首页 | 本学科首页   官方微博 | 高级检索  
相似文献
 共查询到20条相似文献,搜索用时 15 毫秒
1.
Tin dioxide thin films were prepared successfully by pulsed laser deposition techniques on glass substrates. The thin films were then annealed for 30 min from 50 °C to 550 °C at 50 °C intervals. The influence of the annealing temperature on the microstructure and optical properties of SnO2 thin films was investigated using X-ray diffraction, optical transmittance and reflectance measurements. Various optical parameters, such as optical band gas energy, refractive index and optical conductivity were calculated from the optical transmittance and reflectance data recorded in the wavelength range 300-2500 nm. We found that the SnO2 thin film annealed at temperatures up to 400 °C is a good window material for solar cell application. Our experimental results indicated that SnO2 thin films with the high optical quality could be synthesized by pulsed laser deposition techniques.  相似文献   

2.
Polycrystalline indium doped CdS0.2Se0.8 thin films with varying concentrations of indium have been prepared by spray pyrolysis at 300 °C. The as deposited films have been characterized by XRD, AFM, EDAX, optical and electrical resistivity measurement techniques. The XRD patterns show that the films are polycrystalline with hexagonal crystal structure irrespective of indium doping concentration. AFM studies reveal that the RMS surface roughness of film decreases from 34.68 to 17.76 with increase in indium doping concentration up to 0.15 mol% in CdS0.2Se0.8 thin films and further it increases for higher indium doping concentrations. Traces of indium in CdS0.2Se0.8 thin films have been observed from EDAX studies. The optical band gap energy of CdS0.2Se0.8 thin film is found to decrease from 1.91 eV to 1.67 eV with indium doping up to 0.15 mol% and increase after 0.15 mol%. The electrical resistivity measurement shows that the films are semiconducting with minimum resistivity of 3.71 × 104 Ω cm observed at 0.15 mol% indium doping. Thermoelectric power measurements show that films exhibit n-type conductivity.  相似文献   

3.
Stoichiometric compound of copper indium sulfur (CuIn5S8) was synthesized by direct reaction of high purity elemental copper, indium and sulfur in an evacuated quartz tube. The phase structure of the synthesized material revealed the cubic spinel structure. The lattice parameter (a) of single crystals was calculated to be 10.667 Å. Thin films of CuIn5S8 were deposited onto glass substrates under the pressure of 10−6 Torr using thermal evaporation technique. CuIn5S8 thin films were then thermally annealed in air from 100 to 300 °C for 2 h. The effects of thermal annealing on their physico-chemical properties were investigated using X-ray diffraction (XRD), Energy-dispersive X-ray spectroscopy (EDX), scanning electron microscope (SEM), optical transmission and hot probe method. XRD studies of CuIn5S8 thin films showed that as-deposited films were amorphous in nature and transformed into polycrystalline spinel structure with strong preferred orientation along the (3 1 1) plane after the annealing at 200 °C. The composition is greatly affected by thermal treatment. From the optical transmission and reflection, an important absorption coefficient exceeds 104 cm−1 was found. As increasing the annealing temperature, the optical energy band gap decreases from 1.83 eV for the as-deposited films to 1.43 eV for the annealed films at 300 °C. It was found that CuIn5S8 thin film is an n-type semiconductor at 300 °C.  相似文献   

4.
Thin films of lithium cobalt oxide were deposited on Pt or Pt/Ti/quartz glass substrates by radio frequency (RF) magnetron sputtering at the substrate temperatures from room temperature to 500 °C. As the substrate temperature increased, the film structure changed from amorphous structure to crystallinity with a strong (003) texture as characterized by X-ray diffraction. The surface morphology and cross-section were observed using scanning electron microscopy. It was found that the films tended to crack at a high substrate temperature. Charge-discharge tests of these films were conducted and compared. The different electrochemical characteristics of these films were attributed to the modified crystallography, morphology, and thermal stress. The LiCoO2 film deposited at 400 °C showed a well-defined 4.0 V voltage plateau on charge and a 3.9 V plateau on discharge, and delivered 54.5 μAh/cm2 μm at the first discharge capacity, with good cycling performance, giving evidence that such films could be used as the thin film cathodes for lithium microbatteries.  相似文献   

