Development of a High-k Pr $_{2}$O $_{3}$ Sensing Membrane for pH-ISFET Application

In order to develop a pH sensor having a good pH-sensing characteristic, electrolyte-insulator-semiconductor capacitors using a high-k Pr$_{2}$O$_{3}$ thin film as the sensing membrane were fabricated on silicon substrates by reactive radio frequency sputtering. The structural and morphological features of these films with annealing at various temperatures were studied by X-ray diffraction, atomic force microscopy, and X-ray photoelectron spectroscopy. The Pr$_{2}$O $_{3}$ sensing film after annealing at 900$;^{circ}$C is suggested to the increase in the interfacial SiO $_{2}$ and silicate formation, and the high surface roughness. Therefore, a physical vapor deposition Pr$_{2}$O $_{3}$ film is adopted as a new pH-sensing layer. The result produces a pH response of 52.9 mV/pH $({rm pH}=2hbox{--}12)$, a hysteresis voltage of 17.5 mV $({rm pH}=7 to 4 to 7to 10 to 7)$, and a drift rate of 2.15 mV/h (${rm pH}=7$ buffer solution).      

Microstructure, Electrical, and Magnetic Properties of ZrO$_{2}$ Added MnZn Ferrites

We investigated the influence of ZrO$_{2}$ on the microstructure and electromagnetic properties of MnZn ferrites by characterizing fracture surface micrographs, magnetic properties, and dc resistivity. Powders of Mn $_{0.68}$Zn $_{0.25}$Fe $_{2.07}$O $_{4}$ composition were prepared by the conventional ceramic technique. Toroidal cores were sintered at 1350 $^{circ}$C for 4 h in N$_{2}$/O$_{2}$ atmosphere with 4% oxygen. The results show that the lattice constant and average grain size increase with ZrO$_{2}$ concentration, but excessive ZrO $_{2}$ concentration will result in exaggerated grain growth and porosity increase. The dc resistivity, activation energy, saturation magnetic flux density, and initial magnetic permeability increase monotonically when the ZrO$_{2}$ concentration is not more than 0.04 wt% and then decrease with further increase of ZrO$_{2}$ concentration. On the other hand, the porosity, drift mobility, resonance frequency, and core loss decrease initially and then increase with the increase of ZrO$_{2}$ concentration.      

Effects of Post-Deposition Annealing and Oxygen Content on the Structural and pH-Sensitive Properties of Thin Nd $_{2}$O $_{3}$ Films

This paper describes the structural properties and sensing characteristics of thin Nd$_{2}$O$_{3}$ sensing membranes deposited on silicon substrates by means of reactive sputtering. X-ray diffraction, X-ray photoelectron spectroscopy, and atomic-force microscopy were used to study the chemical and morphological features of these films as functions of the growth conditions (argon-to-oxygen flow ratios of $20/5, 15/10$ and $10/15$; temperatures ranging from 600$~^{circ}$C to 800$~^{circ}$C). The thin Nd$_{2}$O$_{3}$ electrolyte-insulator-semiconductor devices prepared under a 15/10 flow ratio with subsequent annealing at 700$~^{circ}$C exhibited a higher sensitivity (56.01 mV/pH, in the solutions from pH 2 to 12), a smaller hysteresis voltage (4.7 mV in the pH loop $7 to 4 to 7to 10 to 7$), and a lower drift rate (0.41 mV/h in the pH 7 buffer solution) than did those prepared at the other conditions. We attribute this behavior to the optimal oxygen content in this oxide film forming a high density of binding sites and a small surface roughness.      

Structure and Magnetic Properties of Sn$_{1 - {rm x}}$ Co$_{rm x}$ O$_{2}$ Powder and Film

We have studied room-temperature ferromagnetism (RTFM) in Sn$_{1 - {rm x}}$Co$_{rm x}$O$_{2}$ powders and films fabricated by the sol-gel method. Our X-ray diffraction, high-resolution transmission microscopy, and X-ray photoelectron spectroscopy results show that all the samples have a pure rutile structure, and Co ions have a chemical valence of 2+. In addition, the magnetic moment per Co ion drops rapidly with the increase of Co content. Interestingly, Sn $_{1 - {rm x}}$Co $_{rm x}$O $_{2}$ films spin-coated on a Si (111) substrate have much larger magnetic moment than powder samples, because film samples have larger domain volumes, which may induce stronger long-range magnetic exchange coupling.      

