1.3-/spl mu/m AlGaInAs strain compensated MQW-buried-heterostructure lasers for uncooled 10-gb/s operation

We have successfully fabricated 1.3-/spl mu/m AlGaInAs strain-compensated multiple-quantum-well (MQW) buried-heterostructure (BH) lasers by narrow-stripe selective metalorganic vapor-phase epitaxy. Based on the optimization of AlGaInAs strain compensated MQW and the Al-oxidation-free BH process, we obtained a low-threshold current of 12.5 mA and a relaxation frequency of more than 10 GHz at 85/spl deg/C for Fabry-Perot lasers. For distributed feedback lasers, we demonstrated a 10-Gb/s operation and transmission of over 16 Km for a single mode fiber at 100/spl deg/C. Furthermore, a record-low 25.8-mA/sub p-p/ modulation current for a 10-Gb/s modulation at 100/spl deg/C was demonstrated with shorter cavity and high grating-coupling coefficient. A median life of more than 1/spl times/10/sup 5/ h at 85/spl deg/C was estimated after an aging test of over 5000 h for these lasers. These superior characteristics at high temperatures were achieved by the combination of the high differential gain of AlGaInAs strain compensated MQW and the BH structure.     

Long-wavelength vertical-cavity surface-emitting lasers on InP with lattice matched AlGaInAs-InP DBR grown by MOCVD

1.3- and 1.55-/spl mu/m vertical-cavity surface-emitting lasers (VCSELs) on InP have been realized. High-reflectivity AlGaInAs-InP lattice matched distributed Bragg reflectors (DBRs) were grown on InP substrates. 1.7 (for 1.3 /spl mu/m) and 2.0 (for 1.55 /spl mu/m) mW single mode power at 25/spl deg/C, 0.6 mW single mode power at 85/spl deg/C and lasing operation at >100/spl deg/C have been achieved. 10 Gbit/s error free transmissions through 10 km standard single mode fiber for 1.3-/spl mu/m VCSELs, and through 15 km nonzero dispersion shift fiber for 1.55-/spl mu/m VCSELs, have been demonstrated. With the addition of an SOA, 100 km error free transmission at 10 Gbit/s also has been demonstrated through a negative dispersion fiber. No degradation has been observed after over 2500-h aging test.     

1.3-/spl mu/m-range GaInNAsSb-GaAs VCSELs

1.3-/spl mu/m-range GaInNAsSb vertical-cavity surface-emitting lasers (VCSELs) with the doped mirror were investigated. GaInNASb active layers that include a small amount of Sb can be easily grown in a two-dimensional manner as compared with GaInNAs due to the suppression of the formation of three-dimensional growth in MBE growth. The authors obtained the lowest J/sub th/ per well (150 A/cm/sup 2//well) for the edge-emission type lasers due to the high quality of GaInNAsSb quantum wells. Using this material for the active media, the authors accomplished the first continuous wave operation of 1.3-/spl mu/m-range GaInNAsSb VCSELs. For the reduction of the threshold voltage and the differential resistance, they used the doped mirror grown by metal-organic chemical vapor deposition (MOCVD). By three-step growth, they obtained 1.3-/spl mu/m GaInNAs-based VCSELs with the low threshold current density (3.6 kA/cm/sup 2/), the low threshold voltage (1.2 V), and the low differential resistance (60 /spl Omega/) simultaneously for the first time. The back-to-back transmission was carried out up to 5 Gb/s. Further, the uniform operation of 10-ch VCSEL array was demonstrated. The maximum output power of 1 mW was obtained at 20/spl deg/C by changing the reflectivity of the front distributed Bragg reflector mirror. GaInNAsSb VCSELs were demonstrated to be very promising material for realizing the 1.3-/spl mu/m signal light sources, and the usage of the doped mirror grown by MOCVD is the best way for 1.3-/spl mu/m VCSELs.     

Single-mode distributed feedback and microlasers based on quantum-dot gain material

Quantum-dot gain material fabricated by self-organized epitaxial growth on GaAs substrates is used for the realization of 980-nm and 1.3-/spl mu/m single-mode distributed feedback (DFB) lasers and edge-emitting microlasers. Quantum-dot specific properties such as low-threshold current, broad gain spectrum, and low-temperature sensitivity could be demonstrated on ridge waveguide and DFB lasers in comparison to quantum-well-based devices. 980-nm DFB lasers exhibit stable single-mode behavior from 20/spl deg/C up to 214/spl deg/C with threshold currents < 15 mA (1-mm cavity length). Utilizing the low-bandgap absorption of quantum-dot material miniaturized monolithically integrable edge-emitting lasers could be realized by deeply etched Bragg mirrors with cavity lengths down to 12 /spl mu/m. A minimum threshold current of 1.2 mA and a continuous-wave (CW) output power of >1 mW was obtained for 30-/spl mu/m cavity length. Low-threshold currents of 4.4 mA could be obtained for 1.3-/spl mu/m emitting 400-/spl mu/m-long high-reflection coated ridge waveguide lasers. DFB lasers made from this material by laterally complex coupled feedback gratings show stable CW single-mode emission up to 80/spl deg/C with sidemode suppression ratios exceeding 40 dB.     

