A 45-channel 100 GHz AWG based on Si nanowire waveguides

A 45-channel 100 GHz arrayed waveguide grating (AWG) based on Si nanowire waveguides is designed, simulated and fabricated. Transfer function method is used in the spectrum simulation. The simulated results show that the central wavelength and channel spacing are 1 562.1 nm and 0.8 nm, respectively, which are in accord with the designed values, and the crosstalk is about ?23 dB. The device is fabricated on silicon-on-insulator (SOI) substrate by deep ultraviolet lithography (DUV) and inductively coupled plasma (ICP) etching technologies. The 45-channel 100 GHz AWG exhibits insertion loss of 6.5 dB and crosstalk of ?8 dB. This work has been supported by the National High Technology Research and Development Program of China (No.2015AA016902), and the National Natural Science Foundation of China (Nos.61435013 and 61405188). E-mail:zhangjiashun@semi.ac.cn      

基于SOI的16通道200GHz阵列波导光栅

设计并制作了基于绝缘体上硅(SOI)材料的1×16阵列波导光栅(AWG).该AWG器件的中心波长为1 550 nm,信道间隔为200 GHz,采用了脊型波导结构.首先确定了波导的结构尺寸以保证单模传输,并利用束传播法(BPM)模拟了波导间隔、弯曲半径和锥形波导长度等参数对器件性能的影响,对器件结构进行了优化,同时也利用BPM方法模拟了器件的传输谱.模拟结果显示:器件的最小信道损耗为4.64 dB,串扰小于-30 dB.根据优化的器件结构,通过光刻等半导体工艺制作了AWG,经测试得到AWG器件的损耗为4.52～8.1 dB,串扰为17～20 dB,能够实现良好的波分复用/解复用功能.     

用于单片集成的InP阵列波导光栅设计和制备

InP 阵列波导光栅(AWG)是InP 基单片多波长转换器中的重要单元。采用深脊型波导结构,设计了一种10通道、通道间隔200GHZ(1.6nm)的偏振无关型InP基阵列波导光栅。采用外延技术、光刻、感应耦合等离子体刻蚀技术等在实验室制造出了这种AWG。经过测试,插入损耗约为-8dB,串扰小于-17dB,中心通道和旁边通道的通道均匀性基本上在3dB左右。     

Eight-channel flat spectral response arrayed-waveguide multiplexer with asymmetrical Mach-Zehnder filters

An eight-channel flat spectral response arrayed-waveguide grating (AWG) multiplexer with asymmetrical Mach-Zehnder filters has been fabricated on the planar lightwave circuit (PLC). The monotonic spectral loss characteristics of AWG have been canceled by the opposite spectral response in the asymmetric MZ filter. The 1.5 dB bandwidth of 141 GHz and 3 dB bandwidth of 159 GHz are obtained for the 200 GHz channel spacing. The 1.5 dB bandwidth becomes 1.8 times wider than that of the conventional AWG. Crosstalks to neighboring and all other channels are less than -24 dB and the on-chip insertion losses range from 7.0 to 7.4 dB, respectively.     

Athermal Mach-Zehnder interferometer-synchronised arrayed waveguide grating multi/demultiplexer with low loss and wide passband

Described is a silica-based athermal 100 GHz-spacing 40-channel arrayed waveguide grating (AWG) with a Mach-Zehnder interferometer (MZI)-synchronised configuration that employs resin-filled grooves in the AWG and MZI. By suppressing the groove excess loss and using 1.5%-Delta waveguides, a low insertion loss of 3.2 dB and a wide 0.5 dB bandwidth of 45.9 GHz with athermal operation in the -5 to 65degC range and a compact chip size were achieved.     

1-GHz-spaced 16-channel arrayed-waveguide grating for a wavelength reference standard in DWDM network systems

We fabricated a 1-GHz-spaced 16-channel arrayed-waveguide grating (AWG) by using a new AWG configuration where the path of each arrayed waveguide winds backward and forward across a 4-in diameter wafer without crossing any other waveguides. The ultra-narrow (< 1 GHz) and stable transmission bands of this AWG can be used to construct a wavelength reference standard covering the S, C, and L bands in the dense wavelength-division-multiplexing network systems whose frequency deviation is /spl plusmn/160 MHz.     

Narrow-channel-spacing 32-channel AWG multiplexer with an innovative alignment method

A 32-channel 50 GHz spaced arrayed-waveguide grating（AWG） with our innovative configuration has been designed and fabricated. The performance of the device has been fully tested by using a system that consists of a tunable laser light source （TLS）, an optical power meter and a polarization controller. The insertion loss （IS） of the device is 4.2-7.4 dB. The crosstalk is about - 28 dB. The IS uniformity is less than 3.3 dB. With our configuration,the performance of the device has been enhanced effectively and the difficulty in alignment process has been decreased obviously.     

