Temporary bond—debond technology for high‐performance transistors on flexible substrates

Abstract— A processing technology based upon a temporary bond—debond approach has been developed that enables direct fabrication of high‐performance electronic devices on flexible substrates. This technique facilitates processing of flexible plastic and metal‐foil substrates through automated standard semiconductor and flat‐panel tool sets without tool modification. The key to processing with these tool sets is rigidifying the flexible substrates through temporary bonding to carriers that can be handled in a similar manner as silicon wafers or glass substrates in conventional electronics manufacturing. To demonstrate the power of this processing technology, amorphous‐silicon thin‐film‐transistor (a‐Si:H TFT) backplanes designed for electrophoretic displays (EPDs) were fabricated using a low‐temperature process (180°C) on bonded‐plastic and metal‐foil substrates. The electrical characteristics of the TFTs fabricated on flexible substrates are found to be consistent with those processed with identical conditions on rigid silicon wafers. These TFTs on plastic exhibit a field‐effect mobility of 0.77 cm²/V‐sec, on/off current ratio >10⁹ at Vds = 10 V, sub‐threshold swing of 365 mV/dec, threshold voltage of 0.49 V, and leakage current lower than 2 pA/μm gate width. After full TFT‐array fabrication on the bonded substrate and subsequent debonding, the flexible substrate retains its original flexibility; this enables bending of the EPD display without loss in performance.     

A quick‐response liquid‐powder display (QR‐LPD®) with plastic substrate

Abstract— Paper‐like displays as thin as 290 μm have been developed using QR‐LPD technology. We fabricated two types of displays. One is a dot‐matrix type with a 160 × 160 array of pixels and a 3.1‐in.‐diagonal viewable image size. The other is a segmented type for clock use. Each display has a paper‐like appearance and exhibits high contrast. Plastic substrates with a thickness of 120 μm were used, resulting in flexible displays that can be bent up to a radius of curvature of 20 mm.     

Fabrication of flexible organic light‐emitting‐diode display with a flexible color filter driven by In—Ga—Zn—Oxide TFTs

Abstract— A novel flexible active‐matrix organic light‐emitting‐diode (OLED) display fabricated on planarized stainless—used‐steel substrates with a resolution of 85 dpi in a 4.7‐in. active area has been demonstrated. Amorphous indium—gallium—zinc—oxide thin‐film transistors were used as the backplane for the OLED display with high device performance, high electrical stability, and long lifetime. A full‐color moving image at a frame frequency of 60 Hz was also realized by using a flexible color filter directly patterned on a plastic substrate with a white OLED as the light source.     

Low‐temperature amorphous‐silicon backplane technology development for flexible displays in a manufacturing pilot‐line environment

Abstract— A low‐temperature amorphous‐silicon (a‐Si:H) thin‐film‐transistor (TFT) backplane technology for high‐information‐content flexible displays has been developed. Backplanes were integrated with frontplane technologies to produce high‐performance active‐matrix reflective electrophoretic ink, reflective cholesteric liquid crystal and emissive OLED flexible‐display technology demonstrators (TDs). Backplanes up to 4 in. on the diagonal have been fabricated on a 6‐in. wafer‐scale pilot line. The critical steps in the evolution of backplane technology, from qualification of baseline low‐temperature (180°C) a‐Si:H process on the 6‐in. line with rigid substrates, to transferring the process to flexible plastic and flexible stainless‐steel substrates, to form factor scale‐up of the TFT arrays, and finally manufacturing scale‐up to a Gen 2 (370 × 470 mm) display‐scale pilot line, will be reviewed.     

Suspension‐deposited carbon‐nanotube networks for flexible active‐matrix displays

Abstract— The unique properties of carbon nanotubes (CNTs) promise innovative solutions for a variety of display applications. The CNTs can be deposited from suspension. These simple and low‐cost techniques will replace time‐consuming and costly vacuum processes and can be applied to large‐area glass and flexible substrates. Single‐walled carbon nanotubes (SWNTs) have been used as conducting and transparent layers, replacing the brittle ITO, and as the semiconducting layer in thin‐film transistors (TFTs). There is no need for alignment because a CNT network is used instead of single CNTs. Both processes can be applied to glass and to flexible plastic substrates. The transparent and conductive nanotube layers can be produced with a sheet resistance of 400 Ω/□ at 80% transmittance. Such layers have been used to produce directly addressed liquid‐crystal displays and organic light‐emitting diodes (OLED). The CNT‐TFTs reach on/off ratios of more than 10⁵ and effective charge‐carrier mobilities of 1 cm²/V‐sec and above.     