Design consideration and performance of high-power and high-brightness InGaAs-InGaAsP-AlGaAs quantum-well diode lasers (/spl lambda/=0.98 /spl mu/m)

We conduct a theoretical analysis of the design, fabrication, and performance measurement of high-power and high-brightness strained quantum-well lasers emitting at 0.98 /spl mu/m. The material system of interest consists of an Al-free InGaAs-InGaAsP active region and AlGaAs cladding layers. Some key parameters of the laser structure are theoretically analyzed, and their effects on the laser performance are discussed. The laser material is grown by metal-organic chemical vapor deposition and demonstrates high quality with low-threshold current density, high internal quantum efficiency, and extremely low internal loss. High-performance broad-area multimode and ridge-waveguide single-mode laser devices are fabricated. For 100-/spl mu/m-wide stripe lasers having a cavity length of 800 /spl mu/m, a high slope efficiency of 1.08 W-A, a low vertical beam divergence of 34/spl deg/, a high output power of over 4.45 W, and a very high characteristic temperature coefficient of 250 K were achieved. Lifetime tests performed at 1.2-1.3 W (12-13 mW//spl mu/m) demonstrates reliable performance. For 4-/spl mu/m-wide ridge waveguide single-mode laser devices, a maximum output power of 394 mW and fundamental mode power up to 200 mW with slope efficiency of 0.91 mW//spl mu/m are obtained.     

Long-wavelength quantum-dot lasers on GaAs substrates: from media to device concepts

Recent progress in semiconductor quantum-dot (QD) lasers approaches qualitatively new levels, when dramatic progress in the development of the active medium already motivates search for new concepts in device and system designs. QDs, which represent coherent inclusions of narrower bandgap semiconductor in a wider gap semiconductor matrix, offer a possibility to extend the wavelength range of heterostructure lasers on GaAs substrates to 1.3 /spl mu/m and beyond and create devices with dramatically improved performance, as compared to commercial lasers on InP substrates. Low-threshold current density (100 A/cm/sup 2/), very high characteristic temperature (170 K up to 65/spl deg/C), and high differential efficiency (85%) are realized in the same device. The possibility to stack QDs (e.g., tenfold) without an increase in the threshold current density and any degradation of the other device parameters allow realization of high modal gain devices suitable for applications in 1.3-/spl mu/m short-cavity transmitters and vertical-cavity surface-emitting lasers (VCSELs). The 1.3-/spl mu/m QD GaAs VCSELs operating at 1.2-mW continuous-wave output power at 25/spl deg/C are realized, and long operation lifetime is manifested. Evolution of GaAs-based 1.3-/spl mu/m lasers offers a unique opportunity for telecom devices and systems. Single-epitaxy VCSEL vertical integration with intracavity electrooptic modulators for lasing wavelength adjustment and/or ultrahigh-frequency wavelength modulation is possible. Arrays of wavelength-tunable VCSELs and wavelength-tunable resonant-cavity photodetectors may result in a new generation of "intelligent" cost-efficient systems for ultrafast data links in telecom.     

Design and analysis of single-mode oxidized VCSELs for high-speedoptical interconnects

Oxide-confined vertical-cavity surface-emitting laser diodes (VCSELs) are fabricated for applications in high-performance optical interconnects. Both 980-nm as well as 850-nm wavelength devices in one- and two-dimensional arrays are investigated. Noise properties of single- and multimode devices under different operation conditions are relative intensity noise of single-mode devices can be as low as -150 dB/Hz at output powers of about 1 mW and feedback levels up to -30 dB. Data rates up to 12.5 Gb/s with bit error rates below 10^-11 are achieved with VCSELs showing stable single-mode emission at large-signal modulation, combined with modulation bandwidths exceeding 10 GHz. Arrays with 4×8 elements flip-chip mounted on Si CMOS driver chips ready for use in parallel data transmission systems are presented     

Performance of 20 Gb/s quaternary intensity modulation based on binary or duobinary modulation in two quadratures with unequal amplitudes

