共查询到18条相似文献,搜索用时 156 毫秒
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一种新型电容式位移传感器电路设计 总被引:2,自引:0,他引:2
针对电容式位移传感器检测电路复杂、输出非线性和只适合微小位移测量等问题,设计了一种基于虚部法电容检测原理的电容式位移传感器;该传感器检测电路采用三角波作为激励,作用于虚部法电容测量电路,得到与被测电容大小成正比.即与位移大小成反比的信号;并运用电容补偿技术,消除寄生电容的影响;与传统的电容式位移传感器相比,该传感器具有良好的线性度,抗干扰性强,相同直径的传感器探头,其测量范围更远. 相似文献
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电容式传感器测量油品中水的体积分数之新方法 总被引:3,自引:0,他引:3
提出了一种采用电容式传感器测量油品中水的体积分数的新方法,运用油品中水的体积分数的不同引起油水混合物的介电常数的变化原理设计相应的电容式传感器,传感器调理电路中运用最新集成电容/电压转换芯片XE2004,有效的消除了电路中的引线电缆的分部电容的影响。实验结果表明:当电容式传感器结构一定时,该方法能够较好的克服寄生电容及环境对电容式传感器的干扰,以较高的精度实现油品中水的体积分数的在线测量。 相似文献
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一种新型CMOS电容式绝对压力传感器的设计 总被引:3,自引:0,他引:3
提出了一种新型的采用标准CMOS工艺结合MEMS后处理工艺加工的电容式绝对压力传感器.传感器结构部分是由导体/介质层/导体组成的可变电容器.电容的上下极板分别为CMOS工艺中的多晶硅栅和n阱硅,中间介质层为栅氧化层.在CMOS工艺加工完之后,利用选择性的体硅腐蚀、pn结自停止腐蚀以及阳极键合等MEMS后处理工艺来得到传感器结构.与传统的电容式压力传感器相比,这种结构具有更大的初始固有电容,这样可以抑制寄生电容的影响,从而简化检测电路的设计.文中,应用多层膜理论模型分析了传感器的结构,并利用ANSYS有限元分析对模型进行了验证,并利用电容变化模型分析了传感器的灵敏度.对于边长为800 μm的敏感方膜,初始电容值为1 104pF,传感器灵敏度为46 fF/hPa.同时,本文给出了传感器的电容检测电路的设计. 相似文献
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基于AD7150微小电容测量方法的研究 总被引:1,自引:0,他引:1
本文主要研究了一种新型的微小电容的测量方法,阐述了电容测量电路的应用背景和国内外研究现状,针对电容式传感器的工作原理确定了测试电路。AD7150是一种响应快速兼超低功耗的电容-数字转换器,通过串行接口与微控制器连接,为电容式近程传感器的信号处理提供了一种全面的解决方案。 相似文献
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一般的电容式传感器因存在一定的缺点,从而限制了它的应用.本文介绍的,利用分压原理构成的电容传感器可以从根本上改掉了它的缺点,且所用测量电路也极为简单. 相似文献
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A readout circuit for a passive telemetric intra-ocular pressure (IOP) sensor is being developed. The intra-ocular sensor consists of a capacitive pressure sensor in parallel with a planar coil. This inductor–capacitor (LC) resonant circuit transduces the pressure into a shift of resonance frequency. A voltage controlled oscillator (VCO) is used to excite the sensor over a large frequency range (20–40 MHz), hereby detecting resonance of the internal sensor, and thus enabling the measurement of the intra-ocular pressure. This low power circuit is extremely compact, making it suitable for long-term ambulant patient monitoring. The circuit allows wireless readout of the smallest pressure transducers. Tests show promising results at mutual coil distances up to 7.5 mm. 相似文献
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Chatzandroulis S. Tsoukalas D. Neukomm P.A. 《Journal of microelectromechanical systems》2000,9(1):18-23
A miniature telemetric pressure-measuring system is presented in this paper. The system uses passive telemetry to transfer power to the transponder and pressure data to the remote base unit. Such telemetric systems are becoming ever more important in the biomedical field as the interest for in-vivo measurements of different biological parameters both of humans and animals is increasing. A novel capacitive-type pressure sensor based on an SiGeB diaphragm is used as a sensing element. The merits of combining a capacitive pressure sensor and passive telemetry lies in the inherent low-power consumption of the sensor and the continuous availability of power through induction. The pressure sensor is connected to an integrated interface circuit, which includes a capacitance to frequency converter and an internal voltage regulator to suppress supply voltage fluctuations on the transponder side. In addition, the sensor and accompanying interface circuit take up very little space so as to be suitable for implantation 相似文献
