C面蓝宝石衬底上6H-SiC薄膜的低压化学气相外延生长与表征

采用低压化学气相沉积方法在C面蓝宝石衬底上异质外延生长出高结晶质量和良好表面形貌的6H-SiC薄膜,研究了CsHs气体流速对薄膜结晶质量的影响.随着C3Hs气体流速的降低,薄膜的结晶质量先增加后降低,表明薄膜的生长在开始阶段受表面反应控制,而后受质量输运控制.所得到的结晶质量最好的6H-SiC薄膜,其摇摆曲线半高宽为0.6°,已经达到单晶水平.没有使用A1N过渡层,制备出结晶质量更好的SiC薄膜,表明对于蓝宝石衬底上SiC薄膜的生长,起决定性因素的是温度,过渡层不是影响SiC薄膜结晶质量的主要因素.     

Si(111)衬底上6H-SiC薄膜的低压化学气相外延生长与表征

在Si(111)衬底上,采用SiH4-C3H8-H2气体反应体系,通过低压化学气相沉积(LPCVD)工艺外延出结晶质量良好的SiC薄膜.低温光致发光谱表明该薄膜属于6H-SiC多型体.X射线衍射图表明该薄膜具有高度的择优取向性.扫描电子显微镜图表明该薄膜由片状SiC晶粒组成.拉曼光谱和透射电子衍射谱的结果进一步表明该薄膜具有较高的结晶质量.对Si(111)衬底上6H-SiC薄膜的生长机制进行了初步探讨.     

微波等离子体化学气相淀积法生长取向性纳米氮化铝薄膜

采用微波等离子体增强的化学气相淀积法，在Si（111）衬底上生长了（002）择优取向良好的AIN纳米薄膜研究淀积参数对膜的形貌、物相结构和生长速率的影响，发现在一定条件下，该起积过程属于典型的输运控制过程采用表面吸附生长模型讨论了膜的生长机制     

低压化学气相淀积多晶硅薄膜膜厚的分子动力学模拟

从分子动力学的观点出发，引入了吸附因子，建立了势壁低压化学气相淀积多晶硅薄膜的膜厚模型，在此进行计算机模拟。模拟结果与Ｒ．Ｓ．Ｒｏｓｌｅｒ的实验结果相似，该模型从分子动力学的角度阐明了多晶硅薄膜的生长过程。     

卤素原子在化学气相淀积金刚石薄膜过程中的作用

根据非平衡热力学耦合模型计算得到了碳氢氟和碳氢氯体低压金刚石生长的非平衡定态相图，计算与大量实验事实符合良好。     

等离子增强化学气相淀积硅化钛薄膜的特性

本文以四氯化钛（ＴｉＣｌ４）和硅烷（ＳｉＨ４）为源物质，采用等离子增强化学气相淀积（ＰＥＣＶＤ）工艺结合常规热退火制备了优良的ＴｉＳｉ２薄膜。研究了淀积和退火条件对薄膜性质的影响。用四探针检测了退火前后薄膜的薄层电阻，用俄歇电子能谱（ＡＥＳ）和Ｘ射线衍射分析了薄膜的化学组成和晶体结构。     

低压化学气相淀积多晶硅薄膜膜厚的分子动力学模拟

从分子动力学的观点出发，引入了吸附因子．建立了热壁低压化学气相淀积多晶硅薄膜的膜厚模型，在此基础上进行了计算机模拟。模拟结果与R．S．Rosier的实验结果相似。该模型从分子动力学的角度阐明了多晶硅薄膜的生长过程。     

Comparison of graphene films grown on 6H-SiC and 4H-SiC substrates

Abstract

Atomic force microscopy, Kelvin-probe microscopy and Raman spectroscopy have been used to examine graphene films grown by thermal decomposition of the Si face of semi-insulating substrates of 6H-SiC and 4H-SiC polytypes in the atmosphere of argon. It was demonstrated that the quality of graphene grown on substrates of various polytypes at identical technological growth regimes is about the same. A conclusion was made that the differences in crystal structure between 6H-SiC and 4H-SiC does not lead to significant dissimilarities in the mechanism of sublimation of silicon carbide components from the surface of a crystal and in that of graphene crystallization.     

Ultralong zinc-blende ZnS nanowires grown on polar C face of 6H-SiC substrates at low temperatures by metalorganic chemical vapor deposition

Ultralong ZnS nanowires with high purity were grown on Au-coated polar C face of 6H-SiC substrates via metalorganic chemical vapor deposition at low temperatures. The ZnS nanowires have zinc-blende structure and the length is up to tens of micrometers. HRTEM investigations show that the nanowires are well crystalline single crystal grown along [1 1 1] and free of bulk defects. However, sparse straight and curved nanowires with poor crystalline nature are randomly grown on the Au-coated Si face of 6H-SiC substrates. We deduce that the growth of ZnS is related to the substrates and C face can enhance Au-catalytic VLS growth. The CL spectra of an individual nanowire grown on C and Si face reveal different optical properties. Intrinsic sulfur and zinc vacancies are the main reasons for the 458.1 nm and 459.2 nm blue emission detected in the nanowire grown on C face and Si face, respectively. Nevertheless, an unusual green emission at 565.1 nm is observed in the poor crystalline nanowire grown on Si face, which originates from the bulk defects.     

