化学机械抛光工艺中的抛光垫

抛光垫是晶片化学机械抛光中决定表面质量的重要辅料。研究了抛光垫对光电子晶体材料抛光质量的影响：硬的抛光垫可提高晶片的平面度;软的抛光垫可改善晶片的表面粗糙度;表面开槽和表面粗糙的抛光垫可提高抛光效率;对抛光垫进行适当的修整可使抛光垫表面粗糙。     

高精度氮化硅陶瓷球批量加工研磨工艺研究

为解决高精度氮化硅陶瓷球批量研磨加工的问题,将超精密研磨技术应用到氮化硅陶瓷球的加工实验中.开展了研磨过程的分析,建立了不同研磨阶段陶瓷球球度、表面质量及材料去除率与所选不同大小粒度磨料之间的关系,并提出了对比分析的方法,在通过专业设备检测的基础上对成品球球度、表面粗糙度和振动值进行了评价.研究结果表明,氮化硅陶瓷球能够批量生产且球度达到0.062μm以下,表面粗糙度达到1.48 nm以下,振动值达到24 dB以下,实现了批量生产G3级氮化硅陶瓷球的目的.     

回转类零件的数控柔性滚压研究

阐述了一种在数控车床上对回转类零件进行滚压的工艺方法，通过滚压工具向工件表面施加力产生变形，滚压力大小可根据工况进行调节。工件上所产生的变形能显著提高工件表面的光洁度和硬度。调整不同的滚压力和滚压速度可精整出不同的滚压效果。     

雾化抛光氮化硅陶瓷基体的工艺参数优化

通过正交试验对氮化硅陶瓷基体进行超声精细雾化抛光,研究抛光工艺参数(抛光液流量、抛光压力、抛光盘转速)对抛光速率和表面粗糙度的影响。以抛光后氮化硅陶瓷的材料去除率和表面粗糙度为评价指标,根据正交试验结果得到最优参数组合,并与传统的抛光效果进行试验对比。结果表明:研究的3种参数中,对材料去除率的影响程度由高到低依次为雾液流量、抛光压力、抛光盘转速,对抛光后工件表面粗糙度的影响程度由高到低依次为抛光盘转速、雾液流量、抛光压力;在相同的实验条件下,精细雾化抛光的材料去除率与表面粗糙度与传统抛光接近,但精细雾化抛光的抛光液用量仅为传统用量的12.5%,有效减少了资源的浪费。     

化学机械抛光技术

化学机械抛光应用 化学机械抛光技术是目前最好的实现全局平面化的工艺技术，加工表面具有纳米级型面精度和亚纳米级表面粗糙度，同时表面和亚表面无损伤，已接近表面加工的极限。广泛应用在集成电路、计算机磁头，硬磁盘等超精密表面加工，如化学机械抛光应用在半导体工业中的层间介电介质，镶嵌金属W、Al、Cu、Au，多晶硅，导体，绝缘体，硅氧化物等的平坦化工。     

基于砂轮法向跟踪的回转曲面磨削研究

在回转曲面的磨削中,采取小直径平行砂轮代替圆弧砂轮的方法,保证曲面磨削点的法向始终与砂轮表面垂直,实现砂轮法向跟踪磨削.根据磨削轨迹,建立了磨削表面残留高度模型,分析了砂轮半径、工件曲率和进给速度对残留高度的影响.并进行磨削试验,得出了砂轮半径、工件曲率及进给速度对表面粗糙度的影响曲线,其变化规律与残留高度的变化规律基本一致,证明在回转曲面磨削中,可以通过控制残留高度的大小来改善磨削表面粗糙度.     

