共查询到19条相似文献,搜索用时 140 毫秒
1.
2.
纳米栅格和台阶等结构的线宽准确测量,是国内外计量领域的研究热点与难点。采用原子力显微镜(AFM)能获得上述结构的三维形貌信息,但其扫描图像却是探针针尖的形貌和被测样品表面的形貌共同作用的结果,这种作用往往导致线宽边缘测量失真。为了更加精确地获得样品的表面形貌特征,首先需要重建探针针尖形貌,进而从得到的扫描图像中尽可能地消除由探针形貌带来的失真影响。基于数学形态学的盲重建理论,利用Matlab对不同形状参数的探针针尖扫描台阶样品表面进行了仿真,评价了探针形状对扫描结果的影响,初步实现了基于真实粗糙测量表面的探针针尖形状重建。 相似文献
3.
《纳米技术与精密工程》2015,(3)
基于原子力显微镜(atomic force microscope,AFM)的关键尺寸(critical dimension,CD)测量技术可有效测量MEMS结构的侧壁形貌和线宽,针对CD-AFM的关键共性技术之一提出了一种三维图像拼接方法,旨在把结构正表面图像和侧壁图像拼接成为一幅完整的三维图像.通过旋转样品的方式,利用AFM扫描结构形貌,分别得到其正表面和侧壁的扫描图像.在两幅图像的重叠区域进行图像预处理和快速图像相关匹配,可准确获取图像匹配点.随后,对侧壁扫描图像进行逐列翻转、切割、旋转和拼接等操作,最终可得到结构的三维形貌图像.采用C++语言编写的算法对AFM获得的实际扫描图像进行了三维拼接,拼缝边缘曲线相似程度达到97.62%,结果表明该算法具有很好的准确度. 相似文献
4.
5.
利用各向异性化学湿法刻蚀工艺在Si(100)上加工了具有本征侧墙角(54.73°)的典型微机电系统(MEMS)梯形结构.用该微结构作为线宽测试结构,对其进行了原子力显微镜(AFM)和扫描电子显微镜(SEM)线宽和轮廓的比对测量.并对AFM探针和样品耦合效应进行了研究,提出了AFM探针参数动态表征的模型,基于几何模型对线宽和轮廓测量中探针针尖形状和针尖位置参数进行了表征,提出了用曲率半径、安装倾角、扫描倾角和针尖半顶角来对原子力显微镜探针针尖进行表征.该方法是对现有AFM探针表征模型的改进和完善. 相似文献
6.
原子力显微镜图像降噪与平面校正的同步实现 总被引:1,自引:0,他引:1
将小波阈值收缩去噪技术应用于原子力显微镜(AFM)图像去噪的同时,应用最小二乘拟合法对AFM二维小波分解近似子图像的一次倾斜平面进行校正,从而同步实现了AFM图像去噪与平面校正.在保证图像去噪效果及平面校正质量的前提下,大幅度减少了最小二乘拟合计算量,提高了算法实时性能.由于该方法借助于小波变换实现,可以方便地与图像的小波压缩方法相结合,因此更有利于AFM扫描图像的原位分析与处理.通过实验,采用上述方法对AFM扫描图像进行了降噪与平面校正处理,证明了此方法的有效性. 相似文献
7.
提出一种异形热态锻件几何尺寸测量方法。基于线激光器、CCD和伺服系统构建线激光扫描测量系统,通过提取图像上被锻件表面轮廓调制的激光条纹二维信息,经过坐标变换及点云三维重构得到锻件三维尺寸信息。针对被测异形锻件形貌特征,建立基于摄像机运动的扫描测量模型,并提出一种基于棋盘参考平面的摄像机光心轨迹求解方法。根据平面上特征点在CCD图像不同帧中的坐标拟合摄像机的运动轨迹,结合扫描测量模型实现对异形锻件完整轮廓尺寸的测量。通过实验对封头进行扫描测量,得到球冠部分截面测量直径误差小于4 mm,满足热态锻件测量要求,验证了该方法的可行性。 相似文献
8.
合成孔径雷达(SAR)的成像过程使其高分辨图像的几何形变呈现局部性.针对高分辨SAR图像精确配准问题,本文提出一种基于邻域重构模型的局部转换函数.邻域重构模型首先采用重构系数刻画参考图像中每个像素点的几何位置;接着给出了一种重构控制点的选择标准使每个像素的配准误差达到最小;最后根据重构系数及控制点坐标对输入图像进行再抽样以实现配准.与经典分片线性映射相比,该模型从理论上给出了一种区域剖分准则:对于每个像素选取能使配准误差能达到最小的控制点作为重构控制点.对模拟数据和真实SAR图像进行了试验,结果表明,该模型能有效地提高配准精度. 相似文献
9.