Homoepitaxial 6H-SiC thin films by vapor-liquid-solid mechanism

Silicon carbide (SiC) is a IV-IV compound semiconductor with a wide energy band gap. Because of its outstanding properties, SiC can be used in high-power, high-temperature devices with high radiation resistance. In this study, a two-step vapor-liquid-solid (VLS) method was proposed for homoepitaxial growth of high quality 6H-SiC thin films, combining VLS growth and conventional chemical vapor deposition (CVD) processes. VLS growth was used to eliminate the micro-pipes (MPs) in the first step, and the subsequent step based on the CVD process was employed to improve the surface roughness. The morphology and structure of the as-grown thin films were investigated by scanning electron microscopy, X-ray energy dispersive spectroscopy, atomic force microscopy and high-resolution X-ray diffraction, showing that thin films grown by two-step method have good crystalline quality and small surface roughness.     

Hetero-epitaxy and structure characterization of Si films on 6H-SiC substrates

In order to realize the non-ultraviolet application of SiC optoelectronic devices, Si/6H-SiC heterojunctions were prepared by the low-pressure chemical vapour deposition at 850 °C. The X-ray diffraction (XRD) and the selected area electron diffraction (SAED) results indicate that Si thin films have a monocrystalline structure and were grown along the (111) crystal plane. The rationality of the (111) growth plane was also analyzed by the theoretical calculation. High-density structural defects such as stacking faults and twins were observed on Si films by the high-resolution transmission electron microscopy. This phenomenon was also validated by the SAED patterns of defect-rich regions on Si films.     

Effect of growth parameters on the heteroepitaxy of 3C-SiC on 6H-SiC substrate by chemical vapor deposition

Epitaxial 3C-SiC(1 1 1) films were grown on 6H-SiC(0 0 0 1) Si face on axis substrates by chemical vapor deposition under H₂, SiH₄ and C₃H₈ in a cold wall vertical reactor. Two temperatures were studied (1450 and 1700 °C) with various C/Si ratio and deposition time. It was found that under conditions giving high lateral growth (low C/Si and/or high temperature), homoepitaxial growth occurred even at temperatures as low as 1450 °C. For other conditions, the 3C-SiC polytype was detected and always together with the formation of double positioning boundaries whose density was found to depend on the growth conditions but not on the initial surface reconstruction. Single domain enlargement was observed when growth was performed at 1700 °C over a nucleation layer grown at 1450 °C.     

Layer-by-layer growth of graphene layers on graphene substrates by chemical vapor deposition

We demonstrate a synthesis of graphene layers on graphene templates prepared by the mechanical exfoliation of graphite crystals using a developed chemical vapor deposition (CVD) apparatus that has a furnace with three temperature zones and can regulate the temperatures separately in each zone. This results in individual control over the decomposition reaction of the carbon feedstock and the growth of graphene layers by activated carbon species. CVD growth using multi-temperature zones provides wider temperature windows appropriate to grow graphene layers. We observed that graphene layers proceed by a layer-by-layer growth mode using an optical microscopy, an atomic force microscopy, and Raman spectroscopy. This result suggests that a graphene growth technique using the CVD apparatus is a potential approach for making graphene sheets with precise control of the layer numbers.     

Bundles of carbon nanotubes grown on sapphire and quartz substrates by catalytic hot filament chemical vapor deposition

Carbon nanotubes were deposited on non-conductive optically transparent sapphire substrates of various crystallographic orientations and on amorphous quartz glass. The substrates were covered by catalysts in which trivalent iron, Fe(III), was the dominant component. The nanotubes were synthesized by catalytic hot filament chemical vapor deposition. During their production, they form bundles composed of multiwalled carbon nanotubes and have a length of up to several tens of micrometers, thickness between 1 and 4 μm, and a non-circular cross-section. The growth of these bundles on a non-porous non-conducting optically transparent substrate was confirmed by scanning electron microscopy and by Raman spectroscopy.     

Realization of nonpolar a-plane ZnO films on r-plane sapphire substrates using a simple single-source chemical vapor deposition

Nonpolar (112?0) ZnO thin films (a-plane ZnO) have been grown on (11?02) sapphire substrates (r-plane sapphire) by a simple atmospheric pressure single-source chemical vapor deposition (SSCVD) approach. The crystallinity, surface morphology and optical property of the films were investigated using high-resolution X-ray diffraction (HRXRD), scanning electron microscope (SEM) and transmission spectrum, respectively. XRD results revealed that the ZnO films were grown on the substrates epitaxially along (112?0) orientation, and the epitaxial relationship between the ZnO films and the substrates was determined to be (112?0)ZnO∥(11?02) Al2O3, and [1?101]ZnO∥[022?1]Al₂O₃. The SEM image exhibited that the a-plane ZnO films showed a high density of well-aligned ZnO sheets with rectangular structure. The transmission spectrum showed that the ZnO films were highly transparent in the visible region.     

Silicon nanowire growth on glass substrates using hot wire chemical vapor deposition

We report here, the first observation of silicon nanowire growth via the VLS route at 400 °C using the HWCVD technique with gold (Au) as catalyst. The supersaturation of the alloy droplet, due to a large flux of atomic silicon generated due to efficient dissociation of the silane over the hot wire, leads to the precipitation of Si nanowires. The hot wire process plays a dual role in the entire nanowire growth. Firstly, the atomic hydrogen generated from the hot wire leads to the formation of the metal nanoclusters. Secondly, it offers a continuous supply of silicon atoms enabling efficient diffusion of Si into the Si-Au eutectic alloy leading to the growth of dense silicon nanowires as observed in the SEM. The Raman and TEM data show that the Si nanowires are amorphous in nature. Precise tuning of the hot wire CVD process parameters gives rise to a high density of silicon nanowires having diameters as small as 50 nm and lengths of about a few microns.