抛光液pH值等对硬盘玻璃盘基片化学机械抛光的影响

随着硬盘存储密度的增大、转速的提高、磁头飞行高度的降低,对硬盘基板材料及基板表面质量提出了更高的要求。采用纳米SiO2作为抛光磨料,在不同抛光液条件下(pH值、表面活性剂、润滑剂等),对玻璃基片化学机械抛光去除速率和表面质量的变化规律进行了研究,并利用原子力显微镜(AFM)和光学显微镜观察了抛光表面的微观形貌。结果表明,玻璃基片去除速率在酸性、碱性条件下变化趋势相近,即随着pH值的升高,材料去除速率先增大后减小。加入一定量的表面活性剂和润滑剂使得去除速率有一定程度的下降,但是表面粗糙度明显降低,并且表面没有出现颗粒吸附现象。     

蓝宝石化学机械抛光时磨粒运动轨迹及抛光效果研究

通过化学机械抛光工艺,获得表面平整度和粗糙度优良的蓝宝石晶片,提高蓝宝石键合接触面的表面性能。采用数值分析软件对蓝宝石晶片化学机械抛光过程中磨粒的运动轨迹进行仿真,结果发现,随着晶片转速的上升,磨粒的覆盖区域增大,当晶片转速与抛光盘转速接近于1∶1时,磨粒的抛光区域覆盖整个晶面。采用控制变量实验的方法研究摆臂的运动和抛光盘的转速对抛光效果的影响,并采用AFM对抛光后的蓝宝石晶片表面形貌进行分析。结果表明,抛光盘转速对抛光效果的影响最大,而移动幅度与移动速度的影响较小。通过调整晶片转速,蓝宝石晶片抛光后达到了键合工艺所要求的表面平整度和表面粗糙度要求。     

基于响应曲面法的YG8硬质合金刀片化学机械抛光工艺参数优化

为了快速确定YG8前刀面抛光的最佳工艺参数,提高加工效率和精度,利用响应曲面法对YG8硬质合金刀片抛光工艺进行优化试验研究。通过单因素试验确定抛光转速、抛光压力、磨粒粒径和磨粒浓度的水平,并对4个工艺参数进行中心复合设计试验。建立了材料去除率RMR和表面粗糙度Ra的预测模型,基于响应曲面法优化工艺参数获得最佳工艺参数为抛光转速65.5 r/min、抛光压力156.7 kPa、磨粒粒径1.1 μm、磨粒浓度14%,此时得到了最小表面粗糙度预测值Ra=0.019 μm,材料去除率RMR=56.6 nm/min。试验结果表明,基于响应曲面法的材料去除率与表面粗糙度预测模型准确有效。     

Ta-W合金的化学机械抛光实验研究

针对Ta-W合金材料圆薄片零件化学机械抛光工艺,设计了Ta-W合金材料化学机械抛光抛光液,并探讨了抛光液各组分的含量及抛光工艺参数对抛光速率和抛光件表面质量的影响。结果表明,当抛光液中磨料SiO2溶胶质量分数为40％-65％时,抛光速率也达到较高值并在一定的硅溶胶含量范围内波动不大;当抛光液中有机碱的质量分数为4％-6％时,抛光速率达到最大值;随着氧化剂含量的增加,去除速率几乎成线性增加,但随氧化剂含量的增大表面状态变差,故应控制氧化剂的含量;随着抛光液流量的增加,抛光速率也增大,但在流量增加到200mL／min后,速率的增加变得缓慢。     

Viscoelastic behavior of polishing pad: Effects on edge roll-off during silicon wafer polishing

In semiconductor device fabrication, surface flatness of silicon wafers has a significant impact on the chip yield. Hence, there is a strong demand to prevent the deterioration in surface flatness near the wafer edge due to edge roll-off during polishing. In the present study, we investigate the viscoelastic behavior of polishing pads and its effects on the uniformity of material removal distribution near the wafer edge. On the basis of the findings, we propose polishing conditions required to improve surface flatness near the wafer edge. The double-sided polishing experiments performed using silicon wafers reveal that the proposed polishing conditions effectively reduce edge roll-off.     

