Selective cell spreading, proliferation, and orientation on micropatterned gel surfaces

Hydrogel micropatterns of 10 approximately 200 microm in width were introduced during the polymerization of 2-acrylamido-2-methyl-propane sulfonic acid sodium salt (NaAMPS) on the surface of polyacrylamide (PAAm) gel. Behaviors of endothelial cells on the micropatterned PNaAMPS/PAAm gel surfaces were studied. Cells selectively proliferate on micropatterned PNaAMPS surface but not on PAAm surface, which requires no modification with any cell adhesive proteins or peptides. We found that decrease of the width of the micropatterns could increase the degree of anisotropic spreading of cells and the degree of cell orientation. These results demonstrated that the topographical micropatterns of hydrogel could control cell behaviors.     

Ultralong aligned multi-walled carbon nanotube for electrochemical sensing

We have investigated electrochemical sensing properties of electrodes fabricated with ultralong aligned multi-walled carbon nanotube (MWNT) bundles synthesized using water-assisted chemical vapor deposition on aluminum (Al) and iron (Fe) coated silicon wafer with ethylene and argon/hydrogen gas as carbon source and buffer gas respectively. Cyclic voltammograms performed on these electrodes show diffusion-controlled-reversible reaction. The dominance of radial diffusion mass transport at these electrodes was also indicated by sigmoidal-shaped voltammograms obtained at various scan rates. These electrodes were able to sense very low concentration of ascorbic acid (approximately 0.7 microM) and dopamine (approximately 1.87 microM), two model species often used in electro-analysis. The excellent electrochemical properties along with good single species detection ability suggest that these MWNTs are promising electrode materials for developing very sensitive chemical and/or biological sensors.     

Temperature-programmed GC using silicon microfabricated columns with integrated heaters and temperature sensors

Columns were fabricated in silicon substrates by deep reactive-ion etching. The channels were sealed with a glass wafer anodically bonded to the silicon surface. Heaters and temperature sensors were fabricated on the back side of each column chip. A microcontroller-based temperature controller was used with a PC for temperature programming. Temperature programming, with channel lengths of 3.0 and 0.25 m, is described. The 3.0-m-long channel was fabricated on a 3.2 cmx3.2 cm chip. Four columns were fabricated on a standard 4-in. silicon wafer. The 0.25-m-long channel was fabricated on a 1.1 cmx1.1 cm chip, and approximately 40 columns could be fabricated on a 4-in. wafer. All columns were coated with a nonpolar poly(dimethylsiloxanes) stationary phase. A static coating procedure was employed. The 3.0-m-long column generated about 12000 theoretical plates, and the 0.25-m-long channel generated about 1000 plates at optimal carrier gas velocity. Linear temperature ramps as high as 1000 degrees C/min when temperature programmed from 30 to 200 degrees C were obtained with the shorter column. With the 0.25-m-long column, normal alkanes from n-C5 through n-C15 were eluted in less than 12 s using a temperature ramp rate of 1000 degrees C/min. Temperature uniformity over the column chip surface was measured with infrared imaging. A variation of about 2 degrees C was obtained for the 3.0-m-long channel. Retention time reproducibility with temperature programming typically ranged from +/-0.15% to +/-1.5%. Design of the columns and the temperature controller are discussed. Performance data are presented for the different columns lengths.     

An independent, temperature-controllable microelectrode array

Rapid, localized temperature control and negligible power consumption are key requisites for realizing effective parallel and sequential processing in the miniaturized, integrated biomedical microdevices where temperature-dependent biochemical reactions and fluid flow occur. In this study, an independent, temperature-controllable microelectrode array, with excellent temperature control rates and minimal power consumption, has been developed using microelectromechanical systems technology. The microfabricated array consists of Pt microelectrodes (100-microm diameter), with n-doped polysilicon microheaters (1.4-k Omega resistance), and vacuum-sealed cavities of depth 6.2 microm and diameter 200 microm. The thermal characteristics of each microelectrode were evaluated electrochemically through surface temperature measurements. The large heater power coefficient (2.1 +/- 0.1 degrees C mW(-1)) and the short heating and cooling times (less than 0.2 s for T(0.95)) are consequences of the vacuum-sealed cavities, which facilitate good thermal isolation and low thermal mass. The temperature of each microelectrode is independently controlled by a dedicated microheater, without thermally influencing the adjacent microelectrodes significantly.     