基于3 μm-SOI的波分复用/解复用器与电吸收型VOA的单片集成

波分复用/解复用器与可调光衰减器的是光通信系统中的重要元器件。为了得到制备工艺简单、响应速度快的二者的单片集成芯片,并且考虑到其与其他不同光器件的集成可能性,在绝缘体上硅材料制作了16通道、信道间隔200 GHz的阵列波导光栅复用/解复用器与电吸收型可调光衰减器的单片集成。该器件的片上损耗小于7 dB,串扰小于-22 dB。电吸收型VOA在20 dB的衰减量下的功耗为572 mW （106 mA,5.4 V）。此外,该器件可以实现光功率的快速衰减,在0~5 V的外加方波电压下,VOA上升及下降时间分别为50.5 ns和48 ns。     

Flat-top silica-based arrayed waveguide grating with 40-channels

A wavelength multiplexer or demultiplexer plays ani mportant role in all wavelength division multiplexing( WDM) system.Silica-basedarrayed waveguide gratings(AWGs) offer attractive featuresinthis area due to theadvantage of large output channels and lowlo…     

Crosstalk reduction in arrayed-waveguide grating multiplexer/demultiplexer using cascade connection

This paper proposes a cascade-connected arrayed-waveguide grating (AWG) as a solution to the problem of crosstalk accumulation in a large-scale AWG multiplexer/demultiplexer (MUX/DEMUX) and demonstrates a 64-channel cascaded AWG module with a very low background crosstalk of less than -80 dB and a total crosstalk of about -34 dB. In this paper, the authors densely integrate 64 additional compactly designed crosstalk-suppressing AWGs whose bandwidths were carefully optimized and directly attach them to a conventional 64-channel AWG. Consequently, in addition to a very low crosstalk, a low insertion loss and a compact size without passband shape distortion are achieved with this module. Based on the performance of the cascaded AWG module, it is then estimated that it is possible to realize a 1000-channel AWG MUX/DEMUX that is free from the problem of crosstalk accumulation.     

基于石英衬底的16通道二氧化硅可调复用器/解复用器的单片集成

本文是关于可调复用器/解复用器的单片集成,它由一个16通道200 GHZ的二氧化硅阵列波导光栅和一组马赫增德尔干涉型热光可调光衰减器阵列构成。该集成器件是基于石英衬底的,与基于硅衬底的器件相比,省去了沉积下包层的工艺步骤,并且降低了器件功耗。该集成器件的插入损耗是-5 dB,串扰小于-22 dB。在衰减为20 dB的时候每个通道的功耗只有110 mW。     

Crosstalk reduction in N×N WDM multi/demultiplexers bycascading small arrayed waveguide gratings (AWG's)

This paper shows a new scheme which improves the crosstalk performance of large optical multi/demultiplexers, a key component in wavelength division multiplexing (WDM) systems. This scheme uses arrayed waveguide gratings (AWG's) of various sizes and requires no additional equipment. It is well known that a large multi/demultiplexer can be constructed by cascading small multi/demultiplexers. We have studied the impact of the number and size of AWG stages on crosstalk performance. This paper proves that to obtain a multistage multi/demultiplexer with minimum crosstalk, the total channel number of each AWG stage must be minimized. For example, cascading 10-channel AWG's and 11-channel AWG's improves the crosstalk performance of a 110-channel multi/demultiplexer by about 7.5 dB. Furthermore, the crosstalk performance degradation due to fabrication error is theoretically investigated taking channel bandwidth into account. Optimum design parameters of multistage AWG's are introduced: When the AWG suppression ratio is 30 dB and the ratio of channel bandwidth to channel spacing is about 0.24, the degradation in crosstalk performance due to fabrication error is minimized. The tradeoff between the crosstalk performance and the efficiency in terms of hardware and wavelength are also discussed. It is discovered that this simple scheme can yield a crosstalk-free WDM router. Crosstalk reduction obtained by this scheme allows the realization of flexible multiwavelength networks based on wavelength routing     

Distributed 2- and 3-bit W-band MEMS phase shifters on glass substrates

This paper presents state-of-the-art RF microelectromechanical (MEMS) phase shifters at 75-110 GHz based on the distributed microelectromechanical transmission-line (DMTL) concept. A 3-bit DMTL phase shifter, fabricated on a glass substrate using MEMS switches and coplanar-waveguide lines, results in an average loss of 2.7 dB at 78 GHz (0.9 dB/bit). The measured figure-of-merit performance is 93/spl deg//dB-100/spl deg//dB (equivalent to 0.9 dB/bit) of loss at 75-110 GHz. The associated phase error is /spl plusmn/3/spl deg/ (rms phase error is 1.56/spl deg/) and the reflection loss is below -10 dB over all eight states. A 2-bit phase shifter is also demonstrated with comparable performance to the 3-bit design. It is seen that the phase shifter can be accurately modeled using a combination of full-wave electromagnetic and microwave circuit analysis, thereby making the design quite easy up to 110 GHz. These results represent the best phase-shifter performance to date using any technology at W-band frequencies. Careful analysis indicates that the 75-110-GHz figure-of-merit performance becomes 150/spl deg//dB-200/spl deg//dB, and the 3-bit average insertion loss improves to 1.8-2.1 dB if the phase shifter is fabricated on quartz substrates.     

