Design, fabrication and characterization of an externally actuated ON/OFF microvalve

A magnetic microfluidic valve has been designed, fabricated and tested. Operation relies on the use of a permanent magnet which interacts with an electrodeposited layer of Co–Ni (soft magnetic material) on a V-shaped cantilever beam. The deflection caused by the magnetic forces opens or closes the fluid flow. The microvalve performance has been optimized by means of finite element analysis (FEA). The FEA model has been experimentally validated using confocal microscopy and used to improve the magnetic circuit. Then, a fluidic cell has been built and the microvalve has been demonstrated to work as a check-valve or as ON/OFF valve when being magnetically actuated. Fabricated prototypes were evaluated in a flow of N₂at the flow rate of 20 sccm. The operational applied pressure was 50 mbar. The microvalve has a leaking rate in the order of 1.75 sccm at 50 mbar.     

A microvalve for lab-on-a-chip applications based on electrochemically actuated SU8 cantilevers

Increasing the complexity and functionality of Lab-on-a-Chip devices requires integrated valves for internal flow regulation. The device introduced in this work is an electrochemical SU8 microvalve, featuring a cantilevered structure that seals an adjacent channel under the action of a growing electrolysis bubble. The valve is based on previously reported movable microcantilevers embedded in microchannels. As opposed to membrane valves moving perpendicular to the substrate, the cantilever valve is patterned next to the channel and closes it by moving horizontally, dramatically reducing footprint. Its compact, monolithic and 2D construction reduces assembly problems and results in negligible increase in dead volume (14.5 nl). Besides, its location in the way of the channels avoids the need for auxiliary filling ports or separate working media for actuation. Effective sealing with negligible leakage at 20 kPa has been achieved. The valve also displays passive flow regulation induced by the pressure differential generated across the valve chamber under flow conditions (42-72% flow decrease).     

Design, fabrication, and testing of a bistable electromagneticallyactuated microvalve

A bistable electromagnetically actuated microvalve was designed, processed, and tested. The valve was designed to control a water flow of 0.05-0.5 μs from a reservoir at a pressure of 1-2000 Pa. The two valve components were fabricated in silicon, the upper piece comprises an electroplated gold coil, and the lower piece is an Ni/Fe alloy beam. The bistable capability was achieved by balancing the elastic forces on the beam with the magnetic forces due to a 46-μm-thick rolled magnetic foil. The design includes the flow through the orifice, squeeze film damping due to beam motion, beam elasticity, and electromagnetics. The microvalve was tested for power consumption, flow rate, time response, Ni/Fe alloy composition, and magnetic foil properties. The valve operates at 1-2 V in both air and water     

A thermally actuated microvalve using paraffin composite by induction heating

Microsystem Technologies - A new induction-heating-based microvalve using paraffin composite is successfully demonstrated in this paper. The microvalve consists of a polydimethylsiloxane (PDMS)...     

Design,fabrication and characterization of a piezoelectrically actuated bidirectional polymer micropump

We present the design, fabrication and characterization of a new, piezoelectrically actuated fully polymeric three chamber peristaltic micropump. An optimized bimorph bending actuator has been designed to deform the polymer membranes in an optimal and most-efficient way. The piezoelectric actuators of the micropump are driven with actuation voltages of ±260 V. The pump has a total size of 46 × 18 × 4 mm, is produced by hot embossing and is assembled in a very simple way. The presented design is able to pump water with a flow rate of 4.8 ml/min and achieves a maximum back pressure of app. 200 mBar.     