Enhanced TOF-SIMS imaging of a micropatterned protein by stable isotope protein labeling

Patterning of biomolecules on surfaces is an increasingly important technological goal. Because the fabrication of biomolecule arrays often involves stepwise, spatially resolved derivatization of surfaces, spectroscopic imaging of these arrays is important in their fabrication and optimization. Although imaging time-of-flight secondary ion mass spectrometry (TOF-SIMS) is a powerful method for spatially resolved surface analysis, TOF-SIMS images of micropatterned proteins on organic substrates can be difficult to acquire, because of the lack of high intensity, protein-specific molecular ions that are essential for imaging under static conditions. In contrast, low-mass ions are of suitable intensity for imaging, but can originate from different chemical species on the surface. A potential solution to this problem is to utilize stable isotope labeled proteins, an approach that has heretofore not been explored in TOF-SIMS imaging of micropatterned proteins and peptides. To investigate the feasibility of stable isotope enhanced TOF-SIMS imaging of proteins, we synthesized 15N-labeled streptavidin by labeling of the protein during expression from a recombinant gene. The spatial distribution of streptavidin bound to biotin micropatterns, fabricated on a polymer and on a self-assembled monolayer on gold, was imaged by TOF-SIMS. Imaging of high-intensity, low-m/z secondary ions (e.g., C15N-) unique to streptavidin enabled unambiguous spatial mapping of the micropatterned protein with a lateral resolution of a few micrometers. TOF-SIMS imaging of micropatterned 15N-labeled streptavidin also illustrated the exquisite sensitivity of TOF-SIMS to low fractional coverage of protein (5 A effective thickness) in the background regions of the protein micropattern.     

Modulation of Lumen Formation by Microgeometrical Bioactive Cues and Migration Mode of Actin Machinery

How endothelial cells (ECs) express the particular filopodial or lamellipodial form of the actin machinery is critical to understanding EC functions such as angiogenesis and sprouting. It is not known how these mechanisms coordinately promote lumen formation of ECs. Here, adhesion molecules (RGD peptides) and inductor molecules (BMP‐2 mimetic peptides) are micropatterned onto polymer surfaces by a photolithographic technique to induce filopodial and lamellipodial migration modes. Firstly, the effects of peptide microgeometrical distribution on EC adhesion, orientation and morphogenesis are evaluated. Large micropatterns (100 μm) promote EC orientation without lumen formation, whereas small micropatterns (10–50 μm) elicit a collective cell organization and induce EC lumen formation, in the case of RGD peptides. Secondly, the correlation between EC actin machinery expression and EC self‐assembly into lumen formation is addressed. Only the filopodial migration mode (mimicked by RGD) but not lamellipodial migration mode (mimicked by BMP‐2) promotes EC lumen formation. This work gives a new concept for the design of biomaterials for tissue engineering and may provide new insight for angiogenesis inhibition on tumors.     

Fabrication and characterization of probes for combined scanning electrochemical/optical microscopy experiments

A technique that combines scanning electrochemical microscopy (SECM) and optical microscopy (OM) was implemented with a new probe tip. The tip for scanning electrochemicaVoptical microscopy (SECM/OM) was constructed by insulating a typical gold-coated near-field scanning optical microscopy tip using electrophoretic anodic paint. Once fabricated, the tip was characterized by steady-state cyclic voltammetry, as well as optical and electrochemical approach experiments. This tip generated a stable steady-state current and well-defined SECM approach curves for both conductive and insulating substrates. Durable tips whose geometry was a ring with < 1 microm as outer ring radius could be consistently fabricated. Simultaneous electrochemical and optical images of an interdigitated array electrode were obtained with a resolution on the micrometer scale, demonstrating good performance of the tip as both an optical and an electrochemical probe for imaging microstructures. The SECM feedback current measurements were successfully employed to determine tip-substrate distances for imaging.     