Domain Structure in (NiFe/Au/Co/Au)$_{10}$ Multilayers With Perpendicular Anisotropy of Co Layers

Results of domain structures observation of individual Ni $_{80}$Fe $_{20}$ and Co sublayers in sputter deposited (NiFe/Au/Co/Au)$_{10}$ multilayers, using an element-sensitive method: the photoemission electron microscopy combined with soft X-ray magnetic circular dichroism, are presented. Also, overall domain structures were studied with magnetic force microscopy. The studies allowed us to reveal submicron stripe domains in the investigated samples and the replication of the stripe domains from the Co layers with perpendicular anisotropy to the NiFe layers with easy-plane anisotropy.      

Correlation Between the Degradation of Perpendicular Anisotropy and the Double Hysteresis Behavior in [Pd/Co]$_{rm n}$/FeMn Exchange Biased Thin Films

We clearly detected double hysteresis by increasing Co layer thickness and decreasing the number of bilayers in perpendicular exchange biased [Pd(0.6)/Co$(t)$] $_{rm n}$/FeMn(11.6 nm) thin films. In-plane tensile stress calculations confirmed that the appearance of double hysteresis is closely related to the degradation of stress-induced perpendicular anisotropy in the [Pd/Co] multilayers. Furthermore, annealing at the magnetic field applied perpendicular to the film plane directly verified that the enhancement of thermally induced perpendicular anisotropy, $K_{rm eff-induced}$, in the [Pd/Co] multilayers is the main physical reason for removal of the double hysteresis. All our experimental and theoretical results demonstrated that perpendicular anisotropy is the dominant factor in controlling the double hysteresis behavior of perpendicularly magnetized [Pd/Co]$_{rm n}$/FeMn exchange biased thin films.      

Spin Seebeck Effect in Ni$_{81}$Fe$_{19}$/Pt Thin Films With Different Widths

The spin Seebeck effect (SSE) has been measured in Ni $_{81}$Fe $_{19}$ thin films which have different widths by using the inverse spin Hall effect (ISHE) in a Pt wire. The ISHE voltage induced by SSE is enhanced by lengthening the Pt wire. Combined with ISHE, SSE is applicable to the production of electric generators in which the thermoelectric figures of merit are tunable in terms of device structure.      

Bit Storage by 360 $^{circ}$ Domain Walls in Ferromagnetic Nanorings

We propose a theoretical design for a magnetic memory cell, based on thin-film ferromagnetic nanorings, that can efficiently store, record, and read out information. An information bit is represented by the polarity of a stable 360$^{circ}$ domain wall introduced into the ring. Switching between the two magnetization states is done by a current applied to a wire passing through the ring, whereby the 360$^{circ}$ domain wall splits into two charged 180 $^{circ}$ walls, which then move to the opposite extreme of the ring to recombine into a 360 $^{circ}$ wall of the opposite polarity.      

Planar Optical Waveguide Evanescent Wave ${rm CO}_{2}$ Sensor Based on a Clad of Alstonia Scholaris Leaf Extract

An evanescent wave biosensor is designed and developed using a single mode planar optical waveguide based on a spin coated clad of leaf extract of Alstonia Scholaris. The fabricated sensor showed ${rm CO}_{2}$ concentration dependent response. The specialty of this sensor is that it can be used when stored at room temperature (25$~^{circ}{rm C}$) up to a maximum of 25–30 days with 90% retention of original sensitivity. These ${rm CO}_{2}$ sensing biochips showed good operational efficiency for 10 cycles. The planar optical waveguide is versatile, easy to fabricate and can be used for ppm level ${rm CO}_{2}$ measurement with good sensitivity. Cross sensitivity with respect to humidity is studied. The sensor exhibited a short response time of 4–5 s and recovery time of 25 s with good repeatability and reproducibility.      