2/spl times/10 Gb/s quaternary intensity modulation signals (4-IM) can be generated by combining two modulation signals with unequal amplitudes in quadrature phases or orthogonal polarizations. Two 10-Gb/s nonreturn-to-zero (NRZ) amplitude-shift keying (ASK) signals and a quadrature phase-shift keying (QPSK) modulator allow to generate 4-IM with the same bandwidth as an NRZ-ASK signal (QASK). Measured sensitivity at a bit error rate (BER) of 10/sup -9/ and chromatic dispersion (CD) tolerance are -21.6 dBm and /spl sim/+130 ps/nm, respectively. Two duobinary 10-Gb/s data streams and a QPSK modulator allow to generate a 9-constellation point quaternary intensity signal (QDB), with the same bandwidth as a duobinary signal. A stub filter with frequency response dip at 5 GHz was used to generate the duobinary signals. Detected as a 4-IM, this scheme features a sensitivity and a CD tolerance of -21.2 dBm and /spl sim/+140 ps/nm, respectively. By combining the two duobinary 10-Gb/s data streams with unequal amplitudes in orthogonal polarizations, a 9-constellation point quaternary intensity signal was also obtained (QPolDB). Sensitivity and CD tolerance were -20.5 dBm and /spl sim/+340 ps/nm, respectively. They became -18.4 dBm and /spl sim/+530 ps/nm, respectively, when the frequency response dip of the stub filter was changed to 6 GHz. A polarization and phase-insensitive direct detection receiver with a single photodiode has been used to detect all generated quaternary signals as 4-IM signals.     

High-saturation current wide-bandwidth photodetectors

This paper describes the design and performance of two wide-bandwidth photodiode structures. The partially depleted absorber photodiode utilizes an absorbing layer consisting of both depleted and undepleted In/sub 0.53/Ga/sub 0.47/As layers. These photodiodes have achieved saturation currents (bandwidths) of >430 mA (300 MHz) and 199 mA (1 GHz) for 100-/spl mu/m-diameter devices and 24 mA (48 GHz) for 100-/spl mu/m/sup 2/ area devices. Charge compensation has also been utilized in a similar, but modified In/sub 0.53/Ga/sub 0.47/As-InP unitraveling-carrier photodiode design to predistort the electric field in the depletion region in order to mitigate space charge effects. For 20-/spl mu/m-diameter photodiodes the large-signal 1-dB compression current and bandwidth were /spl sim/90 mA and 25 GHz, respectively.     

Reliability of high-speed SiGe heterojunction bipolar transistors under very high forward current density

As device scaling for higher performance bipolar transistors continues, the operation current density increases as well. To investigate the reliability impact of the increased operation current density on Si-based bipolar transistors, an accelerated-current wafer-level stress was conducted on 120-GHz SiGe heterojunction bipolar transistors (HBTs), with stress current density up to as high as J/sub C/=34 mA//spl mu/m/sup 2/. With a novel projection technique based on accelerated-current stress, a current gain shift of less than /spl sim/15% after 10/sup 6/ h of operation is predicted at T=140/spl deg/C. Degradation mechanisms for the observed dc parameter shifts are discussed for various V/sub BE/ regions, and the separation of the current stress effect from the self-heating effect is made based on thermal resistance of the devices. Module-level stress results are shown to be consistent with wafer-level stress results. The results obtained in this work indicate that the high-speed SiGe HBTs employed for the stress are highly reliable for long-term operation at high operation current density.     

Wafer level reliability and lifetime analysis of InGaAsP/InP quantum-well Fabry-Perot laser diode

This paper investigated the reliability of semiconductor 1.3-/spl mu/m multiquantum-well (MQW) Fabry-Perot laser diodes (LDs) in a quarter 2-in wafer level that are measured to have uniform threshold currents, slope efficiencies, and wavelengths within 4% of the maximum deviation. By performing the accelerated aging test under a constant optical power of 3 mW at 85/spl deg/C for 2100 h, the lifetime of the fabricated optoelectronic devices was estimated, where the failure rate was matched on the fitted line of the lognormal distribution model resulting in the mean-time-to-failure (MTTF) of 2/spl times/10/sup 6/ h operating at room temperature.     

