大视场激光探测与告警技术

利用四路红外非制冷焦平面探测器、大视场光学系统、窄带滤光片和信号处理系统,构成了凝视成像激光探测与告警系统。光学系统采用三片式结构的广角镜头来实现大视场;使用先进的非球面光学设计技术,并以FPGA完成探测器响应信号的非均匀校正,以改善像质;通过光学系统的畸变校正,提高激光的探测方向精度;利用激光和背景强度之间的反差,通过激光目标检测算法进行告警。实验表明,该系统能在127视场范围内对波长为1.315靘, 2.7靘, 3.8靘, 10.6靘的4种激光进行告警,探测功率密度范围为0.05 ~50mW/cm2,探测方向精度可达1。     

一种像旋扫描变焦红外光学系统

基于光学消像旋原理,研究了通过像旋扫描以扩大光学系统视场的途径,并建立了一个设计模型。该模型是一个三次成像的变焦结构,采用了别汉棱镜作为一维扫描器件,为保证不同温度时的成像质量,使用了主动消热差技术。系统采用了480×6的线阵长波红外(7.7~10.3μm)探测器,F数为2.6,线阵长度为12.29 mm,通过像旋扫描获得了半径为探测器线阵长度的圆形总视场,并采用倾斜和偏心探测器的方法实现了冷光阑匹配,其视场为4.4o/17.6o,对应焦距为320/80 mm。系统除别汉棱镜外采用了九片透镜,其中3个非球面。系统在全视场范围内具有接近衍射限的像质。     

球面投影光刻物镜的设计

针对人工晶体或隐形眼镜的面形上连续浮雕结构加工的特点,本文介绍了基于空间光调制器(DMD)曲面投影光刻物镜系统的设计方法.根据其成像面为曲面的特点,根据光学设计理论多次利用弯向物方的弯月形负透镜结构进行场曲校正,同时运用光的衍射原理优化设计物镜系统的数值孔径以消除DMD投影过程中的栅格效应. 运用ZEMAX工程光学设计软件对系统进行了模拟、优化,并对优化后的结果进行了分析.对于设计实例利用上述设计原则给出了设计结果,工作波长为g线(峰值波长λ=436nm),像面曲率r=22.5mm,视场φ6mm,数值孔径NA=0.1,分辨力为7.8 μm(64Ip/mm)时的光学调制传函值>0.8,畸变<±0.05%.     

高分辨率长波红外连续变焦光学系统设计

针对高分辨率640×512元非制冷探测器,设计了一款6×长波红外连续变焦光学系统。该系统由6片透镜构成,工作波长为8~12μm,F数为1~1.1。根据变焦光学系统设计理论,确定了系统的机械补偿式变焦结构并构建了初始结构;对该系统的光学结构参数及凸轮变焦曲线进行了设计和优化。像质评价结果表明该系统在20~120mm焦距范围上实现了连续平滑变焦;在30 lp/mm空间频率处,全焦距范围调制传递函数值大于0.45,接近衍射极限;全焦距范围各视场弥散斑均方根半径小于6.3μm,远小于像元尺寸17μm。实验证明该系统具有高分辨率、高变倍比、大光圈、大视场范围的特点,且像面稳定,变焦平滑,结构紧凑合理,成本相对较低。     

折/衍混合透视型头盔显示器光学系统设计

为满足头盔显示器(HMD)对大视场、高像质和彩色显示的要求,提出了改进型 HMD 光学系统。该系统以彩色 LCD 为图像源实现彩色显示;以折/衍混合单透镜代替双胶合,利用其负色散和波面任意整形特性消除系统色差及改善波前像差。图像源发出的光束在分束器附近成中间像,可增大系统视场;出瞳在中继光学组元中间成像,可减小系统口径,增大出瞳直径;球面耦合器将分束器反射过来的光束准直后投射到人眼,能消除人眼反复观察不同焦距的视频图像和外界图像所造成的疲劳。该系统垂轴色差小于 42μm,视场扩大为 40°(水平)×30°(垂直),分辨力接近人眼的最小分辨能力;口径小于 46mm,重量比现有 HMD 光学系统下降 47%。     

两探测面结构激光粒度仪的接收光路设计

为了扩大激光粒度仪测量的动态范围,采用同轴的两组接收透镜,将两个硅光电探测器阵列分别置于前组透镜的后焦面和两组透镜的组合后焦面上,对测量信号进行组合后用改进共轭梯度法处理数据。通过优化光路结构,采用两组双胶合透镜和探测环半径均不大于45mm的探测器可满足同时测量5～3500μm粒径的要求。     

