软X射线双频光栅设计及制作

以软X射线双频光栅作为剪切干涉元件,研究了剪切干涉法在激光等离子体诊断实验中的应用.为提高实验成功率,研究了双频光栅栅线的平行度及光栅效率.根据软X射线双频光栅栅线平行度与剪切干涉系统的干涉图像的关系,理论计算得出光栅平行度的指标要求.在全息曝光工艺中,通过衍射光斑位置检测法和莫尔条纹法确认光栅平行性,保证光栅平行度达到0.01°.利用合肥国家同步辐射实验室计量站对双频光栅的两组-1级衍射效率进行测试.测试结果显示,光栅平行性满足系统要求,光栅的两组-1级衍射效率均达到10％.软X射线双频光栅剪切干涉实验结果表明,双频光栅平行度及衍射效率满足激光等离子体诊断实验需求.     

软X射线椭圆晶体谱仪的研制

为了测量激光等离子体软X射线的空间和时间分辨光谱,研制了一种新型的双通道椭圆晶体谱仪,椭圆的离心率和焦距分别为0.9586和1350mm。将两个完全相同的椭圆晶体分析器进行上下对称布置,在上通道用软X射线CCD相机测量空间分辨光谱,在下通道用软X射线条纹相机测量时间分辨光谱。利用KAP椭圆晶体作色散元件,测量的波长范围是1.33~2.46nm。首次在“星光Ⅱ”激光装置上进行了打靶实验,利用该谱仪配软X射线CCD相机获取了钛激光等离子体X射线的光谱,实验结果表明该谱仪的最高光谱分辨率可以达到1173。     

激光等离子体软X射线光源的一种诊断方法

激光等离子体软X射线光源是脉冲式光源,对这类光源的光谱诊断有几种方法.文章介绍了一种新的、实用的测量激光等离子体软X射线光源光谱的方法.此方法以低噪声的通道电子倍增器探测来自光源的ns量级的脉冲光信号,并由低噪声、响应快的电荷灵敏前置放大器进一步将其放大,前放的输出电荷与输入的脉冲信号的峰值成正比.使用这种方法测量了铜靶激光等离子体光源和氧、氪气体靶激光等离子体软X射线源在8～30nm波段的光谱.     

窄光谱带宽X射线刻蚀多层膜光栅

结合X射线荧光分析和同步辐射单色器对窄光谱带宽多层膜的需求,开展了窄光谱带宽刻蚀多层膜光栅的理论和实验研究.用平均密度法从理论上阐明将多层膜刻蚀成不同刻蚀比的多层膜光栅后,光谱分辨率将得到提高.用磁控溅射方法制备了W/C多层膜,并用常规的光刻工艺对其进行刻蚀,得到了刻蚀后的多层膜光栅.掠入射X射线衍射测量表明,刻蚀后多层膜的衍射峰位置向小角方向移动,多层膜光栅没有改变剩余多层膜的结构,而且带宽减小,光谱分辨率得到提高,说明实验采用的工艺方法和工艺路线可以满足制作窄光谱带宽刻蚀多层膜光栅的要求,为今后进一步研究实用化元件打下了基础.     

新型柔性铰链式精密狭缝的结构原理及有限元分析

根据上海光源软X射线谱学显微光束线站高光谱分辨的要求,单色光出射狭缝设计采用柔性铰链式精密结构,利用柔性铰链的特性优点,可以实现狭缝开口仅为0～0.5 mm,而且可以精度很高地调节开口宽度.该设计实现了狭缝开口输出位移和输入驱动位移的比例关系.文中介绍了该狭缝结构的机械设计原理及所采用柔性铰链的设计方法,并通过有限元分析软件ANSYS对其进行建模分析,验证了其运动原理和机械强度的设计,确定狭缝能满足上海同步辐射装置的使用要求.     

基于多项式拟合的中阶梯光栅光谱仪谱图还原

为了基于中阶梯光栅光谱仪特殊的二维原始光谱图像实现各波长与其强度信息的一一对应,进而得到可以直接读取所需波段或波长光信号强度信息的一维光谱曲线。对其原始光谱进行分析研究,通过获得接收像面上各波长光斑位置与探测器像元的精确对应关系,实现谱图的还原处理。采用多项式拟合方法分别对中阶梯光栅光谱仪的棱镜色散方向和光栅色散方向上光斑的位置坐标进行拟合,建立起波长与像面之间的关系式,为减小光线追迹数量,同时采用级次间拟合的方式建立谱图还原模型。实验结果表明:通过该方法,可实现快速、高精度的谱图还原模型建立,模型的计算误差最大为0.023 92 mm,即谱图还原精度优于1个像元。该算法具有较强的灵活性和普适性,适用于各类中阶梯光栅光谱仪的谱图还原模型计算。     

软X射线激光多层膜均匀性控制技术

软X射线激光技术在近年来得以较快的发展,而多层膜是其不可缺少的一项基础技术,软X射线激光多层膜本身的要求使得多层膜的结构性需达到很高的水平.现就软X射线激光多层膜的均匀性控制技术进行研究,以期得到更加精确的膜层结构.     

