High-density chain ferroelectric random access memory (chain FRAM)

A new chain ferroelectric random access memory-a chain FRAM-has been proposed. A memory cell consists of parallel connection of one transistor and one ferroelectric capacitor, and one memory cell block consists of plural memory cells connected in series and a block selecting transistor. This configuration realizes the smallest 4 F² size memory cell using the planar transistor so far reported, and random access. The chip size of the proposed chain FRAM can be reduced to 63% of that of the conventional FRAM when 16 cells are connected in series. The fast nondriven half-V_dd cell-plate scheme, as well as the driven cell-plate scheme, are applicable to the chain FRAM without polarization switching during the standby cycle thanks to short-circuiting ferroelectric capacitors. It results in fast access time of 45 ns and cycle time of 70 ns without refresh operation     

A 76-mm2 8-Mb chain ferroelectric memory

This paper demonstrates the first 8-Mb chain ferroelectric RAM (chain FeRAM) with 0,25-μm 2-metal CMOS technology. A small die of 76 mm² and a high average cell/chip area efficiency of 57.4 % have been realized by introducing not only chain architecture but also four new techniques: 1) a one-pitch shift cell realizes small cell size of 5.2 μm²; 2) a new hierarchical wordline architecture reduces row-decoder and plate-driver areas without an extra metal layer; 3) a small-area dummy cell scheme reduces dummy capacitor size to 1/3 of the conventional one; and 4) a new array activation scheme reduces dataline and second amplifier areas. As a result, the chain architecture with these new techniques reduces die size to 65% of that of the conventional FeRAM. Moreover a ferroelectric capacitor overdrive scheme enables sufficient polarization switching, without overbias memory cell array. This scheme lowers the minimum operation voltage by 0.23 V, and enables 2.5-V V_dd operation. Thanks to fast cell plateline drive of chain architecture, the 8-Mb chain FeRAM has achieved the fastest random access time, 40 ns, and read/write cycle time, 70 ns, at 3.0 V so far reported     

A 23-ns 4-Mb CMOS SRAM with 0.2-μA standby current

A 4-Mb CMOS SRAM having 0.2-μA standby current at a supply voltage of 3 V has been developed. Current-mirror/PMOS cross-coupled cascade sense-amplifier circuits have achieved the fast address access time of 23 ns. A new noise-immune data-latch circuit has attained power-reduction characteristics at a low operating cycle time without access delay. A 0.5-μm CMOS, four-level poly, two-level metal technology with a polysilicon PMOS load memory cell, yielded a small cell area of 17 μm² and the very small standby current. A quadruple-array, word-decoder architecture allowed a small chip area of 122 mm²     

A 3.3-V, 4-Mb nonvolatile ferroelectric RAM with selectively drivendouble-pulsed plate read/write-back scheme

This paper presents, for the first time, a 4-Mb ferroelectric random access memory, which has been designed and fabricated with 0.6-μm ferroelectric storage cell integrated CMOS technology. In order to achieve a stable cell operation, novel design techniques robust to unstable cell capacitors are proposed: (1) double-pulsed plate read/write-back scheme; (2) complementary data preset reference circuitry; (3) relaxation/fatigue/imprint-free reference voltage generator; (4) open bitline cell array; (5) unintentional power-off data protection scheme. Additionally, to improve cell array layout efficiency a selectively driven cell plate scheme has been devised. The prototype chip incorporating these circuit schemes shows 75 ns access time and 21-mA active current at 3.3 V, 25°C, 110-ns minimum cycle. The die size is 116 mm² using 9 μm², one-transistor/one-capacitor-based memory cell, twin-well, single-poly, single-tungsten, and double-Al process technology     