A pneumatically actuated full in-channel microvalve with MOSFET-like function in fluid channel networks

A pneumatically actuated silicon microvalve applicable to integrated microfluidic systems is presented. All the ports of this microvalve are in-channel, and connectable to any surface fluid channels in microfluidic systems. This microvalve controls fluid flow by means of the controlled gap between glass and silicon diaphragm actuated by a control pressure. In addition, the diaphragm is also deformed by the outlet pressure of the microvalve. Due to the feature, this microvalve shows saturation of flow rate like MOSFETs operated at saturation region. The fabricated microvalve device was evaluated focusing on analogous relationship between MOSFET and the microvalve. Fluids such as air and DI-water were well controlled by the control pressure. Fluid starts to flow in the microvalve when the control pressure exceeds its "threshold pressure." Hysteresis due to sticking of diaphragm was not observed in the characteristics. Air flow rate of the microvalve was gradually saturated with the increasing of the outlet pressure as expected. Through the evaluation, analogous relationship between this microvalve and MOSFET has been experimentally demonstrated.     

Design of an electro-thermally actuated cell microgripper

The study of cells mechanical properties is of great interest both in medicine and biology to recognize and prevent some diseases causing alterations in cellular behaviour and resistance. Biological micro electro-mechanical systems allow the application of extremely small and precise forces increasing, as a consequence, the number of results possible per experiment and the number of experiments that can be performed simultaneously. The presented work deals with the analysis of an electro-thermally actuated microgripper for single-cell manipulation. Specifications and targets impose several limitations and difficulties in micro manipulators design and these obstacles are even more important when the target of microgripping are biological particles (e.g. living cells). The main parameters that have to be taken into account while designing a cell micromanipulator are, aside from its actuation principle, its kinematics, its fingertips shape, its releasing strategy and its material biocompatibility. More specifically in thermal actuation also thermal stability, insulation and high temperature in the device have to be considered to ensure the cell’s integrity during its micromanipulation.     

Design, fabrication, and characterization of thermally actuated probe arrays for dip pen nanolithography

In Dip Pen Nanolithography (DPN), arbitrary nanoscale chemical patterns can be created by the diffusion of chemicals from the tip of an atomic force microscope (AFM) probe to a surface. This paper describes the design, optimization, fabrication, and testing of an actuated multi-probe DPN array. The probe array consists of 10 thermal bimorph active probes made of silicon nitride and gold. The probes are 300 /spl mu/m long and the tips are spaced 100 /spl mu/m apart. An actuation current of 10 mA produces a tip deflection of 8 /spl mu/m, which is enough to remove individual tips from the surface independent of the adjacent probes. An analytical probe model is presented and used to optimize the design against several possible failure modes. The array is demonstrated by using it to simultaneously write 10 unique octadecanethiol patterns on a gold surface. Pattern linewidth as small as 80 nm has been created at a maximum write speed of 20 /spl mu/m/sec. By writing multiple, distinctly different patterns in parallel, this device provides a significant improvement in throughput and flexibility over conventional AFM probes in the DPN process.     

Design of an electrically actuated lower extremity exoskeleton

Human exoskeletons add the strength and endurance of robotics to a human's innate intellect and adaptability to help people transport heavy loads over rough, unpredictable terrain. The Berkeley lower extremity exoskeleton (BLEEX) is the first human exoskeleton that was successfully demonstrated to walk energetically autonomous while supporting its own weight plus an external payload. This paper details the design of the electric motor actuation for BLEEX and compares it to the previously designed hydraulic actuation scheme. Clinical gait analysis data was used to approximate the torques, angles and powers required at the exoskeleton's leg joints. Appropriately sized motors and gearing are selected, and put through a thorough power analysis. The compact electric joint design is described and the final electric joint performance is compared with BLEEX's previous hydraulic actuation. Overall, the electric actuation scheme is about twice as efficient and twice as heavy as the hydraulic actuation.     

Design and UV-LIGA microfabrication of an electro-statically actuated power relay

A novel type of micro power relay has been designed and fabricated using UV-LIGA technology. The relay is based on electrostatic actuation and SU-8 was used as a functional material. The unique character of this novel power relay is that other than two SU-8 strips used both as electrical insulators mechanical connectors, all other components are made of metal or alloys. Because UV-LIGA technology has the advantages of broad material selection and the capability of making high aspect ratio microstructures, the technology is best suited for fabricating micro electro mechanical system power relays. A multi-step, multi-layer UV-LIGA process has been successfully developed and a prototype relay has been successfully fabricated.     

