Microelectromechanical diffraction gratings: Areas of applicability and prospects

The structure and specific features of operation of microelectromechanical systems, micromirror devices, and diffraction gratings controlled by an electric field are considered. Elements of microelectromechanical diffraction gratings and some applied problems solved with the use of these gratings are described. A new element of the microelectromechanical diffraction grating based on using dielectric materials with a high dielectric permeability in the gap between the electrodes is proposed. As compared with available analogs, this element has a lower control voltage, a higher clock frequency, and better processability. The characteristics of the new element and available analogs are compared.     

衍射光多普勒频移的实验研究

为了证明由周期性造成的光的"负折射"现象不同于光的衍射现象,采用光学外差干涉法,对运动的平面光栅的衍射光进行多普勒频移的测量。通过对参考光引进频移的方法,让拍频值和参考光频移值对比确定衍射光所发生的多普勒频移的正负,验证了周期性的平面光栅当入射光与出射的衍射光在法线同一侧时发生的多普勒频移是正常的。说明仅由周期性造成的"负折射"现象,并不能产生反常多普勒效应;具有反常多普勒频移的周期性二维光子晶体才具有反常的等效负折射率,"左手"材料的反常性质并不仅是由于周期性造成的。     

Low-voltage element of a field-programmable dynamic diffraction grating

A new element of a field-controlled diffraction grating [Grating Light Valve™ diffractive MOEMS device (GLV)] is described, which differs from known similar elements by the physical principle of operation and its structure; other distinctive features are the lower control voltage, the absence of the hysteresis, and the possibility of operation in the analog mode. Experimental characteristics of the GLV element are presented.     

闪耀透射光栅衍射规律的分析和验证

基于标量理论研究了不同槽形角,不同刻线密度的透射式闪耀光栅对使用波段的影响,推导了闪耀透射光栅的衍射光能量分布规律。分析证明了透射闪耀光栅在衍射能量最强方向上衍射光的衍射角与入射光的入射角之间的关系满足Snell定律。给出了入射角、衍射角与槽形角之间的关系式,研究了不同刻线密度和槽形角条件下衍射光能量分布的规律。对闪耀透射光栅进行了测量和比较,结果表明:已有闪耀透射光栅测量的结果与理论计算数据相吻合。制备了聚二甲基硅氧烷(PDMS)可调谐闪耀透射光栅,应用研究的理论公式测量了该闪耀透射光栅在拉伸与自由状态下的闪耀波长和光栅刻线密度,结果显示其波长测量误差在5nm以内。拟合了光栅的等效槽形,验证了实时监测PDMS光栅槽形和刻线密度随拉力大小变化的规律。     

高频高频射效率H—PDLC体全息光栅的研究

H- PDLC体全息光栅可使光栅的衍射能量集中到非零级的衍射级次上 ,大大提高衍射效率。实验表明 ,不同的材料配方比例、干涉光夹角、PDLC的膜厚、曝光时间均对H- PDLC体全息光栅的衍射效率产生影响     

用C方法计算介质膜光栅衍射效率

运用C方法对介质膜基底反射光栅的衍射效率进行了详细的理论分析。在此基础上用正弦函数的高次幂作为光栅的槽形函数编写了介质膜光栅衍射效率计算程序,数值计算结果表明了C方法在计算介质膜光栅衍射效率的可行性。     

Diffraction of 0.5keV electrons from free-standing transmission gratings

A nanostructured grating was used to diffract a low-energy (500 eV) electron beam, and the current transmitted into the zeroth diffraction order was greater than 5% of the incident beam current. This diffraction efficiency indicates that the 55-nm-wide grating bars absorb electrons but the 45-nm-wide slots between bars transmit electron de Broglie waves coherently. The diffraction patterns can be asymmetric, and can be explained by a model that incorporates an electrostatic potential energy for electrons within 20 nm of the grating structure calculated by the method of images.     

