直流PCVDTi（CxN1—X）硬质膜及其应用

对不同成分的PCVD－Ti（CXN1－X）膜的组织结构及性能进行了研究。结果表明，Ti（CN）膜的高硬度、高致密组织和膜表面因吸附氧而形成的与TiN不同的表面结构是Ti（CN）膜性能优于TiN膜的重要因素。在冷挤压模上应用结果也表明，用PCVD法制备的Ti（CN）膜和TiC膜的使用效果要比TiN膜好得多。     

空心阴极离子镀沉积Ti（CN）的最佳工艺参数及其耐磨性能研究

运用正变试验洼进行了空心阴极离子镀(HCD)沉积Ti(CN)最佳工艺参数的研究。采用反应气体总分压，乙炔气与氯气的分压比及烘烤温度作为试验的三个变化的因素。比较了Ci(CN)TiN及TiC的耐磨性能，结果表明Ti（CN)膜比TiC，TiN膜性能更优异。用X射线衍射（XRD)分析了Ti(CN)膜层的相结构及组成。     

脉冲直流PCVD制备Ti（C，N）薄膜及其组织结构分析

用工业型脉冲直流等离子体化学气相沉积(PCVD)设备,针对不同混合气体CH4所占比例,在H13模具钢表面沉积了Ti(C,N)薄膜。用SEM观察薄膜断口形貌,用XRD及XPS分析薄膜相组成和价态。结果表明：一定量碳元素的加入,抑制了TiN薄膜中柱状晶的生长,并且阻止了TiN晶粒的长大。Ti(C,N)的相结构可能为TiN和TiC两相混合,但在C(或N)含量较低的膜层中,c(或N)原子也会以置换的方式存在于TiN(或TiC)单相组织中。     

低能离子束辅照对溅射镀TiN膜生长的影响

用诱导型等离子体辅助磁控溅射装置在Si（100）表面低温沉积TiN膜，研究了高密度低能量（≈20eV）离子束辅照对溅射镀TiN膜生长、结构和性能的影响．结果表明，高密度低能离子束辅照会改变TiN膜的择优生长方向并使薄膜致密化。即使沉积温度低于150℃，当入射基板离子数和Ti原子数的比值Ji／JTi≥4.7时，沉积的TiN膜仍可具有完全的（200）面择优生长，薄膜微观结构致密，硬度达到25GPa，残余压应力小．     

梯度过渡层对硬质合金沉积类金刚石膜的耐磨性影响

目的分析不同类型的梯度过渡层对硬质合金沉积类金刚石涂层耐磨性能的影响,制备出能有效改善硬质合金减摩抗磨性能的类金刚石涂层。方法采用真空阴极电弧离子镀和等离子体增强化学沉积技术,在硬质合金基底上制备了Ti/TiC/DLC、Ti/TiN/DLC、Ti/TiN/TiNC/DLC和Ti/TiN/TiNC/TiC/DLC四种类型的Ti多元梯度过渡类金刚石涂层。通过GNEHM-150型洛氏硬度计和电子显微镜、MFT-4000多功能材料表面性能试验仪、纳米硬度测试仪,分别评价不同类型多元梯度过渡层对硬质合金类金刚石涂层的膜基结合强度、摩擦磨损性能及纳米硬度。结果 Ti/TiC/DLC、Ti/TiN/DLC、Ti/TiN/TiNC/DLC和Ti/TiN/TiNC/TiC/DLC四种类型涂层的膜基结合强度等级分别为HF3-HF4、HF5-HF6、HF1-HF2、HF1,对两种膜基结合强度较好的涂层(Ti/TiN/TiNC/DLC、Ti/TiN/TiNC/TiC/DLC)进行摩擦磨损检测,其摩擦系数分别为0.2、0.1,且经过60 min对摩,Ti/TiN/TiNC/TiC/DLC涂层仍未出现明显剥落。结论梯度过渡层的类型对薄膜的膜基结合强度、摩擦性能有较明显的影响,Ti/TiN/TiNC/TiC/DLC结构的涂层膜基结合强度最好,具有最低的摩擦系数,表现出了优异的减摩抗磨性能,可有效改善硬质合金表面的耐磨性能。     

