Development of a simple microsystems membrane probe card

Presented here are details of the development of a novel membrane integrated circuit (IC) probe card structure based on microsystems technology. The device design allows probing of both solder bumps and pads. A self-limiting sensor was integrated to prolong device lifetime. Comparison with and discussion of the use of modelling is made. Possible enhancements to the probing structure are discussed to improve alignment and measurements. Also shown is data using our microsystems probe card to access a simple IC device. Our device has a contact resistance of less than 0.5 Ω for a force of 0.004 N. A method to implement our probing structure for commercial application and the potential developments which can be made to improve its ease of use are then discussed.

     

Probe recording technology using novel MEMS devices

In this paper, we present novel micro-electro-mechanical systems (MEMS) devices for unique probe recording technology, where the 1-D cantilever probe array approach requires a small number of cantilever probe tips for a large media platform and hence has higher reliability. The probe storage system is composed of three key MEMS devices: MEMS XY-stage, linear motor and 1-D cantilever probe array with integrated heater. The design and fabrication process of three MEMS devices are given with prototypes. Their performances are discussed with the experimental results. The compact MEMS XY-stage device can be driven with ±20 μm movement, in X- and Y-directions. The miniature linear motor is smoothly driven to move back and forth at the speed of 20 mm/s and step of 150 μm by 150 mA pulse driving current. The indented (writing) bit size of 100 nm on polymer media is achieved by the prototyped cantilever probe tip with integrated heater.     

Submicron-scale surface acoustic wave resonators fabricated by high aspect ratio X-ray lithography and aluminum lift-off

A submicron-scale surface acoustic wave (SAW) resonator fabricated by high-aspect-ratio X-ray lithography (XRL) and metal lift-off that operates at microwave frequencies is presented. We demonstrate that XRL is especially well suited for SAW device templating, as long submicron-scale interdigitated transducer structures can be batch patterned with excellent structure quality. 0.4–2.0 μm thick PMMA layers were structured by X-ray lithography shadow projection using silicon nitride-based X-ray masks. Structures with a critical lateral feature size of down to 200–700 nm were processed. The polymer structures served as templates in a subsequent aluminum lift-off process. The metal electrodes were successfully tested as SAW resonators for high frequency applications, e.g. around 1.3 GHz, using calibrated 1-port RF wafer probing measurements. Compared with standard fabrication techniques, the high structure quality of submicron-scale polymer templates made of unusually thick PMMA layers offers additional possibilities to fabricate thicker metal transducers.     

Thermally actuated microprobes for a new wafer probe card

A new type of MEMS microprobe was designed and fabricated which can be used for a nest generation wafer probe card. A prototype MEMS probe card consisting of an array of microprobes individually actuated by bimorph heating to make contact with the test chip was also fabricated. This probe card is called the CHIPP (Conformable, HIgh-Pin count, Programmable) card and can be designed to contact up to 800 I/O pads along the perimeter of a 1-cm² chip with a microprobe repeat distance of approximately 50 μm. Microprobes for a prototype CHIPP probe card have been fabricated with a variety of cantilever structures including Al-SiO₂, W-SiO₂ and Al-Si bimorphs, and with the resistive heater placed either inside or on the surface of the cantilever. Ohmic contacts between tips and bond pads were tested with contact resistance as low as 250 mΩ. The deflection efficiency varies from 5.23-9.6 μm/mW for cantilever lengths from 300-500 μm. The maximum reversible deflection is in the range of 280 μm. The measured resonant frequency is 8.16 kHz for a 50×500 μm device and 19.4 kHz for a 40×300 μm device. Heat loss for devices operating in air was found to be substantially higher than for vacuum operation with a heat loss ratio of about 2/1 for a heater inside the structure, and 4.25/1 for a structure with the heater as an outer layer of the cantilever     

Towards chip prototyping: a model for droplet formation at both T and X-junctions in dripping regime

Segmented flows in both T and X-junction glass microchannels are investigated. The effective pressure domain of use of the microchips are compared for two chemical systems. After studying the flow patterns and current empirical equations proposed in the literature, a new empirical equation is validated for both T and X-junctions allowing the prediction of not only the domain of use of the microchip in terms of flow rates knowing the viscosities of the two phases but also the droplets diameter, volume, spacing, and specific interfacial area. Specific interfacial area could be optimized using the model within our specific microsystems, and a maximum of 10,000 m^?1 is determined. Ensuing the definition of the model, several insights in the way to optimize segmented flows for different purposes are discussed, i.e., for the production of monodisperse populations of droplets and mass transfer optimization.     

