Transparent conducting properties of Ni doped zinc oxide thin films prepared by a facile spray pyrolysis technique using perfume atomizer

Undoped and Ni doped zinc oxide (Ni–ZnO) thin films were prepared by a facile spray pyrolysis technique using perfume atomizer from aqueous solution of anhydrous zinc acetate (Zn(CH₃COOH)₂ and hexahydrated nickel chloride (NiCl₂·6H₂O) as sources of zinc and nickel, respectively. The films were deposited onto the amorphous glass substrates kept at (450 °C). The effect of the [Ni]/[Zn] ratio on the structural, morphological, optical and electrical properties of Ni doped ZnO thin film was studied. It was found from X-ray diffraction (XRD) analysis that both the undoped and Ni doped ZnO films were crystallized in the hexagonal structure with a preferred orientation of the crystallites along the [002] direction perpendicular to the substrate. The scanning electron microscopy (SEM) images showed a relatively dense surface structure composed of crystallites in the spherical form whose average size decreases when the [Ni]/[Zn] ratio increases. The optical study showed that all the films were highly transparent. The optical transmittance in the visible region varied between 75 and 85%, depending on the dopant concentrations. The variation of the band gap versus the [Ni]/[Zn] ratio showed that the energy gap decreases from 2.95 to 2.72 eV as the [Ni]/[Zn] ratio increases from 0 to 0.02 and then increases to reach 3.22 eV for [Ni]/[Zn] = 0.04. The films obtained with the [Ni]/[Zn] ratio = 0.02 showed minimum resistivity of 2 × 10⁻³ Ω cm at room temperature.     

The effect of substrate temperature on Al-doped ZnO characteristics for organic thin film transistor applications

The influence of substrate temperature on the structural, electrical, and optical properties of aluminum-doped zinc oxide (AZO) films fabricated by radio frequency (RF) magnetron sputtering was investigated. The AZO films were deposited at various substrate temperatures, and the effect of AZO gate electrode conductivity on organic thin film transistor (OTFT) performance was examined. While an increase in the substrate temperature from 100 °C to 300 °C led to an improvement in crystallinity, substrate temperatures over 300 °C caused degradation of the electrical and surface properties. We fabricated OTFTs using AZO films prepared at various substrate temperatures and obtained good device performance. Thus, the performance of an OTFT can be determined by the conductivity of the AZO gate electrode.     

Resistive hysteresis in BiFeO3 thin films

Capacitor-like Au/BiFeO₃/SrRuO₃ thin film with (1 1 1) orientation was grown on the SrTiO₃ (1 1 1) substrate by radio frequency magnetic sputtering. It shows a resistive switching behavior, where a stable hysteresis in current–voltage curve was well developed by applying an optimum voltage at room temperature, and it reached the saturation at a bias voltage of 8 V. The Child's law in V_max → 0 direction and the interface-limited Fowler–Nordheim tunneling in 0 → V_max direction, together with the polarization reversal in the BiFeO₃ barrier, are shown to involve in the observed resistive hysteresis.     

Effect of oxygen flow rate and radio-frequency power on the photoconductivity of highly ultraviolet sensitive ZnO thin films grown by magnetron sputtering

We have investigated the effect of oxygen flow rate and radio-frequency (RF) power on the photoconductivity properties of ZnO thin films grown by magnetron sputtering and correlated the changes to the structural qualities. The electrical measurements show that the carrier concentration decreases with increase in the oxygen flow rate which is attributed to the probable increase in the oxygen vacancy (V_O)-related defects. The photocurrent spectra show that as the oxygen content increases, the films become lesser and more sensitive to the visible and ultraviolet (UV) lights respectively. As a result, the photo-to-dark current ratio (gain) increases to a value of 1.10 × 10⁶. As the RF power increases from 50 W to 150 W, the films become more conducting. The photoconductivity results show that as the RF power increases, the UV gain decreases slowly indicating that highly UV sensitive films can be grown at lower RF power.     

Optical properties of pyrene doped polymer thin films

Thin films of pyrene in polystyrene matrix have been prepared by spin coating technique. The concentration of polystyrene is kept constant to 1 wt.% while that of pyrene dopant varied in the range 2.30×10⁻⁴-2.30×10⁻¹ wt.%. Thickness of the films was found to depend upon concentration of pyrene and varies from 90 to 782 nm. The results of X-ray diffraction analysis reveal the crystalline nature of the films. The optical properties were studied by absorption, excitation and fluorescence spectroscopy. The band gap energy of pyrene in polymer films was calculated from absorption results. A transition from monomer to excimer is observed with thickness variation of the films. The structured part of the spectrum is assigned to the monomer emission while the broad emission band is attributed to well known pyrene excimer-like emission.     