A 1 Mb EEPROM with MONOS memory cell for semiconductor diskapplication

A 1 Mb 5 V-only EEPROM (electrically erasable programmable ROM) with metal-oxide-nitride-oxide-semiconductor (MONOS) memory cells specifically designed for a semiconductor disk application is described. The memory has high endurance to write/erase cycles and a relatively low programming voltage of ±9 V. These advantages result from the structure and the characteristics of the MONOS memory cell. A newly developed dual-gate-type MONOS memory cell has a small unit cell area of 18.4 μm² with 1.2 μm lithography, and the die size of the fabricated chip is 5.3 mm×6.3 mm. A new programming scheme called multiblock erase solved the problem of slow programming speed. A programming speed of up to 1.1 μs/B equivalent (140 ms/chip) was obtained     

A 1.5-ns cycle-time 18-kb pseudo-dual-port RAM with 9K logic gates

An 18-kb RAM with 9-kgate control logic gates operating during a cycle-time of 1.5 ns has been developed. A pseudo-dual-port RAM function is achieved by a two-bank structure and on-chip control logic. Each bank can operate individually with different address synchronizing the single clock. A sense-amplifier with a selector function reduces the reading propagation time. Bonded SOI wafers reduce the memory-cell capacitance, and this results in a fast write cycle without sacrificing α-particle immunity. The chip is fabricated in a double polysilicon self-aligned bipolar process using trench isolation. The minimum emitter size is 0.5×2 μm² and the chip size is 11×11 mm²     

0.9-V DSP blocks: a 15-ns 4-k SRAM and a 45-ns 16-bmultiply/accumulator

4-k SRAM and 16-b multiply/accumulate DSP blocks have been designed and fabricated in complementary heterostructure GaAs. Both circuits operate from 1.5 V to below 0.9 V. The SRAM uses 28,272 transistors in an area of 2.44 mm². Cell size is 278 μm ² at 1.0-μm gate length. Measured results show an access delay of 5.3 ns at 1.5 V and 15.0 ns at 0.9 V. At 0.9 V, the power dissipated is 0.36 mW. The CGaAs multiplier uses a 16-b modified Booth architecture with a 3-way 40-b accumulator. The multiplier uses 11,200 transistors in an area of 1.23 mm². Measured delay is 19.0 ns at 1.5 V and 44.7 ns at 0.9 V. At 0.9 V, current is less than 0.4 mA     

An asynchronous GaAs MESFET static RAM using a new current mirrormemory cell

An experimental 1-kb GaAs MESFET static RAM using a new memory cell has been designed, fabricated and tested. The new memory cell is not subject to the destructive read problems that constrain the design of the conventional six-transistor memory cell. The biasing arrangement for this new cell minimizes the leakage currents associated with unselected bits attached to a column, maximizing the number of bits allowed per column. This new memory cell also provides a much larger access current for readout than is possible using a conventional memory cell of the same area and cell power. A write time of 1.0 ns and address access times of between 1.0 and 2.3 ns have been obtained from a 1-kb test circuit. A cell area of 350 μm² and cell current of 60 μA were achieved using a conventional E/D process     

A 1.5-ns 256-kb BiCMOS SRAM with 60-ps 11-K logic gates

A 1.5-ns address access time, 256-kb BiCMOS SRAM has been developed. To attain this ultra-high-speed access time, an emitter-coupled logic (ECL) word driver is used to access 6-T CMOS memory cells, eliminating the ECL-MOS level-shifter time delay. The RAM uses a low-power active pull down ECL decoder. The chip contains 11-K, 60-ps ECL circuit gates. It provides variable RAM configurations and general logic functions. RAM power consumption is 18 W; chip power consumption is 35 W. The chip is fabricated by using a 0.5-μm BiCMOS process. The memory cell size is 58 μm² and the chip size is 11×11 mm     

A 55-ns 16-Mb DRAM with built-in self-test function usingmicroprogram ROM

A single 5-V power supply 16-Mb dynamic random-access memory (DRAM) has been developed using high-speed latched sensing and a built-in self-test (BIST) function with a microprogrammed ROM, in which automatic test pattern generation procedures were stored by microcoded programs. The chip was designed using a double-level Al wiring, 0.55-μm CMOS technology. As a result, a 16-Mb CMOS DRAM with 55-ns typical access time and 130-mm² chip area was attained by implementing 4.05-μm² storage cells. The installed ROM was composed of 18 words×10 b, where the marching test and checkerboard scan write/read test procedures were stored, resulting in successful self-test operation. As the BIST circuit occupies 1 mm² and the area overhead is about 1%, it proves to be promising for large-scale DRAMs     

