Theory and design of piezoelectric resonators immune to acceleration: present state of the art

A typical low noise oscillator uses a crystal resonator as the frequency-determining element. An understanding of the fundamental nature of acceleration sensitivity in crystal oscillators resides primarily in understanding the behavior of the crystal resonator. The driving factor behind the acceleration-induced frequency shift is shown to be deformation of the resonator. The deformation drives two effects: an essentially linear change in the frequency-determining dimensions of the resonator and an essentially nonlinear effect of changing the velocity of the propagating wave. In this paper, the fundamental nature of acceleration sensitivity is reviewed and clarified, and attendant design guidance is developed for piezoelectric resonators. The basic properties of acceleration sensitivity and general design guidance are developed through the simple examples of “bulk acoustic wave (BAW) in a box” and “surface transverse wave (STW) in a box.” These examples serve to clarify a number of concepts, including the role of mode shape and the basic difference between the BAW and STW cases. The design equations clarify the functional dependencies of the acceleration sensitivities on the full range of crystal resonator design and fabrication parameters     

基于主动阻尼的屈曲梁准零刚度隔振技术研究

准零刚度(QZS)隔振系统具有高静刚度-低动刚度的特性,能够对低频振动进行有效抑制,而主动阻尼能够显著降低系统的共振峰值同时保持系统高频传递特性不变。因此,将准零刚度隔振系统与主动阻尼相结合,可以有效提升系统的超低频隔振性能。以屈曲梁准零刚度隔振器为研究对象,基于系统动力学模型,引入主动阻尼控制策略,通过理论分析研究了主动阻尼对屈曲梁准零刚度隔振系统传递率的影响,并利用SIMULINK工具开展扫频、正弦和随机扰动条件下的屈曲梁准零刚度-主动阻尼隔振系统仿真研究。仿真结果表明:在超低频段(≤0.1 Hz)该系统能够产生8~32 dB的隔振效果;在高频段(≥10 Hz)隔振效率不低于36 dB,且对随机扰动响应的隔振效率为36 dB。     

佩戴瞄准具头盔的人体振动响应和目标跟踪能力

目的研究振动条件下佩戴瞄准具头盔时,头和头盔的共振频率,共振频率点的正弦振动以及随机振动对头盔稳定性和目标跟踪能力的影响,为飞行头盔的设计和使用提供依据。方法选取被试6人,体检合格,佩戴适体的头盔。头盔上安装瞄准具或激光器。受试者坐在弹射座椅上,座椅刚性固定在振动台上。在振动台、座椅、头、头盔上分别固定安装加速度传感器。拉杆式线性位移传感器固定在面部,拉出端连接在头盔上。受试者的前面有一显示器,显示器上有一运动着的目标。先进行正弦扫描振动试验,频率范围2~110 Hz,确定头和头盔的共振频率。然后在共振频率点进行正弦振动试验,受试者观察瞄准显示信息或进行目标跟踪,测量头盔位移。最后进行随机振动试验。结果头和头盔的共振频率4.5 Hz左右。头盔位移在0.5~6.7 mm之间,振幅对头盔的位移有较大影响。振动对目标跟踪误差和有效跟踪时间有非常显著性影响。结论佩戴头盔后,人体头部仍为低频响应;振动对目标跟踪能力有显著性影响。     

Theoretical and experimental mass-sensitivity analysis of polymer-coated SAW and STW resonators for gas sensing applications

Polymer-coated surface transverse waves (STW) resonators have recently been successfully studied for organic gas sensing applications. The first results indicate increased absolute and even relative sensitivity as compared to similar resonators with surface acoustic waves (SAW). However, the gain in sensitivity is accompanied by the adverse effect of an increased attenuation and the advantage frame is difficult to establish quantitatively. In this paper, a new set of experimental samples with Parylene C-coated quartz substrates are studied. The samples are matched in frequency and wavelength. The results are compared and the obtained features explained using available theoretical algorithms for analyzing layered SAW and Love configurations, and a recently developed STW algorithm. The approximate limits of advantageous applicability of the STW resonator gas sensors are discussed.     