Super compact optical add-drop multiplexer for FTTH applications based on low-loss polymer waveguide materials

Four- and eight-channel arrayed-waveguide grating (AWG) and fixed optical add-drop multiplexer (OADM) devices with channel spacing of 1200 and 600 GHz have been fabricated using super-high refractive index contrast (/spl Delta/n=0.020) triazine containing polymers. Accordingly, the size of the four-channel AWG was only 10/spl times/3 mm and the insertion loss was 3 dB.     

Si纳米线阵列波导光栅制备

采用绝缘层上Si(SOI)材料设计制备了3×5纳米线阵列波导光栅(AWG),器件大小为110μm×100μm。利用简单传输法模拟了器件的传输谱,并采用二维时域有限差分(FDTD)模拟中心通道输出光场的稳态分布,模拟结果表明,器件的通道间隔为11 nm,通道间的串扰为18 dB。通过电子束曝光(EBL)和感应耦合等离子(ICP)刻蚀制备了所设计的器件,光输出谱测试分析表明,器件中心通道的片上损耗为9 dB,通道间隔为8.36～10.40 nm,中心输出通道的串扰为6 dB。在误差允许范围内,设计和测试的结果一致。     

Low-crosstalk 10-GHz-spaced 512-channel arrayed-waveguide gratingmulti/demultiplexer fabricated on a 4-in wafer

We report a 10-GHz-spaced 512-channel arrayed-waveguide grating (AWG) multi/demultiplexer fabricated on a 4-in wafer. We achieved this by folding the 7-cm-long slab waveguides of a conventionally configured AWG, so that the whole configuration was contained in the wafer and then attached reflecting mirrors at the folded parts. Phase compensation of the fabricated AWG was performed by means of ultraviolet irradiation through a metal mask     

8通道-1.6nm Si纳米线阵列波导光栅的设计与制作

设计了基于绝缘层上硅(SOI)材料的8通道Si纳米线阵列波导光栅(AWG),器件的通道间隔为1.6nm,面积为420μm×130μm。利用传输函数法模拟了器件传输谱,结果表明,器件的通道间隔为1.6nm,通道间串扰为17dB。给出了结合电子束光刻(EBL)和感应耦合等离子(ICP)刻蚀技术制备器件的详细流程。光谱测试结果分析表明,器件通道间隔为1.3～1.6nm,通道串扰为3dB,中心通道损耗为11.6dB。     

Low-loss fibre-pigtailed 256 channel arrayed-waveguide gratingmultiplexer using cascaded laterally-tapered waveguides

A fibre-pigtailed 25 GHz-spacing 256 channel arrayed-waveguide grating (AWG) module has been fabricated. The module was composed of an AWG chip with a Δ of 1.5%, a fan-out planar lightwave circuit (PLC) with a A of 0.75%, an input fibre and two 128 fibre arrays. To improve the coupling loss of the 256 output fibres, a new PLC-fibre connection using cascaded laterally-tapered waveguides was developed. The fibre-pigtailing loss is reduced to only 1.1 dB and a multiplexer with a low insertion loss of 1.9-3.9 dB is realised     

Improve Channel Uniformity of an Si-Nanowire AWG Demultiplexer by Using Dual-Tapered Auxiliary Waveguides

Dual-tapered auxiliary waveguides at the exit of the waveguide array are introduced to improve the channel uniformity of an Si-nanowire-based arrayed waveguide grating (AWG) demultiplexer. By using a hybrid simulation method, the dual-tapered auxiliary waveguides of the AWG demultiplexer are optimized reliably and efficiently. A 12-channel AWG demultiplexer is designed as an example, and a small nonuniformity (< 0.5 dB) is achieved.     

Low‐Loss Compact Arrayed Waveguide Grating with Spot‐Size Converter Fabricated by a Shadow‐Mask Etching Technique

This paper describes a low‐loss, compact, 40‐channel arrayed waveguide grating (AWG) which utilizes a monolithically integrated spot‐size converter (SSC) for lowering the coupling loss between silica waveguides and standard single‐mode fibers. The SSC is a simple waveguide structure that is tapered in both the vertical and horizontal directions. The vertically tapered structure was realized using a shadow‐mask etching technique. By employing this technique, the fabricated, 40‐channel, 100 GHz‐spaced AWG with silica waveguides of 1.5% relative index‐contrast showed an insertion‐loss figure of 2.8 dB without degrading other optical performance.