A 1-Mb 2-Tr/b nonvolatile CAM based on flash memory technologies

This paper describes the circuit technologies and the experimental results for a 1 Mb flash CAM, a content addressable memory LSI based on flash memory technologies. Each memory cell in the flash CAM consists of a pair of flash memory cell transistors. Additionally, four new circuit technologies have been developed: a small-size search sense amplifier; a highly parallel search management circuit; a high-speed priority encoder; and word line/bit line redundancy circuits for higher production yields. A cell size of 10.34 μm² and a die size of 42.9 mm² have been achieved with 0.8 μm design rules. Read access time and search access time are 115 ns and 135 ns, respectively, with a 5 V supply voltage. Power dissipation in 3.3 MHz operations is 210 mW in read and 140 mW in search access     

A 7.5-ns 32 K×8 CMOS SRAM

A 256 K (32 K×8) CMOS static RAM (SRAM) which achieves an access time of 7.5 ns and 50-mA active current at 50-MHz operation is described. A 32-block architecture is used to achieve high-speed access and low power dissipation. To achieve faster access time, a double-activated-pulse circuit which generates the word-line-enable pulse and the sense-amplifier-enable pulse has been developed. The data-output reset circuit reduces the transition time and the noise generated by the output buffer. A self-aligned contact technology reduces the diffused region capacitance. This RAM has been fabricated in a twin-tub CMOS 0.8-μm technology with double-level polysilicon (the first level is polycide) and double-level metal. The memory cell size is 6.0×11.0 μm² and the chip size is 4.38×9.47 mm ²     

A 46-ns 1-Mbit CMOS SRAM

A 1-Mb (128 K×8-bit) CMOS static RAM (SRAM) with high-resistivity load cell has been developed with 0.8-μm CMOS process technology. Standby power is 25 μW, active power 80 mW at 1-MHz WRITE operation, and access time 46 ns. The SRAM uses a PMOS bit-line DC load to reduce power dissipation in the WRITE cycle, and has a four-block access mode to reduce the testing time. A small 4.8×8.5-μm² cell has been realized by triple-polysilicon layers. The grounded second polysilicon layer increases cell capacitance and suppresses α-particle-induced soft errors. The chip size is 7.6×12.4 mm²     

A 7-ns 140-mW 1-Mb CMOS SRAM with current sense amplifier

A 7-ns 140-mW 1-Mb CMOS SRAM was developed to provide fast access and low power dissipation by using high-speed circuits for a 3-V power supply: a current-sense amplifier and pre-output buffer. The current-sense amplifier shows three times the gain of a conventional voltage-sense amplifier and saves 60% of power dissipation while maintaining a very short sensing delay. The pre-output buffer reduces output delays by 0.5 ns to 0.75 ns. The 6.6-μm² high-density memory cell uses a parallel transistor layout and phase-shifting photolithography. The critical charge that brings about soft error in a memory cell can be drastically increased by adjusting the resistances of poly-PMOS gate electrodes. This can be done without increasing process complexity or memory cell area. The 1-Mb SRAM was fabricated using 0.3-μm CMOS quadrupole-poly and double-metal technology. The chip measures 3.96 mm×7.4 mm (29 mm²)     

An 18-ns 1-Mbit CMOS SRAM

A 1-Mb (256 K×4 b) CMOS static random-access memory with a high-resistivity load cell was developed with 0.7-μm CMOS process technology. This SRAM achieved a high-speed access of 18 ns. The SRAM uses a three-phase back-bias generator, a bus level-equalizing circuit and a four-stage sense amplifier. A small 4.8×8.5-μm² cell was realized by the use of a triple-polysilicon structure. The grounded second-polysilicon layer increases cell capacitance and suppresses α-particle-induced soft errors. The chip size measures 7.5×12 mm²     

