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1.
提出了一种膜厚修正挡板的设计方法,分析给出了使用挡板情况下基片膜厚和监控片膜厚的关系,对线性渐变滤光片镀制挡板进行了设计,给出了设计结果。用设计的挡板成功镀制了线性渐变滤光片,并给出了镀制结果。  相似文献   

2.
详细描述一种等离子体高效溅射系统及应用工艺.此种崭新的溅射技术结合了蒸发镀的高效及溅射镀的高性能特点,特别在多元合金以及磁性薄膜的制备,具有其他手段无可比拟的优点.  相似文献   

3.
低温沉积ITO透明导电膜的研究   总被引:1,自引:0,他引:1  
通过探讨半导体氧化物ITO膜的透光和导电机理,用反应性直流磁控溅射的镀膜工艺,在有机玻璃上低温镀制(ITO)膜,研究ITO膜溅射工艺参数与透光和导电性能的关系,实现了在低温下镀制(ITO)膜的技术,其透光率≥80%以上,表面电阻≤30Ω/□.  相似文献   

4.
李莉 《硅谷》2010,(3):6-7
根据短波通滤光片的设计原理,采用二氧化钛和二氧化硅作为高折射率材料和低折射率材料,从理论上计算出用这两种材料设计的短波通滤光片所需要的周期数及主膜系,并用膜系设计软件对该膜系进行优化。依照改进的设计,采用电子束蒸发的方法制备出符合要求的短波通滤光片,并找到最佳制备工艺和方法。UV-3100分光光度计测量结果表明,在波长380-670nm处,平均透射率T90%;在波长690-800nm处截止,平均透射率T1%,镀制膜层的透射率曲线与理论曲线符合技术要求。  相似文献   

5.
针对当前可见-近红外光电探测器的激光防护要求,研究了1064 nm负滤光片的设计和制备。基于等效折射率理论,综合考虑光谱和场强分布优化,设计了由SiO2/Y_(2)O_(3)/H4组合的规整膜系和SiO2/H4组合的非规整膜系负滤光片;采用离子束辅助热蒸发沉积方式对负滤光片进行了制备,并测试了其光学和抗激光损伤性能。结果表明:在膜系结构G|(0.5LH0.5L)s|A两侧匹配减反膜可以有效减小通带波纹,调整膜系最外层厚度可以同时改善膜系的光谱特性和电场强度分布。镀制的规整膜系负滤光片在400~900 nm和1200~2000 nm波段平均透过率分别为89.98%和93.21%,1064 nm透过率为1.29%,激光损伤阈值为6.0 J/cm^(2);非规整膜系负滤光片在650~900 nm和1200~2000 nm波段平均透过率分别为93.70%和94.99%,1064 nm透过率为1.60%,激光损伤阈值为6.8 J/cm^(2)。  相似文献   

6.
四坩埚磁偏转电子束蒸发源   总被引:1,自引:0,他引:1  
在真空镀膜设备中,电子束蒸发源虽远较电阻加热式蒸发源复杂,但因其能蒸镀难熔材料,膜层纯度高,而优于电阻加热蒸发源。到七十年代中期,磁偏转电子束蒸发源蒸镀提高了淀积率,并克服了环形枪蒸镀时易发生气体放电、功率较小,以及直枪式蒸发源占用空间大,x射线二次电子损伤大的缺点,而获得广泛的应用,特别在集成电路工艺中应用,达到了很好的效果。使用多坩埚电子束蒸发源,可以在一次抽真空的过程中镀制多层膜或合金膜。  相似文献   

7.
太阳能模拟器滤光片的研制   总被引:2,自引:0,他引:2  
太阳能模拟器作为研究航天科技卫星空间环境模拟和太阳能电池的检测与标定的必要模拟设备,越来越受到人们的关注,其中,模拟器滤光片(AM1.5)是太阳能模拟器的关键元件。本文依据标准大气光谱和标准氙灯的光谱曲线,得到了AM1.5型太阳能模拟器滤光片的透射率光谱曲线。在此基础上用TFC膜系软件对该滤光片的膜系进行了设计、优化,并对该膜系进行了镀制工艺研究。光谱测试结果表明,所研制的滤光片的中心波长950 nm处的透射率T=15%,半宽度350 nm;400~750 nm波段内,平均透射率Ta≥95%,1200~1400 nm内平均透射率Ta≥92%。光谱辐照度测试结果表明,其辐照匹配度在0.89~1.09之间,达到A类滤光片要求。  相似文献   