陶瓷膜对牙轮钻头滑动轴承摩擦磨损性能的影响

采用化学气相沉积（CVD）和物理气相沉积（PVD）工艺,分别选用高铝钛及TiC+ Ti(C, N) +TiN复合的金属陶瓷在滑动轴承表面制备金属陶瓷膜层。采用金相显微镜（OM）、体视显微镜和显微硬度计对不同金属陶瓷膜的表面形貌、组织结构及厚度进行测量和观察,并在MMW-1型万能摩擦磨损试验机对涂层材料进行摩擦磨损试验,通过测量磨损量与摩擦因数随时间的变化规律,观察摩擦副表面磨损形貌,分析了不同陶瓷膜层的耐磨性和摩擦磨损机理。结果表明,涂镀复合陶瓷膜（TiC/Ti(C, N)/TiN）的销试件硬度高、磨损极其轻微、表面质地均匀且光滑,复合陶瓷膜（淬火）更适用于牙轮钻头滑动轴承表面涂层材料。     

Ti（C，N）基金属陶瓷超微粉在不同液体介质中的分散性研究

对Ti(C，N)基金属陶瓷硬质相粉末TiC，TiN和WC的分散行为进行了研究。探讨了不同液体介质和不同表面活性剂对硬质相粉末分散的影响，结果表明：以蒸馏水作液体介质优于以无水乙醇作液体介质；对TiC，TiN粉末，选用聚氧乙烯十二烷基醚作为分散剂具有较好分散效果，而对WC粉末，聚乙二醇是较好的分散剂。     

三极反应溅射超硬镀层工艺及其应用

三极反应溅射具有设备简单，工艺简便，镀层致密等特点。本文介绍了三极反应溅射设备原理，制备TiN，TiC，Ti（CN），TiAlN，CrN等越硬镀层的工艺和应用情况。对镀层结合力的影响因素和对策进行了讨论．     

Ti(CN)基金属陶瓷热重分析时的氧化现象

介绍了热重分析仪（TGA－7）使用三种不同试验方法测量Ti（CN）基金属陶瓷材料的热曲线。发现常规试验方法产生氧化现象．而改进气路吹洗和尾气排放压力后，克服了试验中的氧化现象，再现了Ti（CN）基金属陶瓷材料从室温～1200℃的脱脂、脱碳热重分析曲线。     

纳米Ti（CN）基金属陶瓷烧结过程中的结构和相变

用分段真空烧结、X射线衍射和背散射扫描电镜研究了纳米Ti（CN）基金属陶瓷在烧结过程中的结构和相成分的演变。结果表明：纳米Ti（CN）基金属陶瓷在900℃以后，Mo2C和TaC开始由于扩散，与Ti（CN）发生固溶反应，在1200℃以前，Mo2C和TaC固溶反应结束，两相均消失。WC在1100℃以后，开始由于扩散，与Ti（CN）发生固溶反应，在1250℃以前消失。在1250℃以后，合金中只有Ti（CN）和Ni（Ni＋Co）两相存在。纳米Ti（CN）粉末与M（M=Mo，W．Ta）反应形成富M的（Ti，M）（CN）固溶体为核，贫M的（Ti，M）（CN）固溶体为环的“亮芯黑环”环形结构，在1350℃即可获得致密的合金。     

Effect of pretreatment, seeding and interlayer on nucleation and growth of HFCVD diamond films on cemented carbide tools