Electrical properties of vanadium tungsten oxide thin films

The vanadium tungsten oxide thin films deposited on Pt/Ti/SiO₂/Si substrates by RF sputtering exhibited good TCR and dielectric properties. The dependence of crystallization and electrical properties are related to the grain size of V_1.85W_0.15O₅ thin films with different annealing temperatures. It was found that the dielectric properties and TCR properties of V_1.85W_0.15O₅ thin films were strongly dependent upon the annealing temperature. The dielectric constants of the V_1.85W_0.15O₅ thin films annealed at 400 °C were 44, with a dielectric loss of 0.83%. The TCR values of the V_1.85W_0.15O₅ thin films annealed at 400 °C were about −3.45%/K.     

Effect of sputtering power on the physical properties of dc magnetron sputtered copper oxide thin films

Cuprous oxide films were deposited on glass substrates using dc magnetron sputtering technique by sputtering of pure copper target in a mixture of argon and oxygen atmosphere under various sputtering powers in the range 0.38–1.50 W cm⁻². The influence of sputtering power on the structural, electrical and optical properties was systematically studied. The films were polycrystalline in nature with cubic structure. The films formed at sputtering powers ≤0.76 W cm⁻² exhibited mixed phase of Cu₂O and CuO while those formed at 1.08 W cm⁻² were single phase Cu₂O. The single-phase Cu₂O films formed at a sputtering power of 1.08 W cm⁻² showed electrical resistivity of 46 Ω cm, Hall mobility of 5.7 cm² V⁻¹ s⁻¹ and optical band gap of 2.04 eV.     

Indium tin oxide films deposited by thermionic-enhanced DC magnetron sputtering on unheated polyethylene terephthalate polymer substrate

Indium tin oxide thin films were deposited onto polyethylene terephthalate substrates via thermionic enhanced DC magnetron sputtering at low substrate temperatures. The structural, optical and electrical properties of these films are methodically investigated. The results show that compared with traditional sputtering, the films deposited with thermionic emission exhibit higher crystallinity, and their optical and electrical properties are also improved. Indium tin oxide films deposited by utilizing thermionic emission exhibit an average visible transmittance of 80% and an electrical resistivity of 4.5 × 10⁻⁴ Ω cm, while films made without thermionic emission present an average visible transmittance of 74% and an electrical resistivity of 1.7 × 10⁻³ Ω cm.     

Optical and structural characteristics of ZnO thin films grown by rf magnetron sputtering

Nanostructured ZnO thin films on Pyrex glass substrates were deposited by rf magnetron sputtering at different substrate temperatures. Structural features and surface morphology were studied by X-ray diffraction and atomic force microscopy analyses. Films were found to be transparent in the visible range above 400 nm, having transparency above 90%. Sharp ultraviolet absorption edges around 370 nm were used to extract the optical band gap for samples of different particle sizes. Optical band gap energy for the films varied from 3.24 to 3.32 eV and the electronic transition was of the direct in nature. A correlation of the band gap of nanocrystalline ZnO films with particle size and strain was discussed. Photoluminescence emission in UV range, which is due to near band edge emission is more intense in comparison with the green band emission (due to defect state) was observed in all samples, indicating a good optical quality of the deposited films.     

Structural, electrical and optical studies of SILAR deposited cadmium oxide thin films: Annealing effect

Successive ionic layer adsorption and reaction (SILAR) method has been successfully employed for the deposition of cadmium oxide (CdO) thin films. The films were annealed at 623 K for 2 h in an air and changes in the structural, electrical and optical properties were studied. From the X-ray diffraction patterns, it was found that after annealing, H₂O vapors from as-deposited Cd(O₂)_0.88(OH)_0.24 were removed and pure cubic cadmium oxide was obtained. The as-deposited film consists of nanocrystalline grains of average diameter about 20-30 nm with uniform coverage of the substrate surface, whereas for the annealed film randomly oriented morphology with slight increase in the crystallite size has been observed. The electrical resistivity showed the semiconducting nature with room temperature electrical resistivity decreased from 10⁻² to 10⁻³ Ω cm after annealing. The decrease in the band gap energy from 3.3 to 2.7 eV was observed after the annealing.     

