一种高性能的新结构IGBT

提出了一种低功率损耗的新结构IGBT.该新结构的创新点在于其复合耐压层结构,该耐压层包括深扩散形成的n型缓冲层和硼注入形成的透明背发射区两部分.虽然在正常工作条件下,该新结构IGBT工作于穿通状态,但器件仍具有非穿通IGBT(NPT-IGBT)的优良特性.该新结构IGBT具有比NPT-IGBT更薄的芯片厚度,从而可以获得更好的通态压降和关断功耗之间的折衷.实验结果表明:与NPT-IGBT相比较,新结构IGBT的功率损耗降低了40%.     

1700V/100A平面型NPT-IGBT静态特性研究

基于现有工艺平台设计一款1 700V/100A非穿通型绝缘栅双极晶体管器件(Non punch through insulator gate bipolar transistor,简称NPT-IGBT),元胞采用平面型结构,元胞注入采用自对准工艺,背发射极采用透明集电极技术,对其静态特性进行工艺仿真。仿真结果显示,调整P阱注入剂量及P阱推结时间可以改变器件的阈值电压,调整P阱及背面P+集电极注入剂量可以改变器件的饱和电压。将此设计进行流片验证,结果显示击穿电压在2 100V以上,饱和压降在2.5~2.7V之间,阈值电压在3.9~5.9V之间,实测值和仿真值相差不大,在误差接受范围之内。     

1700 V精细沟槽栅IGBT器件设计

为了改善绝缘栅双极型晶体管(IGBT)器件关断损耗和导通压降之间的折中关系,同时降低器件制造成本,基于1 700 V电压平台设计了一种采用精细沟槽栅结构的IGBT。采用TCAD软件进行仿真,研究衬底电阻率、衬底厚度、沟槽栅深度、沟槽栅宽度、载流子存储层注入剂量、沟槽栅元胞结构等因素对精细沟槽栅IGBT器件性能参数的影响,确定了最优工艺参数,并对1 700 V精细沟槽栅IGBT芯片进行流片和封装。测试结果显示,相比普通沟槽栅IGBT模块,1 700 V精细沟槽栅IGBT模块在芯片面积减小34.2%的情况下,关断损耗降低了8.6%,导通压降仅升高5.5%,器件性价比得到了优化。     

掩埋隧道结在长波长VCSEL结构中的应用

采用气态源分子束外延技术在InP(100)衬底上分别生长了δ掺杂的p+-AlIn-As-n+-InP和p+-InP-n+-InP两种隧道结结构,用电化学C-V和I-V特性曲线表征了载流子浓度和电学特性,发现p+-AlInAs-n+-InP隧道结性能优于p+-InP-n+-InP隧道结.在InP(100)衬底上生长了包含p+-AlInAs-n+-InP掩埋隧道结和多量子阱有源层的1.3μm垂直腔面发射激光器(VCSEL)结构,测试得出其开启电压比普通的pin结VCSEL小,室温下其电致发光谱波长为1.29μm.     

掩埋隧道结在长波长VCSEL结构中的应用

采用气态源分子束外延技术在InP(100）衬底上分别生长了δ掺杂的p+-AlIn-As-n+-InP和p+-InP-n+-InP两种隧道结结构，用电化学C-V和I-V特性曲线表征了载流子浓度和电学特性，发现p+-AlInAs-n+-InP隧道结性能优于p+-InP-n+-InP隧道结. 在InP(100）衬底上生长了包含p+-AlInAs-n+-InP掩埋隧道结和多量子阱有源层的1.3μm垂直腔面发射激光器（VCSEL）结构，测试得出其开启电压比普通的pin结VCSEL小，室温下其电致发光谱波长为1.29μm.     