A monolithic CMOS microhotplate-based gas sensor system

A monolithic CMOS microhotplate-based conductance-type gas sensor system is described. A bulk micromachining technique is used to create suspended microhotplate structures that serve as sensing film platforms. The thermal properties of the microhotplates include a 1-ms thermal time constant and a 10/spl deg/C/mW thermal efficiency. The polysilicon used for the microhotplate heater exhibits a temperature coefficient of resistance of 1.067/spl times/10/sup -3///spl deg/C. Tin(IV) oxide and titanium(IV) oxide (SnO/sub 2/,TiO/sub 2/) sensing films are grown over postpatterned gold sensing electrodes on the microhotplate using low-pressure chemical vapor deposition (LPCVD). An array of microhotplate gas sensors with different sensing film properties is fabricated by using a different temperature for each microhotplate during the LPCVD film growth process. Interface circuits are designed and implemented monolithically with the array of microhotplate gas sensors. Bipolar transistors are found to be a good choice for the heater drivers, and MOSFET switches are suitable for addressing the sensing films. An on-chip operational amplifier improves the signal-to-noise ratio and produces a robust output signal. Isothermal responses demonstrate the ability of the sensors to detect different gas molecules over a wide range of concentrations including detection below 100 nanomoles/mole.     

基于Na3Zr2Si2PO12固体电解质的非平衡态SO2传感器

基于Na₃Zr₂Si₂PO₁₂(NASICON)固体电解质, 分别以Na₂SO₄-BaSO₄混合盐和NaRe(SO₄)₂复盐为敏感电极材料制备了片式SO₂非平衡态气体传感器。结果表明, 该类型传感器的输出电动势与SO₂气体浓度的对数呈良好的线性关系, 在低温260℃具有最佳性能, 灵敏度分别达到了160 mV/decade和136 mV/decade。传感器在不同浓度的SO₂气体中的交流阻抗谱测试结果显示, 气体在敏感电极的三相界面处电化学反应的活性随着气体浓度的增大而增强, 结合敏感电极结构, 对该类敏感电极的机理进行了分析。由于NASICON具有良好的低温钠离子导电性, 可以大幅降低传感器的工作温度; 由于Na₂SO₄-BaSO₄混合盐和NaRe(SO₄)₂敏感材料具有更好的化学稳定性, 制备的传感器具有良好的可重复性和稳定性。基于非平衡态设计的传感器, 具有结构简单和成本低的优点。以上特性为该传感器在SO₂气体在环境监测方面的应用提供了可能。     

Fabricating ZnO nanorods sensor for chemical gas detection at room temperature

We present a sensor fabricated by simply casting ZnO nanorods on a microelectrodes array for chemical gas detection at room temperature. The ammonia and ethanol gas sensing characteristics were carefully investigated. The sensor exhibited high sensitivity for both ammonia and ethanol gases. The response and recover time are less than 20 seconds, respectively. Present results demonstrate the potential application of ZnO nanorods for fabricating highly sensitive gas sensors.     

Diffusion and Interaction Dynamics of Individual Membrane Protein Complexes Confined in Micropatterned Polymer‐Supported Membranes

Micropatterned polymer‐supported membranes (PSM) are established as a tool for confining the diffusion of transmembrane proteins for single molecule studies. To this end, a photochemical surface modification with hydrophobic tethers on a PEG polymer brush is implemented for capturing of lipid vesicles and subsequent fusion. Formation of contiguous membranes within micropatterns is confirmed by scanning force microscopy, fluorescence recovery after photobleaching (FRAP), and super‐resolved single‐molecule tracking and localization microscopy. Free diffusion of transmembrane proteins reconstituted into micropatterned PSM is demonstrated by FRAP and by single‐molecule tracking. By exploiting the confinement of diffusion within micropatterned PSM, the diffusion and interaction dynamics of individual transmembrane receptors are quantitatively resolved.     

Fully integrated on-chip electrochemical detection for capillary electrophoresis in a microfabricated device

Microfabricated lab-on-a-chip devices employing a fully integrated electrochemical (EC) detection system have been developed and evaluated. Both capillary electrophoresis (CE) channels and all CE/EC electrodes were incorporated directly onto glass substrates via traditional microfabrication techniques, including photolithographic patterning, wet chemical etching, DC sputtering, and thermal wafer bonding. Unlike analogous CE/EC devices previously reported, no external electrodes were required, and critical electrode characteristics, including size, shape, and placement on the microchip, were established absolutely by the photolithography process. For the model analytes dopamine and catechol, detection limits in the 4-5 microM range (approximately 200 amol injected) were obtained with the Pt EC electrodes employed here, and devices gave stable analytical performance over months of usage.     