A study on the electrical properties of Pb(Zr, Ti)O3 thin films crystallized by the electrical resistive heating of Pt thin film

The electrical properties of Pb(Zr, Ti)O₃ thin films annealed by Pt thin film heater were investigated. By the thin film heater, we successfully crystallized Pb(Zr, Ti)O₃ thin films at a high temperature above 750 °C in a few seconds. The thin film heater has some advantages, such as a low thermal budget, little Pb-loss and enhanced surface morphology compared with the conventional furnace because it has a fast heating rate. The electrical properties of the Pb(Zr, Ti)O₃ thin film crystallized by thin film heater improved considerably comparing to those crystallized in conventional furnace. The remanent polarization, breakdown field, and leakage current density measured to be 22.7 μC/cm², 853 kV/cm, and 6.93 × 10⁻⁷ A/cm², respectively.     

Effect of thermal annealing treatment on structural, electrical and optical properties of transparent sol-gel ZnO thin films

Effect of thermal annealing in different ambients on the structural, electrical and optical properties of the sol-gel derived ZnO thin films are studied. XRD results show that the annealed ZnO films with wurtzite structure are randomly oriented. Crystallite size, carrier concentration, resistivity and mobility are found to be dependent on the annealing temperature. The change in carrier concentration is discussed with respect to the removal of adsorbed oxygen from the grain boundaries. The highest carrier concentration and lowest resistivity are 8 × 10¹⁸ cm⁻³ and 2.25 × 10⁻¹ Ω cm, respectively, for the film annealed at 500 °C in vacuum. The annealed films are highly transparent with average transmission exceeding 80% in the wavelength region of 400-800 nm. In all three ambients, the optical band gap value does not change much below 500 °C temperature while above this temperature band gap value decreases for nitrogen and air and increases for vacuum.     

Structure and properties of ternary manganese nitride Mn3CuNy thin films fabricated by facing target magnetron sputtering

Deposition of Mn₃CuN_y thin films on single crystal Si (1 0 0) at various substrate temperatures (T_sub) by facing target magnetron sputtering is reported. The crystal structure and composition were characterized by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The results confirmed that the crystalline antiperovskite Mn₃CuN_y thin film with (2 0 0) highly preferred texture had been obtained at T_sub = 180 °C. Furthermore, for the resulting Mn₃CuN_y thin film, it showed different properties compared with the bulk counterpart. There was a paramagnetic to ferrimagnetic transition at 225 K with decreasing temperature. The change of the lattice constant with temperature presented positive thermal expansion behavior and no structural transition was observed. The average linear thermal expansion coefficient (α) is 2.49 × 10⁻⁵ K⁻¹ from 123 K to 298 K. More interestingly, the temperature dependence of resistivity displayed a semiconductor-like behavior, i.e. an obvious monotonous decrease of resistivity with increasing temperature.     

Properties of Al heavy-doped ZnO thin films by RF magnetron sputtering

Al-doped ZnO films were deposited by RF magnetron sputtering. From the X-ray diffraction and scanning electron spectrometer studies, wurtzite structure with (0 0 2) orientation ZnO thin films were obtained at Al concentration below 15 atomic percent (at.%). As the Al concentration above 15 at.%, the thin films did not fully crystallize. Two new emission peaks occurred at 351 nm and 313 nm when the Al doping above 15 at.% from the photoluminescence spectrum, and the peaks shift towards the shorter wavelengths with increasing the Al concentration. X-ray photonic spectra of O 1s conformed the amount of oxygen captured by Al³⁺ increasing as the Al³⁺ concentration increasing due to the dominant Al³⁺ possess high charge in competition with Zn²⁺ in the matrix of ZnO.     

Comparative study of physical properties of vapor chopped and nonchopped Al2O3 thin films

Aluminium oxide being environmentally stable and having high transmittance is an interesting material for optoelectronics devices. Aluminium oxide thin films have been successfully deposited by hot water oxidation of vacuum evaporated aluminium thin films. The surface morphology, surface roughness, optical transmission, band gap, refractive index and intrinsic stress of Al₂O₃ thin films were studied. The cost effective vapor chopping technique was used. It was observed that, optical transmittance of vapor chopped Al₂O₃ thin film showed higher transmittance than the nonchopped film. The optical band gap of vapor chopped thin film was higher than the nonchopped Al₂O₃, whereas surface roughness and refractive index were lower due to vapor chopping.     

