基于偏振折叠的光纤耦合实验研究

基于二极管激光器mini-bar的光纤耦合方式是一种降低耦合系统成本并提高整体转换效率的方法。提出一种偏振折叠的光束整形方式,并采用一种CW 50 W mini-bar进行了相关耦合系统的设计。针对mini-bar的特殊结构与散热需求,设计了针对mini-bar封装用的特种微通道冷却器,并通过封装实验结果验证设计有效。将10片封装在铜微通道冷却器上的CW 50W mini-bar组装成两列各5 bar的叠阵,实现了两列叠阵的激光束沿快轴方向的空间合成,合成后输出功率439 W,空间耦合效率97%。根据耦合系统的设计进行了400μm芯径、0.22 NA的光纤耦合实验,得到光纤输出端脉冲激光功率186.9 W,整体光光效率为52.2%。     

高亮度半导体激光泵浦源光纤耦合系统设计

为了提高半导体激光器作为光纤激光器、固体激光器泵浦源的亮度，基于光束准直、空间光束合成、偏振光合成、光纤耦合等技术，提出了一种紧凑的光束整形系统来均衡半导体激光器快慢轴的光束质量，采用类似阶梯型棱镜和两个30°的直角棱镜填充快轴方向暗区，并用偏振合束器对慢轴光束宽度进行压缩的光束整形方案，设计出了一种紧凑的高亮度光纤耦合系统。该系统由8个mini-bar组成的半导体激光器叠阵耦合进芯径为100μm、数值孔径为0.22的光纤中，其输出功率为272.4 W，光光转换效率为85.1%，亮度高达22.832 MW/(cm²·sr)。     

500W级半导体激光器光纤耦合输出模块设计

为实现亮度均匀、形状对称、高对称光束质量的高功率半导体激光输出,提出了一种基于mini-bar芯片的高功率光纤耦合系统设计方案,使用Zemax设计了一套针对200 m/NA0.22多模光纤的500 W级光纤耦合输出系统。设计使用反射镜-条纹镜系统实现单列叠层微通道封装芯片快轴方向光束的尺寸压缩,并结合偏振合束技术在不改变光束束参积的条件下将功率提高一倍,并使用慢轴扩束系统压缩慢轴方向发散角,最后采用非球面透镜耦合进目标光纤。在设计的基础上采用4列叠层微通道封装的叠阵（每列包含5个mini-bar芯片）进行了等效验证实验,在注入电流为37 A时得到稳定输出功率506 W的小型化模块,亮度达10.3 MW/（cm2sr）,电光效率为43.0%。设计和实验共同表明,该光纤耦合模块可实现500 W稳定功率输出,可广泛应用在光纤/固体激光泵浦及工业加工等领域。     

双平行平面反射镜在激光二极管阵列光束整形中的应用

为了实现激光二极管阵列(LDA)的高亮度光纤耦合输出,设计了一套简单有效的光束整形系统.首先采用快慢轴准直透镜压缩LDA的发散角,然后采用双平行平面反射镜光束整形装置,将压缩后的LDA慢轴方向的光束分为4束(也可以根据需要分为任意多束),并将4束子光束在快轴方向重新排列,最后通过聚焦系统,将整形后的光束耦合进入芯径600 μm,数值孔径0.37的光纤.实验测得双平行平面反射镜整形装置的效率为98.87%,系统的整体效率为77.2%.该整形系统设计简单,效牢高,具有很高的应用价值.     

