Fabrication and characterization of machinable Si3N4/h-BN functionally graded materials

A new design method of machinable ceramic composites was proposed, which applies the graded-structure concept to the design of machinable Si₃N₄ ceramics. Silicon nitride/hexagonal boron nitride (h-BN) functionally graded materials (FGMs) were fabricated by hot pressing at 1750°C for 2 h, varying the alignment of the amount of hexagonal BN using powder layering method. The improved machinability of Si₃N₄/h-BN composite can be attributed to addition of layered structure hexagonal BN. Hexagonal BN possesses excellent cleavage planes perpendicular to the c-axis. Ease of machining depends on degree of crystal interlocking; hence volume content of h-BN crystals and their aspect ratio affect machinability. Such design can improve the machinability of composite, and at the same time can make the mechanical properties of Si₃N₄ ceramic not to be sacrificed too much. The texture of h-BN and β-Si₃N₄ was observed during hot pressing sintering.     

颗粒级配对Si_(3)N_(4)w/Si_(3)N_(4)复合材料弯曲强度与介电性能的影响EI北大核心CSCD

为了获得一种弯曲和介电性能良好的氮化物陶瓷材料,本工作首先以氮化硅晶须(Si_(3)N_(4w))为原料,采用喷雾造粒工艺制备3种具有不同粒径分布的Si_(3)N_(4w)球形颗粒粉体,研究雾化盘转速对Si_(3)N_(4w)球形颗粒粉体粒径分布的影响。然后以喷雾造粒得到的Si_(3)N_(4w)球形颗粒为原料,采用干压法制备3种颗粒级配的Si_(3)N_(4w)预制体,研究颗粒级配Si_(3)N_(4w)预制体的孔径分布。采用化学气相渗透(CVI)和先驱体浸渍裂解(PIP)工艺在3种颗粒级配的Si_(3)N_(4w)预制体中进一步制备Si_(3)N_(4)基体,研究Si_(3)N_(4w)/Si_(3)N_(4)复合材料制备过程中的物相和微结构演变以及颗粒级配对Si_(3)N_(4w)/Si_(3)N_(4)复合材料的微结构、密度、弯曲强度和介电性能的影响。结果表明:3种颗粒级配的Si_(3)N_(4w)预制体均具有二级孔隙特征,其中小孔孔径均约为0.7μm,大孔孔径分别为45.2,30.1μm和21.3μm。在制备的3种颗粒级配的Si_(3)N_(4w)/Si_(3)N_(4)复合材料中,S13样品的颗粒级配效果最好,复合材料的弯曲强度达到81.59 MPa。此外,该样品的介电常数和介电损耗分别为5.08和0.018。良好的弯曲强度和介电性能表明制备的Si_(3)N_(4w)/Si_(3)N_(4)复合材料有望应用于导弹天线罩领域。     

Effect of the microstructure of Si3N4 on the adhesion strength of TiN film on Si3N4

The effect of the microstructure of silicon nitride, which was used as a substrate, on the adhesion strength of physical vapor deposited TiN film on Si₃N₄ was investigated. Silicon nitride substrates with different microstructures were synthesized by controlling the size (fine or coarse), the phase ( or β) of starting Si₃N₄ powder, and sintering temperature. The microstructure of Si₃N₄ was characterized in terms of grain size, aspect ratio of the elongated grain, and β-to- phase ratio. For a given chemical composition but different mechanical properties, such as toughness, elastic modulus, and hardness of Si₃N₄ were obtained from the diverse microstructures. Hertzian indentation was used to estimate the yield properties of Si₃N_4, such as critical loads for yield (P_y) and for ring cracking (P_c). The effect of the microstructure of Si₃N₄ on adhesion strength evaluated by scratch test is discussed. TiN films on Si₃N₄ showed high adhesion strengths in the range of 80–140 N. Hardness and the P_y of Si₃N₄ substrate were the primary parameters influencing the adhesion strength of TiN film. In TiN coating on Si₃N₄, substrates with finer grain sizes and higher phase ratios, which show high hardness and high P_y, were suitable for higher adhesion strength of TiN film.     

