Full-field surface plasmon resonance sensor for high resolution refractive index measurement using common-path heterodyne interferometer

This study presents a full-field surface plasmon resonance (SPR) sensor induced by attenuated total reflection (ATR)-couple for liquid refractive index measurement. The system adopts a common-path heterodyne interferometer to measure the phase difference between P- and S-wave after passing through the SPR sensor. In order to realize the full-field measurement, it adopts a three-frame integrating-bucket method. The experimental results show great consistency profile between single point and full-field liquid refractive index measurement from 1.330 to 1.340 RIU. It shows that the best sensitivity and resolution of a single pixel in charge couple device (CCD) for liquid refractive measurement are 3.3 × 10⁴ (deg/RIU) and 3.53 × 10⁻⁶ (RIU), respectively. As compared with traditional single-point method, the proposed method with a regular CCD has no degradation. Therefore, the system has many applications in chemistry and biology.     

Pull-in-based μg-resolution accelerometer: Characterization and noise analysis

The pull-in time (t_pi) of electrostatically actuated parallel-plate microstructures enables the realization of a high-sensitivity accelerometer that uses time measurement as the transduction mechanism. The key feature is the existence of a metastable region that dominates pull-in behavior, thus making pull-in time very sensitive to external accelerations. Parallel-plate MEMS structures have been designed and fabricated using a SOI micromachining process (SOIMUMPS) for the implementation of the accelerometer. This paper presents the experimental characterization of the microdevices, validating the concept and the analytical models used. The accelerometer has a measured sensitivity of 0.25 μs/μg and a bandwidth that is directly related to the pull-in time, BW = 1/2t_pi ≈ 50 Hz. These specifications place this sensor between the state of the art accelerometers found both in the literature and commercially. More importantly, the resolution of the measurement method used is very high, making the mechanical-thermal noise the only factor limiting the resolution. The in-depth noise analysis to the system supports these conclusions. The total measured noise floor of 400 μg (100 μs) is mainly due to the contribution of the environmental noise, due to lack of isolation of the experimental setup from the building vibrations (estimated mechanical thermal noise of 2.8 μg/√Hz). The low requirements of the electronic readout circuit makes this an interesting approach for high-resolution accelerometers.     

Micro tracking and positioning using off-the-shelf servopneumatics

Conventional pneumatic systems do not exhibit significant heat or magnetic fields and present high force to volume ratios. They are, however, typically confined to simple motion tasks owing to their control complexity. Leveraging on a sliding mode based control strategy, the authors have shown in previous works that good tracking and positioning results can be achieved using off-the-shelf servopneumatics. This paper extends the previously mentioned works by applying a modified version of the control law to a new experimental setup comprising different valves and actuators and a better resolution encoder. The modification of the control law involves the use of a new boundary layer thickness variation law, different from the one previously used. Experimental results show that the modified control law leads to very accurate motion control. The positioning error from a control perspective is only limited by the encoder resolution, 1 μm, in any position of the piston stroke and when carrying loads of 3 kg and 8 kg, without any controller retuning. Good results in the micrometer range are also obtained when tracking sinusoidal and triangular references.     

A dielectric-based combined horizontal sensor for on-the-go measurement of soil water content and mechanical resistance

Precision agriculture is drawing widespread attention and increasing interest in the use of on-the-go sensors to extract soil and plant information. This new trend is evident from an increased number of (tillage) studies concerning the development of sensors for measuring physical soil properties. In this study, a new dielectric-based horizontal sensor was designed and stationary calibrated in pots for measurement of volumetric soil water content. Subsequently, the sensor was combined with a load cell and installed on a tine with thickness of 25 mm, and its dynamic performance was assessed. The load cell behind the tine measures horizontal soil mechanical resistance. In order to evaluate the on-the-go performance of this combined sensor, two experiments were carried out in a soil bin, with the purpose of (i) measuring soil water content along a transect of longitudinally variable water contents, (ii) investigating the difference in horizontal resistance force measured by either the combined (horizontal force and water content) or a single sensor (horizontal force only). The stationary calibration results showed that quadratic equations with coefficients of determination (R²) of 0.989 and 0.918 could be fitted to the data points obtained from measurements in soil bulk densities of 1.5 and 1.2 g cm⁻³, respectively. The results of the soil bin experiments indicated that the response of the dielectric sensor to soil water content variations was reasonable, but that the output voltage of the sensor should be amplified for a better sensitivity and resolution. The presented combined sensor can provide useful information on soil physical properties towards site specific applications in soils.     

