Micro/nanosized refractive lens arrays formed by means of conformal thin film deposition

We provide a 'growing' method for fabricating a microlens array with lateral size of a few microns or less. Instead of using complicated etching techniques, the method forms a spherical profile of the lens using conformal chemical vapor deposition. We have fabricated two lens arrays. One has a pitch of 1200?nm, a circular aperture 1000?nm in diameter and a sag height of 130?nm. The other array has a pitch of 600?nm, and a square aperture of 600?nm × 600?nm, with a fill factor close to 100%. The maximum profile deviation between the fabricated lens and an ideal sphere is about 11% and 14% respectively. The calculation indicates that the curvature difference of the profile of the square lens in the orthogonal and diagonal direction is 5.5%. The roughness of the lens is measured as approximately 6?nm.     

正方形连续变电位四极透镜在宽带示波管中的应用

正方形连续变电位边界可以产生理想四极场。本文介绍了利用这种四极场构成的透镜在宽带示波管中的应用进展。透镜由真空蒸镀高阻膜制成,实验中它分别取代了示波管中金属电极四极透镜和栅网,进行单方向和X、Y两个方向的偏转放大,前者获得了较好的图形质量,而后者得到了较大的放大率。文中对尚存的热功耗问题进行了讨论。     

Fabrication of large-aperture lightweight diffractive lenses for use in space

We describe the advantages of using diffractive (Fresnel) lenses on thin membranes over conventional optics for, among others, future space telescope projects. Fabrication methods are presented for lenses on two types of freestanding membrane up to 50 cm in size. The first is a Fresnel lens etched into a thin (380-mum) glass sheet, and the second is an ~50-mum-thick polymer membrane containing a Fresnel lens made by replication process from a specially made fused-silica master. We show optical performance analysis of all the lenses that are fabricated, including a diffraction-limited Airy spot from a 20-m- focal-length membrane lens in a diffractive telescope system.     

Gradient-index rod lens with high N.A

new gradient-index lens with high numerical aperture has been fabricated by a new ion-exchange technique. In this treatment, a glass rod doped with a highly polarizable ion (dopant A) is immersed into KNO3 salt doped with a medium polarizability ion (dopant B). Dopant B penetrates into the rod and modifies the refractive-index profile of the lens. This new lens has 0.6 N.A. and gives a 1.18-micron spot diam in the light-focusing system. This lens gives good results also in a light source coupling system and is useful in microoptic devices.     

Experimental study on polarization lens formed by asymmetrical metallic hole array

A polarization bifocal lens based on the polarization effect caused by asymmetrical hole arrays had been designed, fabricated, and characterized experimentally. By considering the fact that the skin depth of an infrared electromagnetic field inside metal is much shorter than the incident wavelength, a polarization bifocal lens composed of high deep-width ratio metallic holes was realized by using a gold-coated silicon structure to replace the one directly formed on a thick metal film. An infrared optical experiment setup is built based on the secondary imagery method for characterizing the focal length of the designed bifocal lens. The measured focal lengths of the fabricated bifocal lens coincide well with the designed values, which proves the validity for realizing the polarization elements with the proposed structure and the feasibility of the fabrication process.     

Effective formation method for an aspherical microlens array based on an aperiodic moving mask during exposure

An aperiodic mask design method for fabricating a microlens array with an aspherical profile is proposed. The nonlinear relationship between exposure doses and lens profile is considered, and the select criteria of quantization interval and fabrication range of the method are given. The mask function of a quadrangle microlens array with a hyperboloid profile used in the infrared was constructed by using this method. The microlens array can be effectively fabricated during a one time exposure process using the mask. Reactive ion etching was carried out to transfer the structure into the substrate of germanium. The measurement results indicate that the roughness is less than 10 nm (pv), and the profile error is less than 40 nm (rms).     

Field conjugate acoustic lenses for ultrasound hyperthermia

Multipoint foci have been synthesized by applying the pseudoinverse field conjugation method to a single ultrasonic transducer coupled to a polystyrene lens. The lens design is based on phased array calculations are then fabricated on a computer-controlled milling machine. The measured beam patterns from the lenses agree closely with the beam patterns predicted by theory for the equivalent phased arrays. Temperature distributions from thermal modeling and those measured in tissue equivalent phantoms show that the lens system is capable of generating strongly localized, controlled temperature fields for hyperthermia.     