Design, control, and energetics of an electrically actuated leggedrobot

To study the design, control and energetics of autonomous dynamically stable legged machines we have built a planar one-legged robot, the ARL Monopod. Its top running speed of 4.3 km/h (1.2 m/s) makes it the fastest electrically actuated legged robot to date. We adapted Raibert's control laws for the low power electric actuation necessary for autonomous locomotion and performed a detailed energetic analysis of our experiments. A comparison shows that the ARL Monopod with its 125 W average power consumption is more energy efficient than previously built robots.     

Design of shrinkage microvalve in microchannel with hydrophilic and hydrophobic walls

This paper presents a simple design of shrinkage microvalves which can be used to effectively stopping capillary flow inside a microchannel with hydrophilic and hydrophobic walls. Based on the relationship between capillary pressure and cross-section geometry of a microchannel, the microvalve is designed with a critical ratio of rectangular section. In order to verify the feasibility of the design rule, a couple of shrinkage microvalves with different aspect ratios of cross-section are fabricated by using PDMS bonded with glass wafer. The experiment demonstrates the stopping effect of the proposed design of shrinkage microvalve.     

Design and evaluation of an actuated exoskeleton for examining motor control in stroke thumb

Chronic hand impairment is common following stroke. This paper presents an actuated thumb exoskeleton (ATX) to facilitate research in examining motor control and hand rehabilitation. The ATX presented in this work aims to provide independent bi-directional actuation in each of the 5 degrees of freedom (DOF) of the thumb using a novel flexible shaft-based mechanism that has 5 active DOF and 3 passive DOF. A prototype has been built and experiments have been conducted to measure the allowable workspace at the thumb and evaluate the kinematic and kinetic performance of the ATX. The experimental results show that the ATX is able to provide individual actuation at all five thumb joints with high joint velocity and torque capacities. Further improvement and future work are discussed.     

Design and fabrication of an electrothermal microactuator for multi-level conveying

During the past years, a variety of microactuators developed for micro-conveyors have been presented. However, such micro-conveyors can only provide conveying motion in a single plane. Here an electrothermally driven microactuator with a capability of adjustable height is proposed, which may act as a basic unit for multi-level conveyors. This microactuator is based on the principle of thermal bimorph actuation with two long conveying fingers to exert out-of-plane bending motions in the transversal direction, which are connected and lifted by an initially curved height adjuster in the longitudinal direction. The devices can provide conveyance of micro-objects between two plane levels of different heights. The testing results show that the two fingers and a height adjuster can be actuated simultaneously and individually with little thermal crosstalk. The proposed device with a dimension of 900×100×4.5 μm³ can provide 5 μm vertical displacements by the height adjuster at 1 V and 18 μm lateral displacements by the conveying finger at 2 V. Simulations by finite-element program ANSYS 5.7 have been performed and widely match with testing results.     

Design and fabrication of an angular microactuator for magneticdisk drives

Angular electrostatic microactuators suitable for use in a two-stage servo system for magnetic disk drives have been fabricated from molded chemical-vapor-deposited (CVD) polysilicon using the HexSil process. A 2.6-mm-diameter device has been shown to be capable of positioning the read/write elements of a 30% picoslider over a ±1-μm range, with a predicted bandwidth of 2 kHz. The structures are formed by depositing polysilicon via CVD into deep trenches etched into a silicon mold wafer. Upon release, the actuators are assembled onto a target wafer using a solder bond. The solder-bonding process will provide easy integration of mechanical structures with integrated circuits, allowing separate optimization of the circuit and structure fabrication processes. An advantage of HexSil is that once the mold wafer has undergone the initial plasma etching, it may be reused for subsequent polysilicon depositions, amortizing the cost of the deep-trench etching over many structural runs and thereby significantly reducing the cost of finished actuators. Furthermore, 100-μm-high structures may be made from a 3-μm deposition of polysilicon, increasing overall fabrication speed     