漏电低短路能力强的3300 V IGBT模块

为实现满足电网应用要求的短路能力强、反向偏置安全工作区大、工作结温高的3 300 V高压绝缘栅场效应晶体管模块,提出了一种具有N型增强层的IGBT元胞结构,采用P型隔离区的元胞布局结构和台阶形场板的保护环结构的IGBT设计。基于203.2 mm（8英寸）平面栅IGBT加工工艺,制作出的芯片封装成3 300 V/1 500 A的IGBT模块。模块常温下的饱和压降(V₍C_Esat)为2.55 V,动态总损耗(E_tot)为5 236 mJ;高温150℃下的V_CEsat为3.3 V,集电极和发射极间的漏电流(I_CES)只有38 mA,Etot为7 157 mJ。在常温时,当栅极和发射极电压(V_GE)为18.5 V的条件下,模块通过了一类短路测试。在150℃下,模块通过了2.5倍额定电流的反向偏置关断测试。     

硅衬底注氮方法制备超薄SiO2栅介质

利用栅氧化前在硅衬底内注氮可抑制氧化速率的方法,制得3.4nm厚的SiO2栅介质,并将其应用于MOS电容样品的制备.研究了N+注入后在Si/SiO2中的分布及热退火对该分布的影响;考察了不同注氮剂量对栅氧化速率的影响.对MOS电容样品的I-V特性,恒流应力下的Qbd,SILC及C-V特性进行了测试,分析了不同氧化工艺条件下栅介质的性能.实验结果表明:注氮后的热退火过程会使氮在Si/SiO2界面堆积;硅衬底内注入的氮的剂量越大,对氧化速率的抑制作用越明显;高温栅氧化前进行低温预氧化的注氮样品较不进行该工艺步骤的注氮样品具有更低的低场漏电流和更小的SILC电流密度,但二者恒流应力下的Qbd值及高频C-V特性相近.     

氮注入多晶硅栅对超薄SiO2栅介质性能的影响

p+多晶硅栅中的硼在SiO2栅介质中的扩散会引起栅介质可靠性退化,在多晶硅栅内注入N+的工艺可抑制硼扩散.制备出栅介质厚度为4.6nm的p+栅MOS电容,通过SIMS测试分析和I-V、C-V特性及电应力下击穿特性的测试,观察了多晶硅栅中注N+工艺对栅介质性能的影响.实验结果表明:在多晶硅栅中注入氮可以有效抑制硼扩散,降低了低场漏电和平带电压的漂移,改善了栅介质的击穿性能,但同时使多晶硅耗尽效应增强、方块电阻增大,需要折衷优化设计.     

氮注入多晶硅栅对超薄SiO_2栅介质性能的影响

p+ 多晶硅栅中的硼在 Si O2 栅介质中的扩散会引起栅介质可靠性退化 ,在多晶硅栅内注入 N+ 的工艺可抑制硼扩散 .制备出栅介质厚度为 4 .6 nm的 p+栅 MOS电容 ,通过 SIMS测试分析和 I- V、C- V特性及电应力下击穿特性的测试 ,观察了多晶硅栅中注 N+工艺对栅介质性能的影响 .实验结果表明 :在多晶硅栅中注入氮可以有效抑制硼扩散 ,降低了低场漏电和平带电压的漂移 ,改善了栅介质的击穿性能 ,但同时使多晶硅耗尽效应增强、方块电阻增大 ,需要折衷优化设计 .     

压接型IGBT器件单芯片子模组功率循环试验仿真

压接型绝缘栅双极型晶体管(IGBT)器件因具有双面散热、短路失效和易于串联等优点,正逐步应用到柔性直流输电等领域.但其在工作过程中的热学、力学特性与传统焊接式IGBT模块相比有很大差异,故存在不同的长期可靠性问题.基于有限元法建立了压接型IGBT器件单芯片子模组多物理场耦合仿真模型,研究了三种功率循环仿真条件下器件的热学和力学特性,并且在功率循环过程中利用金属弹塑性模型来模拟材料的瞬态特性.仿真结果表明,IGBT芯片发射极表面与发射极钼片相接触的边缘是应力集中区域,芯片发射极表面栅极缺口和四周边角处有明显的塑性变形.同时,将仿真结果与实际失效的IGBT芯片进行了对比,进一步验证了仿真模型的有效性和适用性.     