5.
In order to investigate the thermal stability of electrical properties for aluminum doped zinc oxide (ZnO:Al, AZO) films deposited by direct current reactive magnetron sputtering, AZO films deposited from an alloy target (0.8 wt.% Al) on soda-lime glasses were annealed in argon gas at different temperatures. A data capturer was applied to monitor and collect real-time sheet resistance (Rs) of the films throughout the annealing. Results revealed that Rs of the film heated at 100 °C was reduced throughout the annealing, however, conductivity of the films annealed over 100 °C was improved at early stage but then deteriorated all along to the end. Some novel Rs change points which need more penetrations were detected. The experimental results obtained from electron diffraction spectrum, X-ray diffraction pattern, X-ray photoelectron spectrum, and Hall measurement were analyzed to explore the effect of the annealing on the electrical properties of AZO films. It was found that the exotic element, which might influence the film properties, was not observed. It was also suggested that the transformation of the crystalline structure and surface chemical bonding states, which resulted in the decrease of carrier concentration and mobility could be the reason for the conductivity degeneration of the films annealed at higher temperature.  相似文献   

6.
TiO2 thin films were deposited by DC reactive magnetron sputtering. Some TiO2 thin films samples were annealed for 5 min at different temperatures from 300 to 900 °C. The structure and optical properties of the films were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (SEM) and ultraviolet-visible (UV-vis) spectrophotometry, respectively. The influence of the annealing temperature on the structure and optical properties of the films was investigated. The results show that the as-deposited TiO2 thin films are mixtures of anatase and rutile phases, and possess the column-like crystallite texture. With the annealing temperature increasing, the refractive index and extinction coefficient increase. When the annealing temperature is lower than 900 °C, the anatase phase is the dominant crystalline phase; the weight fraction of the rutile phase does not increase significantly during annealing process. As the annealing temperature rises to 900 °C, the rutile phase with the large extinction coefficient becomes the dominant crystalline phase, and the columnar structure disappears. The films annealed at 300 °C have the best optical properties for the antireflection coatings, whose refractive index and extinction coefficient are 2.42 and 8 × 10−4 (at 550 nm), respectively.  相似文献   

7.
Bi2Zn2/3Nb4/3O7 thin films were deposited on Pt/TiO2/SiO2/Si(1 0 0) substrates at a room temperature under the oxygen pressure of 1-10 Pa by pulsed laser deposition. Bi2Zn2/3Nb4/3O7 thin films were then post-annealed below 200 °C in a rapid thermal process furnace in air for 20 min. The dielectric and leakage current properties of Bi2Zn2/3Nb4/3O7 thin films are strongly influenced by the oxygen pressure during deposition and the post-annealing temperature. Bi2Zn2/3Nb4/3O7 thin films deposited under 1 Pa oxygen pressure and then post-annealed at a temperature of 150 °C show uniform surface morphologies. Dielectric constant and loss tangent are 57 and 0.005 at 10 kHz, respectively. The high resolution TEM image and the electron diffraction pattern show that nano crystallites exist in the amorphous thin film, which may be the origin of high dielectric constant in the Bi2Zn2/3Nb4/3O7 thin films deposited at low temperatures. Moreover, Bi2Zn2/3Nb4/3O7 thin film exhibits the excellent leakage current characteristics with a high breakdown strength and the leakage current density is approximately 1 × 10−7 A/cm2 at an applied bias field of 300 kV/cm. Bi2Zn2/3Nb4/3O7 thin films are potential materials for embedded capacitor applications.  相似文献   