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A novel capacitive pressure sensor with the island-notch structure is introduced. Its theory model is established based on the structure theory of the plate capacitive pressure sensor. The relationships between the external pressure and capacitance of the capacitive pressure sensor with the island-notch structure are studied by using the method of the finite element analysis (FEA). The results show that the linearity of the capacitive pressure sensor with island-notch structure reached up 0.9941 in the linear measurement zone, the sensitivity reached up 0.0019 pF/kPa, and the measurement range of the capacitive pressure sensor is enlarged. Thus, the contradictory among measure sensitivity, linearity and measure range is effectively relieved in the capacitive pressure sensors with island-notch. In addition, the interface circuitry of the charge transfer is designed, and the performance of the interface circuitry is analyzed. 相似文献
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一种新型变电容面积MEMS惯性传感器与传统的梳齿电容传感器相比,具有对梳齿电容不平行敏感度低,可加测试电压高等优点.通过对该传感器在低真空封装条件下的惯性阶跃响应特性分析,着重研究了不同梳齿电容倾斜角度对该传感器的阶跃惯性信号响应的影响,以及不同倾斜角度梳齿的位移响应和测试电压、空气真空度的关系,并把该结果和梳齿结构的情况进行比较.结果表明,工艺因素对变电容面积MEMS惯性传感器在低真空封装下的阶跃惯性响应影响很小;另外,该结构上可加的测试电压可以是梳齿电容结构上可加测试电压的近10倍,这有利于减小接口电路的噪声.以上分析论证了该新型传感器有利于降低器件的工艺要求和提高传感器的分辨率. 相似文献
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针对电容式MEMS陀螺,设计了一种高精度CMOS接口读出电路。从理论上分析了接口寄生电容、器件的不匹配对接口电路的影响,采用连续时间电压读出方式的检测方法,设计了一款带有输入输出共模反馈的低噪声全差分电荷运算放大器,输入输出共模电压稳定在2.5V,输入端的噪声电压为9nV。载波调制技术用来消除低频闪烁噪声。在Cadence中对设计的接口电路进行仿真分析,并采用PCB电路板进行了实验。结果显示所提出的接口电路不仅消除了大部分寄生电容的影响,抑制了大部分的耦合信号和噪声信号,而且减小了由于器件的不匹配产生的失调电压对电容分辨率的影响,电路Cadence仿真的电容分辨率可达0.13aF/(Hz)~1/2,能满足惯导级的需求。 相似文献
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A high-sensitivity, low-noise in-plane (lateral) capacitive silicon microaccelerometer utilizing a combined surface and bulk micromachining technology is reported. The accelerometer utilizes a 0.5-mm-thick, 2.4/spl times/1.0 mm/sup 2/ proof-mass and high aspect-ratio vertical polysilicon sensing electrodes fabricated using a trench refill process. The electrodes are separated from the proof-mass by a 1.1-/spl mu/m sensing gap formed using a sacrificial oxide layer. The measured device sensitivity is 5.6 pF/g. A CMOS readout circuit utilizing a switched-capacitor front-end /spl Sigma/-/spl Delta/ modulator operating at 1 MHz with chopper stabilization and correlated double sampling technique, can resolve a capacitance of 10 aF over a dynamic range of 120 dB in a 1 Hz BW. The measured input referred noise floor of the accelerometer-CMOS interface circuit is 1.6/spl mu/g//spl radic/Hz in atmosphere. 相似文献