软X射线激光多层膜均匀性控制技术

软X射线激光技术在近年来得以较快的发展,而多层膜是其不可缺少的一项基础技术,软X射线激光多层膜本身的要求使得多层膜的结构性需达到很高的水平.现就软X射线激光多层膜的均匀性控制技术进行研究,以期得到更加精确的膜层结构.     

软X射线掠入射金属光栅闪耀特性的校正傅里叶展开微分法分析

在有限电导率光栅的微分理论中引入校正傅里叶展开方法,改善了计算收敛性。运用改进后的微分理论对软X射线波段掠入射金属光栅的闪耀特性做了数值分析,通过详细考察三角槽形、正弦槽形和矩形镀金光栅的软X射线-1级衍射效率对光栅结构参数和入射光状态参数的响应程度,给出了一种在使用和制作工艺上都能够接受的光栅技术指标。结果表明,作为闪耀波长为10.33 nm的软X射线波段掠入射镀金光栅,采用81°入射的刻线密度为1 200 l/mm,倾斜角为2°,顶角大于120°的三角槽形光栅较为合适,其效率可达到50%以上。同时,得到了一些优化软X射线波段掠入射金属光栅设计的新结论。     

X射线激光及等离子体物理研究中的X光光学进展

近十年来,X射线技术的发展很快,用途日益扩展。激光核聚变、X光激光及激光等离子体研究的发展对X光光学提出了新的要求。X光诊断技术也在激光等离子体、X激光以及激光核聚变研究中处于重要地位。本文分别介绍X射线光谱和XUV诊断光学技术、X光成像系统、编码成像、X激光腔反射镜等方面的X光光学进展。     

Characterization of pyrocarbon coated materials using laboratory based x-ray phase contrast imaging technique

In-line x-ray phase contrast is an emerging x-ray imaging technique that promises to improve the contrast in x-ray imaging process. This technique is most suited for x-ray imaging of soft materials, low atomic number elements such as carbon composite fibers, very thin coatings, etc. We have used this new emerging technique for visualization and characterization of the pyrocarbon coated materials using a combination of microfocus x-ray source and x-ray charge coupled device detector. These studies are important for characterization of coating and optimization of various process parameters during deposition. These experiments will help us to exploit the potential of this technique for studies in other areas of material science such as characterization of carbon fibered structures and detection of cracks and flaws in materials. The characterization of the imaging system and optimization of some process parameters for carbon deposition are also described in detail.     

The soft x-ray instrument for materials studies at the linac coherent light source x-ray free-electron laser

The soft x-ray materials science instrument is the second operational beamline at the linac coherent light source x-ray free electron laser. The instrument operates with a photon energy range of 480-2000 eV and features a grating monochromator as well as bendable refocusing mirrors. A broad range of experimental stations may be installed to study diverse scientific topics such as: ultrafast chemistry, surface science, highly correlated electron systems, matter under extreme conditions, and laboratory astrophysics. Preliminary commissioning results are presented including the first soft x-ray single-shot energy spectrum from a free electron laser.     

Advanced experimental applications for x-ray transmission gratings spectroscopy using a novel grating fabrication method

A novel fabrication method for soft x-ray transmission grating and other optical elements is presented. The method uses focused-ion-beam technology to fabricate high-quality free standing grating bars on transmission electron microscopy grids. High quality transmission gratings are obtained with superb accuracy and versatility. Using these gratings and back-illuminated CCD camera, absolutely calibrated x-ray spectra can be acquired for soft x-ray source diagnostics in the 100-3000 eV spectral range. Double grating combinations of identical or different parameters are easily fabricated, allowing advanced one-shot application of transmission grating spectroscopy. These applications include spectroscopy with different spectral resolutions, bandwidths, dynamic ranges, and may serve for identification of high-order contribution, and spectral calibrations of various x-ray optical elements.     

Note: measurement of the runaway electrons in the J-TEXT tokamak

The runaway electrons have been measured by hard x-ray detectors and soft x-ray array in the J-TEXT tokamak. The hard x-ray radiations in the energy ranges of 0.5-5 MeV are measured by two NaI detectors. The flux of lost runaway electrons can be obtained routinely. The soft x-ray array diagnostics are used to monitor the runaway beam generated in disruptions since the soft x-ray is dominated by the interaction between runaway electrons and metallic impurities inside the plasma. With the aid of soft x-ray array, runaway electron beam has been detected directly during the formation of runaway current plateau following the disruptions.     

Linac Coherent Light Source soft x-ray materials science instrument optical design and monochromator commissioning

We present the x-ray optical design of the soft x-ray materials science instrument at the Linac Coherent Light Source, consisting of a varied line-spaced grating monochromator and Kirkpatrick-Baez refocusing optics. Results from the commissioning of the monochromator are shown. A resolving power of 3000 was achieved, which is within a factor of two of the design goal.     