High temperature dynamic viscosity sensor for engine oil applications

This paper presents a new high temperature dynamic viscosity sensor for in situ condition monitoring of engine lubricants. The sensor is used to measure the variation in the quality factor of a vibrating piezoelectric cantilever beam due to viscous damping. The sensor was used to measure the dynamic viscosity of various single and multi-grade engines oils up to 180 cP from 25 °C to 60 °C. The sensor is capable of detecting degradation and dilution of engine oil for both new and used samples of 5W-30 and 10W-40 and diluted SAE 30 engine oils. All of the viscosity measurements presented are within 0.13-9.8% of the results obtained using the standard Walther equation at various temperatures. An equation relating dynamic viscosity of an oil sample to the quality factor of the beam is presented. The quality factor measurement circuit presented in this research can be implemented in automotive applications for in situ condition monitoring of lubricant viscosity.     

Noncontact impedance sensing

This article discusses noncontact impedance sensing used to measure the mass, viscosity, and stiffness of an environment. The developed sensor is composed of a laser displacement sensor and an air nozzle for the force supply. The key point of the design is that we use a common axis for both force probing and distance sensor so that we can obtain the exact displacement of the environment. We also discuss the appropriateness of the estimated parameters from the viewpoint of sensitivity of response. Experimental results are shown to confirm the effectiveness of the proposed sensor. We also tested the developed sensor on pears to confirm the possibility of measuring their surface impedance. This work was presented in part at the 10th International Symposium on Artificial Life and Robotics, Oita, Japan, February 4–6, 2005     

NEMS diaphragm sensors integrated with triple-nano-ring resonator

Two types of circular diaphragm, made by Si and Si/SiO₂, integrated with hexagonal photonic crystal (PhC) lattice with triple-nano-ring (TNR) resonator created at the centre are proposed as nano-scale force and pressure sensor. The optimized channel drop effect of the TNR resonator brings a strong forward drop resonant peak in both the cases and with Q-factor of 1602 and 1737, respectively. The resonant wavelength peak experience red shifts upon the applied load on the circular diaphragm along the normal direction, in terms of a 2nd-order polynomial relationship. The devices can detect a wide range of applied load. Si diaphragm based micro force sensor gives minimum detectable force of 0.847 μN in the region of applied force from 10 to 20 μN. Si/SiO₂ diaphragm based pressure sensor gives minimum detectable pressure of 4.17 MPa in the region of applied pressure from 20 to 40 MPa. From the derived wavelength shift versus a given centre displacement of the diaphragm, Si diaphragm based sensor shows higher sensitivity than Si/SiO₂ diaphragm sensor.     

Evaluation of the MODIS LAI product using independent lidar-derived LAI: A case study in mixed conifer forest

This study presents an alternative assessment of the MODIS LAI product for a 58,000 ha evergreen needleleaf forest located in the western Rocky Mountain range in northern Idaho by using lidar data to model (R² = 0.86, RMSE = 0.76) and map LAI at higher resolution across a large number of MODIS pixels in their entirety. Moderate resolution (30 m) lidar-based LAI estimates were aggregated to the resolution of the 1-km MODIS LAI product and compared to temporally-coincident MODIS retrievals. Differences in the MODIS and lidar-derived values of LAI were grouped and analyzed by several different factors, including MODIS retrieval algorithm, sun/sensor geometry, and sub-pixel heterogeneity in both vegetation and terrain characteristics. Of particular interest is the disparity in the results when MODIS LAI was analyzed according to algorithm retrieval class. We observed relatively good agreement between lidar-derived and MODIS LAI values for pixels retrieved with the main RT algorithm without saturation for LAI LAI ≤ 4. Moreover, for the entire range of LAI values, considerable overestimation of LAI (relative to lidar-derived LAI) occurred when either the main RT with saturation or back-up algorithm retrievals were used to populate the composite product regardless of sub-pixel vegetation structural complexity or sun/sensor geometry. These results are significant because algorithm retrievals based on the main radiative transfer algorithm with or without saturation are characterized as suitable for validation and subsequent ecosystem modeling, yet the magnitude of difference appears to be specific to retrieval quality class and vegetation structural characteristics.     