Printing of polymer thin‐film transistors for active‐matrix‐display applications

Abstract— We present a process for active‐matrix flat‐panel‐display manufacture based on solution processing and printing of polymer thin‐film transistors. In this process, transistors are fabricated using soluble semiconducting, conducting, and dielectric polymer materials. Accurate definition of the transistor channel and other circuit components are achieved by direct ink‐jet printing combined with surface‐energy patterning. We have used this process to create 4800‐pixel 50‐dpi active‐matrix backplanes. These backplanes were combined with polymer‐dispersed liquid crystal to create the first ink‐jet‐printed active‐matrix displays. Our process is, in principle, environmentally friendly, low temperature, compatible with flexible substrates, cost effective, and advantageous for short‐run length and large display sizes. As well as polymer‐dispersed liquid crystal, this technology is applicable to conventional liquid‐crystal and electrophoretic display effects.     

Flexible hybrid substrates of roll‐to‐roll manufacturing for flexible display application

A flexible hybrid substrate was developed and demonstrated for roll‐to‐roll (R2R) manufacturing. Layer‐by‐layer misalignment can be well controlled within 5 µm. Top‐gate amorphous InGaZnO thin‐film transistor was fabricated on the flexible hybrid substrate by R2R process for the first time. A 4.3‐in. segment‐type reflective Electro‐Phoretic Display (EPD) display was also demonstrated to show the R2R capability of flexible substrates.     

Roll‐to‐roll manufacturing of electronics on flexible substrates using self‐aligned imprint lithography (SAIL)

Abstract— The manufacture of large‐area arrays of thin‐film transistors on polymer substrates using roll‐to‐roll (R2R) processes exclusively is being developed. Self‐aligned imprint lithography (SAIL) enables the patterning and alignment of submicron‐sized features on meter‐scaled flexible substrates in the R2R environment. SAIL solves the problem of precision interlayer registry on a moving web by encoding all the geometry information required for the entire patterning steps into a monolithic three‐dimensional imprint with discrete thickness modulation. The pre‐aligned multiple‐step mask structure maintains its alignment regardless of subsequent substrate distortion. Challenges are encountered in relation to the novel nature of using flexible substrates and building toolsets for the R2R processing. In this paper, methods of the SAIL process, the resulting active‐matrix backplanes, the trajectory of SAIL process development, and the remaining issues for production are presented.     

Flexible amorphous‐silicon non‐volatile memory

Abstract— The development of a flexible, rewritable, non‐volatile memory (NVM) that is implemented on a standard, low‐temperature a‐Si:H process without additional mask steps is reported. This NVM is a part of a flexible‐display system. Each NVM cell is composed of differentially configured thin‐film‐transistors (TFTs). The cell reads out one of two stable states depending on the relative threshold voltages of the differentially configured TFTs. Information is stored in each cell by increasing the threshold voltage of one differential TFT or the other, utilizing the well‐known electrical‐stress degradation intrinsic to a‐Si:H TFTs. The stored information is retained indefinitely with no applied power. A test array of individually addressable NVM cells has been successfully fabricated and tested on flexible stainless‐steel substrates. Read and write operation, as well as preliminary reliability measurements, are described. The design is readily scalable to large memory arrays.     

Pixel‐isolated liquid‐crystal mode by using a patterned anisotropic phase separation for flexible LCDs

Abstract— A pixel‐isolated liquid‐crystal (PILC) mode for enhancing the mechanical stability of flexible‐display applications is proposed. Because liquid‐crystal (LC) molecules in this mode are isolated in each pixel by patterned or phase‐separated microstructures, and the two substrates are tightly attached to each other by a solidified polymer layer, the LC alignment is stable against external pressure, and the cell gap of our structure is uniformly preserved against bending deformation of the plastic substrates. The mechanical stability of the PILC structure having plastic substrates was tested for its electro‐optic properties.     