Mechanical property improvements in Nicalon SiC fibre reinforced silicon nitride ceramics by oxide coating of Si3N4 starting powders

Ceramic matrix composites are attractive as candidate materials for high-temperature applications offering some advantages compared to monolithic ceramics and high-temperature metal alloys. SiC fibre reinforced silicon nitride is one such composite system. However, the processing route is critical to the production of a reliable composite. In this study, silicon nitride matrix densification was improved and sintering temperature was lowered by coating of Si₃N₄ particles with oxides deposited from hydrolysed metal alkoxides. The solution containing oxide coated Si₃N₄ powders was used as a slurry to infiltrate Nicalon SiC fibre tows. Following previous studies, the fibres were heat-treated in carbon monoxide to improve mechanical and surface properties. Infiltrated green bodies were hot-pressed at elevated temperatures to produce dense composites. The results showed that particle coating accelerated densification kinetics, eliminated pores and reduced the required hot-pressing temperature. There was also less fibre degradation as a result of the lower temperature of densification. Bending strength and fracture toughness of the composites were measured and fractography was conducted using scanning electron microscope. Composites manufactured using coated Si₃N₄ powders showed improved properties, specifically matrix stiffening and delayed crack initiation under load.     

原位引入BN-SiC燃烧合成Si3N4-BN-SiC复合材料

Si₃N₄-BN-SiC复合材料以其良好的力学性能和抗氧化性能而具有良好的工程应用前景。本研究以Si、Si₃N₄稀释剂、B₄C和Y₂O₃为原料, 采用燃烧合成法成功制备了Si₃N₄-BN-SiC复合材料。通过Si、B₄C和N₂气之间的反应, 在Si₃N₄陶瓷中原位引入BN和SiC, 制备的Si₃N₄-BN-SiC复合材料由长棒状的β-Si₃N₄和空心球形复合材料组成。实验研究了空心球微结构的形成机理, 结果表明, 生成的SiC、BN颗粒及玻璃相覆盖在原料颗粒上, 当原料颗粒反应完全时, 形成空心球形微结构。并进一步研究了B₄C含量对Si₃N₄-BN-SiC复合材料力学性能的影响。原位引入SiC和BN在一定程度上可以提高复合材料的力学性能。当B₄C添加量为质量分数0~20%时, 获得了抗弯强度为28~144 MPa、断裂韧性为0.6~2.3 MPa·m ^1/2, 杨氏模量为17.4~54.5 GPa, 孔隙率为37.7%~51.8%的Si₃N₄-BN-SiC复合材料。     

Machining of Green Si3N4 Polymer Bonded Ceramic Materials

This research examined the machinability of Si₃N₄, based polymer bonded ceramic green bodies. They were clearly machinable. Surface roughness was comparable to milled steel. The machining forces were lower than those reported for other ceramics and composites. Higher percentages of polymer produced stronger, more machinable green bodies. The areas of greatest concern were: tool wear, distribution of polymer throughout the body, and choice of polymer, for good wettability. Feasible parameters for blank fabrication were determined. Optimal parameters for both blank fabrication and machining are still to be determined. Polymer bonded ceramic bodies may also have their own utility; however applications with these materials will require further investigations.     

Improved sinterability of SiC(w)/Si3N4 composites by whisker-oriented alignment

Effects of whisker-oriented alignment on sintering behavior of SiC(w)/Si₃N₄ composites were investigated by sintering curves of SiC(w)/Si₃N₄ compacts with different whisker alignment (random and unidirectionally oriented). It was found that whisker-oriented alignment led to considerable anisotropy of linear shrinkage and sintering rate of SiC(w)/Si₃N₄ compacts during sintering. Whisker-oriented alignment could improve the sinterability of the SiC(w)/Si₃N₄ composites and consequently improve the maximum fraction of whisker addition and reduce the content of sintering additives without obviously lowering the density, which are more beneficial to exert the best reinforcing effects of whiskers and mechanical properties of SiC(w)/Si₃N₄ composites at elevated temperature.     