Cross-sensitivity evaluation for ammonia sensing using absorption spectroscopy in the UV region

This paper describes an optical sensor for the monitoring of ammonia gas. An open path optical technique is used to analyze the absorption lines of ammonia within the ultra-violet region. The optical sensor shows absorption lines comparable to the theoretical ammonia spectra. Cross-sensitivity with carbon dioxide and oxygen gas has been tested and clearly shows that these two gases have no effect on ammonia measurement in the ultra-violet region, between 200 nm and 230 nm. The optical sensor is able to detect ammonia down to 9 ppm with an average error less than 2%. The optical sensor system also shows a fast response time which is less than 4 s.     

Magnetic particle dosing and size separation in a microfluidic channel

Separation of functional magnetic particles or magnetically labeled entities is a key feature for bioanalytical or biomedical applications and therefore also an important component of lab-on-a-chip devices for biological applications. We present a novel integrated microfluidic magnetic bead manipulation device, comprising dosing of magnetic particles, controlled release and subsequent magnetophoretic size separation with high resolution. The system is designed to meet the requirements of specific bioassays, in particular of on-chip agglutination assays for the detection of rare analytes by particle coupling as doublets. Integrated soft-magnetic microtips with different shapes provide the magnetic driving force of the bead manipulation protocol. The magnetic tips that serve as field concentrators of an external electromagnetic field, are positioned in close contact to a microfluidic channel in order to generate high magnetic actuation forces. Mixtures of 1.0 μm and 2.8 μm superparamagnetic beads have been used to characterize the system. Magnetophoretic size separation with high resolution was performed in static conditions and in continuous flow mode. In particular, we could demonstrate the separation of 1.0 μm single beads and doublets in a sample flow.     

Micromechanical force sensors based on SU-8 resist

This paper presents an innovative approach to develop highly sensitive 3D force sensors. In order to increase the probing sensitivity by using a material with low Young’s Modulus, a novel force sensor design based on SU-8 polymer is realized. Therefore, a low cost fabrication process is developed accompanied by design studies and an estimation of mechanical properties of the deforming elements. This paper will present the fabrication process as well as a distinguishing set of test results, analytical results, and simulations on the characterization of the presented SU-8 force sensor. The novel SU-8 design consists of an SU-8 boss-membrane with integrated piezoresistive elements. The SU-8 membranes are structured using photolithography. The SU-8 micromechanical structures are characterized to determine film stresses, bending stiffness, displacement of the stylus, and breaking points. Included in these tests are measurement of the stress behavior at different process steps and simulation of stress distribution in the membrane at different directions of loading. In addition a comparative analytical investigation of the structures is carried out particularly with regard to the displacement of the stylus.     

A comparison of multi-spectral, multi-angular, and multi-temporal remote sensing datasets for fractional shrub canopy mapping in Arctic Alaska

Shrub cover appears to be increasing across many areas of the Arctic tundra biome, and increasing shrub cover in the Arctic has the potential to significantly impact global carbon budgets and the global climate system. For most of the Arctic, however, there is no existing baseline inventory of shrub canopy cover, as existing maps of Arctic vegetation provide little information about the density of shrub cover at a moderate spatial resolution across the region. Remotely-sensed fractional shrub canopy maps can provide this necessary baseline inventory of shrub cover. In this study, we compare the accuracy of fractional shrub canopy (> 0.5 m tall) maps derived from multi-spectral, multi-angular, and multi-temporal datasets from Landsat imagery at 30 m spatial resolution, Moderate Resolution Imaging SpectroRadiometer (MODIS) imagery at 250 m and 500 m spatial resolution, and MultiAngle Imaging Spectroradiometer (MISR) imagery at 275 m spatial resolution for a 1067 km² study area in Arctic Alaska. The study area is centered at 69 °N, ranges in elevation from 130 to 770 m, is composed primarily of rolling topography with gentle slopes less than 10°, and is free of glaciers and perennial snow cover. Shrubs > 0.5 m in height cover 2.9% of the study area and are primarily confined to patches associated with specific landscape features. Reference fractional shrub canopy is determined from in situ shrub canopy measurements and a high spatial resolution IKONOS image swath. Regression tree models are constructed to estimate fractional canopy cover at 250 m using different combinations of input data from Landsat, MODIS, and MISR. Results indicate that multi-spectral data provide substantially more accurate estimates of fractional shrub canopy cover than multi-angular or multi-temporal data. Higher spatial resolution datasets also provide more accurate estimates of fractional shrub canopy cover (aggregated to moderate spatial resolutions) than lower spatial resolution datasets, an expected result for a study area where most shrub cover is concentrated in narrow patches associated with rivers, drainages, and slopes. Including the middle infrared bands available from Landsat and MODIS in the regression tree models (in addition to the four standard visible and near-infrared spectral bands) typically results in a slight boost in accuracy. Including the multi-angular red band data available from MISR in the regression tree models, however, typically boosts accuracy more substantially, resulting in moderate resolution fractional shrub canopy estimates approaching the accuracy of estimates derived from the much higher spatial resolution Landsat sensor. Given the poor availability of snow and cloud-free Landsat scenes in many areas of the Arctic and the promising results demonstrated here by the MISR sensor, MISR may be the best choice for large area fractional shrub canopy mapping in the Alaskan Arctic for the period 2000-2009.     