铝合金超声波表面光饰加工技术研究

首先介绍超声波表面光饰加工的原理,以航空工业中常见铝合金材料2D12及LC9为研究对象,采用超声波加工和常规加工对比的方法,研究超声波表面光饰加工技术对铝合金疲劳性能、表面组织及镀覆性能的影响。通过试验对比可以得出结论:超声波表面光饰加工使表面产生压应力,优化表层组织,大幅度提高表面粗糙度;表面硬质阳极氧化和镀铬后,镀(化)层质量不低于常规加工的试样;经过超声波表面光饰加工的试件疲劳寿命有较大幅度的提高。     

Dependence of pad performance on its texture in polishing mono-crystalline silicon wafers

Mono-crystalline silicon wafers are important materials in the semiconductor industry for fabricating integrated circuits and micro-electro-mechanical systems. To ensure high surface integrity of polished wafers, the effect of pad texture and its variation on the pad performance needs to be understood. This paper studies experimentally the dependence of pad performance on its texture deterioration by investigating its correlation with polishing time, polishing pressure, and material removal rate. The study concludes that material removal rate decreases as the cylindrical cell structure of a pad is gradually deteriorated, that there is a pad life limit beyond which polishing quality can no longer be maintained, and that the workable pad life can be extended to a certain degree by applying higher polishing pressure.     

微细铣削铝合金表面粗糙度的实验研究

利用直径为2 mm的立铣刀对铝合金进行铣槽实验,研究分析切削速度与每齿进给量交互作用对加工槽底表面粗糙度的影响.实验结果表明:每齿进给量小于4μm时,随着切削速度的提高表面粗糙度值呈先减小后增大的变化趋势;而每齿进给量大于6μm时,随切削速度的提高表面粗糙度值先增大后减小.切削速度较低时,表面粗糙度值随每齿进给量的增大先减小后增大;但切削速度大于30 m/min时,随着每齿进给量的增大,表面粗糙度值呈现逐渐增大的趋势.     

An Experimental and Theoretical Study of Hybrid Bearing Micropitting Performance under Reduced Lubrication

Hybrid bearings—that is, bearings with ceramic rolling elements and steel rings—are often used in applications with reduced (i.e., boundary or mixed) lubrication conditions. The mechanisms by which hybrid bearings perform significantly better than full-steel ones in these cases are so far unclear, although a number of published works have shown experimental results in which appreciable performance benefits were obtained by the use of hybrid bearings under boundary or mixed lubrication. In this article, the reduced lubrication performance of hybrid rolling contacts, versus full-steel ones, is studied in detail by means of rolling bearing fatigue experiments and a theoretical micropitting model. It is found that the large improvement in surface fatigue resistance of hybrid contacts cannot be explained solely on the basis of the unavoidable differences in some of the roughness parameters existing between the full-steel and hybrid contacts. It is also necessary to take into account a considerable reduction in the effective boundary friction coefficient of the hybrid contact. In the numerical micropitting simulations it was found that the boundary friction coefficient of a hybrid contact must be about two times lower than that for the corresponding full-steel contact, in order to be able to predict the experimental observations reasonably well. A similar ratio of the boundary friction coefficients was obtained in a number of dedicated tests, thus confirming the results of the micropitting model. The mechanisms of the strong micropitting resistance of hybrid bearings under reduced lubrication conditions are discussed in detail, shedding new light on the operational tribology and performance capabilities of bearings with rolling elements made of silicon nitride ceramics.     