Scanning electrochemical microscopy. 41. Theory and characterization of ring electrodes

Ring ultramicroelectrodes, which are of particular interest as probes for scanning electrochemical microscopy (SECM), combined with near-field scanning optical microscopy, were investigated. Theoretical SECM tip current-distance (approach) curves for a ring electrode were calculated by numerical (finite element) analysis. The SECM curves obtained were a function of the geometry of the tips including the thickness of the ring and the insulating sheath. Theoretical approach curves over conductive substrates showed a strong dependence on the ratio of inner to outer radii of ring microelectrodes (a/b) and were relatively insensitive to the thickness of the insulating sheath (r(g)). For insulating substrates, however, the approach curves varied significantly with r(g), but much less with the a/b ratio. Comparison of experimental and theoretical SECM curves provided a good method of evaluating the size and shape of ring electrodes. Good agreement of the experimental and theoretical curves was found with a ring microelectrode with a nominal 200-nm ring thickness, yielding values of 1.7, 1.9, and 5.7 microm for the inner (a) and outer (b) radii of a ring and the outermost radius of insulating sheath (r(g)), respectively.     

Highly Stretchable,Adaptable, and Durable Strain Sensing Based on a Bioinspired Dynamically Cross‐Linked Graphene/Polymer Composite

Flexible strain sensors can detect physical signals (e.g., temperature, humidity, and flow) by sensing electrical deviation under dynamic deformation, and they have been used in diverse fields such as human motion detection, medical care, speech recognition, and robotics. Existing sensing materials have relatively low adaptability and durability and are not stretchable and flexible enough for complex tasks in motion detection. In this work, a highly flexible self‐healing conductive polymer composite consisting of graphene, poly(acrylic acid) and amorphous calcium carbonate is prepared via a biomineralization‐inspired process. The polymer composite shows good editability and processability and can be fabricated into stretchable strain sensors of various structures (sandwich structures, fibrous structures, self‐supporting structures, etc.). The developed sensors can be attached on different types of surfaces (e.g., flat, cambered) and work well both in air and under water in detecting various biosignals, including crawling, undulatory locomotion, and human body motion.     

Nanofibrous PANI-based conductive polymers for trace gas analysis

Electrospun nanofibres have been confirmed to be very good candidates for ultra-sensitive gas sensors since they greatly improve surface area to volume ratios of coatings, which in turn affect two additional and crucial features for sensors: high sensitivity and fast response time. Electrospinning is a simple method for the deposition of long (up to several centimetres) nanofibres, aligned or non-woven, directly onto suitable transducers. Such a structured layer may have better properties than a compact film, providing faster adsorption and minimising some bulk effects (i.e. long diffusion-desorption time, analyte entrapment, etc.). Electrospun conductive polymers (CPs) have been specifically investigated for developing smart sensors whose electrical properties change upon interactions with the analytes. Polyaniline is one of the most interesting CPs for gas sensing, because of its conductive features, when doped, as well as its thermal stability and sensing performance. The sensing mechanisms are different, depending on the nature of both PANi and the targeting analytes. Thus, various blends of polyaniline and insulating host polymers have been planned, prepared, deposited and studied to optimise the properties of sensors consequent to the combination of the electrical conductivity of CP and of the physical properties of the host polymer. Host polymer carriers cause great modifications to the topology of the interacting surface (diameter and length of the fibres, roughness, porosity, presence of beads and grains, non-woven framework and branched junctions, adhesion, etc.), in addition to the different affinity to the analytes tested. However, they enable electrodes to function over a wider dynamic range of gas or vapour concentrations. The polymer features have been also characterised over a range of water vapour concentrations and temperatures.     