Integration of optical waveguide on pneumatic balloon actuator for flexible scanner in endoscopic imaging diagnosis applications

This paper reports a flexible scanner consisting of a scanning actuator and optical waveguides for medical imaging applications such as endoscopic fluorescence imaging diagnosis. The 0.3-mm-thick and 5-mm-wide functional scanner was designed to be smaller enough than the 10 mm-diameter of channel of endoscope. The proposed device can be used to introduce an excitation light into the abdominal cavity or digestive tract. A pneumatic balloon actuator (PBA) consisting of polydimethylsiloxane (PDMS) is used as the scanning actuator for the scanner in consideration of its small, soft, and safe features. The SU-8 optical waveguides with high refractive index (n_SU-8 = 1.575) are integrated onto the PBA structure made of PDMS with a lower refractive index (n_PDMS = 1.405). Excitation light at a wavelength of 405 nm is transmitted through an optical fiber to the SU-8 waveguides. The outgoing light from the waveguide can be scanned by the bending motion of the PBA. The waveguide functions as a detector as well. Our developed device has successfully scanned, excited, and detected light from fluorescence beads at a wavelength of 540 nm distributed in a pseudo-tissue.     

用CPLD实现基于PC104总线的429接口板

根据429总线接口板的研究现状,提出了一种新的429接口板的研究方案,即基于PC104总线的两发四收429接口板.由于PC104板卡存在可利用空间小的特点,采用高集成度的复杂可编程逻辑器件CPLD实现与429总线的收发电路和与PC104总线之间的数据通信.CPLD的集成度高,可有效节省硬件资源,并且与专用集成电路相比,具有设计开发周期短、设计制造成本低、开发工具先进、测试简单和质量稳定等优点;与微处理器相比,具有处理速度快的优点,因此可以很好地提高该429接口板的性能.通过设计和实验该板卡可以正常稳定工作.     

Valve controlled fluorescence detection system for remote sensing applications

We demonstrate a microfluidics-based fluorescence detection device where the filters, source, detector, and electronically controlled valves are embedded into a Polydimethylsiloxane (PDMS)-based microfluidic chip. The device reported here has been specifically designed for chlorophyll a fluorescence sensing in autonomous systems, such as oceanic applications. In contrast to a monolithic approach, the modular approach made the fabrication of this device simpler and cheaper. For fluorescence detection, an InGaN/GaN LED is used as the excitation source to specifically excite chlorophyll a; a metal-dielectric Fabry?CPerot filter was used to extinguish out-of-band excitation. A simple Si photodiode is used as detector and provided with a thermally evaporated CdS emission filter to block the excitation source. This filter combination provides an excellent solution to the difficult problem of combining high-rejection excitation and emission filters in an integrated thin-film format. Furthermore, the metal-dielectric filter provides a much broader angular response than a comparable multilayer Bragg mirror, which is a key advantage in the integrated format. We use a novel paraffin wax-based valve design affords low power single-use actuation, between 0.5 and 1 J per actuation and withstands 0.6 bar differential pressure, which provides better performance than its previously reported counterparts. The remote valve-controlled operation of the fluorescence detection system is demonstrated, illustrating the measurement of a chlorophyll a solution, with a detection limit of 340 ??M and subsequent valve-controlled flushing of the measurement reservoir.     