A silicon-glass-based microfabricated wide range thermal distribution gas flow meter

Recently, there has been high demand on miniaturizations of bio-instruments and wide range gas flux measurement in the field of chemistry and mechanics. This paper presents the design, fabrication, and characterization of a silicon-glass-based thermal distribution gas flow meter (20 mm × 10 mm × 1.6 mm) with a wide detection range. To facilitate the fabrication and maintain the stability of the sensor, a platinum (Pt) thin film was adopted as the heater and thermometers. Both the thermal property and temperature sensitivity of Pt thin film were characterized. SiO₂ passivation layers were deposited on top of the Pt film to prevent thermal and electrical shift of sensitive elements. Three pairs of thermometers were constructed beside the heater. Sensitivity and gas flux range of the gas flow meter can be increased by alternate use of these three sensor pairs. We also introduced a specific hardware control circuit system for real-time gas flux monitoring through the connection with a computer interface. The proposed gas flow sensor device was capable of measuring gas flux within the range of 0.8-2800 ml/min, thus demonstrating the potential for a wide range of applications.     

一种非接触型位移传感器的研究

介绍了一种基于磁场测量原理的非接触型直线位移传感器,该位移传感器采用强磁性金属膜磁敏电阻器作为敏感元件,通过测量磁场强度随位移的变化,实现物体位移的非接触测量。详细介绍了传感器的结构、测量原理,并进行了传感器的标定实验。该位移传感器具有结构简单、信噪比高、重复性好、精度高、可实现非接触测量,可广泛应用测量环境恶劣,且要求较高精度和可靠性的场合。     

Capacitive depression sensor for microfluidic pneumatic networks

This paper reports a capacitive depression sensor intended to make measurements in-line in microfluidics pneumatic networks which works with negative pressures in the order of hundreds of millibars. The principle of operation of the sensor is neither thermal nor magnetic, but purely mechanical, and does not need a servomechanism. The proposed device is composed by two circular membranes linked by a column. This structure presents a particular behavior when exerting negative pressures between the membranes, named negative behavior. The behavior is confirmed prior to fabrication using numerical simulations. The materials used are the negative epoxy photoresist SU-8, printed circuit board (PCB) and sputtered gold. The device has been experimentally tested in the laboratory with successful results, providing an increment of capacitance from 1.7 to 3 pF for applied depressions from 0 to 500 mbar and presenting good agreement with the electromechanical FEM simulations.     

Resonant Magnetic Field Sensor With Frequency Output

This paper presents a novel type of resonant magnetic field sensor exploiting the Lorentz force and providing a frequency output. The mechanical resonator, a cantilever structure, is embedded as the frequency-determining element in an electrical oscillator. By generating an electrical current proportional to the position of the cantilever, a Lorentz force acting like an additional equivalent spring is exerted on the cantilever in the presence of a magnetic field. Thus, the oscillation frequency of the system, which is a function of the resonator's equivalent spring constant, is modulated by the magnetic field to be measured. The resonant magnetic field sensor is fabricated using an industrial CMOS process, followed by a two-mask micromachining sequence to release the cantilever structure. The characterized devices show a sensitivity of 60 kHz/Tesla at their resonance frequency$f_0= 175~ kHz$and a short-term frequency stability of 0.025 Hz, which corresponds to a resolution below 1$~mu T$. The devices can thus be used for Earth magnetic field applications, such as an electronic compass. The novel resonant magnetic field sensor benefits from an efficient continuous offset cancellation technique, which consist in evaluating the frequency difference measured with and without excitation current as output signal. 1676     