A rheo-optical apparatus for real time kinetic studies on shear-induced alignment of self-assembled soft matter with small sample volumes

In soft materials, self-assembled nanoscale structures can allow new functionalities but a general problem is to align such local structures aiming at monodomain overall order. In order to achieve shear alignment in a controlled manner, a novel type of rheo-optical apparatus has here been developed that allows small sample volumes and in situ monitoring of the alignment process during the shear. Both the amplitude and orientation angles of low level linear birefringence and dichroism are measured while the sample is subjected to large amplitude oscillatory shear flow. The apparatus is based on a commercial rheometer where we have constructed a flow cell that consists of two quartz teeth. The lower tooth can be set in oscillatory motion whereas the upper one is connected to the force transducers of the rheometer. A custom made cylindrical oven allows the operation of the flow cell at elevated temperatures up to 200 degrees C. Only a small sample volume is needed (from 9 to 25 mm(3)), which makes the apparatus suitable especially for studying new materials which are usually obtainable only in small quantities. Using this apparatus the flow alignment kinetics of a lamellar polystyrene-b-polyisoprene diblock copolymer is studied during shear under two different conditions which lead to parallel and perpendicular alignment of the lamellae. The open device geometry allows even combined optical/x-ray in situ characterization of the alignment process by combining small-angle x-ray scattering using concepts shown by Polushkin et al. [Macromolecules 36, 1421 (2003)].     

A tabletop femtosecond time-resolved soft x-ray transient absorption spectrometer

A laser-based, tabletop instrument is constructed to perform femtosecond soft x-ray transient absorption spectroscopy. Ultrashort soft x-ray pulses produced via high-order harmonic generation of the amplified output of a femtosecond Ti:sapphire laser system are used to probe atomic core-level transient absorptions in atoms and molecules. The results provide chemically specific, time-resolved dynamics with sub-50-fs time resolution. In this setup, high-order harmonics generated in a Ne-filled capillary waveguide are refocused by a gold-coated toroidal mirror into the sample gas cell, where the soft x-ray light intersects with an optical pump pulse. The transmitted high-order harmonics are spectrally dispersed with a homebuilt soft x-ray spectrometer, which consists of a gold-coated toroidal mirror, a uniform-line spaced plane grating, and a soft x-ray charge coupled device camera. The optical layout of the instrument, design of the soft x-ray spectrometer, and spatial and temporal characterizations of the high-order harmonics are described. Examples of static and time-resolved photoabsorption spectra collected on this apparatus are presented.     

基于频谱分析和卷积神经网络的高速轴向柱塞泵空化故障诊断

针对高速轴向柱塞泵不同空化故障等级诊断依赖人工特征提取、识别准确率低的问题,提出了一种融合振动信号频谱分析和卷积神经网络的诊断方法.采集不同空化等级情况下柱塞泵壳体振动信号,对连续的振动数据进行切片并作频谱分析,获得频谱图作为数据集;利用二维卷积神经网络对不同空化等级的信号频谱图进行分类.为提高所提方法的鲁棒性,采用带...     

System for in situ studies of atmospheric corrosion of metal films using soft x-ray spectroscopy and quartz crystal microbalance

We present a versatile chamber ("atmospheric corrosion cell") for soft x-ray absorption/emission spectroscopy of metal surfaces in a corrosive atmosphere allowing novel in situ electronic structure studies. Synchrotron x rays passing through a thin window separating the corrosion cell interior from a beamline vacuum chamber probe a metal film deposited on a quartz crystal microbalance (QCM) or on the inside of the window. We present some initial results on chloride induced corrosion of iron surfaces in humidified synthetic air. By simultaneous recording of QCM signal and soft x-ray emission from the corroding sample, correlation between mass changes and variations in spectral features is facilitated.     

Fast plasma discharge capillary design as a high power throughput soft x-ray emission source

We present the experimental details and results from a low energy but high repetition rate compact plasma capillary source for extreme ultraviolet and soft x-ray research and applications. Two lengths of capillary are mounted in two versions of a closely related design. The discharge operates in 1.6 and 3.2 mm inner diameter alumina capillaries of lengths 21 and 36 mm. The use of water both as dielectric and as coolant simplifies the compact low inductance design with nanosecond discharge periods. The stored electrical energy of the discharge is approximately 0.5 J and is provided by directly charging the capacitor plates from an inexpensive insulated-gate bipolar transistor in 1?μs or less. We present characteristic argon spectra from plasma between 30 and 300 A? as well as temporally resolved x-ray energy fluence in discrete bands on axis. The spectra also allow the level of ablated wall material to be gauged and associated with useful capillary lifetime according to the chosen configuration and energy storage. The connection between the electron beams associated with the transient hollow cathode mechanism, soft x-ray output, capillary geometry, and capillary lifetime is reported. The role of these e-beams and the plasma as measured on-axis is discussed. The relation of the electron temperature and the ionization stages observed is discussed in the context of some model results of ionization in a non-Maxwellian plasma.