8.
真空溅射镀与蒸发镀相比,膜层较牢固、致密,但成膜速率较低。如何提高成膜速率,已成为改进溅射镀工艺的主要方向。由于溅射镀的机理比较复杂,难以确定的因素较多,因而成膜速率的理论估算有困难。本工作详细研究了靶材的迁移过程,得到成膜速率的计算公式,与实验结果符合。该公式所反映的参量关系,有可能对提高成膜速率提供较清晰的途径。  相似文献   

9.
镍铬合金薄膜的研究进展   总被引:5,自引:0,他引:5  
周继承  田莉 《材料导报》2005,19(7):5-7,15
镍铬合金薄膜是重要的精密电阻和应变电阻薄膜材料.简述了镍铬合金薄膜的3种制备方法:真空蒸发沉积、磁控溅射沉积和离子束沉积;讨论了基底、工作气压、沉积时间等薄膜制备工艺参数以及退火工艺对薄膜性能的影响.重点叙述了镍铬合金薄膜、改良型镍铬合金膜、含氮镍铬合金膜、镍铬合金多层膜和纳米镍铬合金薄膜等膜系的特征.阐明了制备具有高电阻率、低电阻温度系数、高应变灵敏系数、良好的热稳定性等优异综合性能的镍铬合金薄膜的新工艺发展趋势.  相似文献   

10.
王勇  张耀锋  尉伟  范乐  王建平  耿会平 《真空》2007,44(4):59-61
简要叙述了小孔流量法测量材料出气率实验的原理和实验装置,给出了不锈钢溅射镀TiN膜在不同情况下的热出气率,并对影响不锈钢溅射镀TiN膜热出气率情况的各种因素进行了分析,为使用溅射镀TiN膜表面处理的储存环真空室的设计提供了依据。  相似文献   

11.
Simultaneous measurement is considered for the working medium level and density by means of a system of two pressure sensors placed in the liquid at different levels and the use of a Kalman filter for filtering out the noise in this system. __________ Translated from Izmeritel’naya Tekhnika, No. 6, pp. 45–49, June, 2007.  相似文献   

12.
基于随机集理论的多目标跟踪研究进展   总被引:1,自引:0,他引:1  
陈金广  马丽丽 《光电工程》2012,39(10):15-20
基于随机有限集理论的多目标跟踪方法,能够避免数据关联步骤的困扰,能够较好地解决复杂环境中目标数目未知且随时间变化的多目标跟踪问题.本文分析基于数据关联和基于随机集理论的多目标跟踪方法,阐明基于随机集理论的多目标跟踪方法的特点和优点,对目标状态提取、航迹关联、更准确的滤波算法,以及复杂条件下的PHDF算法等关键问题进行总结和评述,并指出该领域今后的研究热点.  相似文献   

13.
To solve the problem of the presence of grey-scale material in optimization results and improve convergence efficiency during the optimization procedure caused by those intermediate densities, three kinds of simpler filter functions were proposed for the variable density method according to S-curve models. First, the feasible range for the parameters of the filter functions was determined by studying Messerschmitt–Bölkow–Blohm beam with the solid isotropic micro-structure with the penalization (SIMP) method. Then, the filter functions were applied to three classic examples to verify their validity and feasibility. The results showed that higher convergence efficiency, clearer structure boundaries, and better feasible solutions were obtained compared with that without the filter function. Finally, the filter functions were also compared with one existing method to demonstrate its effectiveness and validity.  相似文献   

14.
戴万阳 《工程数学学报》2006,23(6):1068-1074
基于可能相关并具有某种遍厉性的样本数据,该文设计了一个具有多级自适应滤波器的有限元估计器去估计相应的(平稳)密度函数。数值例了表明了估计器的有效性。同时也讨论了一个有关估计器稳定性的性质。  相似文献   