10.
《纳米技术与精密工程》2016,(2)
传统原子力显微镜(AFM)在接触模式下工作时具有接触力较大、易损伤样品的缺点.本文通过对新型自感应音叉探针施加双频激励,使得AFM工作在轻敲模式下,减小了接触力和扫描过程中的侧向力影响,实现了样品表面力学特性和亚表面结构的表征.然后利用基于DSP的PI反馈控制模块,完成了线扫描实验,证明该双频原子力显微测量系统具有较好的测量能力. 相似文献
11.
Han G Jiang Z Jing W Prewett PD Jiang K 《Journal of nanoscience and nanotechnology》2011,11(12):11041-11044
An atomic force microscopy image is a dilation of the specimen surface with the probe tip. Tips wear or are damaged as they are used. And AFM tip shape and position status make AFM images distorted. So it is necessary to characterize AFM tip shape and position parameters so as to reconstruct AFM images. A geometric model-based approach is presented to estimate AFM tip shape and position status by AFM images of test specimens and scanning electron microscope (SEM) images of AFM tip. In this model, the AFM tip is characterized by using a dynamic cone model. The geometric relationship between AFM tip and the sample structure is revealed in linewidth and profile measurement. The method can easily calculate the tip parameters including half-cone angle, installation angle, scanning tilting angle and curvature radius, and easily estimate the position status of AFM tip when AFM tip moves on the specimen. The results of linewidth and profile measurement are amended accurately through this approach. 相似文献
12.
分析了目前我国几种针尖轮廓检测方法、特点和存在问题。提出了一种针尖飞象自动检验方法,其原理是:被检测的针尖和探测器不动,利用转镜系统扫描针尖,产生针尖各部的时序象(飞象),这些依次出现的象受到探测器检测,即可获得反映针尖轮廓的一串直径信息。文中还对飞象扫描法的误差进行了分析和讨论。 相似文献
13.
Acquiring a high-accuracy three-dimensional (3D) shape of a large-scale object from multiple uncalibrated camera views remains a big challenge, since a considerable number of images is required to cover the entire surface; the use of multiple images could, however, result in accumulative errors from each processed image. Here error propagation rules in the 3D reconstruction process have been deduced on the basis of the traditional dual-view reconstruction method. We propose a method that can control the accumulative errors by reducing the times of coordinate transformation with common-view-based dual-view reconstruction. This method involves constructing an image network composed of many image groups, each of which contains a common view. A baseline threshold method is introduced to construct a high-quality image network, and the sums or reprojection residual of all the common points is proposed to assess the validity of the solutions of the orientation. Experiments carried out with both synthetic and real images demonstrate that the proposed method can handle the accumulative error problem with robust and highly accurate results. 相似文献
14.
J. S. Villarrubia 《Journal of research of the National Institute of Standards and Technology》1997,102(4):425-454
To the extent that tips are not perfectly sharp, images produced by scanned probe microscopies (SPM) such as atomic force microscopy and scanning tunneling microscopy are only approximations of the specimen surface. Tip-induced distortions are significant whenever the specimen contains features with aspect ratios comparable to the tip’s. Treatment of the tip-surface interaction as a simple geometrical exclusion allows calculation of many quantities important for SPM dimensional metrology. Algorithms for many of these are provided here, including the following: (1) calculating an image given a specimen and a tip (dilation), (2) reconstructing the specimen surface given its image and the tip (erosion), (3) reconstructing the tip shape from the image of a known “tip characterizer” (erosion again), and (4) estimating the tip shape from an image of an unknown tip characterizer (blind reconstruction). Blind reconstruction, previously demonstrated only for simulated noiseless images, is here extended to images with noise or other experimental artifacts. The main body of the paper serves as a programmer’s and user’s guide. It includes theoretical background for all of the algorithms, detailed discussion of some algorithmic problems of interest to programmers, and practical recommendations for users. 相似文献
15.
16.
17.
目的 基于图像识别和结构改进对嘴棒发射机运行中产生的横滤嘴棒进行智能剔除、识别和预警,以提高生产效率。方法 采集滤嘴棒侧面运输图像,对异常图像进行追踪,从中提取异常滤嘴棒特征点,基于图像生成警示信息,同时对滤嘴棒发射机输送轨道背板进行结构优化,能剔除大部分横滤嘴棒。结果 改进后的模拟样机,经过输送轨道背板的横滤嘴棒的剔除率高达约77%,其余异常横滤嘴棒被及时预警,嘴棒发射机的管道卡堵概率降低约60%,设备运行效率显著提高。结论 图像识别和结构改进能有效识别预警和剔除嘴棒发射机运行中产生的横滤嘴棒。 相似文献
18.