Electric charge transport and trapping in dielectrics deduced from isothermal and nonisothermal measurements

By sequential use of the isothermal charging, the isothermal discharging, the final thermally stimulated discharge current and the final isothermal discharging current techniques, the charge dynamics in highly insulating materials may be investigated. The method is demonstrated for polyethylene terephthalate. The injected charge for a field of 20 MV m/sup -/1 and polarization temperatures up to 110/spl deg/C is almost totally trapped in the material and is released during the heating of the sample at 180/spl deg/C for a sufficiently long time. A significant current at high temperatures, about 90/spl deg/C above the poling temperature, was observed proving that it originates from charge detrapping. The final thermally stimulated discharge current peaks shift to higher temperature when the polarization temperature increases, and are characterized by activation energies in the range from 1.03 to 1.56 eV. They allowed the identification of the glass transition around 114/spl deg/C. The relaxation time of the trapped charge, at 180/spl deg/C, was determined to be about 3780 s, explaining the very good stability of trapped charge.     

A 5-V operated MEMS variable optical attenuator by SOI bulk micromachining

We report the design, fabrication, and successful demonstration of microelectromechanical variable optical attenuator (VOA) using an electrostatic microtorsion mirror (0.6 mm in diameter) combined with a fiber-optic collimator. The VOA operates at low voltages (dc 5 V or less) for large optical attenuation (40 dB, corresponding to mirror angle of 0.3/spl deg/) and a fast response time (5 ms or faster). The mirror made of a bulk-micromachined silicon-on-insulator wafer has been designed to be shock resistant up to 500 G without any mechanical failure. We also have suppressed temperature dependence of optical performance to be less than /spl plusmn/0.5 dB at 10-dB attenuation in the range of -5/spl deg/C-70/spl deg/C by mechanically decoupling the parasitic bimorph effect from the electrostatic operation.     

A quantitative study of radiative, Auger, and defect related recombination processes in 1.3-/spl mu/m GaInNAs-based quantum-well lasers

By measuring the spontaneous emission (SE) from normally operating /spl sim/1.3-/spl mu/m GaInNAs-GaAs-based lasers we have quantitatively determined the variation of each of the current paths present in the devices as a function of temperature from 130 K to 370 K. From the SE measurements we determine how the current I close to threshold, varies as a function of carrier density n, which enables us to separate out the main current paths corresponding to monomolecular (defect-related), radiative or Auger recombination. We find that defect-related recombination forms /spl sim/55% of the threshold current at room temperature (RT). At RT, radiative recombination accounts for /spl sim/20% of I/sub th/ with the remaining /spl sim/25% being due to nonradiative Auger recombination. Theoretical calculations of the threshold carrier, density as a function of temperature were also performed, using a ten-band k /spl middot/ p Hamiltonian. Together with the experimentally determined defect-related, radiative, and Auger currents we deduce the temperature variation of the respective recombination coefficients (A, B, and C). These are compared with theoretical calculations of the coefficients and good agreement is obtained. Our results suggest that by eliminating the dominant defect-related current path, the threshold current density of these GaInNAs-GaAs-based devices would be approximately halved at RT. Such devices could then have threshold current densities comparable with the best InGaAsP/InP-based lasers with the added advantages provided by the GaAs system that are important for vertical integration.     

High-power high-efficiency 660-nm laser diodes for DVD-R/RW

A kink mechanism in 660-nm laser diodes (LDs) has been studied experimentally. The experiments revealed that the main origin of the kink is a refractive index change due to heat generation in the stripe portion, and the kink power can be increased by improving the temperature characteristics of the LD. A newly developed LD, based on this result, shows stable lateral mode operation up to 190 mW at 80/spl deg/C. This is the highest power recorded among narrow stripe LDs with a wavelength of 660 nm. This LD is suitable for the next generation of high-speed (8x-) DVD-R/RW drives necessitating 140 mW class LDs.     

Electrical conductivity and space charge in LDPE containing TiO/sub 2/ nanoparticles

Electrical conductivity (DC) and space charge accumulation were studied in samples of low density polyethylene to which nano-sized and micro-sized TiO/sub 2/ (anatase) particles and a dispersant had been added. Sample thicknesses were in the range 150-200 /spl mu/m. At applied field strengths of 10 and 20 kV/mm, the conductivity at 30 /spl deg/C, measured in vacuum in samples containing 10 % w/w nano-sized TiO/sub 2/, decreased by 1-2 orders of magnitude relative to samples with dispersant but without TiO/sub 2/, and by three orders of magnitude at 70 /spl deg/C. In air at 30 /spl deg/C the corresponding decrease was an order of magnitude at 10 kV/mm, and a factor of four at 20 kV/mm. In samples containing 10 % w/w micro-sized TiO/sub 2/ the conductivity increased in air and in vacuum, but only by factors in the range 2-10 depending on temperature and field. Space charge profiles were obtained using the laser-intensity-modulation-method (LIIMM), irradiating both surfaces of the sample. The micro-sized TiO/sub 2/ particles are associated with increased charge injection from the electrodes and increased charge trapping in the sample bulk, increasing the conductivity overall. The nano-sized particles generate very little charge in the sample bulk, but render the electrodes partially-blocking and so lower the conductivity.     