Low-cost credit card-based microfluidic devices for magnetic bead immobilisation

We report a simple low-cost magnetic microfluidic device for magnetic bead separation and immobilisation. One dimensional arrays of localised high magnetic field gradients are constructed at the interfaces between regions magnetised with opposing polarities on the magnetic Fe₂O₃ composite stripes of credit cards. The localised high magnetic field gradients are employed to trap magnetic beads on the surface of the magnetic stripe, without the need for external magnetic components. A magnetic card writer was used to deterministically pattern the magnetic stripes of credit cards to define arrays of magnetic reversals. The fabrication of the device is based on PDMS to credit card bonding of simple flow channels. Experimental results demonstrate that magnetic beads can be captured with efficiencies of 85, 67 and 27 % at flow rates of 25, 50 and 100 μL min^?1, respectively. The results show that the credit card-based magnetic separator might offer an efficient, simple, low-cost alternative to traditional microfluidic magnetic separators for applications such as immunomagnetic cell separation.     

Fluidic interconnections for microfluidic systems: A new integrated fluidic interconnection allowing plug‘n’play functionality

A crucial challenge in packaging of microsystems is microfluidic interconnections. These have to seal the ports of the system, and have to provide the appropriate interface to other devices or the external environment.

Integrated fluidic interconnections appear to be a good solution for interconnecting polymer microsystems in terms of cost, space and performance. Following this path we propose a new reversible, integrated fluidic interconnection composed of custom-made cylindrical rings integrated in a polymer house next to the fluidic network. This allows plug‘n’play functionality between external metal ferrules and the system.

Theoretical calculations are made to dimension and model the integrated fluidic interconnection.

Leakage tests are performed on the interconnections, in order to experimentally confirm the model, and detect its limits.     

Manufacturing of microstructures with high aspect ratio by micromachining

The development of micromachining plays an important role in miniaturization of microsystems. Micromachining is a very flexible and compared to EDM or ECM a very fast machining process with a high material removal rate. A wide range of materials like polymers, metals and alloys as well as some sorts of ceramics can be machined. Also 3D-structures can be easily manufactured. Additionally, big advances have been made concerning the realization of high aspect ratios for small diameter end mills. Whereas end mills below 100 μm diameter are limited to an aspect ratio of 1.5, end mills of 100 μm diameter are available up to an aspect ration of ten now. A few years ago, end mills in this diameter range were uncoated. Nowadays, there was a big progress in the coating technology so that these end mills can be coated with layers as thin as 0.5 μm.     

Design and fabrication of microfluidic devices integrated with an open‐ended MEMS probe for single‐cell impedance measurement

When an electrical current with a low frequency is applied to a cell, the current passes through the outside of the cell. Thus, impedance measurements at low frequencies cannot be used to determine the pathological change of the cellular organelle taking place inside the cell. However, increasing the frequency of the electrical current makes the capacitive impedance of the cell decrease, allowing the electrical current to flow through the cell. This study presents the design and fabrication of a microfluidic device integrated with a coplanar waveguide open-ended micro-electro-mechanical-systems (MEMS) probe for the impedance measurement of the single HeLa cell in frequencies between 1 MHz and 1 GHz. The device includes a poly-dimethlysiloxane (PDMS) cover with a microchannel and microstructures to capture the single HeLa cell and a conductor-backed CPW fabricated using a silicon chip and two printed circuit boards (PCB). The effects of the substrate on the characteristic impedance of the conductor-backed coplanar waveguide (CBCPW) structure were investigated under three conditions by utilizing a time-domain reflectometer (TDR). Finally, impedance measurements using the proposed device and a vector network analyzer (VNA) are demonstrated for de-ionized (DI) water, alcohol, PBS, and a single HeLa cell.     

Arrays of high-aspect ratio microchannels for high-throughput isolation of circulating tumor cells (CTCs)