复合烧结助剂对Si3N4陶瓷力学性能和热导率的影响

Si₃N₄陶瓷因兼具优异的力学和热学性能, 成为第三代半导体陶瓷基板的首选材料之一。本研究以7种不同离子半径的稀土氧化物(RE₂O₃, RE=Sc、Lu、Yb、Y、Gd、Nd、La)与非氧化物(MgSiN₂)作复合烧结助剂, 通过热压烧结和退火热处理制备了高强、高热导Si₃N₄陶瓷, 并系统研究了复合烧结助剂中RE₂O₃种类对Si₃N₄陶瓷物相组成、微结构、力学性能和热导率的影响规律。热压后Si₃N₄陶瓷力学性能优越, 其中添加Nd₂O₃-MgSiN₂的样品弯曲强度达到(1115±49) MPa。退火处理后Si₃N₄陶瓷的热导率得到大幅提升, 呈现出随稀土离子半径减小而逐渐增大的规律, 其中添加Sc₂O₃-MgSiN₂的样品退火后的热导率从54.7 W·m^-1·K^-1提升至80.7 W·m^-1·K^-1, 提升了47.6%。该结果表明, 相较于国际上通用的Y₂O₃-MgSiN₂和Yb₂O₃-MgSiN₂烧结助剂组合, Sc₂O₃-MgSiN₂有望成为制备高强度、高热导Si₃N₄陶瓷的新型复合助剂。     

The effect of Si3N4 on the thermal expansion behavior of MoSi2

The effect of Si₃N₄ particulates on the thermal expansion coefficient (CTE) of MoSi₂ was investigated. It was observed that as the volume percent of Si₃N₄ increases, the CTE of the MoSi₂-Si₃N₄ composites decreases. In the temperature range 1000–1500 °C, typical of that required for glass melting, about 30–35 vol% Si₃N₄ particulates are needed in the MoSi₂-Si₃N₄ composites such that the CTE of the composite matches the CTE of Mo.     

氮化硼纳米管增强氮化硅复合材料的裂纹扩展阻力行为

用氮化硼纳米管(BNNT)增强氮化硅(Si₃N₄)陶瓷制备了BNNT/Si₃N₄复合材料, 利用三点弯曲强度及单边切口梁(SENB)法测定了BNNT/Si₃N₄复合材料的弯曲强度和断裂韧性。通过SEM观察了BNNT/Si₃N₄复合材料微观形貌。基于BNNT增强Si₃N₄陶瓷复合材料的裂纹扩展阻力计算公式, 构建了BNNT对Si₃N₄陶瓷裂纹屏蔽区的裂纹扩展阻力的数学模型。用该模型的计算结果与Si₃N₄陶瓷的裂纹扩展阻力进行了对比。结果表明: BNNT/Si₃N₄复合材料的弯曲强度和断裂韧性明显高于Si₃N₄陶瓷, 说明BNNT对Si₃N₄陶瓷的裂纹扩展有阻力作用, 摩擦拔出是Si₃N₄陶瓷抗裂纹扩展能力提高的主要原因; BNNT对Si₃N₄陶瓷有明显的升值阻力曲线行为。通过有限元模拟裂纹尖端应力分布, 发现BNNT使Si₃N₄陶瓷裂纹尖端的最大应力转移到纳米管上, 而且BNNT降低了Si₃N₄陶瓷裂纹尖端的应力, 对Si₃N₄陶瓷尖端的裂纹有屏蔽作用, 从而提高了Si₃N₄陶瓷的裂纹扩展阻力。     

Thermal stability and crystallization kinetics of sputtered amorphous Si3N4 films