Dielectrophoretic batch fabrication of bundled carbon nanotube thermal sensors

We present a feasible technology for batch assembly of carbon nanotube (CNT) devices by utilizing ac electrophoretic technique to manipulate multiwalled bundles on an Si/SiO/sub 2/ substrate. Based on this technique, CNTs were successfully and repeatably manipulated between microfabricated electrodes. By using this parallel assembly process, we have investigated the possibility of batch fabricating functional CNT devices when an ac electrical field is applied to an array of microelectrodes that are electrically connected together. Preliminary experimental results showed that over 70% of CNT functional devices can be assembled successfully using our technique, which is considered to be a good yield for nanodevices manufacturing. Besides, the devices were demonstrated to potentially serve as novel thermal sensors with low power consumption (/spl sim/microwatts) with electronic circuit response of approximately 100 kHz in constant current mode operation. In this paper, we will present the fabrication process of this feasible batch manufacturable method for functional CNT-based thermal sensors, which will dramatically reduce production costs and production time of nanosensing devices and potentially enable fully automated assembly of CNT-based devices. Experimental results from the thermal sensors fabricated by this batch process will also be discussed.     

Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications

This paper explores the development of high-temperature pressure sensors based on polycrystalline and single-crystalline 3C-SiC piezoresistors and fabricated by bulk micromachining the underlying 100-mm diameter (100) silicon substrate. In one embodiment, phosphorus-doped APCVD polycrystalline 3C-SiC (poly-SiC) was used for the piezoresistors and sensor diaphragm, with LPCVD silicon nitride employed to electrically isolate the piezoresistor from the diaphragm. These piezoresistors fabricated from poly-SiC films deposited at different temperatures and doping levels were characterized, showing -2.1 as the best gauge factor and exhibited a sensitivities up to 20.9-mV/V*psi at room temperature. In a second embodiment, epitaxially-grown unintentionally nitrogen-doped single-crystalline 3C-SiC piezoresistors were fabricated on silicon diaphragms, with thermally grown silicon dioxide employed for the piezoresistor electrical isolation from the diaphragm. The associated 3C-SiC/SiO/sub 2//Si substrate was fabricated by bonding a (100) silicon wafer carrying the 3C-SiC onto a silicon wafer with thermal oxide covering its surface. The 3C-SiC handle wafer was then etched away in KOH. The diaphragm was fabricated by time etching the silicon substrate. The sensors were tested at temperatures up to 400/spl deg/C and exhibited a sensitivity of 177.6-mV/V*psi at room temperature and 63.1-mV/V*psi at 400/spl deg/C. The estimated longitudinal gauge factor of 3C-SiC piezoresistors along the [100] direction was estimated at about -18 at room temperature and -7 at 400/spl deg/C.     

大面积高深宽比微结构硅片的热氧化实验研究

利用大面积硅片制作X射线光栅和硅基微通道板等都涉及硅的热氧化工艺。热氧化使具有高深宽比微结构的大面积硅片产生形变,严重影响了这些器件的应用。本文以5英寸硅片为例,研究了硅基微结构在热氧化过程中的变形问题,定性分析了产生形变的力学因素,提出了减小形变的氧化方法。首先实验制作了具有高深宽比微结构的硅片,采用不同的氧化方法,比较了变形的大小。结果表明,通过控制热氧化过程中的温度来控制热膨胀系数和在热氧化过程中施加外部热塑应力等方法能够有效地减小热氧化变形量。     

Fabrication of humidity sensors by multi-walled carbon nanotubes

Humidity sensors have multi-walled carbon nanotubes (MWNTs) as the sensing material is demonstrated. The sensor was fabricated on a silicon dioxide coated silicon wafer with metal electrodes. MWNTs were deposited and interlinked with the electrodes by means of the dielectrophoresis technique. The sensing device has the function of a hygrometer when measuring resistance variations to the local relative humidity percentage (RH%) through MWNTs. By measuring the MWNT resistances, we find that higher RH% results in a decrease of conductivity. The results indicate that electron transports in MWNTs are affected by water molecules adsorption on the outermost nanotube surface. A miniature thermocouple sensor was also fabricated and integrated with the humidity sensor. This allowed us to simultaneously sense environmental humidity and temperature. Hence, accurate humidity measurements were achieved with this prototype by calibrating the electrical resistance and temperature levels to carry out the tests with the humidity percentages.