8.
The Cu-poly(acrylic) acid (PAA) thin films were deposited at room temperature by a simple and cost effective polymer assisted deposition (PAD) method. The solution containing Cu salt and PAA was spin coated to yield the thin films with desired properties. The Cu-PAA films were annealed at 400 °C in ambient air for 4 h to obtain CuO-PAA phase. The effect of PAA concentration on the film properties is studied and characterized by employing various techniques. The structural and surface morphological studies are carried out using X-ray diffraction (XRD) and scanning electron microscope (SEM) respectively. Fourier transform infrared spectroscopy (FT-IR) and FT-Raman spectroscopy are employed to investigate the hybrid film formation. Wetting behavior is studied by measuring the contact angle of water on the film surface. Cyclic voltammetry (CV) studies were carried out to investigate the specific capacitance of CuO-PAA films in aqueous 1 M H2SO4 electrolyte. Hybrid films deposited with 2 mM PAA exhibits highest specific capacitance of 65 F g−1.  相似文献   

9.
In this paper, we report on the structure, ferroelectric/magnetoelectric properties and improvement of leakage current density of (Bi0.85Nd0.15)FeO3 (BNFO) thin films deposited on Pt(1 1 1)/Ti/SiO2/Si substrates from the polymeric precursor method. X-ray patterns and Rietveld refinement indicated that BNFO thin films with a tetragonal structure can be obtained at 500 °C for 2 h in static air. Field emission scanning electron, atomic force and piezoelectric force microscopies showed the microstructure, thickness and domains with polarization-oriented vectors of BNFO thin films. Ferroelectric and magnetoelectric properties are evident by hysteresis loops. The magnetoelectric coefficient measurement was performed to show the magnetoelectric coupling behavior. The maximum magnetoelectric coefficient in the longitudinal direction was close to 12 V/cm Oe. Piezoresponse force microscopy micrographs reveal a polarization reversal with 71° and 180° domain switchings and one striped-domain pattern oriented at 45° besides the presence of some nanodomains with rhombohedral phase involved in a matrix with tetragonal structure. The cluster models illustrated the unipolar strain behavior of BNFO thin films. The leakage current density at 5.0 V is equal to 1.5 × 10−10 A/cm2 and the dominant mechanism in the low-leakage current for BNFO thin films was space-charge-limited conduction.  相似文献   

10.
Filtered vacuum (cathodic) arc deposition (FVAD, FCVD) of metallic and ceramic thin films at low substrate temperature (50-400 °C) is realized by magnetically directing vacuum arc produced, highly ionized, and energetic plasma beam onto substrates, obtaining high quality coatings at high deposition rates. The plasma beam is magnetically filtered to remove macroparticles that are also produced by the arc. The deposited films are usually characterized by their good optical quality and high adhesion to the substrate. Transparent and electrically conducting (TCO) thin films of ZnO, SnO2, In2O3:Sn (ITO), ZnO:Al (AZO), ZnO:Ga, ZnO:Sb, ZnO:Mg and several types of zinc-stannate oxides (ZnSnO3, Zn2SnO4), which could be used in solar cells, optoelectronic devices, and as gas sensors, have been successfully deposited by FVAD using pure or alloyed zinc cathodes. The oxides are obtained by operating the system with oxygen background at low pressure. Post-deposition treatment has also been applied to improve the properties of TCO films.The deposition rate of FVAD ZnO and ZnO:M thin films, where M is a doping or alloying metal, is in the range of 0.2-15 nm/s. The films are generally nonstoichiometric, polycrystalline n-type semiconductors. In most cases, ZnO films have a wurtzite structure. FVAD of p-type ZnO has also been achieved by Sb doping. The electrical conductivity of as-deposited n-type thin ZnO film is in the range 0.2-6 × 10− 5 Ω m, carrier electron density is 1023-2 × 1026 m− 3, and electron mobility is in the range 10-40 cm2/V s, depending on the deposition parameters: arc current, oxygen pressure, substrate bias, and substrate temperature. As the energy band gap of FVAD ZnO films is ∼ 3.3 eV and its extinction coefficient (k) in the visible and near-IR range is smaller than 0.02, the optical transmission of 500 nm thick ZnO film is ∼ 0.90.  相似文献   