大型衍射光栅刻划机拉杆结构的分析与改进

由于大型衍射光栅刻划机刻划系统的双拉杆结构不能使其满足精度指标要求,本文设计了一套单拉杆结构。讨论了石英导轨分度方向弯曲误差产生的原因及其减小该误差的方法,分析和比较了两种拉杆结构的鞍型滑块的受力情况。基于材料力学弯曲变形理论,建立了石英导轨分度方向弯曲误差模型。在该模型的基础上仿真了双、单拉杆结构下刻划系统的石英导轨在分度方向上的弯曲变形误差。最后,使用双频激光干涉仪对石英导轨上的两个特征测量点进行了测量。测量结果显示:改进后的拉杆结构使得石英导轨在两特征测量点处的位移误差由50.36nm降低到小于10nm,满足大型衍射光栅刻划机刻划系统在分度方向上5~10nm的精度指标要求。     

体布拉格光栅外腔倍频半导体激光器研究

为提高绿光激光器的输出特性,设计了一种体布拉格光栅外腔倍频半导体激光器。采用反射型体布拉格光栅作为反馈元件构成外腔半导体激光器,并使用三硼酸锂晶体进行倍频,研究了基频光的光束及光谱特性对倍频光的光束及光谱特性的影响。实验结果表明,使用体布拉格光栅进行外腔锁波时,所得到的倍频光同样能实现窄带宽输出,同时倍频光的远场分布与基频光的远场分布一致。使用衍射效率为10%的体布拉格光栅作为外腔输出镜,可将半导体激光器的输出波长稳定锁定在1 064 nm,所得到的倍频光波长稳定在532 nm附近,光谱线宽压缩至0.4 nm左右,输出功率可达73 mW。     

Shack-Hartmann sensor based on a low-aperture off-axis diffraction lens array

A Shack-Hartmann type wavefront sensor designed on the basis of a low-aperture off-axis diffraction lens array is described. Tests experiments showed that the sensor is capable of measuring wavefront slopes at array subapertures of size 640×640 µm with an error not exceeding 4.80 arcseconds (0.15 pixel), which corresponds to the standard deviation (SD) (SD = 0.0170λ) at the reconstructed wavefront. Advantages of the array used in the sensor and the technology of its manufacture are discussed. The sensor tested in the experiments can be used to measure atmospheric turbulence parameters and as an element of adaptive optical imaging systems.     

衍射光栅刻划机的闭环控制系统

以S3C2440A为控制核心,设计了衍射光栅刻划机的高精度运动控制系统,实现了现场显示、实时控制等功能。用S3C2440A微控制器控制伺服电机和步进电机完成光栅刻划的分度运动和刻划运动,通过SiGNUMTM RELM直线光栅尺反馈和PD加前馈控制算法补偿由于惯性等原因造成的分度误差,并用MATLAB对使用PD加前馈控制算法的分度运动进行仿真。采用RON225增量式角度编码器反馈以补偿执行刻划运动的步进电机因失步造成的误差,通过分析和处理实验数据获得分度运动最佳速度和伺服电机在此分度运动速度下停止时的过冲距离。最后,对可能产生控制误差的原因进行了初步分析,并提出了需要进一步改进和完善之处。     

衍射光栅刻划机微定位系统控制器设计

针对衍射光栅刻划机开环控制的定位精度不能满足指标要求的问题,在刻划机已有的状态和结构下,设计了微定位系统的控制器。首先,介绍了衍射光栅刻划机,分析了微定位系统及其定位精度指标。然后,运用系统辨识的方法,设计了微定位系统的扫频实验,建立其数学模型。接着,提出了在已有数学模型的基础上,运用实际测量数据和MATLAB/Simulink软件仿真试凑来设计控制器的方法,并设计了满足精度指标要求的控制器。最后,将设计的控制器应用于微定位系统并进行模拟刻划实验,实验结果可知:所设计的微定位系统控制器定位精度基本满足指标要求,其中峰-峰值小于40 nm,RSM值总体略大于2.8 nm。     

宽波段金属光栅设计中闪耀波长对光栅异常的补偿效应

给出适用性强、工艺上易于实现的单闪耀面宽波段金属光栅设计新方法。基于Rayleigh异常和共振异常两种不同的光栅异常机理,分别讨论了它们出现的条件,在光栅电磁场理论的基础上,数值分析了TE波、TM波闪耀波长的分布规律,发现了闪耀波长与光栅异常、光栅光谱范围的关系,提出了用TM波第一闪耀波长补偿Rayleigh异常或共振异常实现制作宽波段金属光栅的设计思想。同时,指出了TM波第一闪耀波长对Rayleigh异常的补偿效应,只是它对共振异常的补偿效应的极限情况。给出了将补偿效应应用于紫外可见分光光度计、近红外分光光度计和红外分光光度计用不同刻线密度宽波段金属光栅的设计实例。补偿效应法无论在理论设计上还是在工艺实现上都要优于传统的宽波段金属光栅设计方法,它可以使得用于各个波段上的宽波段金属光栅衍射效率都在40%以上。     