用于大截面传像光纤束的折衍混合光学系统设计

在大截面传像束前置光学物镜设计中,采用“负-正”型式的像方远心光路结构,很好地解决了镜头轴外像差校正和像面照度均匀性问题,同时使镜头结构紧凑、小型化。给出了前置物镜设计实例:工作波长0.8~1.1μm,焦距5mm,相对孔径为1:3.84,光学长度为47mm,视场角为60°。在光学耦接镜设计中采用物方远心光路结构,引入二元光学透镜,通过理论计算和ZEMAX光学软件优化,给出工作波长0.8~1.1μm,焦距33.6mm,光学长度为63.5mm,采用一个衍射面的耦接镜设计实例。该设计结果适用于单丝直径16μm,截面直径6mm的光纤传像束。     

超大数值孔径浸没式物镜的研发设计

该文提出一种超大数值孔径光刻投影物镜。该光刻投影物镜作为光刻机曝光系统的核心模块,将掩模版上的图案以4倍缩小倍率成像于硅片面,该物镜以193 nm的准分子激光器为曝光光源,视场范围为26mm×5.5mm,光学结构不同于传统的全透射系统,引入反射镜及镜片反射面,采用折反射式光学系统结构,有利于平衡像差。浸没情况下最大数值孔径可达到1.35,可应用于前道制造45 nm关键层和非关键层的光刻工艺需求。     

微弱激光辐射探测技术在激光告警设备中的应用

根据激光告警设备的作战对象和设备特点,分析了微弱激光探测技术应用于激光告警设备的主要限制因素,这些因素包括大视场接收和窄带光谱滤波技术之间的矛盾、光学系统通光孔径和视场角之间的矛盾、低激光重复频率的限制和激光信号的窄脉冲限制等;针对不同体制激光告警设备不同的灵敏度需求,简要介绍了在直接探测体制激光告警设备和散射截获体制激光告警设备采用的微弱激光辐射探测技术,这些技术包括低噪声探测器、低噪声光电接口电路和放大电路、双探测电路相关检测技术、大视场大相对孔径光学系统和大视场光谱滤波技术等,上述技术的应用,满足了激光告警设备的灵敏度需求。     

静态紫外地球模拟器光学系统设计

静态紫外地球模拟器是一种对紫外导航敏感器进行地面标定和精度测试的设备。本文设计了一种静态紫外地球模拟器光学系统,提出大视场静态紫外地球模拟器光学系统设计方案,对光学系统的参数进行了分析,系统选用七片透镜进行设计,有效孔径为D=10 mm,焦距为f=100 mm,视场角为Φ40°。全视场相对畸变小于0.036%,MTF在50 lp/mm处大于0.7,波像差均方根值小于0.037λ,地球张角偏差??0.006 7°,达到了高精度的指标要求,满足设计要求。     

远距离高精度多普勒位移测量

通过泛函、激光散斑理论和随机过程各态遍历的研究,导出激光多普勒信号强度与聚焦光斑直径、接收透镜通光口径、光电接收器响应等参数间的关系,在此基础上设计出一种适用于远距离处面内位移测量的光路。此光路将高斯光束束腰聚焦在被测体上,实现最小聚焦光斑和平面波叠加,此外采用大口径透镜接收散射光,用响应度高的光电接收器转换光电信号等措施获得高强度高信噪比的测量信号。将此光路用于 100m 处面内位移(49.70mm)测量,其精度可达 2%。此设计方法能用于振动或地震波的高精度检测。     

Application of the astigmatic method to the thickness measurement of glass substrates

We developed a high accuracy thickness measurement system for glass substrates based on the optical design of the astigmatic method. The astigmatic optical system includes a laser diode, a cylindrical lens, a convex lens, and a quadrant detector. This method measures the astigmatic focusing error signal induced from the measured glass placed in the astigmatic optical system. The astigmatic focusing error signal is converted into the thickness of the glass substrate. The proposed glass thickness measurement system is verified by using a coordinate measuring machine (CMM). The accuracy of the proposed system is 0.2 microm, with a standard deviation of 0.7 microm within the thickness measuring range of 1.2 mm.     

半光斑成像式多功能激光瞄准测头的研究

运用半光斑成像原理设计了一种用于三坐标测量机的多功能激光瞄准测头。详细介绍了测头的光学系统工作原理和设计思路,采用自适应控制方法实时调节激光光强使其可以适应不同光学特性表面的瞄准测量,并进行了多功能测头的重复性瞄准测量、灵敏度测量、倾角跟踪实验。实验结果表明,该测头重复性瞄准测量不确定度优于1 μm,测量灵敏度可达30 mV/μm,激光跟踪瞄准被测曲面倾角可达25°,能满足三坐标测量机的使用要求。该测头具有检测速度快、自动化程度高、瞄准精度高的特点,结合三坐标测量机或者其它测长仪器,能够实现对自由曲面进行快速精确瞄准及轮廓图像瞄准测量,具有广泛的应用前景和实用价值。     