SiGe/Si Quantum-Dot Infrared Photodetectors With ${bm delta}$ Doping

The multicolor absorption of MOS SiGe/Si quantum-dot (QD) infrared photodetectors is demonstrated using the boron $delta$-doping in Si spacers. The energy-dispersive X-ray spectroscopy shows that the Ge concentration in the wetting layers is much smaller than that in QDs. Most holes stay at the ground state in QDs instead of wetting layers. The energy band structure in QDs is calculated to understand the absorption spectrum. The absorption at 3.7–6 $mu$m is due to the intersubband transition in the SiGe QDs. The other absorption at 6–16 $mu$ m mainly comes from the intraband transition in the boron $delta$ -doping wells. Since the broadband spectrum covers most of the atmospheric transmission windows for infrared, the broadband detection is feasible using this device.      

A Fiber-Optic Sensor for Monitoring Trace Ammonia in High-Temperature Gas Samples With a ${hbox{CuCl}}_{2}$-Doped Porous Silica Optical Fiber as a Transducer

An optical fiber chemical sensor for detecting/monitoring trace ammonia in high-temperature gas streams has been developed. This sensor uses a ${hbox{CuCl}}_{2}$-doped porous silica optical fiber, prepared via a previously reported sol-gel process, as a transducer. Trace ammonia in a gas sample diffuses into the porous fiber to react with the doped agent to form a ${hbox{Cu}}^{2+}$-ammonia complex. The concentration of the ${hbox{Cu}}^{2+}$ -ammonia complex inside the porous silica optical fiber is proportional to ammonia concentration in the gas sample, to which the sensing porous silica fiber is exposed. Therefore, ammonia concentration in the gas sample can be detected through detecting the optical absorption signal of the formed ${hbox{Cu}}^{2+}$-ammonia complex inside the fiber by using a fiber-optic UV/Vis absorption spectrometric method. This sensor can be used to reversibly monitor trace ammonia in a gas sample at an elevated temperature up to 450 $^{circ}$C in the tested range. A detection limit of 0.24 ppmv ammonia in an air gas sample was achieved when the sensor was tested at a temperature of 450 $^{circ}$ C.      

Novel Built-In Current-Sensor-Based $I_{rm DDQ}$ Testing Scheme for CMOS Integrated Circuits

This paper presents a new built-in current sensor (BICS)-based $I_{rm DDQ}$ testing scheme for complementary metal-oxide semiconductor (CMOS) integrated circuits (ICs). The proposed BICS will employ short detection times and low power dissipation to effectively ensure the reliability of the BICS and reduce the impact of the circuit under test (CUT) during testing. In addition, an $I_{rm DDQ}$ testing scheme based on the proposed BICS for detecting the abnormal quiescent current is presented. A 16-kB CMOS static random access memory (SRAM) is used as the CUT in this paper to discuss the testing considerations, including fault models and the $I_{rm DDQ}$ testing strategy. The simulation results show that the proposed BICS has a much improved performance compared with that in previous works. In addition, the physical chip design of the proposed BICS-based $I_{rm DDQ}$ testing scheme for SRAM testing applications is also implemented using the Taiwan Semiconductor Manufacturing Company (TSMC) 0.18-$mu hbox{m}$ CMOS technology. The test results show that 100% fault coverage can be achieved with only a 1.23% area overhead penalty.      