11.
Ti-O, Ti-O-C and Ti-O-C-N thin films have been synthesized successfully via metalorganic chemical vapor deposition (MOCVD) technique. Tetrabutyl orthotitanate (TBOT) is used as a precursor in presence of Ar, H2, and N2 as process gases. By controlling deposition temperature and type of process gases, it was possible to control the composition of the deposited films. The deposited films are composed mainly of Ti and O when H2 is used as a process gas in the temperature range 350-500 °C. As the temperature increased up to 600 °C, thin films containing anatase (TiO2) and titanium carbide (TiC) phases are deposited and confirmed by XRD and EDX analyses. As the temperature increased to 750 °C, a transformation from anatase to rutile phase (TiO2) is started and clearly observed from XRD patterns. Titanium nitride (Ti2N and TiN) phase in addition to TiO2 and TiC phases are formed at 600-1000 °C in presence of nitrogen as a process gas. SEM images for all investigated film samples showed that the films are deposited mainly in the form of spherical particles ranged from few nano- to micrometer in size with some additional special features regardless the type of the process gas. Films containing carbon and nitrogen show higher hardness than that containing only oxygen. The obtained results may help in better understanding and controlling film composition and its phase formation in Ti-O-C-N system by MOCVD technique.  相似文献   

12.
Nanocrystalline, uniform, dense, and adherent cerium oxide (CeO2) thin films have been successfully deposited by a simple and cost effective spray pyrolysis technique. CeO2 films were deposited at low substrate and annealing temperatures of 350 °C and 500 °C, respectively. Films were characterized by differential thermal analysis, X-ray diffraction, scanning electron microscopy, atomic force microscopy; two probe resistivity method and impedance spectroscopy. X-ray diffraction analysis revealed the formation of single phase, well crystalline thin films with cubic fluorite structure. Crystallite size was found to be in the range of 10-15 nm. AFM showed formation of smooth films with morphological grain size 27 nm. Films were found to be highly resistive with room temperature resistivity of the order of 107 Ω cm. Activation energy was calculated and found to be 0.78 eV. The deposited film showed high oxygen ion conductivity of 5.94 × 10−3 S cm−1 at 350 °C. Thus, the deposited material shows a potential application in intermediate temperature solid oxide fuel cells (IT-SOFC) and might be useful for μ-SOFC and industrial catalyst applications.  相似文献   

13.
Polycrystalline PbSe thin films were deposited on Si substrates by a thermal reduction method with the carbon as the reducing agent. The X-ray diffraction (XRD) spectra show that the deposited thin films predominately crystallize with the rock-salt structures above the evaporation temperature of 600 °C, and the PbSe thin film has the optimal crystal quality at 900 °C. The scanning electron microscopy (SEM) measurements reveal that the PbSe thin film with carbon addition has uniform crystal grain sizes and dense microstructure, while the thin film without carbon consists of loosely distributed and widely size-ranged crystal grains. The optical transmittance spectrum shows that the direct band gap of the PbSe film is about 0.256 eV. By the introduction of element S, PbSe1−xSx (0 ≤ x ≤ 1.0) thin films could be prepared, but excess amount of S additions (>20 at.%) would cause phase segregations between PbSe and PbS phases. The deposition method presented in this paper may be useful for mass-producing polycrystalline lead chalcogenide thin films in the future.  相似文献   

14.
Highly transparent, p-type conducting SnO2:Zn thin films are prepared from the thermal diffusion of a sandwich structure of Zn/SnO2/Zn multilayer thin films deposited on quartz glass substrate by direct current (DC) and radio frequency (RF) magnetron sputtering using Zn and SnO2 targets. The deposited films were annealed at various temperatures for thermal diffusion. The effect of annealing temperature and time on the structural, electrical and optical performances of SnO2:Zn films was studied. XRD results show that all p-type conducting films possessed polycrystalline SnO2 with tetragonal rutile structure. Hall effect results indicate that the treatment at 400 °C for 6 h was the optimum annealing parameters for p-type SnO2:Zn films which have relatively high hole concentration and low resistivity of 2.389 × 1017 cm− 3 and 7.436 Ω cm, respectively. The average transmission of the p-type SnO2:Zn films was above 80% in the visible light range.  相似文献   

