满足一等量块检定要求的接触式激光量块干涉仪

最新研制的接触式激光量块干涉仪主要用于测量一、二等量块的中心长度，其长度测量不确定度达到（0.02 0.2L)μm。文中介绍了其工作原理、测量不确定度分析，给出了量块测量的验证数据。     

双波长激光量块干涉仪研制

本文介绍了双波长激光量块干涉仪的工作原理,详细描述了仪器的光学,机械设计以及干涉图象处理和量块中心长度自动判读技术,该干涉仪满足1等量块的测量不确定度要求,目前已用于高等级量块的自动化测量。     

用立式接触式干涉仪检定四等量块中心长度评定其测量不确定度

测量不确定度是对测量结果质量的定量表征,测量结果的可用性很大程度上取决于其不确定度的大小。量块作为仪器校准和调整机床的高精度重要量具,其测量不确定度的评定显得尤为重要,然而作为质检专业的学生,对量块中心长度的测量不确定度评定没有系统的认识。就此问题,本文详细阐述了立式接触式干涉仪检定四等量块中心长度测量结果的不确定度评定。     

二等量块标准装置测量不确定度估算

二等量块标准装置是指用二等量块作标准，通过乌氏干涉仪、光学计或其它类型的比较仪来检定三等量块的全套装置。本文以乌氏干涉仪为例，试行对三等量块的测量不确定度进行估算。由于某些影响不确定度的因素与量块长度有关，因此本文对１００ｍｍ、５０ｍｍ、１０ｍｍ和１ｍｍ量块的测量不确定度分别进行了估算。     

一种减小比较仪溯源标准不确定度的新方法

使用量块对高精度光学计、比较仪、测微仪进行检定或校准时,其溯源标准量块长度的不确定度会带来很大的影响,而现在通常使用的"配对法"又存在一些问题.经过分析研究和测试试验,提出了一种减小溯源标准(即量块长度差)不确定度的新方法.用量块干涉仪直接测量两个量块的中心长度差,其测量结果的不确定度能够减小到0.01 μm以下,从而可以满足高精度比较仪的溯源要求.     

用改造后的柯氏干涉仪测量量块中心长度的测量不确定度评定

通过用６３３ｎｍ 短频Ｈｅ－Ｎｅ 激光代替氪灯,提高小数测量的准确度等措施,对常规柯氏干涉仪进行了改造,结果获得测量量块中心长度的标准不确定度为ｕｃ＝ （５．５ｎｍ ）２＋ （８．３×１０－ ８Ｌ）２,大大优于一等量块的最大允许不确定度     

3等量块中心长度校准结果不确定度评定

本文以新规程《JJG146-2003量块》为依据,对三等量块在接触式干涉仪上检定中心长度校准结果的不确定度分析、评定.     

三等量块比对测量值不确定度的评估

简述比对要求和方法,详细分析了测量量块中心长度的主要误差来源,包括:标准量块中心长度测量不确定度分量、比较差值估算的不确定度分量、标准量块与被测量块膨胀系数差给出的分量、标准量块与被测量块间的温度差给出的分量。并评定这些误差来源对测量值的影响。     

三等量块标准装置不确定度评定

不确定度是测量工作的质量和测量结果可信赖程度和评价。利用三等量块、接触式干涉仪、平面平晶、温度湿度计、干涉显微镜等组成建立三等量块标准装置,通过对三等量块标准装置测量不确定度来源的分析,评定了三等量块标准装置测量不确定度大小,分析得到的结果满足采用比较测量法检定四等及四等以下量块。     

新型移相量块干涉仪的研制

研制了一台用于0.5~100 mm量块测量的新型移相量块干涉仪,分别以波长为633 nm和543 nm的两台稳频激光器作为测量光源,通过一根单模光纤引入到干涉仪内。高精密移相器实现5步移相干涉测量,CCD相机采集干涉条纹并计算干涉条纹小数,被测量块长度采用多波长的小数重合法计算。移相量块干涉仪的测量不确定度达到U=0.015μm+0.07×10~(-6)L(L为量块长度,mm)。     

