压电微动工作台的位移复合控制

为解决稳态精度和稳定性之间的矛盾,提高压电陶瓷执行器的控制性能,进而提高其驱动的微动工作台的定位精度,构造了一种前馈补偿同反馈调节相结合的复合控制算法。其中,前馈补偿为基于压电陶瓷执行器迟滞非线性模型的前馈控制,通过自学习算法来实现,用来补偿压电陶瓷执行器的迟滞非线性,提高对参考位移信号的跟踪能力;反馈调节为PID反馈控制,用来进一步校正前馈补偿没有消除的偏差以及由模型的不确定性所引起的误差,且为了减小积分饱和作用以及微分对扰动的敏感性,对PID算法进行了改进,使之成为一种变系数积分与加权微分的PID算法。试验验证了该算法的有效性,并将该算法同其他控制算法——开环控制、前馈控制、PID 反馈控制进行了对比试验研究,结果表明,复合控制算法比其他控制算法具有更好的性能。     

Modeling of piezoelectric actuator for compensation and controller design

This work proposes a novel method for describing the hysteretic non-linearity of a piezoelectric actuator. The hysteresis behavior of piezoelectric actuators, including the minor loop trajectory and the residual displacement near zero input, are modeled by a set of hysteresis operators, including a gain and an input-dependent lag, as well as the parameter scheduling method. A hysteresis model, using the identified parameters, and containing only the dominant hysteresis operator, is presented herein. Based upon a simplified hysteresis model, tracking is controlled to reduce the non-linear effects in the characteristics of the piezoelectric actuator. A proportional-integral (PI) controller, with inverse model feed-forward, suppresses the tracking error to within ±1% full span range (FSR) of the actuator, noticeably improving the tracking performance of the piezoelectric actuator.     

Observer-based sliding mode control with adaptive perturbation estimation for micropositioning actuators

Control of piezoelectric actuators is under the effects of hysteresis that could affect actuators micropositioning accuracy. In this paper a modified Prandtl-Ishlinskii (PI) operator and its inverse is utilized for both identification and real time compensation of the hysteresis effect. As a result, the actuator dynamic model would be transformed to the second order linear dynamic model. Considering the parametric uncertainties, PI estimation error and probably unmodeled dynamics, a variable structure controller coupled with adaptive perturbation estimation is proposed for trajectory tracking of the piezoelectric position. Considering the very noisy output of the actuator, a high-gain observer would estimate full states from the only measurable position trajectory. The stability of the controller in the presence of the estimated state is demonstrated with the Lyapunov criterion. Comparing to the widely used proportional-integral controller, the experimental results depicts that the proposed approach is greatly achieved in precisely tracking of multiple frequency trajectories.     

Ultra-precise tracking control of piezoelectric actuators via a fuzzy hysteresis model

In this paper, a novel Takagi-Sugeno (T-S) fuzzy system based model is proposed for hysteresis in piezoelectric actuators. The antecedent and consequent structures of the fuzzy hysteresis model (FHM) can be, respectively, identified on-line through uniform partition approach and recursive least squares (RLS) algorithm. With respect to controller design, the inverse of FHM is used to develop a feedforward controller to cancel out the hysteresis effect. Then a hybrid controller is designed for high-performance tracking. It combines the feedforward controller with a proportional integral differential (PID) controller favourable for stabilization and disturbance compensation. To achieve nanometer-scale tracking precision, the enhanced adaptive hybrid controller is further developed. It uses real-time input and output data to update FHM, thus changing the feedforward controller to suit the on-site hysteresis character of the piezoelectric actuator. Finally, as to 3 cases of 50 Hz sinusoidal, multiple frequency sinusoidal and 50 Hz triangular trajectories tracking, experimental results demonstrate the efficiency of the proposed controllers. Especially, being only 0.35% of the maximum desired displacement, the maximum error of 50 Hz sinusoidal tracking is greatly reduced to 5.8 nm, which clearly shows the ultra-precise nanometer-scale tracking performance of the developed adaptive hybrid controller.     