A study on IGBT junction temperature (Tj) online estimation using gate-emitter voltage (Vge) at turn-off

A novel method is presented for online estimation of the junction temperature (Tj) of semiconductor chips in IGBT modules, based on evaluating the gate-emitter voltage (Vge) during the IGBT switch off process. It is shown that the Miller plateau width (in the Vge waveform) depend linearly on the junction temperature of the IGBT chips. Hence, a method can be proposed for estimating the junction temperature even during converter operation – without the need of additional thermal sensors or complex Rth network models. A measurement circuit was implemented at gate level to measure the involved time duration and its functionality was demonstrated for different types of IGBT modules. A model has been proposed to extract Tj from Vge measurements. Finally, an IGBT module with semiconductor chips at two different temperatures has been measured using Vge method and this method was found to provide the average junction temperature of all the semiconductor chips.     

IGBT芯片参数对瞬态均流特性的影响

IGBT模块一般采用多芯片并联的方式进行封装,但由于模块参数、驱动控制等差异,模块内部存在电流分布不均衡的问题。相比于稳态电流分布,瞬态电流分布的影响因素众多,是研究的热点。针对IGBT的芯片参数开展了模块内部各支路瞬态电流分布特性的研究。通过建立IGBT芯片模型及芯片并联的瞬态电路分析模型,计算单一芯片参数与多种芯片参数作用下IGBT模块的瞬态电流分布,提出新的适用于芯片支路瞬态均流分析的评价指标,得到了IGBT芯片参数对并联瞬态均流影响的规律。研究结果表明阈值电压、跨导和栅极电阻是对瞬态均流影响最大的3个芯片参数,且需要关注阈值电压与跨导的共同影响。研究结果对IGBT的芯片筛选及并联后的瞬态均流计算具有指导意义。     

高性能IGBT模块的设计考虑

本文对ＩＧＢＴ模块中功率芯片（ＩＧＢＴ和续流二极管）的优化设计进行了讨论。通过优化几个重要的工艺参数并改进器件的结构，ＩＧＢＴ不仅有足够的短路容量，而且正向压降与电流下降时间之间可实现最佳折衷。另外，续流二极管的反向恢复特性也有明显改善。通过采用衬底控制技术，ＩＧＢＴ模块的输出特性不受温度的影响，输出电流更稳，输出阻抗更高。本文详细介绍了整个设计考虑。     

高压Trench IGBT的研制

介绍了当前绝缘栅双极晶体管(IGBT)的几种结构及沟槽型IGBT的发展现况,分析了高电压沟槽型非穿通(NPT)IGBT的结构及工艺特点。通过理论分析计算出初步器件的相关参数,再利用ISE仿真软件模拟器件的结构及击穿和导通特性,结合现有沟槽型DMOS工艺流程,确定了器件采用多分压环加多晶场板的复合终端、条状元胞、6μm深度左右沟槽、低浓度背面掺杂分布与小于180μm厚度的器件结构,可以很好地平衡击穿特性与导通特性对器件结构的要求。成功研制出1 200 V沟槽型NPT系列产品,并通过可靠性考核,经过电磁炉应用电路实验,结果表明IGBT器件可稳定工作,满足应用要求。该设计可适合国内半导体生产线商业化生产。     

Temperature measurements and thermal modeling of high power IGBT multichip modules for reliability investigations in traction applications

To study the failure mechanisms induced on high power IGBT multichip modules by thermal cycling stress in traction environment, a good knowledge of the temperature distribution and variations on the chips and in the interfaces between the different layers of the packaging is necessary. This paper presents a methodology for contact temperature measurements on chips surface in power cycling conditions and a fast 3D thermal simulation tool for multilayered hybrid or monolithic circuits. The results of static and dynamic thermal simulation of a 1200A–3300V IGBT module are given and compared with the contact temperature measurements results. The investigation has been done within the RAPSDRA (Reliability of Advanced High Power Semiconductor Device for Traction Applications) European project.     