A 50-MHz 8-Mbit video RAM with a column direction drive senseamplifier

An 8-Mb (1-Mwords×8-b) dynamic RAM which utilizes a column direction drive sense amplifier to obtain low peak current is described. The power supply peak current is about one fourth of that for conventional circuits. The chip operates at 50-MHz and is fabricated with a 0.7-μm n-well CMOS, double-level polysilicon, single-polycide, and double-level metal technology. The memory cell is a surrounding hi-capacitance cell structure. The cell size is 1.8×3.0 μm², and the chip area is 12.7×16.91 mm²     

A 120-mm2 64-Mb NAND flash memory achieving 180 ns/Byteeffective program speed

Emerging application areas of mass storage flash memories require low cost, high density flash memories with enhanced device performance. This paper describes a 64 Mb NAND flash memory having improved read and program performances. A 40 MB/s read throughput is achieved by improving the page sensing time and employing the full-chip burst read capability. A 2-μs random access time is obtained by using a precharged capacitive decoupling sensing scheme with a staggered row decoder scheme. The full-chip burst read capability is realized by introducing a new array architecture. A narrow incremental step pulse programming scheme achieves a 5 MB/s program throughput corresponding to 180 ns/Byte effective program speed. The chip has been fabricated using a 0.4-μm single-metal CMOS process resulting in a die size of 120 mm² and an effective cell size of 1.1 μm²     

A 14-ns 1-Mbit CMOS SRAM with variable bit organization

The authors describe a 14-ns 1-Mb CMOS SRAM (static random-access memory) with both 1M word×1-b and 256 K word×4-b organizations. The desired organization is selected by forcing the state of an external pin. The fast access time is achieved by the use of a shorter divided-word-line (DWL) structure, a highly sensitive sense amplifier, a gate-controlled data-bus driver, and a dual-level precharging technique. The 0.7-μm double-aluminum and triple-polysilicon process technology with trench isolation offers a memory cell size of 41.6 μm² and a chip size of 86.6 mm ². The variable bit-organization function reduces the testing time while keeping the measurement accuracy of the access times     

An experimental 4 Mb flash EEPROM with sector erase

A 512K×8 flash EEPROM (electrically erasable programmable ROM) which operates from a single 5-V supply was designed and fabricated. A double-poly, single-metal CMOS process with a minimum feature size of 0.9 μm was developed to manufacture the test vehicle, which resulted in a die size of 95 mm². The storage cell is 8.64 μm² and consists of a one-transistor cell that uses a remote, scalable, tunnel diode for programming and erasing by Fowler-Nordheim tunneling. Process high-voltage requirements are relaxed by utilizing circuit techniques to alleviate the burden of high voltages. A segmented architecture provides the flexibility to erase any one sector (16 kB) or the entire chip during one cycle by an erase algorithm. The memory can be programmed one byte at a time, or the internal bit-line latches can be used to program a 256-B page in one cycle. A programming time of 10 ms is typical, which results in a write time of 40 μs/B during page programming. The chip features an access time of 90 ns     

A 30-ns cycle time 4-Mb mask ROM

A 4-Mb mask ROM in a 256-Kb×16 organization is described. It is fabricated with a 1.0-μm CMOS process, using single polysilicon, two levels of metal, and 3.0×4.4 μm² X-cells. Unlike conventional ROM's, it implements a DRAM type RAS/CAS control scheme. A RAS access time of 60 ns is measured. For a fast data access, the chip has a consecutive address read mode in which the system needs to supply only a first address and subsequent addresses are generated in the ROM chip at every CAS clock. A 30-ns cycle time is demonstrated in this mode. 16-b data pins are also used for RAS/CAS multiplexed address inputs. Because of this three way pin multiplexing, the 7.5×10.5 mm² chip needs only 28 pins for its 400-mil SOJ package