World's first large size 77‐inch transparent flexible OLED display

Large flexible organic light‐emitting diode (OLED) display provides various electronic applications such as curved, bendable, rollable, and commercial display, because of its thinness, light weight, and design freedom. In this work, the process flow and key technologies to fabricate the world's first large size 77‐inch transparent flexible OLED display are introduced. “White OLED on TFT + color filter” method is used to fabricate the aforementioned display. On both thin‐film transistor and color filter substrates, transparent polyimide (PI) was used as plastic substrate with multi‐barrier. In case of a transparent flexible display, the multi‐barrier is required for the additional consideration to overcome the decrease of transmittance due to the difference in refractive index of the conventional multi‐barrier. We developed the special multi‐barrier to increase transparency with superior water vapor transition rate characteristic. The optimized amorphous indium gallium zinc oxide thin‐film transistors were employed on the multi‐barrier, and it shows the highly uniform electrical performance and reliability on plastic substrate. Also, the typical panel failure mechanism during laser lift‐off process caused by a particle in PI is studied, and a sacrificial layer was suggested between PI and a carrier glass to reduce the panel failure. Finally, we successfully realized the world's first 77‐inch transparent flexible OLED display with ultra‐high‐definition resolution, which can be rolled up to a radius of 80 mm with a transmittance of 40%.     

Defect‐free deformed‐helix ferroelectric liquid‐crystal mode in a vertically aligned configuration (Invited Paper)

Abstract— A novel deformed‐helix ferroelectric liquid‐crystal (DHFLC) mode in a vertically aligned (VA) configuration is described. In this configuration, several unique features of display performance such as uniform alignment, fast response, and analog gray‐scale capability are obtained. Particularly, this VA‐DHFLC mode allows for the defect‐free uniform alignment of both the FLC molecules and the smectic layers over a large area without employing additional processes such as rubbing or electric‐field treatment that are generally required for planar FLC modes. Based on the VA‐DHFLC mode, a transflective display having a single‐gap geometry with in‐plane electrodes on two substrates in the transmissive regions and on one substrate in the reflective regions is described.     

Flexible ferroelectric liquid‐crystal devices containing fine polymer fibers

A new flexible ferroelectric liquid‐crystal‐display device with gray‐scale capability has been created by using submicrometer‐diameter polymer fibers. The polymer fibers, which are formed by photopolymerization of aligned monomer molecules in liquid crystal, align the ferroelectric liquid crystal and mechanically support two flexible thin plastic substrates. The composite film made of liquid crystal and polymer with a thickness of 2 μm was formed between the plastic substrates by using a fabrication method consisting of coating, lamination, and ultraviolet irradiation processes without the conventional gap‐forming and injection processes. The fabricated flexible device revealed gray‐scale capability due to the change in spatial distribution of micrometer‐sized binary‐switching liquid‐crystal domains. From the polarizing microscope observation, it was found that the switching domains are generated and expanded from the areas with poor polymer density. The experimental results indicated that the polymer fibers spatially modulate the threshold voltage for molecular switching. Our device exhibits great potential for flexible large‐sized light‐weight motion‐image displays.     

Active‐matrix organic light‐emitting displays employing two thin‐film‐transistor a‐Si:H pixels on flexible stainless‐steel foil

Abstract— An active‐matrix organic light‐emitting diode (AMOLED) display driven by hydrogenated amorphous‐silicon thin‐film transistors (a‐Si:H TFTs) on flexible, stainless‐steel foil was demonstrated. The 2‐TFT voltage‐programmed pixel circuits were fabricated using a standard a‐Si:H process at maximum temperature of 280°C in a bottom‐gate staggered source‐drain geometry. The 70‐ppi monochrome display consists of (48 × 4) × 48 subpixels of 92 ×369 μm each, with an aperture ratio of 48%. The a‐Si:H TFT pixel circuits drive top‐emitting green electrophosphorescent OLEDs to a peak luminance of 2000 cd/m².     

Development of 8‐in. oxide‐TFT‐driven flexible AMOLED display using high‐performance red phosphorescent OLED

An 8‐in. flexible active‐matrix organic light‐emitting diode (AMOLED) display driven by oxide thin‐film transistors (TFTs) has been developed. In‐Ga‐Zn‐O (IGZO)‐TFTs used as driving devices were fabricated directly on a plastic film at a low temperature below 200 °C. To form a SiO_x layer for use as the gate insulator of the TFTs, direct current pulse sputtering was used for the deposition at a low temperature. The fabricated TFT shows a good transfer characteristic and enough carrier mobility to drive OLED displays with Video Graphic Array pixels. A solution‐processable photo‐sensitive polymer was also used as a passivation layer of the TFTs. Furthermore, a high‐performance phosphorescent OLED was developed as a red‐light‐emitting device. Both lower power consumption and longer lifetime were achieved in the OLED, which used an efficient energy transfer from the host material to the guest material in the emission layer. By assembling these technologies, a flexible AMOLED display was fabricated on the plastic film. We obtained a clear and uniform moving color image on the display.     