15.
Ta-Si-N thin films were applied as diffusion barriers for Cu interconnections or hard coatings in mechanical application. The resistivity, hardness and thermal stability were the important issues in the interconnections and hard coatings, respectively. In this paper, we investigated the relationship between the microstructures, resistivity, nanohardness and thermal stability of the Ta-Si-N thin films at different nitrogen flow ratios of 0-30% (N2% = N2 / (Ar + N2) × 100%) by magnetron reactive co-sputtering. The Ta-Si-N films were annealed at 600, 750 and 900 °C at about 6 × 103 Pa for 1 h, respectively, to examine their thermal stability. The microstructures of Ta-Si-N films at low N2% of 2-10% still retained the amorphous-like phase with nanocrystalline grains in an amorphous matrix at annealing of 600-900 °C. The nanohardness of amorphous-like Ta-Si-N film at N2% of 3% was measured to be 15.2 GPa much higher than that of polycrystalline film of 10.1 GPa at N2% of 20%. The average nanohardness of both films is stable up to 900 °C and varied in the range of 0.43-0.83 GPa. The resistivity of the as-deposited Ta-Si-N films increase with increasing N2 flow rate. It is small around 220-540 μΩ cm for low N2% of 2-10% while it increases abruptly to about 7700-43,000 μΩ cm at high N2% of 20-30%. The best thermal stability of resistivity of Ta-Si-N film occurs at the N2% of 2% in the range of 220 to 250 μΩ cm from RT to 900 °C.  相似文献   

16.
CaCu3Ti4O12 (stoichiometric) and Ca1.1Cu2.9Ti4O12 (non-stoichiometric) thin films have been prepared by the soft chemical method on Pt/Ti/SiO2/Si substrates, and their electrical and dielectric properties have been compared as a function of the annealing temperature. The crystalline structure and the surface morphology of the films were markedly affected by the annealing temperature and excess calcium. The films show frequency-independent dielectric properties at room temperature which is similar to those properties obtained in single-crystal or epitaxial thin films. The room temperature dielectric constant of the 570-nm-thick CCTO thin films annealed at 600 °C at 10 kHz was found to be 124. The best non-ohmic behavior (α = 12.6) presented by the film with excess calcium annealed at 500 °C. Resistive hysteresis on the I-V curves was observed which indicates these films can be used in resistance random access memory (ReRAM).  相似文献   

17.
Cd1−xZnxS (0 ≤ x ≤ 1) thin films have been deposited by chemical bath deposition method on glass substrates from aqueous solution containing cadmium acetate, zinc acetate and thiourea at 80 ± 5 °C and after annealed at 350 °C. The structural, morphological, compositional and optical properties of the deposited Cd1−xZnxS thin films have been studied by X-ray diffractometer, scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDX), photoluminescence (PL) and UV-vis spectrophotometer, respectively. X-ray diffraction analysis shows that for x < 0.8, the crystal structure of Cd1−xZnxS thin films was hexagonal structure. For x > 0.6, however, the Cd1−xZnxS films were grown with cubic structure. Annealing the samples at 350 °C in air for 45 min resulted in increase in intensity as well as a shift towards lower scattering angles. The parameters such as crystallite size, strain, dislocation density and texture coefficient are calculated from X-ray diffraction studies. SEM studies reveal the formation of Cd1−xZnxS films with uniformly distributed grains over the entire surface of the substrate. The EDX analysis shows the content of atomic percentage. Optical method was used to determine the band gap of the films. The photoluminescence spectra of films have been studied and the results are discussed.  相似文献   