The crystallization of thin silicon nitride (Si₃N₄) films deposited on polycrystalline SiC substrates was investigated by X-ray diffractometry as a function of annealing time. The amorphous Si₃N₄ films were produced by means of reactive r.f. magnetron sputtering. Annealing at temperatures between 1300 and 1700 °C led to the formation of crystalline films composed of -Si₃N₄ and β-Si₃N₄. The fraction of β-Si₃N₄ in the films reaches approximately 40% at temperatures above 1550 °C. Both polymorphic modifications were formed simultaneously during the crystallization process. A transformation of -Si₃N₄ to β-Si₃N₄ could not be observed in the time and temperature range investigated. The crystallization process of amorphous Si₃N₄ can be described according to the Johnson–Mehl–Avrami–Kolmogorov (JMAK) formalism, assuming a three-dimensional, interface controlled grain growth from pre-existing nuclei. The rate constants show an Arrhenius behaviour with an activation enthalpy of approximately 5.5 eV.     

氮气压力对多孔氮化硅陶瓷显微组织和力学性能的影响

以α-Si₃N₄为原料, Y₂O₃为烧结助剂, 在三种不同的氮气压力(0.12、0.32和0.52 MPa)下烧结制备了多孔氮化硅陶瓷。研究了氮气压力对氮化硅的烧结行为、显微组织和力学性能的影响, 分别通过SEM观察显微组织并统计晶粒的长径比, 通过XRD对物相进行分析, 并对烧结试样进行三点弯曲强度测试。随着氮气压力的提高, 多孔陶瓷的线收缩率降低、气孔率提高, 这是由于低熔点的液相中N含量随氮气压力的提升而增加, 导致了液相粘度提高, 抑制陶瓷致密化。随着氮气压力的提高, 组织中的棒状β-Si₃N₄生长良好, 晶粒长径比增大, 其原因是高的液相粘度抑制了β-Si₃N₄形核, 有利于β-Si₃N₄生长。由于β-Si₃N₄棒状晶的作用, 陶瓷弯曲强度随氮气压力的升高得到改善, 但是气孔率的升高降低陶瓷的强度。在0.52 MPa的氮气压力下烧结的多孔陶瓷气孔率达58%, 弯曲强度为140 MPa。     

添加BaTiO3的热压烧结Si3N4陶瓷的力学和介电性能

本研究以Al₂O₃和Nd₂O₃为烧结助剂, 采用热压烧结法制备Si₃N₄陶瓷, 系统研究了添加BaTiO₃对Si₃N₄陶瓷力学和介电性能的影响。研究结果表明, 随着BaTiO₃含量的增加, 相对密度、抗弯强度和维氏硬度都随之降低, 而断裂韧性有所升高; 即使添加5wt%~20wt%的BaTiO₃, Si₃N₄陶瓷的抗弯强度依然可以保持在600 MPa以上。Si₃N₄陶瓷的介电常数可以提高到9.26~11.50, 而介电损耗保持在10^-3量级。在Si₃N₄陶瓷中未检测到BaTiO₃结晶相, 可以认为Si₃N₄陶瓷介电常数的提高主要来源于烧结过程中形成的TiN。这些结果有助于拓展Si₃N₄陶瓷的应用领域。     