压电执行器动态迟滞建模与LQG最优控制器设计

为提高空间天文望远镜稳像系统中压电快摆镜(Fast Steering Mirror,FSM)的动态性能,对压电执行器(Piezoelectric Actuator,PZT)动态迟滞补偿和控制进行研究。鉴于基于广义Play算子Prandtl-Ishlinskii(PI)模型的求逆复杂性和迟滞曲线的非对称性,构造一种基于广义Stop算子PI逆模型来补偿压电执行器迟滞非线性。采用Hammerstein模型对压电执行器动态迟滞特性进行建模,以广义PI模型和自回归遍历模型(Auto-regressive Exogenous Model,ARX)分别表征Hammerstein迟滞模型中的静态非线性和率相关性,并针对迟滞率相关模型不确定性问题,提出一种前馈补偿和线性二次型Gauss最优控制算法(Linear Quadratic Gaussian,LQG)相结合的复合控制策略。利用自适应差分进化算法(Adaptive Differential Evolution algorithm,ADE)辨识和整定模型及控制器参数。实验结果表明:该动态迟滞模型能够有效描述1～100Hz频率范围内压电执行器迟滞曲线,拟合均方根误差为0.077 1μm(@1 Hz)～0.512 3μm(@100Hz),相对误差为0.31%(@1Hz)～2.09%(@100Hz);实时跟踪幅值为24.5μm的变频目标位移,LQG控制算法的跟踪精度相比于直接前馈控制和PID控制分别提高48.6%和27.02%。     

基于改进PI模型的压电陶瓷迟滞特性补偿控制

压电陶瓷执行器的迟滞特性会降低星间激光通信精瞄系统的定位精度,对信标光的捕获以及链路的稳定性造成影响。针对这一问题,通过分析压电陶瓷执行器迟滞特性产生机理,提出一种基于PLAY迟滞算子的改进(Prandtl-Ishlinskii,PI)数学模型及其辨识方法,并利用该模型对压电陶瓷执行器迟滞特性进行前馈线性化逆补偿。并通过实验来验证数学模型和线性化的有效性,实验结果表明,通过对系统输入不同频率下等幅和减幅正弦控制信号来验证前馈逆补偿性能时,改进的模型最大拟合误差均在1%之内,通过前馈模型逆补偿的控制方法可使压电陶瓷驱动的线性度误差由5%减小到1%以内,并且改进PI模型在计算复杂度上由O(n)简化为O(1)。     

Non-linear compensation and displacement control of the bias-rate-dependent hysteresis of a magnetostrictive actuator

Magnetostrictive actuators invariably exhibit bias-rate-dependent hysteresis, which could cause vibration and error in the micro-positioning control. We present a methodology for linearization control for the hysteresis of a magnetostrictive actuator with a wide range of input rates and biases. The hysteresis compensation is attained through application of a dynamic Bouc-Wen model and experimental measured hysteresis properties of the magnetostrictive actuator under inputs with different frequencies and biases. The effectiveness of the compensator for hysteresis is demonstrated through experimental results of the magnetostrictive actuator under inputs at different frequencies and bias levels. Based on the proposed compensator, a displacement PID controller is applied to force the output displacement of the magnetostrictive actuator to track the desired displacement accurately thereafter. The maximum absolute tracking errors is 0.052 μm. Compared to the control results without the compensator, the compensator can reduce the control error by about 85%. The results indicate that this study provides an effective method which can compensate the hysteresis of the magnetostrictive actuator under different frequencies and biases of inputs.     

Real-time inverse hysteresis compensation of piezoelectric actuators with a modified Prandtl-Ishlinskii model

This paper presents a novel real-time inverse hysteresis compensation method for piezoelectric actuators exhibiting asymmetric hysteresis effect. The proposed method directly utilizes a modified Prandtl-Ishlinskii hysteresis model to characterize the inverse hysteresis effect of piezoelectric actuators. The hysteresis model is then cascaded in the feedforward path for hysteresis cancellation. It avoids the complex and difficult mathematical procedure for constructing an inversion of the hysteresis model. For the purpose of validation, an experimental platform is established. To identify the model parameters, an adaptive particle swarm optimization algorithm is adopted. Based on the identified model parameters, a real-time feedforward controller is implemented for fast hysteresis compensation. Finally, tests are conducted with various kinds of trajectories. The experimental results show that the tracking errors caused by the hysteresis effect are reduced by about 90%, which clearly demonstrates the effectiveness of the proposed inverse compensation method with the modified Prandtl-Ishlinskii model.     

压电驱动器记忆特性迟滞非线性建模

考虑压电驱动器固有的迟滞特性对驱动器定位精度的影响,提出了一种精确描述压电驱动器迟滞非线性特性的建模方法.根据迟滞曲线的运动规律,并且考虑迟滞曲线的记忆更新特性,新的迟滞数学模型修正了单纯采用抛物线拟合时的建模误差.为了验证模型的有效性,以PST150/7/40VS12型压电陶瓷驱动器为例进行了试验研究.研究显示,采用抛物线迟滞模型对一阶反转输入信号进行预测时,最大误差为0.141 3 μm,均方误差为0.060 4 μm,对复杂信号模型预测的最大误差为1.396 0 μm,均方误差为0.856 6 μm;采用修正后的模型对文中复杂信号建模时,最大误差为0.237 0 μm,均方误差为0.09 μm.实验结果表明,修正后的模型不仅能够满足迟滞曲线的运动规律,还能够满足迟滞非线性的记忆更新特性,可以比较精确地描述复杂输人信号下的迟滞非线性特性.     