Analysis and fabrication of minifeature lamp lens by excimer laser micromachining

A variety of shapes of lamp lenses at the feature millimeter scale have been extensively used in lamp design. To further improve the light efficiency and to reduce the overall dimension of lamps, the lamp lens at the micrometer scale is fabricated by excimer laser cross scanning on a polycarbonate sheet. To verify the proposed method, the influence of an optical system with various shapes and sizes of lamp lenses on the light efficiency is explored in advance by ASAP optical software. The lens with a miniature feature can produce a smaller divergence angle than that with a large-size lens feature. The experiment is carried out at varying laser operating parameters, mask shape, and dimensions. The simulation shows that the desired lamp lens profile can be effectively produced by excimer laser micromachining.     

Development of a two-dimensional phase-grating mask for fabrication of an analog-resist profile

Fabrication of a thick analog profile with photoresist is a difficult task in photolithography. We demonstrate that a binary phase-grating photomask with an appropriate period and duty cycles is capable of manipulating the exposure illumination in an analog fashion and can be used for fabrication of the desired analog micro-optics profiles on the surface of a thick photoresist. By choosing the proper period and variation of duty cycle of the phase-grating mask, one can create the desired analog intensity of exposure illumination for an optical stepper. This allows the formation of a wide range of analog micro-optics profiles with an SPR 220-7 photoresist. The numerical convolution of the diffraction efficiency curve and resist exposure characteristics is used to predict the final resist profile and also to design the appropriate duty-cycle distribution for the binary phase grating. As a demonstration of this technology, we fabricated a variety of micro-optical elements, such as a positive lens, ring lens, prism, and vortex of approximately 100-200 microm diameter, by using a phase-grating mask fabricated in a poly(methyl methacrylate) electron-beam resist.     

The Groove Profile Formation of Holographic Gratings

Models for predicting the groove profile of metal coated holographic gratings, fabricated in positive photoresist, are studied. Development is assumed to be an etching process, where the etching is directed perpendicularly to the resist-developer interface. Two methods for metal coating are considered; vacuum evaporation and sputtering, and models that describe the profile formation for these cases are presented. It is noted that even a thin coating has a considerable effect on the profile. The theoretical groove profiles are found to be in good agreement with experimental profiles, obtained from SEM photographs of fabricated gratings.     

Characterization of the small molecule based organic thin film fabricated by electrospray deposition technique

A novel route for the fabrication of the SM based 2,9-dimethyl-4,7-diphenyl-1,10-phenanthroline (BCP) organic thin film by electrospray deposition (ESD) technique has been presented in this paper. The tailoring of the film thickness was also performed by varying the number of deposition passes at a constant substrate speed. The structural and optical characterizations of the fabricated BCP thin film were thoroughly investigated. The energy gap of the fabricated thin film was measured to be 3.5 eV. Furthermore, the electrical performance of the BCP thin film was verified by performing current–voltage measurement of the prototype organic diode device having fabricated BCP film as a buffer layer. The current density–voltage characteristic curve of the organic device showed non linear diode like behavior, thereby confirming the proper interference established between organic diode adjacent layers. At low voltage, the device showed ohmic conduction, where as the space charged limited current and trap charge limited current mechanism have been found to be dominant in the fabricated organic device at higher voltage. Overall, the results suggest that the ESD approach will be promising for organic semiconductor device fabrication at low cost and with low material loss.     

Large-area ultrasonic gap profile measurements usingtwo-dimensional PVDF “blanket array” transducers

A technique is described for utilizing two-dimensional ultrasonic transducer arrays to accurately measure the spacing (i.e., the gap profile) between large-area mating surfaces. The acoustic measurement theory for pulse-echo and pitch-catch gap profile measurements is derived from a generalized KLM model representation of ultrasonic transducers located within the gap between two mating structures. Expressions for the ultrasonically measured gap spacing are derived in terms of the thicknesses and longitudinal acoustic velocities of the constituent layers of the transducer element(s), adhesive layers(s), and gap medium. Extremely thin PVDF two-dimensional arrays were fabricated and adhered to the inside of a precision gap profile device for demonstrating the measurement technique. Two-dimensional gap profile measurements were made to ±0.001" accuracy for a variety of gap profiles in the range of 0-0.200" thickness. Gap profile measurements were made with both liquid and air as the gap medium and the results show potential for measuring otherwise inaccessible gap profiles between structures     

Ultrasmall microlens array based on vertically aligned carbon nanofibers

An ultrasmall tunable microlens with a diameter of 1.5 μm is fabricated using nematic liquid crystals (electrically tunable medium) and vertically aligned carbon nanofibers (CNFs, electrodes). Individual CNFs are grown at the center of circular dielectric regions. This allows the CNFs to produce a more Gaussian electric field profile and hence more uniformity in lens array switching.     