Device performance and wavelength tuning behavior of ultra-short quantum-cascade microlasers with deeply etched Bragg-mirrors

The fabrication and characteristics of edge-emitting quantum-cascade (QC) lasers and microlasers with monolithically integrated deeply etched semiconductor-air Bragg-mirrors based on GaAs is reported. We observe a reduction of the threshold current density by 25% and an increase of the operation temperature by 23 K to a maximum of 315 K for 800 /spl mu/m long devices by employing Bragg-mirrors. Devices with ultra-short cavities of about 100 /spl mu/m (/spl sim/40 times the wavelength) operate up to 260 K. At 80 K, these devices show threshold currents as low as 0.63 A and output levels up to 56 mW. In these devices, longitudinal single mode operation with output levels exceeding 7.7, 5.6, and 2.8 mW was measured at 180, 200, and 240 K, respectively. This can be attributed to the limited gain bandwidth of QC lasers and the large mode spacing in these devices. By temperature control the emission wavelength can be tuned without mode jumps over 80 nm. The feasibility to pre-select the emission wavelength by a direct control of the Fabry-Perot mode was demonstrated by microlasers with 1 /spl mu/m cavity length difference.     

High-Power Monolithic Two-Mode DFB Laser Diodes for the Generation of THz Radiation

We have devolved 1064 nm high-power monolithic distributed feedback lasers which operate simultaneously on two longitudinal modes. These modes correspond to the fundamental and first-order lateral mode and arise from a 7.5 mum width ridge waveguide supporting both of them. They are further stabilized by a first-order grating built into an InGaP/GaAs/InGaP multilayer structure. The threshold current of the laser is 66 mA, the slope efficiency is 0.5 W/A, and an output power of ~500 mW is reached. Detailed investigations of the intensity distribution of lateral and vertical far fields and the spectral behavior are shown. The longitudinal mode spacing at 260 mW is 0.56 nm corresponding to approximately 150 GHz. THz generation is demonstrated by mixing the two-line laser emission in a LT-GaAsSb photomixer.     

Ultra high vacuum properties of some engineering polymers

Engineering Polymers are very good candidates for applications requiring mechanical properties comparable with metals, chemical inertia, high insulation capability, high temperature operation and ultra high vacuum (UHV) compatibility. The results of a systematic test series, aimed at qualifying the engineering resins VESPEL/spl reg/ SP1, PEEK and CELAZOLE/spl reg/ PBI as UHV seals, are reported. The study of the materials behavior has been carried out over a wide temperature interval, ranging from 20 to 400/spl deg/C. In addition to the tightness and permeation tests, thermal desorption and gas chromatographic-mass spectrometer (GC/MS) analysis have also been performed. The results obtained indicate that CELAZOLE/spl reg/PBI provides the best performance, since it can be operated safely up to 375/spl deg/C, without giving any sign of leak or other drawbacks. PEEK, on the contrary, does not stand temperatures higher than 275/spl deg/C but, below this limit, it remains a very cost effective and reliable alternative. VESPEL/spl reg/ SP1, in its turn, can be operated safely up to 325/spl deg/C but above this temperature its properties start to degrade even if not in an abrupt manner as is the case for the other two resins. The possible applications of some of these polymers in the field of nuclear fusion research are also briefly described.     

Characterization of Si implants in p-type GaN

Si ion implantation into p-type GaN followed by rapid thermal annealing (RTA) in N/sub 2/ has been performed. X-ray diffraction analyses indicate that ion-implanted damage remains even with 1050/spl deg/C, 60 s RTA. By varying implantation and postimplantation annealing conditions, we could convert carrier concentration from p-type 3 /spl times/ 10/sup 17/ cm/sup -3/ into n-type 2 /spl times/ 10/sup 17/ cm/sup -3/ /spl sim/2 /spl times/ 10/sup 19/ cm/sup -3/. It was found that typical activation energies of Si implants in p-GaN are lower than 10 meV. Such activation energies are smaller than those observed from epitaxially grown Si-doped GaN films. A deep donor level with activation energy of 60 meV was also found from some samples. Photoluminescence studies show that the peak appears at 372 nm might be related to implantation-induced defects. It was also found that a green emission band could be observed from Si-implanted GaN. It was shown that such a green emission is related to the yellow band observed from epitaxially grown Si-doped GaN. The transport properties of these Si-implanted samples were also studied.