RESEARCH ON THE DYNAMIC PROPERTY OF PIEZOELECTRIC MICRO DISPLACEMENT ACTUATOR FOR BORING ERROR COMPENSATION

The dynamic property of piezoelectric micro displacement actuator (PMDA) is analyzed, especially the mechanical characteristic, lag phase property and hysteresis phenomenon. The influence factors of static and dynamic mechanical characteristics and the lag phase property are analyzed systematically. Three main influence factors of lag phase property are discovered. With comparison to mechanical Coulomb friction, a generalized model of nonlinear hysteresis of PMDA is advanced, based on the essential analysis of nonlinear phenomenon. Finally the application of PMDA in error compensation control system of boring is introduced. A good compensation result is achieved.     

Controller design for high-frequency cutting using a piezo-driven microstage

Controller design consists of a feedforward and a feedback controller to support a microstage with flexure hinge structure driven by piezoelectric ceramic actuator for high-frequency nanoscale cutting is developed in this article. The feedforward controller is designed based on a hysteresis dynamic model in order to reduce the nonlinear hysteresis effect of piezoelectric actuator. The position feedback controller is designed based upon an exponentially weighted moving average (EWMA) method embedded in an internal model control (IMC) structure constructing a run-to-run IMC (RtR-IMC) control scheme in order to deal with system bias or modeling inaccuracy. Also, disturbance due to temperature rise will influence actuator's performance, hence an additional compensator is included in the IMC structure. Surfaces dimple micro-machining utilizes piezoelectric-driven microstage for high-speed cutting is selected as an example to investigate system performance. The developed control algorithm is implemented on a DSP-based system to provide 1 kHz operating speed. In experiment, the proposed feedforward and feedback controller is verified to be able to overcome those negative factors efficiently and preserve good positioning accuracy.     

基于PZT非球面能动抛光盘的变形优化

基于PZT压电陶瓷驱动器的非球面能动抛光盘,能够在PZT驱动器的作用下改变面形,用于中小口径非球面镜加工。一个口径100mm、含19个PZT驱动器的非球面能动抛光磨盘已经试制完毕,用于一个口径350mm、k＝－1.112155、顶点半径R=840mm双曲面镜的加工实验。为研究PZT压电陶瓷驱动器迟滞效应对非球面能动抛光盘输出面形的影响,实测各PZT压电陶瓷驱动器的电压位移特性曲线,用基于径向基函数的神经网络算法建立各PZT压电陶瓷驱动器位移输出特性的数学模型并实施补偿,实测各PZT压电陶瓷驱动器迟滞补偿前后的位移输出值。最后利用有限元分析方法,得到迟滞补偿前后非球面能动抛光盘的输出面形,以及剩余残差RMS相应分别为1.910um、0.342um。通过补偿各PZT压电陶瓷驱动器的迟滞效应,非球面能动抛光盘输出面形精度得到了提高,剩余残差RMS减少了82%。     

压电陶瓷驱动微位移机构迟滞非线性改善方法研究

压电陶瓷驱动器在精密微位移系统中有着广泛的应用,但其固有的迟滞非线性严重影响系统的运动精度,使控制困难.通过数学建模方法建立压电陶瓷的迟滞曲线逆模型,并用此模型对压电陶瓷进行位移补偿,可以有效减小压电陶瓷迟滞非线性对系统精确控制的影响.提出一种用两个压电陶瓷协同驱动微动平台运动的微位移机构,通过基于迟滞逆模型的开环控制方法,对压电陶瓷位移进行误差补偿,可以实现微动平台运动与控制信号较好的线性对应关系.     

叠堆式压电陶瓷驱动器的复合控制

提出了逆Bouc-Wen前馈控制与反馈控制相结合的复合控制算法,用于改善压电陶瓷驱动器对目标轨迹的跟踪性能。建立了压电陶瓷驱动器的Bouc-Wen迟滞动力学模型,并用粒子群算法(PSO)对该模型的参数进行识别。基于Bouc-Wen迟滞模型,提出了逆Bouc-Wen前馈补偿控制。最后,为消除迟滞模型的不确定性,引入比例积分(PI)反馈控制,并与前馈补偿控制构成复合控制算法。建立了基于dSPACE实时系统的压电陶瓷驱动实验平台,迟滞实验结果表明:压电陶瓷的迟滞误差量几乎为0,线性度高达96.5%;目标轨迹跟踪实验结果表明:复合控制算法的最大跟踪误差为0.180 5μm,均方根(RMS-Root mean square)跟踪误差为0.055 4μm,跟踪精度达到了10-8 m。相比于开环控制、前馈控制及PI反馈控制,提出的复合控制算法能够基本消除压电陶瓷的迟滞非线性,同时具有很好的轨迹跟踪性能。     