15.
Lithium–CO2 batteries are attractive energy‐storage systems for fulfilling the demand of future large‐scale applications such as electric vehicles due to their high specific energy density. However, a major challenge with Li–CO2 batteries is to attain reversible formation and decomposition of the Li2CO3 and carbon discharge products. A fully reversible Li–CO2 battery is developed with overall carbon neutrality using MoS2 nanoflakes as a cathode catalyst combined with an ionic liquid/dimethyl sulfoxide electrolyte. This combination of materials produces a multicomponent composite (Li2CO3/C) product. The battery shows a superior long cycle life of 500 for a fixed 500 mAh g?1 capacity per cycle, far exceeding the best cycling stability reported in Li–CO2 batteries. The long cycle life demonstrates that chemical transformations, making and breaking covalent C? O bonds can be used in energy‐storage systems. Theoretical calculations are used to deduce a mechanism for the reversible discharge/charge processes and explain how the carbon interface with Li2CO3 provides the electronic conduction needed for the oxidation of Li2CO3 and carbon to generate the CO2 on charge. This achievement paves the way for the use of CO2 in advanced energy‐storage systems.  相似文献   

16.
Wind and solar powers will gradually become dominant energies toward carbon neutrality. Large-scale renewable energies, with strong stochasticity, high volatility, and unadjustable features, have great impacts on the safe operation of power system. Thus, an advanced hydropower energy system serving multiple energies is required to respond to volatility, with expanding role from a “stable energy supplier” to a “flexible efficiency regulator”. Future research and application can be considered from three aspects: 1) system expansion (e.g., the construction of large-scale hydropower/renewable energy bases in China, the construction of transnational hydropower energy internet, and the functional transformation of traditional hydropower reservoirs and generating units); 2) efficiency promotion (e.g., advanced intelligent forecasting, multi-objective operation, and risk management methods); and 3) supporting measures (e.g., market reform, benefit compensation and policy mechanism, technical standards, and laws and regulations).  相似文献   

17.
根据窄带滤光片性能对温度和吸湿依赖性的数学模型,进行了初步实验验证,得到了温度和吸湿对窄带滤光片光学性能的影响规律.  相似文献   

18.
高红波  周彦  曾丽梅  吴伟钢 《计量学报》2022,43(12):1568-1572
为解决罗维朋颜色体系量值溯源问题,提出了用光谱光度法研究罗维朋颜色体系。实验数据分析表明:在单波长下,罗维朋滤色片的光谱密度和罗维朋数之间有明显的线性关系;在380~780 nm波长范围内,罗维朋滤色片的积分光密度和罗维朋数之间也有明显的线性关系。通过美国油品化学协会所提供的数据验证了关系式的可靠性。  相似文献   

19.
Environmentally friendly energy sources (e.g., hydrogen) require an urgent development targeting to address the problem of energy scarcity. Electrocatalytic water splitting is being explored as a convenient catalytic reaction in this context, and promising amorphous nanomaterials (ANMs) are receiving increasing attention due to their excellent catalytic properties.Oxygen group-based amorphous nanomaterials (O-ANMs) are an important component of the broad family of ANMs due to their unique amorphous structure, large number of defects, and abundant randomly oriented bonds, O-ANMs induce the generation of a larger number of active sites, which favors a better catalytic activity. Meanwhile, amorphous materials can disrupt the inherent features of conventional crystalline materials regarding electron transfer paths, resulting in higher flexibility. O-ANMs mainly include VIA elements such as oxygen, sulfur, selenium, tellurium, and other transition metals, most of which are reported to be free of noble metals and have comparable performance to commercial catalysts Pt/C or IrO2 and RuO2 in electrocatalysis. This review covers the features and reaction mechanism of O-ANMs, the synthesis strategies to prepare O-ANMs, as well as the application of O-ANMs in electrocatalytic water splitting. Last, the challenges and prospective remarks for future development in O-ANMs for electrocatalytic water splitting are concluded.  相似文献   

20.
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