可磁分离Fe3O4/g-C3N4复合材料的制备及其性能

为了利用Fe₃O₄的磁响应性及石墨相C₃N₄（g-C₃N₄）优良的光催化活性,首先采用高温热聚合法,以尿素为前驱体制备g-C₃N₄,然后采用水热法合成了可磁分离Fe₃O₄/g-C₃N₄复合材料。利用TEM、XRD、TGA、BET和振动样品磁强计（VSM）等多种测试手段表征分析Fe₃O₄/g-C₃N₄复合材料的形貌、晶型结构、比表面积、成分、饱和磁化强度等。通过模拟太阳光下Fe₃O₄/g-C₃N₄复合材料光催化吸附降解亚甲基蓝（MB）的实验,评价了Fe₃O₄/g-C₃N₄复合材料的吸附性能及光催化性能。结果表明,可磁分离Fe₃O₄/g-C₃N₄复合材料具有较大的比表面积,约为71.89 m²/g;且具有较好的磁性,饱和磁化强度为18.79 emu/g,可实现复合材料的分离回收;光照240 min时,Fe₃O₄/g-C₃N₄复合材料对MB的去除率为56.54%。所制备的Fe₃O₄/g-C₃N₄复合材料具有优良的吸附性能、光催化活性和磁性,并可通过外加磁场进行分离与回收。     

TiC_(0.7)N_(0.3)增强ZrO_2基复合材料的微观结构及力学性能

为提高ZrO2基复合材料硬度,采用热压烧结法制备了TiC0.7N0.3/ZrO2复合材料,并研究了TiC0.7N0.3颗粒增强相对复合材料的物相组成、微观结构和力学性能的影响。结果表明:TiC0.7N0.3的添加具有稳定四方相ZrO2(t-ZrO2)的作用,能增加TiC0.7N0.3/ZrO2复合材料中t-ZrO2的含量,提高断裂韧性。随着热压烧结温度的升高和TiC0.7N0.3含量的增加,复合材料的硬度升高。1 400℃下热压烧结时,TiC0.7N0.3发生部分分解,分解的N与被还原的ZrO2反应生成ZrN,提高了复合材料的硬度。1 400℃下热压烧结后的35wt%TiC0.7N0.3/ZrO2复合材料的相对密度达99.9%,维氏硬度达17 GPa。而1 300℃下热压烧结后,复合材料断裂韧性较高,为6.48 MPa·m1/2。研究结果为TiC0.7N0.3/ZrO2复合材料的组织控制及性能改进提供了参考。     

Si3N4/FePd/Si3N4薄膜的晶体结构和磁性能研究

采用磁控溅射的方法制备了Si₃N₄/FePd/Si₃N₄三层膜, 研究了非磁性材料Si₃N₄作为插入层对磁记录FePd薄膜结构与磁性能的影响。结果表明, 热处理后Si₃N₄分布在FePd纳米颗粒之间, 抑制了FePd晶粒的生长, 与纯FePd薄膜相比, Si₃N₄/FePd/Si₃N₄薄膜的颗粒明显得到细化; 通过添加Si₃N₄层, FePd薄膜的晶体学参数c/a从0.960减小到0.946, 表明Si₃N₄可以有效促进FePd薄膜的有序化进程, 同时提升了矫顽力和剩磁比, 分别提高到249 kA/m、0.86; 随着600℃退火时间的进一步延长, 添加Si₃N₄的薄膜磁性没有迅速下降, 在较宽的热处理时间范围内磁性能保持在比较高的水平, 提高了抗热影响的能力。Si₃N₄作为插入层对FePd薄膜的磁性能具有较大的提升作用, 这对磁记录薄膜的发展具有重要意义。     

Coverage properties of silicon nitride film prepared by the Cat-CVD method

The coverage properties of silicon nitride (Si₃N₄) films prepared by the catalytic chemical vapor deposition (Cat-CVD) technique were systematically studied. By increasing the catalyzer–substrate distance, the coverage was improved from 46 to 67% on a 1.0-μm line and space pattern. The etching rate of Cat-CVD Si₃N₄ film measured using 16BHF solution was independent of the deposited position of the micro-patterns deposited, and was approximately 3 nm/min, one order of magnitude lower than that of plasma-enhanced CVD (PE-CVD) Si₃N₄ film. This means that Cat-CVD Si₃N₄ films are denser than PE-CVD Si₃N₄ films, and that the quality at the side wall is equivalent to that on the top surface. That is, Cat-CVD Si₃N₄ films show a passivation effect, which was excellent, even at the side wall of micro-patterns. These results suggest that Si₃N₄ films prepared by Cat-CVD are suitable for the passivation films in microelectronic devices having a step configuration, such as TFT-LCDs and ULSIs.     