18.
Zinc-Tin-Oxide (ZTO) thin films were deposited on glass substrate with varying concentrations (ZnO:SnO2; 100:0, 90:10, 70:30 and 50:50 wt.%) at room temperature by flash evaporation technique. These deposited ZTO films were annealed at 450 °C in vacuum. These films were characterized to study the effect of annealing and addition of SnO2 concentration on the structural, chemical and electrical properties. The XRD analysis indicates that crystallization of the ZTO films strongly depends on the concentration of SnO2 and post annealing where annealed films showed polycrystalline nature. Atomic force microscopy (AFM) images manifest the surface morphology of these ZTO thin films. The XPS core level spectra of Zn(2p), O(1s) and Sn(3d) have been deconvoluted into their Gaussian component to evaluate the chemical changes, while valence band spectra reveal the electronic structures of these films. A small shift in Zn(2p) and Sn(3d) core level towards higher binding energy and O(1s) core level towards lower binding energy have been observed. The minimum electrical resistivity (ρ ≈ 3.69 × 10−2 Ω-cm), maximum carrier concentration (n ≈ 3.26 × 1019 cm−3) and Hall mobility (μ ≈ 5.2 cm2 v−1 s−1) were obtained for as-prepared ZTO (50:50) film thereafter move towards lowest resistivity (ρ ≈ 1.12 × 10−3 Ω-cm), highest carrier concentration (n ≈ 2.96 × 1020 cm−3) and mobility (μ ≈ 18.8 cm2 v−1 s−1) for annealed ZTO (50:50) thin film.  相似文献   

19.
The CoFe2O4 (CFO) starting precursor solutions were prepared by two sol-gel methods. The XRD results show that the second sol-gel method is a better method to obtain CFO materials with high purity. The CFO precursor solutions prepared by the second sol-gel method were spin-coated onto the Pt/Ti/SiO2/Si substrate to obtain CFO films. With the increase of annealing temperature, the relative amounts of secondary phases in CFO films are decreased. When annealed at 700 °C, CFO films are almost composed of the main phase and the substrate phase without secondary phases. The CFO film is crack-free and has compact structure without any pore. The thickness of CFO film is about 49 nm. The starting precursor solution with the concentration of 0.15 mol L−1 is better for preparing CFO films. The CFO films with nano-scaled film thicknesses have better magnetic properties than the CFO powders.  相似文献   

20.
Nanocrystalline ZnO thin films were prepared on glass substrates by using spin coating technique. The effect of annealing temperature (400-700 °C) on structural, compositional, microstructural, morphological, electrical and optical properties of ZnO thin films were studied by X-ray diffraction (XRD), Energy dispersive Spectroscopy (EDS), Atomic Force Microscopy (AFM), High Resolution Transmission Microscopy (HRTEM), Scanning Electron Microscopy (SEM), Electrical conductivity and UV-visible Spectroscopy (UV-vis). XRD measurements show that all the films are nanocrystallized in the hexagonal wurtzite structure and present a random orientation. The crystallite size increases with increasing annealing temperature. These modifications influence the optical properties. The AFM analysis revealed that the surface morphology is smooth. The HRTEM analysis of ZnO thin film annealed at 700 °C confirms nanocrystalline nature of film. The SEM results shows that a uniform surface morphology and the nanoparticles are fine with an average grain size of about 40-60 nm. The dc room temperature electrical conductivity of ZnO thin films were increased from 10−6 to 10−5 (Ω cm)−1 with increase in annealing temperature. The electron carrier concentration (n) and mobility (μ) of ZnO films annealed at 400-700 °C were estimated to be of the order of 4.75-7.10 × 1019 cm−3 and 2.98-5.20 × 10−5 cm2 V−1 S−1.The optical band gap has been determined from the absorption coefficient. We found that the optical band gap energy decreases from 3.32 eV to 3.18 eV with increasing annealing temperature between 400 and 700 °C. This means that the optical quality of ZnO films is improved by annealing.It is observed that the ZnO thin film annealing at 700 °C has a smooth and flat texture suited for different optoelectronic applications.  相似文献   

设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号