The direct deposition of diamond on carbide tools is difficult because formation of graphitization and thus leading to poor adhesion, due to presence of cobalt on the surface. Various methods were adopted to suppress the effect of cobalt during deposition. One of them was by putting an interlayer. In this study, carbide substrates with coatings of Ti, TiN and TiC were used. Ti coating has a strong tendency to form intermediate carbide leading to the highest nucleation density of diamond. A comparison was made on nucleation and growth of diamond crystals on various interlayers by hot filament CVD method. At the same time, the variations of diamond film growth morphology have been studied on unseeded and seeded carbide inserts. The SEM pictures revealed that among interlayer, Ti coating gave highest nucleation density compared to TiN and TiC coatings. At the same time, diamond seeded inserts, pretreated by Treat 1 [HCl + HNO₃ + H₂O (1:1:1)] for 15 min ultrasonically resulted in the highest nucleation density, compared to Treat 2 [K₃[Fe(CN)₆] + KOH + H₂O] solution in (1:1:10) for 15 min, at constant process parameters.     

纳米TiN改性金属陶瓷刀具的磨损性能

Ti(C,N)基金属陶瓷由于具有优良的综合性能因而被广泛用作刀具材料。本文探讨了纳米 Ti N对 Ti C基金属陶瓷刀具显微组织的影响 ;还研究了它与 Ti(C,N)基金属陶瓷刀具 (cermetμm,下同 )及 YG8刀具在切削灰铸铁时的磨损曲线及磨损机理。结果表明 ,纳米 Ti N改性 Ti C基金属陶瓷刀具 (cerm etnm,下同 )的效果显著 ;与 cermetμm刀具及 YG8刀具相比 ,cermetnm刀具具有更高的寿命与耐磨性 ;崩刃是 cermetnm刀具主要的失效形式     

Tribological behavior of a TiSiCN coating tested in air and coolant

One TiSiCN coating and one TiN coating as a comparison basis were investigated in this paper. The coatings were deposited on stainless steel substrates using a Plasma Enhanced Magnetron Sputtering (PEMS) process, a variation of the physical vapour deposition (PVD) technique. The XRD pattern for the TiSiCN coating implied that the coating either consists of TiN and TiC phases or C be incorporated in TiN as a single solid solution. Both coatings exhibited good adhesion, although their thickness (17 μm-45 μm) was much larger than that of many commercial PVD coatings. The TiSiCN coating showed higher hardness than the TiN coating. The sliding tribological behavior of the coatings against alumimium and alumina counterparts was studied both in air and in a coolant (Hangsterfer's S-500) by pin-on-disc tests. Scanning electron microscopy (SEM) was used to examine the wear tracks on the discs and the wear scars on the pins. Compared to the TiN coating, the TiSiCN coating exhibited lower wear rates and lower coefficients of friction (C.O.F.) against those two kinds of counterparts when tested in air. The cutting coolant provided a lubricant effect and reduced the adhesive wear and C.O.F. between the coating and the counterpart.     

Improvement of the wear resistance of Ti-based coating sliding against copper alloy

The multilayer coating, Ti10%-C:H/TiC/TiCN/TiN, was deposited on cemented tungsten carbide (WC-Co) substrate by an unbalanced magnetron sputtering system. Tribological characteristics of this coating were compared with the coatings of TiN, TiCN, and TiC/TiCN/TiN deposited on WC-Co substrates and the WC -Co substrate itself. The coating displayed excellent tribological properties, i.e., both low value and smooth curve of friction coefficient, and also, compared with the other tested materials, yielded the lowest wear depth when sliding against bronze under dry conditions. The coating thus protects against the high wear experienced when Ti-based coatings rub against copper alloy.     