自蔓延高温合成氮化硅多孔陶瓷的研究进展

多孔氮化硅陶瓷兼具有高气孔率和陶瓷的优异性能, 在吸声减震、过滤等领域具有非常广泛的应用。然而, 目前常规的制备方法如气压/常压烧结、反应烧结-重烧结以及碳热还原烧结存在烧结时间长、能耗高、设备要求高等不足, 导致多孔Si₃N₄陶瓷的制备成本居高不下。因此, 探索新的快速、低成本的制备方法具有重要意义。近年来, 采用自蔓延高温合成法直接制备多孔氮化硅陶瓷展现出巨大潜力, 其可以利用Si粉氮化的剧烈放热同时完成多孔氮化硅陶瓷的烧结。本文综述了自蔓延反应的引发以及所制备多孔氮化硅陶瓷的微观形貌、力学性能和可靠性。通过组分设计和工艺优化, 可以制备得到氮化完全、晶粒发育良好、力学性能与可靠性优异的多孔氮化硅陶瓷。此外还综述了自蔓延合成多孔Si₃N₄陶瓷晶界相性质与高温力学性能之间的关系, 最后展望了自蔓延高温合成多孔Si₃N₄陶瓷的发展方向。     

Ag-Ag2O/TiO2-g-C3N4纳米复合材料的制备及可见光催化性能

近年来,半导体光催化技术作为一项快速发展的新型环保技术,在降解水体中污染物和可再生清洁能源的生产领域有很大的应用前景。本文以所制备出的20 wt%类石墨烯碳氮化合物(g-C₃N₄)/TiO₂为基质,利用水热法中纳米Ag颗粒部分氧化行为成功合成了Ag修饰异质结型Ag-Ag₂O/TiO₂-g-C₃N₄复合材料。利用X射线衍射(XRD)、扫描电子显微镜(SEM)、X射线光电子能谱(XPS)、紫外-可见漫反射光谱(UV-Vis DRS)、光致荧光光谱(PL)、瞬态光电流响应等分析测试手段对Ag-Ag₂O/TiO₂-g-C₃N₄复合材料的晶体结构、形貌、光学性质等进行表征和分析。以亚甲基蓝溶液为目标降解物,研究了Ag-Ag₂O/TiO₂-g-C₃N₄复合材料的可见光催化性能。结果表明:在纳米Ag颗粒修饰的Ag-Ag₂O/TiO₂-g-C₃N₄复合材料中,Ag部分氧化成Ag₂O;与g-C₃N₄的协同作用使Ag-Ag₂O/TiO₂-g-C₃N₄复合催化剂具有良好的可见光催化活性;可见光照射4 h后,Ag-Ag₂O/TiO₂-g-C₃N₄复合催化剂对亚甲基蓝的降解率接近50%。      

双连续Si3N4/1Cr18Ni9Ti复合材料的制备和冲蚀性能

用凝胶注模和压力铸造两步法制备具有双连续结构的Si₃N₄/1Cr18Ni9Ti复合材料并分析其物相组成、宏观和微观结构,研究了材料的冲蚀率与攻角、流速、含沙量以及时间的关系。结果表明,与1Cr18Ni9Ti材料相比,Si₃N₄/1Cr18Ni9Ti复合材料具有双连续结构,界面结合良好;其冲蚀率随着攻角变化的幅度小,冲蚀率与流速之间的关系由1Cr18Ni9Ti材料的线性关系转变为指数关系(E∝V^0.67),且随着时间的延长冲蚀率降低;冲蚀率与含沙量之间的关系仍呈线性。具有双连续结构的Si₃N₄/1Cr18Ni9Ti复合材料,具有更加优异的耐冲蚀性能。