Fabrication and Application of Ruthenium-Doped Titanium Dioxide Films as Electrode Material for Ion-Sensitive Extended-Gate FETs

A novel ruthenium-doped titanium dioxide (TiO $_{2}$: Ru) film for pH detection is based on an ion-sensitive extended gate field effect transistor (ISEGFET) sensor. For the preparation of the TiO$_{2}$ : Ru sensing film, a specific processing for metal modification of TiO$_{2}$ thin film is deposited by a co-sputtering system. After thermal annealing treatment, material analysis of the sensing layer is measured by SEM, Hall measurement system and electrical detection system. The average sensitivity of TiO$_{2}$: Ru for hydrogen ion detection is about 55.20 mV/pH (concentration range between pH1 and pH13). The effect of long-term drift for TiO$_{2}$ : Ru ISEGFET-based sensor is presented. Drift rate of the sensor for pH is 0.745 mV/h for 12 h. In order to prepare the calcium ion sensor, the sensing membrane of polymer materials is based on TiO $_{2}$: Ru ISEGFET-based sensor by physical adsorption. The average sensitivity of the calcium ion sensor in the concentration ranging between 1 M and 1$,times,$ 10$^{-3}$ M CaCl$_{2}$ is about 29.65 mV/pCa.      

Comparison of Alternative Techniques for Characterizing Magnetostriction and Inverse Magnetostriction in Magnetic Thin Films

We compare the direct and inverse techniques of measuring magnetostriction in magnetic thin films. We chose a set of four magnetic thin film samples (Co$_{95}$Fe$_5$, Co$_{60}$Fe$_{20}$B$_{20}$, Ni$_{65}$Fe$_{15}$Co$_{20}$, and Ni$_{80}$Fe$_{20}$) for the measurements, representing positive and negative magnetostriction and having saturation magnetostriction of magnitudes ranging from $10^{-7}$ to $10^{-5}$. We made the direct measurements on a high-precision optical cantilever beam system, and we carried out the inverse magnetostriction measurements on a nondestructive inductive $Bhbox{-}H$ looper with three-point bending stage.      

Optimization of Spin-Valve Structure NiFe/Cu/NiFe/IrMn for Planar Hall Effect Based Biochips

This paper deals with the planar Hall effect (PHE) of Ta(5)/NiFe$(t_{rm F})$/Cu(1.2)/NiFe$(t_{rm P})$/IrMn(15)/Ta(5) (nm) spin-valve structures. Experimental investigations are performed for 50 $mu$m$times hbox{50} mu$m junctions with various thicknesses of free layer ( $t_{rm F} = 4, 8, 10, 12, 16, 26$ nm) and pinned layer ($t_{rm P} = 1, 2, 6, 8, 9, 12$ nm). The results show that the thicker free layers, the higher PHE signal is observed. In addition, the thicker pinned layers lower PHE signal. The highest PHE sensitivity $S$ of 196 $mu$V/(kA/m) is obtained in the spin-valve configuration with $t_{rm F} = 26$ nm and $t_{bf P} = 1$ nm. The results are discussed in terms of the spin twist as well as to the coherent rotation of the magnetization in the individual ferromagnetic layers. This optimization is rather promising for the spintronic biochip developments.      

Comparison of the ${mbi A}^{*}{-}{mbi A}$ and ${mbi T}, Phi{-}Phi$ Formulations for the 2-D Analysis of Solid-Rotor Induction Machines

We present two eddy-current field potential formulations to solve rotating electrical machine problems by applying the finite-element method (FEM) using the motional ${mbi A}^{*}{-}{mbi A}$-potential formulation and the motional ${mbi T}, {bf Phi}{-}{bf Phi}$-potential formulation. We use the single-phase and three-phase solid-rotor induction motors of Problem No. 30a of TEAM Workshops to compare the potential formulations. We have solved both problems in the time domain and the frequency domain.      

Carbon Nanotube Growth Studies Using an Atmospheric, Microplasma Reactor

This paper reports chemical vapor deposition (CVD) of carbon nanotube arrays at substrate temperatures lower than 100 $^{circ}$C and growth rates greater than 50 $mu$m/h using atmospheric plasma discharges inside microcapillary reactors. Thermal CVD using the same reactor required temperatures in excess of 900  $^{circ}$C. At temperatures greater than 1100  $^{circ}$C, the thermal CVD yielded an unusual, diverging conical morphology. The microreactor studies suggest no new micrometer scale effects for thermal CVD. On the other hand, the microplasma discharges show beneficial effects on nanotube growth due to high plasma densities achieved at submillimeter reactor dimensions. The results suggest that the nanotube growth rates are proportional to plasma radical density.      