亚波长光栅的衍射效率

本文使用矢量衍射理论一严格的耦合波理论对亚波长光栅的衍射效率进行了数值计算，得到在不同光栅参数时亚波长光栅的衍射效率，对影响光栅衍射效率的各个光栅参数分别进行分析，讨论了光栅在光栅参数变化时的衍射特性，给出衍射效率随光栅各个参数的变化曲线。由结果可知亚波长光栅的衍射效率随光栅槽的深度以及光栅占空比有着规律性的变化，选取不同的光栅参数就可得到完全不同的衍射效率，这样就为设计出所需要的光栅滤波特性提供了制造依据。     

Many-beam dynamical simulation of electron backscatter diffraction patterns

We present an approach for the simulation of complete electron backscatter diffraction (EBSD) patterns where the relative intensity distributions in the patterns are accurately reproduced. The Bloch wave theory is applied to describe the electron diffraction process. For the simulation of experimental patterns with a large field of view, a large number of reflecting planes has to be taken into account. This is made possible by the Bethe perturbation of weak reflections. Very good agreement is obtained for simulated and experimental patterns of gallium nitride GaN{0001} at 20kV electron energy. Experimental features like zone-axis fine structure and higher-order Laue zone rings are accurately reproduced. We discuss the influence of the diffraction of the incident beam in our experiment.     

全息波导耦出光栅出瞳亮度均匀性的改善

目前在AR领域,存在着全息波导显示系统的耦出光栅出瞳亮度不均匀的问题,设计并制作了一种衍射效率渐变的全息光栅以进一步提高显示光路中耦出光栅的出瞳亮度均匀性。提出移动遮挡板方案,以实现分区域地改变全息干版的曝光时间,使得到的全息光栅的衍射效率具有渐变特性,并对实验结果进行研究和分析。结果表明,系统中耦出光栅的出瞳亮度均匀性由28.57%提高到57.14%。因此采用的全息光学元件的拍摄光路和曝光方法,可以有效改善全息波导耦出光栅出瞳亮度均匀性。     

Application of a diffraction grating and position sensitive detectors to the measurement of error motion and angular indexing of an indexing table

In this paper, two systems for the measurement of the error motion and angular indexing of a rotary indexing table have been developed. A laser diode, a laser holder and a position sensitive detector (PSD) are integrated as a simple measuring device for the measurement of the rotary error without using a precision reference artifact (a cylinder or a sphere), multiple probes or error separation methods. The laser diode is assembled in the laser holder and fixed on the rotary table. The PSD is set up above the laser holder to detect the position of an incident laser beam from the laser diode. When the rotary table rotates, the rotary error changes the direction of the incident beam and also the position of the spot on the PSD. For the measurement of the angular indexing, a reflective diffraction grating and two PSDs are integrated as a high-resolution angle measuring device without using an autocollimator or a laser interferometer system. The diffraction grating is set at the center of the rotary table and reflects an incident laser beam into several diffractive rays. Two PSDs were set up for detecting the positions of ±1st-order diffraction rays. A simple algebraic method is used to solve the angular indexing through an optical analysis. The experimental results showed the feasibility of the proposed test devices.     

高分辨率X射线衍射光学元件

评述了BESSY研制的用于X射线聚焦的各种衍射光学元件。基于布拉格-菲涅耳光学元件,设计了高效高分辨率X射线聚焦和色散光学元件。描述了对长焦距布拉格-菲涅耳透镜与可变曲率半径反射镜组合所做的实验研究。用一块反射菲涅耳波带板作聚焦和色散光学元件进行了短脉冲X射线吸收谱(XAS)的测量。     

Design, fabrication, and characterization of diffraction gratings for neutron phase contrast imaging

We have developed a neutron phase contrast imaging method based on a grating interferometer setup. The principal constituents are two absorption gratings made of gadolinium and a phase modulating grating made of silicon. The design parameters of the setup, such as periodicity, structure heights of the gratings, and the distances between the gratings, are calculated. The fabrication of each grating is described in detail. The produced diffraction gratings were finally characterized within the setup, by locally evaluating the produced contrast (visibility) in each detector pixel, resulting in a visibility map over the whole grating size. An averaged value of 23% is achieved.