TLM method for thermal investigation of IGBT modules in PWM mode

The insulated gate bipolar transistor (IGBT) is popularly used in high power, high frequency power-electronic applications such as motor control and inverters. These applications require well designed thermal management system to ensure the protection of IGBTs. Choice simulation tools for accurate prediction of device power dissipation and junction temperature become important in achieving optimised designs.In this paper, thermal analysis of a 1200 A, 3.3 kV IGBT module was investigated and analysed using the three-dimensional transmission line matrix (3D-TLM) method. The results show a three-dimensional visualisation of self-heating phenomena in the device. Since the comparison TLM results with the analytical solutions do not exist for this IGBT module, we use the MSC.NASTRAN tool to find the similar range of the temperatures. Results are compared.Typically, IGBT is used in a three-phase inverter leg where the control signals are generated via PWM scheme so, the prediction of the temperature rise is important in the pulse operation conditions for the IGBT device. A view of the dynamic thermal temperature rise is obtained with 100 W-step pulse dissipation applied at IGBT chips. The temperature rises are calculated using TLM method during the PWM load cycles. Simulations give clear indications of the importance of the spreader material and are helpful in selecting the proper one.TLM has been successful in modelling heat diffusion problems and has proven to be efficient in terms of stability and complex geometry. The three-dimensional results show that method has a considerable potential in power devices thermal analysis and design.     

高跨导AlGaN/GaN HFET器件研究

报道了蓝宝石衬底上AlGaN/GaNHFET的制备以及室温下器件的性能。器件栅长为0.8μm,源漏间距为3μm,得到器件的最大漏电流密度为0.7A/mm,最大跨导为242.4mS/mm,截止频率(fT)和最高振荡频率(fmax)分别为45GHz和100GHz。同时器件的脉冲测试结果显示,SiN钝化对大栅宽器件的电流崩塌效应不能彻底消除。     

Static and dynamic finite element modelling of thermal fatigue effects in insulated gate bipolar transistor modules

The aim of this paper is to demonstrate the use of finite element techniques for modelling thermal fatigue effects in solder layers of insulated gate bipolar transistor (IGBT) – modules used in traction applications. The three-dimensional models presented predict how progressive solder fatigue, affects the static and dynamic thermal performance of such devices.Specifically, in this paper, the analysis of an 800 A–1800 V IGBT module is performed. In the first part, the static analysis is realised. The parameters assessed are thermal resistance, maximum junction temperature and heat flux distribution through the different layers comprising the module construction. In the second part of the paper, transient analyses are performed in order to study the dynamic thermal behaviour of the module. The constructed thermal impedance curves allow for calculation of the device temperature variations with time. Stress parameters, such as temperature excursion and maximal temperature at chip and solder interfaces, are determined. Calibration of all simulation models is achieved by comparison with alternative theoretical calculations and manufacturers’ measured values provided in the data sheet book.     

Thermal component model for electrothermal analysis of IGBT modulesystems

The insulated gate bipolar transistor (IGBT) modules are getting more accepted and increasingly used in power electronic systems as high power and high voltage switching components. However, IGBT technology with high speed and greater packaging density leads to higher power densities on the chips and increases higher operating temperatures. These operating temperatures in turn lead to an increase of the failure rate and a reduction of the reliability. In this paper, the static and dynamic thermal behavior of IGBT module system mounted on a water-cooled heat sink is analyzed. Although three-dimensional finite element method (3-D FEM) delivers very accurate results, its usage is limited by an imposed computation time in arbitrary load cycles. Therefore, an RC component model (RCCM) is investigated to extract thermal resistances and time constants for a thermal network. The uniqueness of the RCCM is an introduction of the time constants based on the Elmore delay, which represents the propagation delay of the heat flux through the physical geometry of each layer. The dynamic behavior predicted by the thermal network is equivalent to numerical solutions of the 3-D FEM. The RCCM quickly offers insight into the physical layers of the components and provides useful information in a few minutes for the arbitrary or periodic power waveforms. This approach enables a system designer to couple the thermal prediction with a circuit simulator to analyze the electrothermal behavior of IGBT module system, simultaneously