Determination of 3-nitrotyrosine in human urine samples by surface plasmon resonance immunoassay

This paper describes the detection of a low-molecular weight molecule, 3-nitrotyrosine (3-NT) (∼226 Da), in human urine by coupling indirect inhibition assay with a surface plasmon resonance (SPR) sensor. 3-NT antibody (anti-3-NT Ab, mouse IgG) was used in this assay. An optimal antibody concentration has been measured at 27.9 μg/mL in order to obtain the best performance of the sensor surface. The lowest detection limit for 3-NT with this method is 4.7 ng/mL (S/N = 3). Sensor reliability was demonstrated by good specificity, intra-assay and inter-assay relative standard deviations <8%, average recovery of 107.68 ± 19.4% and sensor surface (self-assembled monolayer) stability through more than 200 regeneration cycles and 15 days of repeated measurement. This is the first SPR biosensor assay of 3-NT in human urine. The high stability of the SPR sensor surface underlies the potential of the SPR method as a low cost diagnostic tool for clinical detection of 3-NT.     

A sequential model for disaggregating near-surface soil moisture observations using multi-resolution thermal sensors

A sequential model is developed to disaggregate microwave-derived soil moisture from 40 km to 4 km resolution using MODIS (Moderate Imaging Spectroradiometer) data and subsequently from 4 km to 500 m resolution using ASTER (Advanced Scanning Thermal Emission and Reflection Radiometer) data. The 1 km resolution airborne data collected during the three-week National Airborne Field Experiment 2006 (NAFE'06) are used to simulate the 40 km pixels, and a thermal-based disaggregation algorithm is applied using 1 km resolution MODIS and 100 m resolution ASTER data. The downscaled soil moisture data are subsequently evaluated using a combination of airborne and in situ soil moisture measurements. A key step in the procedure is to identify an optimal downscaling resolution in terms of disaggregation accuracy and sub-pixel soil moisture variability. Very consistent optimal downscaling resolutions are obtained for MODIS aboard Terra, MODIS aboard Aqua and ASTER, which are 4 to 5 times the thermal sensor resolution. The root mean square error between the 500 m resolution sequentially disaggregated and ground-measured soil moisture is 0.062 vol./vol. with a bias of − 0.045 vol./vol. and values ranging from 0.08 to 0.40 vol./vol.     

Development of a touch probe based on five-dimensional force/torque transducer for coordinate measuring machine (CMM)

Systematic errors due to the pre-travel variation and the probe tip shape are irreducible to the traditional touch trigger probing systems. This paper describes the development of a probing system based on five-dimensional force/torque transducer for coordinate measuring machines. The compensation for pre-travel variation is accomplished through the five-dimensional force/torque information acquired by the integrated transducer and the stiffness matrix of the stylus. From the relationship between the obtained force/torque information and the geometrical shape equation, coordinates of the exact contact point immune from the contact error are acquired. After calibration, the combined measurement uncertainty is estimated to be less than ±0.3 μm.     

Principles of nonlinear MEMS-resonators regarding magnetic-field detection and the interaction with a capacitive read-out system

This paper presents a magnetic field sensor with capacitive read-out, whose active element is a micromachined mechanical resonator. The MEMS magnetic field sensor exploits the Lorentz force to detect external magnetic flux density through the displacement of the resonant structure, which can be measured with optical and capacitive sensing techniques. The micromachined U-shaped cantilever features a length of 2 mm, a base width of 90 μm and a thickness of 20 μm, and is manufactured in SOI technology. The designed sensor has a measured resonant frequency of 4.359 kHz for the fundamental mode and a calculated mass of the flexible structure of 24.5 ng. A quality factor in the order of 10⁴ at an ambient pressure of 0.3 Pa has been measured where a magnetic field resolution of 15 nT can be achieved. Although these arrangements are well suited to capacitively sense the vibrations caused by the Lorentz force on the current lead on the silicon part, care has to be taken to avoid undesired mutual interferences. A serious interference was observed in case of a DC bias voltage at the readout capacitance and a significant voltage drop caused by the current needed for the generation of the Lorentz force. This work investigates in detail this phenomenon as well as the complete physical transduction chain and improves the understanding of such microelectromechanical systems significantly. An analytical model of the electrostatic system is established including all relevant components and their interactions as well as the motion of the MEMS part. The importance of electrostatic back-action for a feasible detection limit for magnetic fields was recognized for the first time.