Precise interferometric length and phase-change measurement of gauge blocks based on reproducible wringing

A modern fringe-pattern-analyzing interferometer with a resolution of 1 x 10(-9) and without exclusion of systematic uncertainties owing to optic effects of less than 1 nm was used to test a new method of interferometric length measurement based on a combination of the reproducible wringing and slave-block techniques. Measurements without excessive wringing film error are demonstrated for blocks with nominal lengths of 2-6 mm and with high surface flatness. The uncertainty achieved for these blocks is less than 1 nm. Deformations of steel gauge blocks and reference platens, caused by wringing forces, are investigated, and the necessary conditions for reproducible wringing are outlined. A subnanometer uncertainty level in phase-change-correction measurements has been achieved for gauge blocks as long as 100 mm. Limitations on the accuracy standard method of interferometric length measurements and shortcomings of the present definition of the length of the material artifact are emphasized.     

激光量块干涉测量中传感器的应用和校准

本文介绍了双波长激光量块干涉仪中使用的温度、湿度和气压传感器,描述了其工作原理、设计方案、测量不确定度以及校准方法。这些传感器同样可用于其他高准确度长度测量的激光干涉系统中。     

Ring interferometer for two-sided measurement of the absolute lengths of end standards

Special features of a two-sided interferometer based on a ring optical scheme previously proposed [V. M. Khavinson and L. F. Khavinson, in Investigations in the Field of Length and Angle Measurements, N. P. Gerasimov, ed., Proceedings of the D. I. Mendeleyev Institute for Metrology (Energoatomizdat, Leningrad, 1983), pp. 14-18], which exploits an alternative measurement method to the conventional method for measuring absolutely the lengths of precision gauge blocks. Both measuring surfaces of a gauge are viewed directly without an auxiliary platen wrung onto one of them. The two-sided method results in improved consistency of measurement results because the elimination of wringing avoids the contact error that can occur in the gauge length obtained when the conventional method is used. A variety of means to control the optical phase differences in the interferometer are considered.     

Measurement of Refractive Index of Liquids Using Length Standards Traceable to SI Unit

Many workers have published various methods to measure refractive index of various liquids. Mostly, the measurement results are not traceable to SI units. A novel method is developed at CSIR-NPL, India (NPLI) to measure refractive of index of liquids using gauge blocks, metrological microscope and displacement laser interferometer. A vessel with flat bottom is chosen to hold the liquid under test. A pair of gauge blocks of different lengths is fixed in the vessel. The vessel is arranged under a vertically movable microscope. A calibrated displacement laser interferometer is attached to the microscope stage. The microscope is focused to the surface of gauge block before poring liquid. After poring liquid in the vessel, the microscope is moved vertically to regain the focussed image of surface of submerged gauge blocks. The measurement method is simulated mathematically. The refractive index of liquid medium is calculated using this mathematical model. Refractive index of water, isopropyl alcohol is measured. Various error contributing sources are identified. The measurement uncertainty is evaluated.     

100 mm一等量块自动测量仪测量不确定度评定

分析了100mm一等量块自动测量仪的误差来源，确定了测量量块的合成标准不确定度和扩展不确定度。     

Increasing the range of unambiguity in step-height measurement with multiple-wavelength interferometry--application to absolute long gauge block measurement

An instrument for step-height measurement by multiple-wavelength interferometry is described. The addition of a 1152-nm wavelength to a multiple-wavelength scheme applying wavelengths of 633, 612, and 543 nm relaxes the tolerance range of the required preliminary measurement to +/- 140 microm, if the total uncertainty in the fringe fraction measurement can be kept below 2%. For larger fringe fraction measurement uncertainty, numerical simulations show that the integer number of interference orders can still be determined unambiguously if the range in the preliminary knowledge of the length has been correspondingly reduced. The interferometer instrument is described, and experimental data are presented in the context of long gauge block calibration at the National Research Council of Canada.     

重复性对量块配对法测量结果不确定度的影响

本文阐述了在使用量块配对法时 ,重复性对测量结果不确定度的影响