Interface activation and surface characteristics of Ti/TiN/HA coated sintered stainless steels

Interface activation and surface characteristics of Ti/TiN/HA film coated sintered stainless steels (SSS) have been investigated by electrochemical and biocompatibility tests. HA (hydroxyapatite), Ti, and Ti/TiN film coatings were applied using electron-beam deposition method (EB-PVD). Ti, Ti/TiN, and Ti/TiN/HA film coated surfaces and layers were investigated by SEM and XPS. The coated films showed micro-columnar structure, and Ti/TiN/HA films were denser than Ti or HA-only film. The corrosion resistance of the HA coating was similar to that of Ti/TiN/HA film coating when Cu content reached 4 wt.%, but the corrosion resistance of the HA coating decreased when Cu content increased from 4 wt.% in 0.9% NaCl solution. Therefore, HA-only coating could ensure corrosion resistance when Cu content does not exceed 4 wt.%. The results of biocompatibility tests of SSS on dogs showed that bone formation and biocompatibility were favorable when Cu content did not exceed 4 wt.%. The biocompatibility with bone was generally favorable in Ti/TiN/HA film coating and HA-only coating, while bone formation was somewhat faster for the HA film coated surface than for the Ti/TiN/HA film coating. Also, good cell growth and osseointegration without toxicity were observed.     

Microstructure and wear performance of gradient Ti/TiN metal matrix composite coating synthesized using a gas nitriding technology

Surface modification is an attractive method to enhance the surface hardness and wear resistance of titanium. In this paper, a continuous wave 2 kW Nd:YAG laser was used to synthesize Ti/TiN metal matrix composite coating on the surface of commercial pure titanium. The microstructure and the wear resistance of the synthesized metal matrix composite coating were investigated. The synthesized surface Ti/TiN metal matrix composite coating had a pronounced gradient microstructure through the melt depth. Good metallurgical bonding between the reinforcing phase of the metal matrix composite and the titanium matrix was observed. The hardness and wear resistance under block-on-ring dry sliding wear testing conditions of the synthesized Ti/TiN metal matrix composite coating were markedly enhanced.     

Mechanical Properties and Oxidation Behavior of a Graded (Ti,Al)N Coating Deposited by Arc-Ion Plating

A graded (Ti,Al)N coating was deposited on 1Cr–11Ni–2W–2Mo–V stainless steel for aero-engine compressor blades by arc-ion plating(AIP). The microstructure and the morphology of the graded coating were investigated using electron-probe microanalysis (EPMA), X-ray diffraction and scanning-electron microscopy. The mechanical properties of the graded coating were investigated and it was found that the microhardness and the wear resistance were similar to those of the monolithic (Ti,Al)N coating, but much better than those of a homogenous TiN coating. In addition, the adhesive strength and the thermal-shock resistance of the graded (Ti,Al)N coating were much better than those of the monolithic TiN and (Ti,Al)N coatings. The oxidation tests were performed at 600 and 700°C in air for 500 hr, and corrosion tests were carried out at 600°C under the synergistic effect of water vapor and NaCl for 20 hr. Compared to pure TiN, it was found that due to the incorporation of aluminum, a protective layer rich in alumina was formed on top of the graded (Ti,Al)N coating, which greatly improved the oxidation resistance and corrosion resistance of the coating.     

Effect of TiN/Ti composite coating and shot peening on fretting fatigue behavior of TC17 alloy at 350 °C

A TiN/Ti composite coating has been prepared on a TC17 titanium alloy substrate by an ion-assisted arc deposition (IAAD) technique with a view to improving the fretting fatigue resistance of the titanium alloy at 350 °C. The composition distribution, bonding strength, micro-hardness, ductility, tribological properties, and fretting fatigue resistance at elevated temperature of the coating have been investigated. The results indicate that the IAAD technique can be used to prepare a TiN/Ti composite coating with high hardness, good ductility, excellent bonding strength, and high load-bearing capability. The TiN/Ti composite coatings can improve the resistance to wear and fretting fatigue of the Ti alloy, as manifested in its excellent tribological behavior at 350 °C. However, the fretting fatigue resistance of the titanium alloy treated by shot peening (SP) combined with IAAD TiN/Ti coating post-treatment was lower than that by IAAD TiN/Ti coating or SP alone, because the compressive residual stress induced by SP was significantly relaxed during coating process and the coating easily cracked and broke off.