Studies on the photoconductivity of vacuum deposited ZnTe thin films

The present paper reports the analysis of photoconductivity of vacuum deposited zinc telluride (ZnTe) thin films as a function of substrate temperature and post-deposition annealing. Detailed analyses were first carried out to understand the effect of substrate temperature and annealing on the structure, composition, optical and electrical properties of the films. The films deposited at elevated substrate temperatures showed faster and improved photoresponse. Post-deposition annealing was found to further enhance the photoresponse of the films. Attempts have been made to explain the improvement in the photoresponse on the basis of structural and compositional changes, taking place in the films, due to the substrate temperature and annealing.     

Effects of doping concentration on the microstructural and optoelectrical properties of boron doped amorphous and nanocrystalline silicon films

Boron doped hydrogenated amorphous silicon thin films were prepared by plasma-enhanced chemical vapor deposition technique at various flow rate of diborane (F_B). As-deposited samples were thermally annealed at the temperature of 800 °C to obtain the doped nanocrystalline silicon (nc-Si) films. The effect of boron concentration on the microstructural, optical and electrical properties of the films was investigated. X-ray photoelectron spectroscopy (XPS) measurements demonstrated the presence of the substitutional boron in the doped films. It was found that thermal annealing can efficiently activate the dopants in films accompanying with formation of nc-Si grains. Based on the temperature-dependent conductivity measurements, it was shown that the dark conductivity of doped amorphous samples increases monotonously with the increase of doping content. While the dark conductivity of doped nc-Si films is not only determined by the concentration of dopant but also the crystallinity of the films. As increasing the flow rate of diborane, the crystallinity of doped nc-Si films decreases, which causes the decrease of dark conductivity. Finally, the high dark conductivity of 178.68 S cm⁻¹ of the B-doped nc-Si thin films can be obtained.     

La0.67Ca0.33MnO3 thin films on Si (1 0 0) by DC magnetron sputtering technique using nanosized powder compacted target

La_0.67Ca_0.33MnO₃ (LCMO) thin films were successfully fabricated by a DC magnetron sputtering technique on Si (1 0 0) substrates from chemically synthesized compacted powders. Powders of proper stochiometry composites were synthesized by a novel chemical technique [D.R. Sahu, B.K. Roul, P. Pramanik, J.L. Huang, Physica B 369 (2005) 209] and were found to be nanosized (≈40-50 nm). The sinterability of the powders were improved significantly due to their large surface area with a reduction of sintering temperature (up to 500 °C) as compared to the powders prepared by other solid-state reaction route. Bulk LCMO targets were prepared and preliminary structural and magnetic properties of target were investigated for colossal magnetoresistance (CMR) properties. Films deposition parameters like DC power, gas flow rate, deposition time, etc., were critically optimized to achieve desired thickness of film using above LCMO target by DC magnetron sputtering. LCMO films fabricated on Si (1 0 0) substrates showed enhanced magnetoresistance (MR) at low temperature. Maximum MR of about 1000% was observed at 100 K. Paramagnetic to ferromagnetic transitions were observed in films below room temperature and were found at approximately 240 K. However, as compared to bulk target prepared by a chemical route, it was found that Curie temperature (T_c) and MR response of bulk target were higher than the thin films. Preliminary point chemical analysis revealed the deficiency of Ca²⁺ ions in CMR films.     

Improved efficiency of the chemical bath deposition method during growth of ZnO thin films

Chemical bath deposition (CBD) is an inexpensive and low temperature method (25-90 °C) that allows to deposit large area semiconductor thin films. However, the extent of the desired heterogeneous reaction upon the substrate surface is limited first by the competing homogeneous reaction, which is responsible for colloidal particles formation in the bulk solution, and second, by the material deposition on the CBD reactor walls. Therefore, the CBD method exhibits low efficiency in terms of profiting the whole amount of starting materials. The present work describes a procedure to deposit ZnO thin films by CBD in an efficient way, since it offers the possibility to minimize both the undesirable homogeneous reaction in the bulk solution and the material deposition on the CBD reactor walls. In a first stage, zinc peroxide (ZnO₂) crystallizing with cubic structure is obtained. This compound shows a good average transparency (90%) and an optical bandgap of 4.2 eV. After an annealing process, the ZnO₂ suffers a transformation toward polycrystalline ZnO with hexagonal structure and 3.25 eV of optical bandgap. The surface morphology of the films, analyzed by atomic force microscope (AFM), reveals three-dimensional growth features as well as no colloidal particles upon the surface, therefore indicating the predominance of the heterogeneous reaction during the growth.