Microsystem-based technologies are providing new opportunities in the area of in vitro diagnostics due to their ability to provide process automation enabling point-of-care operation. As an example, microsystems used for the isolation and analysis of circulating tumor cells (CTCs) from complex, heterogeneous samples in an automated fashion with improved recoveries and selectivity are providing new opportunities for this important biomarker. Unfortunately, many of the existing microfluidic systems lack the throughput capabilities and/or are too expensive to manufacture to warrant their widespread use in clinical testing scenarios. Here, we describe a disposable, all-polymer, microfluidic system for the high-throughput (HT) isolation of CTCs directly from whole blood inputs. The device employs an array of high aspect ratio (HAR), parallel, sinusoidal microchannels (25 × 150 μm; W × D; AR = 6.0) with walls covalently decorated with anti-EpCAM antibodies to provide affinity-based isolation of CTCs. Channel width, which is similar to an average CTC diameter (10–20 μm), plays a critical role in maximizing the probability of cell/wall interactions and allows for achieving high CTC recovery. The extended channel depth allows for increased throughput at the optimized flow velocity (2 mm/s in a microchannel); maximizes cell recovery, and prevents clogging of the microfluidic channels during blood processing. Fluidic addressing of the microchannel array with a minimal device footprint is provided by large cross-sectional area feed and exit channels poised orthogonal to the network of the sinusoidal capillary channels (so-called Z-geometry). Computational modeling was used to confirm uniform addressing of the channels in the isolation bed. Devices with various numbers of parallel microchannels ranging from 50 to 320 have been successfully constructed. Cyclic olefin copolymer (COC) was chosen as the substrate material due to its superior properties during UV-activation of the HAR microchannels surfaces prior to antibody attachment. Operation of the HT-CTC device has been validated by isolation of CTCs directly from blood secured from patients with metastatic prostate cancer. High CTC sample purities (low number of contaminating white blood cells) allowed for direct lysis and molecular profiling of isolated CTCs.     

A cell electrofusion microfluidic chip with micro-cavity microelectrode array

A new cell electrofusion microfluidic chip with 19,000 pairs of micro-cavity structures patterned on vertical sidewalls of a serpentine-shaped microchannel has been designed and fabricated. In each micro-cavity structure, the two sidewalls perpendicular to the microchannel are made of SiO₂ insulator, and that parallel to the microchannel is made of silicon as the microelectrode. One purpose of the design with micro-cavity microelectrode array is to obtain high membrane voltage occurring at the contact point of two paired cells, where cell fusion takes place. The device was tested to electrofuse NIH3T3 and myoblast cells under a relatively low voltage (~9 V). Under an AC electric field applied between the pair of microelectrodes positioned in the opposite micro-cavities, about 85–90 % micro-cavities captured cells, and about 60 % micro-cavities are effectively capable of trapping the desired two-cell pairs. DC electric pulses of low voltage (~9 V) were subsequently applied between the micro-cavity microelectrode arrays to induce electrofusion. Due to the concentration of the local electric field near the micro-cavity structure, fusion efficiency reaches about 50 % of total cells loaded into the device. Multi-cell electrofusion and membrane rupture at the end of cell chains are eliminated through the present novel design.     

Integrated structure of PMMA microchannels for DNA separation by microchip capillary electrophoresis

We proposed and fabricated an integrated structure of microchannels consists of three different functional PMMA layers for post-genome analysis, gene diagnosis, and screenings of useful materials for pharmaceutical. This integrated structure with 96 microchip capillary electrophoresis units in one chip is characterized as the simple structure with low cost and new aspects of the serial unit bio-chemical operation from DNA amplification to their analysis using microchip capillary electrophoresis. The design of the structure was performed using computational fluid dynamics, heat transmission, and electrophoresis simulation. To improve DNA separation resolution, microchannel with narrow width at the corner was adapted. The deep X-ray lithography process using synchrotron radiation “New SUBARU”, nano-imprint, and fusion bonding without bonding adhesive was applied for the fabrication of the integrated structure of microchannels. It was demonstrated that the proposed integrated structure of microchannels results in a good performance of the on-chip DNA amplification and separation in a small MCE unit area of 9 mm × 9 mm.     

Novel 3D manufacturing method combining microelectrial discharge machining and electrochemical polishing

This paper reports on the potential of microelectrical discharge machining (μEDM) as an innovative method for the fabrication of 3D microdevices. To demonstrate the wide capabilities of μEDM two different microsystems—a microfluidic device for the dispersion of nanoparticles and a star probe for microcoordinate metrology—are presented. To gain optimized process conditions as well as a high surface quality an adequate adaption of the single erosion parameters such as energy, pulse frequency and spark gap has to be carried out and is discussed below. Thus, a surface roughness of R_a?=?80?nm is achieved at the channel bottom. The fabricated stylus elements for the star probe have sphere diameters of 40–200?μm. For further surface quality enhancement a subsequent electrochemical polishing step is investigated. In case of the dispersion micromodule a combined process chain of μEDM-milling and electropolishing has reached a surface improvement above 70%.     