Experimental evidence for mode shape influence on acceleration-induced frequency shifts in quartz resonators

Experimental results are presented to support the hypothesis that the shape and location of the active region of vibration in a thickness shear mode quartz resonator are the dominant factors in determining the acceleration sensitivity of the resonator. The shape and location of the mode in a real world resonator vary sufficiently from unit to unit (due to material and processing variations) that all other considerations are overwhelmed. It is shown experimentally that the mode shape and/or location can be trimmed with energy trapping by judicious addition or subtraction of mass to produce resonators with improved acceleration sensitivity.     

计及压电效应时矩形振子的三维振动研究

在计及压电效应的情况下，本文利用解析方法对有限尺寸压电陶瓷矩形振子的三维振动进行了研究，推出了振子耦合振动的频率方程，并对振子的振动模式进行了分析。理论研究表明，利用本文中的解析法研究振子的耦合振动，计算简单、物理意义明显。与传统的一维理论分析方法及数值方法相比，由于本研究考虑了振子的压电效应以及不同振动模式不同的相互耦合，因此，振子的理论计算频率与测量值更加符合。     

Extremely low thermal noise floor, high power oscillators usingsurface transverse wave devices

This paper presents state-of-the-art results on 1-GHz surface transverse wave (STW) oscillators running at extremely high loop power levels. The high-Q single-mode STW resonators used in these designs have an insertion loss of 3.6 dB, an unloaded Q of 8000, a residual PM noise of -142 dBc/Hz at a 1-Hz carrier offset, and operate at an incident power of up to +31 dBm in the loop. Other low-Q STW resonators and coupled resonator filters (CRF), with insertion losses in the 5-9 dB range, can conveniently handle power levels in excess of two Watts. These devices were incorporated into voltage controlled oscillators (VCO's) running from a 9.6-V dc source and provide an RF output power of +23 dBm at an RF/dc efficiency of 28%. Their tuning range was 750 kHz and the PM noise floor was -180 dBc/Hz. The oscillators, stabilized with the high-Q devices and using specially designed AB-class power amplifiers, delivered an output power of +29 dBm and exhibited a PM noise floor of -184 dBc/Hz and a 1-Hz phase noise level of -17 dBc/Hz. The 1-Hz phase noise level was improved to -33 dBc/Hz using a commercially available loop amplifier. In this case, the output power was +22 dBm. In all cases studied, the loop amplifier was found to be the factor limiting the close-to-carrier oscillator phase noise performance     

Acceleration sensitivity of surface wave resonators

In light of the substantial performance advantages of STW over SAW in various areas, theoretical and experimental studies of the acceleration sensitivities of STW and SAW resonators have been undertaken. The purpose of the studios has been to understand the fundamental nature of STW and SAW acceleration sensitivities, and to determine whether the performance advantages of STW seen in other areas extend to the case of acceleration sensitivity. The basic approach utilizes the perturbation theory developed by Tiersten to calculate the acceleration sensitivities of both STW and SAW resonators. The acceleration-induced bias is conveniently written in terms of acceleration-induced deformation gradients and factored elastic stiffness expressions. This representation clarifies important concepts regarding the frequency shift and the involved elastic constants, and provides the designer with insight into the basic nature of the problem. The dependencies of the normal acceleration sensitivities on substrate and mode shape parameters and the fundamental nature of plate flexure are discussed at length. The calculations compare favorably to recent experimental results     

The sensitivity of human mesenchymal stem cells to vibration and cold storage conditions representative of cold transportation

In the current study, the mechanical and hypothermic damage induced by vibration and cold storage on human mesenchymal stem cells (hMSCs) stored at 2–8°C was quantified by measuring the total cell number and cell viability after exposure to vibration at 50 Hz (peak acceleration 140 m s⁻² and peak displacement 1.4 mm), 25 Hz (peak acceleration 140 m s⁻², peak displacement 5.7 mm), 10 Hz (peak acceleration 20 m s⁻², peak displacement 5.1 mm) and cold storage for several durations. To quantify the viability of the cells, in addition to the trypan blue exclusion method, the combination of annexin V-FITC and propidium iodide was applied to understand the mode of cell death. Cell granularity and a panel of cell surface markers for stemness, including CD29, CD44, CD105 and CD166, were also evaluated for each condition. It was found that hMSCs were sensitive to vibration at 25 Hz, with moderate effects at 50 Hz and no effects at 10 Hz. Vibration at 25 Hz also increased CD29 and CD44 expression. The study further showed that cold storage alone caused a decrease in cell viability, especially after 48 h, and also increased CD29 and CD44 and attenuated CD105 expressions. Cell death would most likely be the consequence of membrane rupture, owing to necrosis induced by cold storage. The sensitivity of cells to different vibrations within the mechanical system is due to a combined effect of displacement and acceleration, and hMSCs with a longer cold storage duration were more susceptible to vibration damage, indicating a coupling between the effects of vibration and cold storage.     