半导体激光器和光纤的耦合系统设计

本文提出了一种实现半导体激光器和多模光纤耦合的实用化方法。用一段直径为600μm的裸石英光纤对半导体激光器的输出光束进行准直整形;用半球端光纤对准直后的光束进行聚焦后直接实现和光纤耦合。研究表明,采用该方法后的耦合效率在80.0%左右。该耦合系统制作简单,调试和封装方便,且工艺稳定,因而在各种半导体激光器和光纤耦合方面具有广泛的应用前景。     

基于半导体激光器堆栈的光纤耦合技术

由于半导体激光器快慢轴方向的光束质量相差较大,为完成半导体激光器堆栈的光纤耦合,通常采用棱镜堆对光束进行整形。提出一种先填充快轴方向暗区、后旋转重排的光束整形技术,基于棱镜内部的全反射和平行平板对光束的偏移作用,在不使用棱镜堆的情况下完成了整个光束的整形过程。所提技术可将8个巴条组成的半导体激光器堆栈耦合到芯径为200μm、数值孔径为0.22的光纤中,输出功率可达544.47 W,系统的光-光转换效率达到85%。     

激光二极管与单模保偏光纤的耦合研究

给出了一种处理激光二极管经透镜与单模保偏光纤耦合的精确方法,测量了半导体激光器的光束质量,对其光束的收集、准直、整形、聚焦和耦合进入光纤进行了实验研究,同时测量了整形系统和光纤的定位灵敏度.对球面微透镜光纤与激光二极管耦合的方法进行了理论分析,讨论了透镜参数、耦合形式、激光二极管波像散对耦合效率和特性的影响,给出了2种实际耦合系统的实验计算结果,并与理论计算作了比较,结合实验得到了微透镜的优化参数,且将结果应用到了激光二极管与单模保偏光纤耦合实验中,得到了总的耦合效率为36%.     

一种实现半导体激光器和多模光纤耦合的实用技术

文中提出了一种实现半导体激光器和多模光纤耦合的实用化方法。用一段直径为600μm的裸石英光纤代替柱透镜对半导体激光器输出光束进行准直整形;用半球端光纤对光束进行聚焦后直接实现和光纤耦合,来代替聚焦透镜和光纤耦合的环节。研究表明:采用该方法耦合效率在80. 0%左右,同时最大程度解决了使用柱透镜和聚焦透镜的组合透镜耦合系统时存在的调试与封装困难的问题,且工艺稳定,因而有着广泛的应用前景。     

高亮度绿光半导体激光器光纤耦合系统设计与仿真

针对矩形阵列光束与光纤耦合的角度填充系数低,以及未能充分利用光纤数值孔径的缺点,提出密堆积阵列光束的光纤耦合方式以最大化角度填充系数,从而提升光纤耦合的输出亮度。基于该排布方式设计无像差平行平板缩束装置,相比于望远镜缩束系统,该装置可保持光束发散角不变,消除阵列光束之间的暗区,改善组合光束的光束质量。仿真结果表明,该装置可将14支功率为1.5 W绿光单管耦合进数值孔径为0.15和芯径为105μm的光纤中,获得93.75%的光纤耦合效率,输出功率为19.13 W,对应亮度为3.125 MW·cm~(-2)·Sr~(-1),系统的总光-光传输效率达91.10%。     

新型激光二极管列阵光束整形方法

设计并制作了一套简单有效的光束整形系统,用以改善激光二极管列阵器件(LDA)的光束质量,减小快慢轴光束质量积的差别,实现高亮度光纤耦合输出。首先采用快慢轴准直透镜压缩LDA的发散角,然后采用双面分区镀膜的单片平面镜,通过反射和折射将压缩后的LDA慢轴方向的光束分为7束,并将7束子光束在快轴方向重新排列,实验测得整形装置的效率为95.2%。该整形系统设计简单,效率高,具有很高的应用价值。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

A method for calculating the center position of collimated light

It is a key problem to accurately calculate beam spots＇ center of measuring the warp by using a collimated laser. A new method, named double geometrical center method （DGCM）, is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device （CCD） is employed to receive the diffraction-beam spots, then the geometrical centers of the fast and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as the center of datum beam. In face of such adverse instances as laser intension distributing defectively, part of the image being saturated, this method can still work well. What＇s more, this method can detect whether an unacceptable error exits in the courses of image receiving, processing and calculating. The experimental results indicate the precision of this method is high.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.