Near-field thermal lens detection at 257 nm as an alternative to absorption spectrometric detection in combination with electromigrative separation techniques

A device is presented that permits detection of analytes absorbing electromagnetic radiation at lambda = 257 nm (in fused-silica capillaries with 75-microm i.d.) via the near-field thermal lens effect. The detector was realized by using a frequency-doubled argon ion laser as pump laser and a laser diode (emission wavelength, 633 nm) coupled into a monomode optical fiber as probe laser. Comparing the performance of this detector to the performance of a commercial absorption spectrometric detector working at lambda = 257 nm equipped with a unit for on-column detection in fused-silica capillaries showed a substantial improvement in detection limits (up to 30-fold improvement) for the near-field thermal lens detector (NF-TLD). The feasibility of the NF-TLD for sensitive detection of nonfluorescent analytes in real samples after separation by micellar electrokinetic chromatography was shown taking the determination of nitroaromatic compounds in contaminated water from a former ammunition plant as an example. Dependence of the thermal lens signal on pump laser power, velocity of the mobile phase, and chopper frequency was investigated. A linear calibration range over 2 orders of magnitude was obtained.     

激光用于LCD板ITO膜修复的研究

对激光修复LCD板ITO膜的过程及影响因素进行了理论分析和计算。设计并加工出一套激光聚焦系统，由一个用于扩束和压缩发散角的倒置开普勒望运镜和聚焦透镜组成，其聚焦光斑为15μm。优化了调Q基模Nd：YAG激光器的参数，并用其进行了实验研究。结果表明，能修复各种不同厚度的ITO膜，打的孔小于20μm，位置漂移量小于3μm。     

Modeling of laser scanning system to determine its associated uncertainty of measurement

In the fabrication of fine wires such as filaments of lamps and optical fibers, it is always necessary to measure the diameter in real-time and correct the extrusion process. For metrological purposes, laser beam scanning technique will produce similar results as comparative to diffraction-assisted methods. A computerized laser beam scanning measurement system (LSM) is designed and fabricated. The LSM consists of a low power helium-neon gas laser source, a specially designed collimating lens, a hysteresis synchronous motor, a photo detector and a protective replaceable window along with temperature sensor. The LSM is mathematically modeled to identify various error contributing sources. The LSM is calibrated using a set of national reference standard cylindrical pins and a set of national reference standard slots to determine its relative calibration factor. The uncertainty of measurement achieved in the range of (0–35) mm is ± (0.55 +39.2L/m) μm.     

Use of a field lens for improving the overlap function of a lidar system employing an optical fiber in the receiver assembly

This paper presents a method to compute the overlap function of a lidar system in which a step-index optical fiber (or a bundle of such fibers) is used to carry the light collected by the telescope to the photoreceiver and a field lens is placed between the telescope and the optical fiber to increase the receiver field of view (FOV). The use of field lenses is a classical way to increase the FOV of radiometric systems (such as the receiving part of a lidar) when there is no numerical aperture (NA) limitation after the lens. However, when such a limitation exists, as in the case studied here, it will place a limit on the maximum attainable FOV. In the case of lidars, which have range-resolution capabilities, the limited FOV has an effect on the fraction of power coming from scattering volumes at different ranges that actually reaches the photodetector. This fraction is a function (the so-called overlap function) of the range of the scattering volume and its behavior has an impact on the accuracy of the retrievals. The application of the method developed in this paper shows that, in spite of the fiber NA limit, in practical situations the goal is attained of making the overlap function steeper and reaching higher values by using a field lens.     

Three-dimensional sensing based on a dynamically focused laser optical feedback imaging technique

A new method analogous to three-dimensional confocally based sensing is proposed. This method uses the technique of laser optical feedback imaging, which takes advantage of the resonant sensitivity of a short-cavity laser to frequency-shifted optical feedback for highly sensitive detection, making it ideal for surface and volume measurements of noncooperative targets. Rapid depth scanning is made possible by use of an electrically controlled variable-focus lens. The system is able to detect height discontinuities, and because detection occurs along the axis of projection the system does not have problems of shadow. Preliminary results for a depth range of 15 mm and a resolution of 100 mum are presented.     

基于成像式照度测量的菲涅尔光学助降系统设计

为了解决菲涅尔光学助降系统的检测问题,提出了一种基于成像式照度探测法的菲涅尔灯发光强度测量方案,并研制了成像式照度探测装置。试验结果表明该装置可远距离对大口径、大发光角度的菲涅尔灯进行发光强度的探测,满足菲涅尔光学助降系统检测装置测量的要求。