超精密装置PID振动控制系统的仿真研究

 在仿生啄木鸟头部独特生物构造和隔振机理的基础上，采用主动隔振技术建立了超精密装置隔振系统结构及动力学模型． 结合超精密装置隔振系统的结构特点和性能要求，采用闭环PID主动控制系统，用Matlab软件进行了仿真分析．仿真分析结果表明，该振动控制系统宽频率范围内具有良好的减振效果，该系统可应用于超精密\测量、超精密制造设备的隔振领域．     

A surface transverse wave-based MSK system

A minimum-shift-keyed (MSK) system using one 1-GHz surface-transverse-wave (STW) resonator in the transmitter and two identical STW resonators in the receiver is described. It is shown to operate with data rates of over 100 kb/s and consume 150 mW. The system has a very high sensitivity and is tolerant to additive noise. Since the signal is never up- or down-converted. this system eliminates high power consumption. The system should find applications in cellular radios and in industrial communications.     

一种准零刚度车载隔振系统的设计与试验研究

针对车辆行驶工况环境以及振动频率,研制了一种空间占比小、安装方便的准零刚度(quasi-zero-stiffness,QZS)车载隔振系统。将垂向弹簧与两个对称的负刚度结构并联,负刚度机构用于刚度校正,通过静力学特性分析,初步确定了系统在平衡位置具有准零刚度的参数条件,在推导中引入了加工误差系数,分析了加工误差系数对系统准零刚度的影响机理。建立了系统非线性动力学方程,采用平均法求解了系统在车体简谐位移激励下的动力学响应,分析了系统参数和激励幅值对位移传递率的影响。在此基础上,设计制作了准零刚度隔振系统,进行了不同激励幅值、激励频率下的测试,得到了实测的位移传递率幅频响应曲线,并与理论计算结果进行了比较。另外,还通过TruckSim/Simulink联合仿真进行了车载随机激励工况仿真分析。研究表明,试验与理论结果吻合较好,验证了准零刚度隔振系统理论建模和分析方法的正确性。准零刚度的起始隔振频率在1.4 Hz左右,优于线性系统的起始隔振频率2.9 Hz。与车体相应相比,隔振后的位移响应均方根值降低80%以上,加速度均方根值降低90%左右,且稳态时准零刚度隔振系统的稳定性较好,具有良好的隔振性能。     

柱形空气衬垫振动传递特性的试验研究

目的 研究柱形空气衬垫的振动传递特性,以获取振动传递率曲线。方法 在频率为3~100 Hz区间对柱形空气衬垫和确定载荷质量形成的振动系统进行正弦扫频振动试验,分析初始内压和厚度对其振动传递特性的影响规律。结果 初始内压对空气衬垫的隔振能力没有显著影响,3种初始内压下振动系统的共振频率均在35 Hz左右,传递率峰值集中在11左右。当厚度增大时,共振频率和传递率峰值同时减小,空气衬垫隔振能力增强。结论 在满足缓冲性能的前提下,选择合适的初始内压,以及采用多层空气衬垫可显著提高其隔振能力。研究结果可为柱形空气衬垫的缓冲隔振包装设计提供基本依据。     