Low‐temperature fabrication of 5‐in. QVGA flexible AMOLED display driven by OTFTs using olefin polymer as the gate insulator

Abstract— A 5‐in. QVGA flexible AMOLED display driven by OTFTs has been fabricated at a low temperature of 130°C. A polyethylene naphthalate film was used as the flexible substrate and an olefin polymer was used as the gate insulator for the OTFT. This layer was formed by spin‐coating and baking at 130°C. Pentacene was used as the organic semiconductor layer. The OTFT performance to drive the flexible display with QVGA pixels in terms of current on/off ratio, carrier mobility, and spatial uniformity on the backplane have been obtained. Phosphorescent and fluorescent OLEDs were used as light‐emitting devices on a flexible display. Those layers were formed by vacuum deposition. After the flexible display was fabricated, a clear and uniform moving image was obtained on the display. The display also showed a stable moving image even when it was bent.     

A 5‐in. flexible ferroelectric liquid‐crystal display driven by organic thin‐film transistors

Abstract— An organic thin‐film‐transistor (OTFT) driven color flexible ferroelectric‐liquid‐crystal (FLC) display with 160 × 120 pixels and a resolution of 50 ppi has been developed. The flexible FLC was fabricated on a pentacene‐OTFT array using printing and lamination techniques. To drive the display at a fast driving speed, an OTFT was developed with a short channel length having a large current output. The fabricated OTFT array with a channel length of 5 μm exhibits a carrier mobility of 0.3 cm²/V‐sec and an ON/OFF ratio of over 10⁷ at a low drain voltage of ?6 V. A field‐sequential‐color system with a flexible backlight unit was also developed and used to drive the display. Color moving images were successively shown on the 5‐in. display using an active‐matrix driving technique of the OTFT.     

Flexible active‐matrix OLED displays: Challenges and progress

Abstract— Organic light‐emitting‐device (OLED) devices are very promising candidates for flexible‐display applications because of their organic thin‐film configuration and excellent optical and video performance. Recent progress of flexible‐OLED technologies for high‐performance full‐color active‐matrix OLED (AMOLED) displays will be presented and future challenges will be discussed. Specific focus is placed on technology components, including high‐efficiency phosphorescent OLED technology, substrates and backplanes for flexible displays, transparent compound cathode technology, conformal packaging, and the flexibility testing of these devices. Finally, the latest prototype in collaboration with LG. Phillips LCD, a flexible 4‐in. QVGA full‐color AMOLED built on amorphous‐silicon backplane, will be described.     

Viewing direction measurements on flat and curved flexible E‐paper displays

The viewing direction characterization of reflective displays is more demanding than for emissive displays because defined illumination–detection geometries must be maintained for each viewing direction. In addition, the geometry should mimic the behavior of viewers who tend to exclude the reflection of light sources from a handheld reflective display. Viewing direction data was extracted from measured Bidirectional Reflectance Distribution Functions, showing that a source inclination of 45° sufficiently excludes the specular and haze components of source reflection from the measurement. Applying this so‐called 45/θ geometry to curved flexible displays is not straightforward since viewing direction, display curvature, and alignment each affect the measured reflectance. The viewing direction geometry proposed for convex cylindrical displays uses a ring light to deliver viewing‐direction independent illuminance, and maps the range of viewing directions onto the pixels of an image sensor. The illumination can also be applied to flat displays, allowing direct comparisons of flat and cylindrical display states. First results on e‐paper show good agreement with Bidirectional Reflectance Distribution Function data.     

Color displays and flexible displays using quick‐response liquid‐powder technology for electronic paper

Abstract— Color displays and flexible displays that use electronic liquid powder have been developed. Novel types of color displays using either a colored powder or a color filter are discussed. We have also developed a flexible display with low‐cost substrate films with a high‐throughput roll‐to‐roll manufacturing method. These technologies enable a QR‐LPD to be widely used as an electronic‐paper display.