共查询到17条相似文献,搜索用时 203 毫秒
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杨少琪张弛曹书野朱一柯孙鹏刘军山 《微纳电子技术》2023,(10):1619-1625
风速、风向信号的采集在工业、医疗与气象等领域具有重要意义。研发了一种基于纳米裂纹的微电子机械系统(MEMS)二维风速风向传感器。利用纳米裂纹超高灵敏度的优点,设计了纤毛-悬臂梁结构用于风速、风向信号采集。通过有限元数值仿真分析确定传感器的纤毛直径、高度和悬臂梁长度等结构参数。然后,采用聚二甲基硅氧烷(PDMS)衬底制备、聚酰亚胺粘附、金薄膜沉积、金薄膜图案化以及纳米裂纹工艺流程制备了纳米裂纹金薄膜。采用该纳米裂纹金薄膜,利用MEMS工艺技术制作了基于纳米裂纹的MEMS二维风速风向传感器,并通过自主研制的测试平台测试了传感器的风速和风向性能。实验结果表明,制备的二维风速风向传感器能够稳定测量2~7 m/s的风速信号,并具有误差不超过15°的风向识别能力。 相似文献
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一种基于CMOS工艺的二维风速传感器的设计和测试 总被引:1,自引:0,他引:1
给出了一种完全基于CM O S工艺的、能同时测量风速和风向的二维测风传感器的结构、工作原理及其测试结果。该传感器采用恒温差工作模式,热堆输出电压平均值反映芯片温度和环境温度的差,省去了测温二极管。风速测量采用热损失型原理,因此不存在速度量程问题;同时通过四周对称分布热堆的相对差分输出得到风向,风向的测试和风速无关。测试电路是由普通运放电路组成的控制和测试系统。经过风洞测试,风速的测量可以达到23m/s,风速分辨率达到0.5 m/s,风速的最大误差为0.5 m/s。传感器的反应时间为3~5秒,整个功率损耗约为500 mW。 相似文献
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环境测温二极管在工作时受传感器芯片热场影响,常引发MEMS热式风速风向传感器加热电压-风速曲线异常。将其更换为外置测温二极管,并调整其与传感器芯片距离,成功解决了输出曲线异常现象。并在此基础上,优化芯片及外置测温二极管的封装方案,消除了热场的相互干扰和不必要的热损耗,同时保证了外置测温二极管与空气的良好接触。风场测试结果表明,传感器的加热电压-风速曲线变得平滑,且重复性好,风速和风向的测量误差分别在±4%和±4°以内,系统的上电稳定时间大幅缩短至15 s左右。 相似文献
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An advanced direct chip attaching packaged two-dimensional ceramic thermal wind sensor is studied. The thermal wind sensor chip is fabricated by metal lift-off processes on the ceramic substrate. An advanced direct chip attaching (DCA) packaging is adopted and this new packaged method simplifies the processes of packaging further. Simulations of the advanced DCA packaged sensor based on computational fluid dynamics (CFD) model show the sensor can detect wind speed and direction effectively. The wind tunnel testing results show the advanced DCA packaged sensor can detect the wind direction from 0° to 360° and wind speed from 0 to 20 m/s with the error less than 0.5 m/s. The nonlinear fitting based least square method in Matlab is used to analyze the performance of the sensor. 相似文献
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A novel airflow sensor for miniature mobile robots 总被引:1,自引:0,他引:1
A novel airflow sensor has been developed for applications involving miniature chemical sensing robots. Information about air movement is essential for robots when they are searching for the sources of chemical plumes. The airflow sensor described here measures both wind direction and velocity at airflow rates commonly encountered in an indoor environment. Measurements are made by rotating a small paddle in the airflow. The varying speed of the paddle is analysed to determine both wind speed and direction. Low power consumption and rugged construction make the sensor well suited to robotic applications. The prototype sensor is small enough to fit on a mobile robot measuring only 10 cm in diameter. This paper presents the sensor operating principle, construction and some experimental results. 相似文献
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硅热流量传感器及其封装 总被引:1,自引:0,他引:1
在介绍硅热流量传感器的工作原理、工艺方法的基础上,重点给出了目前硅热流量传感器特别是风速计的几种常用结构以及相应的封装形式,并对每种结构及其封装形式的优缺点进行了分析。最后对硅热流量传感器封装发展中尚待解决的问题以及未来发展趋势进行了讨论。 相似文献
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基于光纤Bragg光栅(FBG)检测原理,研发了适用于地下空间安全监测应用的光纤风速、温度、湿度等多参数传感器。光纤风速传感器基于激光致热光纤热线式流量检测原理,对于低风速有较高的灵敏度,风速从0变化到0.5 m/s时,FBG波长变化量为800 pm,采用解调精度为1 pm的光纤光栅解调仪,风速分辨率为0.7 mm/s。光纤湿度传感器通过在FBG光栅表面均匀涂覆湿度敏感的聚酰亚胺溶液,湿度变化导致光纤应变变化进而实现湿度测量。对新型光纤光栅温湿度传感器的性能参数进行测试,实验测试结果显示,传感器监测灵敏度为4.2pm/%RH,检测精度小于±3%RH。 相似文献
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利用北京国家基本气象站内多普勒测风激光雷达和 L 波段探空系统在 2020 年 1 月 1 日至 5 月 31 日期间进
行了同步观测试验, 在经过观测数据时间和空间匹配的基础上, 以后者测风数据为参照标准, 从探测风廓线的高度、
风向和风速三个方面的一致性分析了激光雷达的测风数据质量。结果显示: 在观测试验期间, 激光雷达 56.5% 的观测
时间里最大探测高度不低于 2000 m, 2.9% 的观测时间最大探测高度不足 1000 m; 激光雷达探测获取的水平风向、风
速与 L 波段探空系统具有较好的一致性, 针对匹配得到的 8491 组对比观测数据, 其风向和风速数据拟合总相关系数
分别为 0.965 和 0.986; 总体风向、风速的平均偏差和均方根误差分别为 −1.3◦ 和 16.1◦、0.21 m·s
−1 和 1.06 m·s
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2000 m 以上高度, 由于激光雷达观测数据的信噪比偏弱, 获得可信的观测数据量减少, 会对风向、风速一致性比对造
成不利影响。 相似文献
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A model that precisely forecasts how much wind power is generated is critical for making decisions on power generation and infrastructure updates. Existing studies have estimated wind power from wind speed using forecasting models such as ANFIS, SMO, k‐NN, and ANN. This study applies a projected clustering technique to identify wind power patterns of wind turbines; profiles the resulting characteristics; and defines hourly and daily power patterns using wind power data collected over a year‐long period. A wind power pattern prediction stage uses a time interval feature that is essential for producing representative patterns through a projected clustering technique along with the existing temperature and wind direction from the classifier input. During this stage, this feature is applied to the wind speed, which is the most significant input of a forecasting model. As the test results show, nine hourly power patterns and seven daily power patterns are produced with respect to the Korean wind turbines used in this study. As a result of forecasting the hourly and daily power patterns using the temperature, wind direction, and time interval features for the wind speed, the ANFIS and SMO models show an excellent performance. 相似文献