Single-Wafer-Processed Self-Testable High-$g$ Accelerometers With Both Sensing and Actuating Elements Integrated on Trench-Sidewall

A single-wafer-processed high-$g$ piezoresistive accelerometer is reported. The microsensor has an in-plane self-caging cantilever configuration, in which an electrostatic self-testing function is integrated on-chip. Both the sensing piezoresistors and the self-test actuating electrodes are integrated on vertical sidewalls of the laterally deflecting cantilever. For single-wafer-based fabrication of the self-testable piezoresistive accelerometer, a trench-sidewall micromachining technology is developed, which is capable of integration of both boron-diffused piezoresistive sensors and electrostatic actuators on deep trench sidewalls. In addition, the technology can realize electrical continuity from the vertical trench-sidewall to the wafer surface. After design and fabrication of the accelerometers for a 200 000 g measure-range, characterization was performed to evaluate the developed trench-sidewall integration technology and to test the self-testable high-$g$ accelerometers. A linear I-V relationship for the sidewall-diffused piezoresistor is measured with satisfactory sidewall-to-surface electric-transfer properties. The electrical isolation between adjacent elements on the sidewall shows a breakthrough voltage of about 55 V. Moreover, with the single-chip integrated lateral-actuating structure, both static and dynamic self-testing functions are realized. The measurement of the accelerometer results in a sensitivity of about 1 $~mu$V/g/3.3 V, noise-limited vibration resolution of about 1 g and zero-point temperature drift of lower than 100 ppm/$^{circ}$ C.      

A Vibration-Based PMN-PT Energy Harvester

We report design, modeling, analysis, and experimental study of a vibration-based piezoelectric energy harvester. The energy harvester is made of a composite cantilever of a single crystal relaxor ferroelectric material, $(1-x)$Pb(Mg $_{1/3}$Nb $_{2/3}$)O $_{3-x}$PbTiO $_3$ (PMN-PT), and a polydimethylsiloxane (PDMS) base layer. A PDMS proof mass is constructed at the tip of the composite cantilever beam and is used as a means to tune the system natural frequency. The use of the PMN-PT piezoelectric material and an interdigited electrodes (IDEs) design improves the energy conversion efficiency. A dynamic systems modeling approach is employed to analyze the responses and the performance of the harvester design. We have demonstrated that a prototype of the harvester with a size of 7.4 mm $,times,$2 mm $,times,$110 $mu$m outputs a voltage of 10 V (0.3 mW power) under a vibration excitation with a peak-to-peak amplitude of 1 mm at a frequency around 1.3 kHz. Based on the experimental results, the power density prediction of the proposed harvester design shows a superior performance than that of the other reported piezoelectric harvesters.      

Effect of Factors on Coercivity in Sr–La–Co Sintered Ferrite Magnets

We varied the composition and sintering temperature of Sr–La–Co ferrite magnets to analyze the effects of various important factors on coercivity $(H_{rm cJ})$. We examined the effects of crystal grain size and distribution, the mechanism of magnetization reversal, the degree of crystal grain orientation (OD), and the anisotropy field $(H_{rm A})$ on $H_{rm cJ}$. We proposed an equation based on the experimental results that expresses the measured $H_{rm cJ}$ and considers these effects as $H_{rm cJ} = C_{rm t}(0.4/R_{rm h})$ OD $(H_{rm A} - H_{rm d} - H_{rm in})$, where $C_{rm t}, R_{rm h}, H_{rm d}$, and $H_{rm in}$ are the crystal grain size effects on $H_{rm cJ}$ of sintered magnet, rotational hysteresis integral corresponding to the mechanism of magnetization reversal, demagnetizing field of shape anisotropy, and interaction field between crystal grains, respectively. We found that apart from the volume ratio for single-domain crystal grains and $H_{rm A}$, the mechanism of magnetization reversal had significant effects on $H_{rm cJ}$ for Sr–La–Co sintered ferrite magnets.