A flexible polyimide cable for implantable neural probe arrays

A flexible polyimide cable developed for implantable neural probe array application is presented. The flexible cable is used to connect two implantable platforms—one in direct touch with the brain containing a neural probe array and its interface IC, and the other on the skull including a wireless link IC, a coil and an antenna for power and data transfer through the transcutaneous link. The cable needs to be highly flexible to minimize post-insertion injury caused by the probe array in the presence of brain micro-motion. Polyimide is used to form a flexible substrate and an insulator layer of the cable. For the advanced neural recording system, a large amount of neural recording data has to be communicated between the two platforms through the flexible cable. High-rate data transmission performance of the fabricated flexible cable is characterized and discussed. The measured insertion loss (IL) of the flexible cable is less than 3 dB and the isolation between two adjacent interconnects is better than 17 dB up to 2 GHz. The data transmission through the flexible cable is verified to be highly reliable at 100 Mbps. For surgical manipulation and long term implantation of the neural probe microsystem, the flexible cable needs to have excellent mechanical strength and resistance to fatigue. The mechanical characteristics and fatigue strength of the flexible cable are also measured and discussed. The measured maximum tensile stress and strain of the flexible cable before failure are 251.2 ± 7.1 MPa (14.35 ± 0.3 N) and 4.16 ± 0.11 %, respectively. The Young’s modulus of the fabricated flexible cable is 8.21 GPa. From the fatigue strength testing, the measured resistance change of the flexible cable’s interconnect is less than 4.8 % after 250,000 cycles of cyclic mechanical stretch.     

非接触IC卡应用系统设计

主要介绍非接触IC卡在考勤管理系统中的应用和实现。非接触IC卡读写系统是一种经高科技开发、研制、生产出来的新型管理系统 ,它具有操作方便、安全、可靠性高等优点。在考勤系统中 ,IC卡作为身份识别 ,实现了考勤管理的电子化。系统能准确反映出某一天中每一位职工或某一部门的出勤情况 ,为管理人员提供准确的考勤数据 ,并生成打印报表 ,供管理部门决策     

How information organisation affects users' representation of hypertext structure and content

Previous studies have shown that hypertext users generate a mental representation of the hypertext structure and content. This study examines how information organisation in hypertext affects users' comprehension of the hypertext structure and content of the text. In a 2 × 2 factorial design text interconnectedness (low vs. high) and coherence (coherent vs. incoherent) were manipulated. Users' mental representations were accessed by various tests such as card sorting, summary writing and questionnaires. Results showed that participants' representation of hypertext structure and content was better under the coherent than under the incoherent condition. Interconnectedness did not have an effect on users' representation. Recommendations for hypertext designers are discussed.     

A two-stage electrophoretic microfluidic device for nucleic acid collection and enrichment

Sample purification and enrichment is an important and usually time-consuming step for on-chip nucleic acid detection and analysis. This paper presents an electrophoretic DNA focusing method in microfluidic devices to enrich nucleic acid concentration by around 2700-fold. The electrical waveforms applied to five individual electrodes are such designed that DNAs move successively to the collection electrodes at high speed, while the interferences from bubbles due to electrohydrolysis are minimized. In a spiral channel with a total length of 48 cm, 1 ml DNA sample is purified and enriched by 57 times at a flow rate of 30 μl/min at first. The captured DNAs are then released and transported to the second microfluidic chamber where DNAs are collected and concentrated by 49 times. Thus, in about 40 min, the two-stage device can extract DNAs from 1 ml sample volume and enrich its concentration by 2790-fold. A trade-off exists between the process throughput and the DNA collection efficiency. A DNA capture efficiency of 99.7 % is reached when the flow rate is 1 μl/min, and the maximum DNA capture throughput is achieved at a flow rate of 30 μl/min. As a platform technology, the device can be integrated into bio-sensing and genetic analysis assays for DNA extraction and pre-concentration.