弹性车体垂向运行平稳性一系最优控制研究

采用基于轨道谱及包括轮轴间时延预瞄的最优控制算法,在一系悬挂中加入主动控制,设计其主动控制规律,从降低轨道至车体振动的传递入手,对铁道车辆弹性车体垂向动力学模型进行仿真分析。结果表明,该最优控制算法对车辆系统的振动有较好的抑制作用;可以改善轨道至弹性车体中部的振动加速度传递率,在控制车体刚体振动的同时,也能抑制整车的弹性振动;最优控制算法对车辆系统的1Hz左右的低频振动、以及包含人体垂向振动敏感频域(4Hz-8Hz)的4Hz~10Hz频率内的振动衰减明显,但对车体高频振动作用不大。并与二系主动悬挂系统比较,发现一系主动悬挂能更有效的控制车体的弹性振动,且抑制的频率范围较宽,车辆运行平稳性更佳,为今后弹性车体减振措施选择提供依据。     

Gigahertz range resonant devices for oscillator applications using shear horizontal acoustic waves

It is shown that surface transverse wave (STW) resonant devices are not only very well suited for stable oscillator applications but have some unique features offering greater design flexibility than their surface acoustic wave (SAW) counterparts. Various designs for single- and multimode resonators and resonator filters are presented, and their properties in respect to applications in stable fundamental-mode fixed-frequency and voltage-controlled oscillators in the range of 750 MHz to 2 GHz are discussed. Characteristics of SAW and STW two-port metal strip resonators using identical designs are compared. Data from frequency trimming on STW resonators, using heavy ion bombardment, are presented.     

Scattering matrix approach to STW resonators

The scattering matrix method was used for the analysis of surface transverse wave (STW) resonators on quartz. An expression for the transfer function of the resonators with different numbers of electrodes in the reflectors was derived. It was found that, for a proper ratio of these numbers, the spurious signal level below the resonance frequency can be lowered. The STW resonator for the frequency near 1090 MHz was designed, fabricated, and measured. By matching the measured and calculated transfer functions, the velocity, the electromechanical coupling coefficient, and the reflection coefficient of one aluminium strip of the STW on the 36°Y-cut quartz were determined. The insertion loss about 7 dB, loaded quality coefficient near 4200, and the spurious signal level about 5 dB lower compared with the resonance one were obtained for the resonator     

Microphonic sensitivity of surface-acoustic-wave resonators

The shift in resonant frequency due to acceleration has been measured for surface-acoustic-wave resonators (SAWRs). SAWR devices were subjected to vibration from 5 Hz to 10 kHz with peak accelerations ranging from 10(-2) to 10(3) g. The vibration was applied both normal to and in the plane of propagating surface wave yielding microphonic sensitivities on the order of 1 ppb/g. To confirm the results of the direct measurement method, an oscillator loop was closed around the vibrated SAWR and the magnitudes of the FM sidebands were measured to indicate the resulting frequency shift. Several bulk crystal resonators were also measured and it was found that the microphonic sensitivities were generally comparable in magnitude to those of the SAWRs but spanned much wider ranges.     

滚球型准零刚度隔振器的特性分析

针对工程实践中的低频隔振难题,提出一种紧凑的、带滚球装置的准零刚度隔振器。首先,对隔振器进行了静力学分析,得到了实现准零刚度的参数条件;其次,建立了隔振系统动力学模型,利用谐波平衡法分析了系统频响特性及隔振性能,讨论了激励幅值和阻尼对响应的影响;最后,利用ADAMS对系统动力学特性进行仿真及隔振效果评估。结果表明,与相应的线性隔振系统相比,准零刚度隔振器的起始隔振频率显著降低,且在低频范围内力传递率比线性系统低得多。因此,滚球装置提供的负刚度明显降低了系统竖向总刚度,使系统具有优异的低频隔振性能,更重要的是紧凑的设计使其更易工程化。     

动力装置主动隔振系统硬件设计

随着人们对工作环境、设备可靠性及耐用度、加工精度和设备隐蔽性的要求不断提高,对于振动控制的需求越来越多。单纯的被动隔振系统无法抑制船舶电机频率1.414倍频以下的振动。主动隔振系统利用作动器产生与激振力相反的作用力可以有效地抑制低频振动。本文以船舶电机为控制对象,针对抑制200 Hz以下的低频振动开发了一套主动隔振系统。系统中采用加速度信号作为系统输入或反馈,以DSP+FPGA双核处理架构作为控制核心,最终以电磁作动器作为执行机构,通过实验验证,该系统可以达到预期隔振效果,抑制自身频率1.414倍频以下的振动。