Experimental study on operating temperature in laser-assisted milling of silicon nitride ceramics

Operating temperature plays a significant role in laser-assisted milling (LAMill) of silicon nitride ceramics. Understanding the features of temperature variation can improve the performance of LAMill. Based on the analysis of operating temperature, this paper aims to provide guidelines on parameter selection for LAMill from three aspects: laser?Csilicon nitride interaction mechanism, effect of parameters on temperature, and evaluation of surface quality of the machined workpieces. First, the laser?Csilicon nitride interaction mechanism is explored via heating experiments. It is found that the formation of silica bubbles at the thin top layer of the workpiece can slightly increase the temperature of silicon nitride workpieces due to the heat energy released from the oxidation process. Then, the trends of temperature variations in LAMill are obtained through a parametric study. The key parameters such as laser power, laser beam diameter, feed rate, and preheat time are highlighted. At last, the surface quality of the machined workpieces under different operating temperatures is evaluated in terms of edge chipping, surface finish, and surface residual stress. It is shown that high operating temperature leads to low cutting force, good surface finish, small edge chipping, and low residual stress. In addition, the temperature range for brittle-to-ductile transition should be avoided since the cutting force decreases slowly due to the rapid increase of fracture toughness.     

Parametric analysis on electrochemical discharge machining of silicon nitride ceramics

The electrochemical discharge machining (ECDM) process has a potential in the machining of silicon nitride ceramics. This paper describes the development of a second order, non-linear mathematical model for establishing the relationship among machining parameters, such as applied voltage, electrolyte concentration and inter-electrode gap, with the dominant machining process criteria, namely material removal rate (MRR), radial overcut (ROC) and thickness of heat affected zone (HAZ), during an ECDM operation on silicon nitride. The model is developed based on response surface methodology (RSM) using the relevant experimental data, which are obtained during an ECDM micro-drilling operation on silicon nitride ceramics. We also offer an analysis of variance (ANOVA) and a confirmation test to verify the fit and adequacy of the developed mathematical models. From the parametric analyses based on mathematical modelling, it can be recommended that applied voltage has more significant effects on MRR, ROC and HAZ thickness during ECDM micro-drilling operation as compared to other machining parameters such as electrolyte concentration and inter-electrode gap.     

Surface roughness and material removal rate of lapping process on ceramics

Lapping is a widely used surface finishing process for ceramics. An experimental investigation is conducted into the lapping of alumina, Ni−Zn ferrite and sodium silicate glass using SiC abrasive to study the effect of process parameters, such as abrasive particle size, lapping pressure, and abrasive concentration, on the surface roughness and material removal rate during lapping. A simple model is developed based on the indentation fracture and abrasive particle distribution in the slurry to explain various aspects of the lapping process. The model provides predictions for the surface roughness,R _a andR _t , on the machined surface and rough estimation for the material removal rate during lapping. Comparison of the predictions with the experimental measurements reveals same order of magnitude accuracy.     

Surface strength of silicon nitride in relation to rolling contact performance measured on ball-on-rod and modified four-ball tests

Silicon nitride (Si₃N₄) has been used in various rolling contact applications in turbomachinery, automotive and power industry. It is favoured to replace conventional steel due to its low density, low friction, corrosion resistance and good performance under extreme condition. However, a major limitation of its wider application is its high material and machining cost, especially the cost associated with the finishing process. In the present study, a low cost sintered and reaction bonded silicon nitride (SRBSN) is used to study the surface machining effects on its rolling contact performance. Attempt has been made to link the surface strengths of Si₃N₄ derived from half-rod and C-sphere flexure strength specimens to the rolling contact lifetimes of Si₃N₄ rod and ball specimens. The rolling contact fatigue tests are carried out on ball-on-rod and modified four ball machines. Three types of surfaces with coarse, fine and conventional finishing conditions are examined. Flexure strength tests on half-rod and C-sphere show an increasing surface strength from specimens with coarse, fine to conventionally machined conditions. During rolling contact fatigue test of as-machined specimens, there are no failures observed on both ball-on-rod and four ball tests after 100 million stress cycles. However, there is a trend of decreasing wear volumes measured on the contact path of rods and balls with coarse, fine and conventional conditions. In four ball test, spall failures are observed on pre-crack specimens. There is a trend of increasing rolling contact fatigue lifetime from pre-cracked specimens with coarse, fine to conventional machining conditions.