Design and simulation of a normally closed glucose sensitive hydrogel based microvalve

In drug delivery systems microvalves are the key components that have been developed for active control of drugs. In this research a normally closed microvalve with a glucose sensitive hydrogel actuating system is designed and simulated. Swelling of the hydrogel forces a silicone rubber membrane to deflect and causes the valve to be opened. The component of the valve that can be opened because of the hydrogel pressure is a silicon nitride cantilever beam which is sealed with a parylene layer. Simulations have been done by FEM analysis and the results show that membrane deflection is large enough to enable the valve to be opened and the fluid to flow through the microchannel. For both rectangular and trapezoidal microchannels with various hydraulic diameters, output flow rates less than 50 μl/min to several hundreds of μl/min can be achieved. Final design has been optimized for the opening point of microvalve at glucose concentration of 15 mM. Overall investigation has been done for a microvalve with specific dimensions and with 4 kPa input pressure the output flow rate of 100 μl/min has been generated which is in the desired range.     

Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology

A micromachined electrostatically suspended gyroscope, with a wheel-like rotor housed by top stator and bottom stator, using UV-LIGA microfabrication technology, was presented. The designed structure and basic operating principle of the gyroscope are described. The key steps in the fabrication process, such as wet etching of Pyrex glass pits for soldering, and integration of thick nickel structures by removal of SU-8 mold, were considered in detail and well solved. Cr/Pt/photoresist was used as etching mask and the etched pits, in depth of near 30 μm, with aspect ratio (depth to undercutting) of 0.75, were obtained. With metal foundations constructed for consolidation, successful integration of the nickel structures, in thickness of 200 μm, was achieved by successful removal of the SU-8 mold using oleum. After the two stators and the rotor were fabricated separately, they were assembled and soldering bonded to form axial and radial small gaps, hence, the initial prototype of the microgyroscope was realized. The key techniques described in this paper can be applied to fabrication of other micro devices. The metal foundation method, associated with removal of SU-8 mold by oleum, is expected to make SU-8 wider applications in making integrated microstructures with fabricated circuitry on the same chip.     

Design of suspension-based and collocated dual stage actuated suspensions

Dual stage actuators have recently been implemented in hard disk drive suspensions in order to increase the track density of hard disk drives. This paper investigates the lateral deflection (lateral stroke), stress distribution and design characteristics of a suspension-based and a collocated flexure-based dual stage actuated suspension design using finite element analysis. Design parameters for each suspension design are examined and guidelines for improved lateral deflection characteristics are proposed.     

Stability and traction control of an actively actuated micro-rover

This article addresses the issue of enhancing mobility of actively actuated vehicles by the use of optimal force distribution, and by actively controlling the location of the center of mass of the vehicle body. Force distribution in actively actuated vehicles is an underspecified problem, and optimal force distribution leads to improved contact conditions. Actively actuated vehicles also possess the ability to vary their configuration. This capability can be used to locate the center of mass of the system to further enhance mobility by providing sufficient traction, and ensuring vehicle stability, during difficult vehicle maneuvers. In this work, the general idea of control of the location of the center of mass, followed by optimal force distribution, is addressed first. This is followed by an application of these ideas to Gofor, a simple actively actuated wheeled micro-rover system, that has been designed and fabricated at the Jet Propulsion Laboratory. An algorithm to achieve desired traction and stability has been developed. Simulation studies were performed to investigate negotiation of a vertical surface. It was found that one set of wheels readily climbed the vertical surface with the use of active mass and force distribution. This is a significant improvement over traditional wheeled vehicle systems. © 1994 John Wiley & Sons, Inc.     

Design and fabrication of an on-chip micro flow cytometer with integrated micro-lens

Microsystem Technologies - In this paper, the design and fabrication of an on-chip micro flow cytometer chip with integrated micro-lens with a size of...