微机械部件运动的光学测量

针对微电子机械系统中微小部件运动状态的测量要求，提出了一种基于光纤Ｍｉｃｈｅｌｓｏｎ干涉仪的测量方法，分析了微机械部件不同运动状态对光信号的影响，给出了初步的实验结果。     

静电激振法测量微机械材料的杨氏模量

利用蚀刻硅技术制造的微机械构件,由于特殊的制作工艺而需要对其材料的机械性能如杨氏模量等进行测试。这是随微机械技术的产生而提出的一个新课题。文章综述了微机械材料杨氏模量的静态测试法,提出了微机械材料扬氏模量的动态测试法－静电激振法,这种方法具测试装置简单、测量容量、适应性广等特点。     

微流量测量与控制系统

本文在一些成功的微流体器件的设计加工基础上，提出了一种计算机控制的微流量测量与控制系统。对各个微机械器件做了介绍，并分析了系统的可行性。     

微位移高精度测量控制设计

微机械研究是近年来世界各国科技界研究的一大热点，其中的微测量、控制成为微机技术群的一个重要课题。本文介绍一个为配合压电型微驱动器的研制而设计的高精度的微位移测量、控制系统，它由显微镜ＣＣＤ视觉系统、Ｄ／Ａ及精密直流电压放大电路等环节组成，控制精度达到了０．７μ     

微纳米尺寸测量技术

随着精密和超精密加工技术的迅速发展,亚微米和纳米级的测量方法不断出现,本文对近年几种常见的微纳米计量技术的基本测量原理和方法作了简单的介绍。     

微振动环境下反射镜的微转角测量

为了测量微振动环境条件下反射镜的微小转角,根据结构随机振动加速度的频域数据与转角均方根响应的数学关系,提出了一种经济且简单易行的间接测量结构微转角的方法.并且以一个大型反射镜架为例,通过实验分析得到了其在大厅空调运行与关闭微振动环境下镜片的相对转角响应.实验表明,此方法操作简单、测量精度高,具有广阔的应用前景.     

气体微流量测量技术的发展

本文介绍了美国NIST、德国PTB、日本NMIJ、意大利IMGC、韩国KRISS、中国计量科学研究院NIM和国防科技工业真空一级计量站(兰州物理研究所LIP)的气体微流量测量技术的研究进展,并对其测量方法,测量装置性能指标进行了评述。     

气体微流量测量及标准装置概论

本文全面而概略地论述了气体微流量的测量及其标准的发展和现状。着重考虑了作为气体微流量标准装置核心的恒压式气体微流量计的原理、结构、下限因素和不确定度等基本问题。简略地介绍了我们在这方面的工作和特点。     

Micro 3D measurement method using SEM

Three diamensional (3D) measurement method by Scanning Electron Microscope (SEM) has already been proposed by using the principle of shadow moiré. In the method, the image of original grid in shadow moiré image must be clearly removed in fringe analysis process in order to perform high resolution analysis. A new method based on the principle of projection moiré is proposed to solve the trouble concerning the grid. In this paper, the mechanism of producing some shadows of grid on the surface of the object by back scattering electron beam in the new method is discussed. Fringe image as shadow of grid is analyzed by Wavelet transform. The precise 3D measurement is realized by using the phenomenon of shadows of grid. Furthermore, a 3D micro structure on the head of a hard disk is measured. From the comparison of results obtained by Atomic Force Microscope (AFM), it is confirmed that the proposed method has high-resolution power(about 20nm).     

HTS subsystem analysis

This paper describes studies of three superconducting subsystems: a satellite repeater, MRI body coils, and an 11-GHz downconverter. The first two are paper studies, intended to indicate the potential and problems in two commonly identified applications of high-temperature superconductors, and to analyze how the most significant benefits can be obtained. The downconverter successfully demonstrated the integration of semiconductor, superconductor, and cooler technologies, and also indicates areas of potential application.     

机械振动测量虚拟仪器的设计

机械振动参数测量中信号变化频率高、数据处理工作量大、频谱分析所涉及的数学运算复杂,采用模拟式仪器很难达到测试要求,而数字式仪器又具有价格昂贵、功能不够灵活的缺点,针对以上特点,以l_abVlEW为开发环境设计了虚拟式机械振动测试和分析系统,系统采用普通的Pc机和数据采集卡,利用计算机强大的数据处理能力实现测量数据的波形显示、存储和打印等功能.实验结果表明,系统的结构简单、稳定性好,功能灵活、运算可靠.     

一种离子交换树脂金属复合材料(IPMC)的力学参数测定

对一种新型的人工肌肉材料--离子交换树脂金属复合材料(IPMC)的力学性能参数进行了测试研究.进行了精密拉伸实验,测定了其弹性模量E和泊松比v,确定了其本构关系,证实了其具有各向同性特性.测试研究为开展IPMC人工肌肉和其应用研究提供了参考数据.     

Optical noncontacting Doppler methods of mechanical vibrations measurement

Conclusions The discussion proved that application of lithium niobate optical modulators and optical two-frequency generators in heterodyne systems makes it possible to measure the velocity of vibrating objects with reflecting surfaces in the range from 10^–6 to 160 m/sec using photomultipliers with a 1 GHz frequency resolution. The derived expressions give the optimum modulation-voltage amplitude applied to the optical modulator and the noise performance of heterodyne measuring systems.Translated from Izmeritel'naya Tekhnika, No. 3, pp. 35–37, March, 1973.     

Pure mechanical wear loss measurement in corrosive wear

The method for the measurement of the pure mechanical wear loss for 321 stainless steel, 1045 steel and pure iron in the study of the synergy between corrosion and wear was studied. The methods studied included the measurement in distilled water, by cathodic protection and by adding inhibitor KI, and all were compared with the wear loss in air. The experiment showed that the pure mechanical wear losses and friction coefficients obtained by the three methods were close to each other and can be used to calculate the various wear components in the study of the interaction of corrosion and wear, but the measurements in distilled water for pure iron and 1045 steel are not recommended due to their corrosion     

The ternary subsystem indium bismuthide-bismuth-tin

The system In Bi-Bi-Sn has been investigated by thermal analysis, metallographic, and X-ray procedures. No ternary compound was encountered, and a ternary eutectic composed of a Sn-rich solid solution, Bi, and InBi occurs at 77.5 ± 0.5° C. It contains 18 wt % Sn, 12% Bi, and 70% InBi. The solid solubilities at the Bi and InBi ends of the phase diagram are very restricted, but the Sn-rich solid solution contains 55 wt % Sn, 14% Bi, and 31% InBi at the eutectic temperature.     

Direct mechanical measurement of pinning forces on type-II superconductors

A radially flowing transport current is fed into a disk specimen suspended in a magnetic field perpendicular to the surface, and the torque resulting from the Lorentz forces is measured. Sample and current leads form a closed superconducting circuit. The current induced in this circuit, and thus the torque, can be increased without dissipation until flux flow starts. The torque corresponding to this limit is directly proportional to the pinning force per unit volume. Results for 0.1-mm-thick Nb samples are reported, including the peak effect and a yield phenomenon. The values of the pinning forces are in good agreement with theoretical predictions and of the same order of magnitude as the measurements of other authors.