Disordered antireflective subwavelength structures using Ag nanoparticles for GaN-based optical device applications

This study reports disordered antireflective subwavelength structures (SWS) on GaN and indium tin oxide (ITO) surfaces fabricated using thermally dewetted Ag nanoparticles. It is shown that the average diameter of Ag nanoparticles, which determines the optical characteristics, can be simply controlled by changing the thickness of the Ag thin film and the annealing temperature. The fabricated GaN and ITO SWS with tapered profile exhibited very low reflectance compared to that of a flat surface over a wide wavelength range.     

Midwave infrared optical zooming design and kinoform degrading evaluation methods

In this study, an optical zooming design method is constructed by ray tracing. The loci of each thin lens is determined utilizing algebraic relationships. A mechanical compensation structure is adapted to stabilize the position of the focal plane. The Gaussian design result is applied for the midwave infrared spectrum, and aberrations can be reduced by controlling the geometric parameters of the thick lens. One hybrid achromatic singlet is introduced utilizing a diffraction optical element. The kinoform surface relief is calculated being the same as its microfabrication process. The effects of the discontinuous zonal profile and the thermal degradation are evaluated.     

Hybrid Si nanowire/amorphous silicon FETs for large-area image sensor arrays

Silicon nanowire (SiNW) field-effect transistors (FETs) were fabricated from nanowire mats mechanically transferred from a donor growth wafer. Top- and bottom-gate FET structures were fabricated using a doped a-Si:H thin film as the source/drain (s/d) contact. With a graded doping profile for the a-Si:H s/d contacts, the off-current for the hybrid nanowire/thin-film devices was found to decrease by 3 orders of magnitude. Devices with the graded contacts had on/off ratios of ～10(5), field-effect mobility of ～50 cm(2)/(V s), and subthreshold swing of 2.5 V/decade. A 2 in. diagonal 160 × 180 pixel image sensor array was fabricated by integrating the SiNW backplane with an a-Si:H p-i-n photodiode.     

Optimization of diffraction grating profiles in fabrication by electron-beam lithography

We propose a new design method for periodic diffraction gratings to be fabricated with direct-writing electron-beam lithography. When the grating has a small period, the proximity effect of electron scattering restricts the grating profile after developing. Our design method optimizes the electron-dose profile and grating profile simultaneously to obtain the desired diffraction efficiency under the restriction of the proximity effect. The optimization is made with rigorous electromagnetic grating analysis and the resist development simulator. When we designed the diffraction grating with a period of 1.0 microm to obtain the highest efficiency of the first-order diffracted light of a 633-nm wavelength, the calculated grating profile was really different from the profile optimized only with rigorous electromagnetic grating analysis. Moreover, the diffraction grating of the electron-beam resist was fabricated according to the simulation result. The estimated diffraction efficiency was 82%, and the measured efficiency was 70%.     

A far-field-viewing sensor for making analytical measurements in remote locations.

We demonstrate a far-field-viewing GRINscope sensor for making analytical measurements in remote locations. The GRINscope was fabricated by permanently affixing a micro-Gradient index (GRIN) lens on the distal face of a 350-micron-diameter optical imaging fiber. The GRINscope can obtain both chemical and visual information. In one application, a thin, pH-sensitive polymer layer was immobilized on the distal end of the GRINscope. The ability of the GRINscope to visually image its far-field surroundings and concurrently detect pH changes in a flowing stream was demonstrated. In a different application, the GRINscope was used to image pH- and O2-sensitive particles on a remote substrate and simultaneously measure their fluorescence intensity in response to pH or pO2 changes.     

Diffractive optical element used in an external feedback configuration to tune the wavelength of uncoated Fabry-Pérot diode lasers

Abstract

A diffractive optical element (DOE) has been designed, fabricated and used in an external feedback configuration to set the wavelength of operation of uncoated Fabry-Pérot diode lasers. The DOE was designed to replace the conventional elements of an external feedback system, which are a collimating lens and grating in the Littrow configuration. The goal was to simplify use of the external cavity laser by replacing the lens and grating with a single optical element while maintaining the performance that is achieved with a grating and lens. Four DOEs were fabricated with two different focal lengths and two different reflectivities. DOE external cavity lasers were tested for maximum tunable range and stability of the wavelength of operation and compared with an external cavity laser based on a lens and grating in the Littrow configuration. A 40 nm tuning range was achieved with the DOE external cavity laser and this is comparable with the tuning range of the external cavity lasers based on a grating and collimating lens in the Littrow configuration.