微机电系统压电振动台迟滞补偿方法研究

微机电系统（MEMS）压电振动台作为加速度传感器现场标定平台的新秀,能够提供片上物理驱动环境,为加速度传感器的快速重新标定提供持续稳定的加速度信号,然而用于压电振动台驱动的压电材料具有明显的迟滞特性,严重影响平台振动信号的稳定性和连续性。基于上述振动台振动特性,建立基于多项式拟合的压电迟滞模型,采用前馈控制和反馈控制相结合的复合控制方法对压电振动台进行控制和加速度滞后补偿。实验结果表明,在10 V（317 Hz）正弦电压激励下,MEMS压电振动台提供的简谐振动信号的加速度最大误差从1.3g降到了0.05g。     

压电陶瓷微位移器件控制模型的研究

从不同角度介绍了压电陶瓷微位移器件的两种控制模型.首先,借助于统计物理学分析,结合数学建模方法,建立了一个简单实用的压电陶瓷的迟滞数学模型.其次,借助于弹性体变形理论,介绍了压电/电致伸缩陶瓷的归一化控制模型,从理论上说明了采用电极化强度的方法可以有效减小迟滞的观点.并设计了两种实验系统,对两种控制模型进行了实验验证,实验结果表明,所建立的两种模型可有效减小压电陶瓷的迟滞非线性误差,提高压电陶瓷微位移的控制精度,有助于实现压电陶瓷驱动器的高精度开环微位移控制.     

压电陶瓷微动台的复合控制

压电陶瓷微动台的迟滞非线性严重影响其动态定位精度,为了解决这一问题,采用一种改进的PI模型对微动台的迟滞非线性进行了建模.为了提高传统PID算法对压电陶瓷微动台的动态定位性能,将改进的PI模型与传统PID算法组合构成前馈复合控制算法,并进行了微动台的慢速与快速动态定位实验.结果表明,对同频曲线定位时,前馈PID复合算法的最大误差为传统PID算法的40％左右,平均误差为传统算法的20％～30％左右;对多频曲线定位时,前馈PID复合算法的最大误差和平均误差为传统PID算法的33％左右.数据表明前馈PID复合算法的动态定位性能明显优于传统PID算法.     

FPGA-based adaptive backstepping fuzzy control for a micro-positioning Scott-Russell mechanism

This paper utilizes the field programmable gate array (FPGA) and Nios II embedded processor technologies to design a controller IC for a micro-positioning Scott-Russell (SR) mechanism, which is driven by a piezoelectric actuator (PA) and its hysteresis phenomenon is described by Bouc-Wen hysteresis model. For the controller design, the adaptive backstepping fuzzy control (ABFC) method is developed to compensate the PA's hysteresis and achieve the motion tracking control. The fuzzy logic method (FLM) is utilized to find the best adaptation gain of the adaptation law and control gain of the stabilization controls. This ABFC controller method can improve the transient and asymptotic tracking performances, and make the SR mechanism keep good working performance when external disturbances is added in the control system. Finally, we successfully apply the system-on-a-programmable-chip (SoPC) technologies to develop the motion controller IC, and achieve the advantages of reduced space, high performance and low cost.     

基于ILC的压电微位移驱动器电源线性化研究

压电微位移驱动器是一种利用压电材料逆压电效应制作的微位移器 ,具有体积小 ,分辨率高 ,重复性好 ,不产生热等优点 ,然而压电驱动器也具有滞回、蠕变、严重的非线性等不良特性 ,给驱动器精确定位带来误差 ,使驱动器电压位移转换信号失真。为使压电驱动器输入输出具有线性度 ,常用的方法是对驱动电源进行电压补偿来实现线性化。这里提出一种实用新颖的电源线性化方法—基于迭代自学习控制 (IL C)策略的线性化方法 ,该法具有在线、快速的优点 ,且可实现动态线性化补偿     

具有迟滞和蠕变特性压电作动器的模糊自适应逆控制方法

针对具有迟滞和蠕变特性的压电作动器非线性模型,提出了一种前馈控制和反馈控制相结合的自适应模糊逆控制方案。在前馈控制器中压电作动器的迟滞和蠕变非线性特性的逆模型由自适应模糊逻辑系统近似;在反馈控制器中比例控制器用来调节压电作动器的输出误差。该方法可以实时补偿压电作动器的迟滞和蠕变特性,减少作动器跟踪误差。仿真计算结果表明了该方法的有效性。