类金刚石碳膜的结构及其微动磨损行为

采用非平衡磁控溅射与等离子源离子注入(PSII)的混合技术，在1Crl8Ni9Ti不锈钢上制备N／Ti，N／TiN／C／DLC多层膜，研究其结构和微动磨损性能，并与N注入层比较。结果表明，N注入层内形成了CrN和Fe3N等氮化物相；多层膜内形成了TiN，Ti2N和CrN等化舍物相。PSII技术能够提高1Crl8Ni9Ti不锈钢的表面硬度，N注入层的硬度约为基体硬度的2．5倍，DLC多层膜的硬度约为基体硬度的4倍。N注入层和DLC多层膜都能够提高1Crl8Ni9Ti的抗微动磨损性，虽然DLC多层膜比N注入层薄，但其抗微动磨损性能更好。     

40Cr钢离子氮化与离子镀TiN复合涂层与苜蓿草粉之间的摩擦学特性

在橡胶轮磨料磨损实验机上考察了40Cr钢基体上离子氮化与离子镀TiN复合涂层在苜蓿草粉软磨料下的摩擦学特性。采用划痕法测定了涂层的结合力,利用XRD分析了涂层的相结构,应用扫描电子显微镜观察分析了涂层磨损表面形貌和磨损机理。结果表明:离子氮化与离子镀TiN复合涂层的膜基结合力和硬度均高于TiN涂层;其对于苜蓿草粉软磨料的耐磨性也高于TiN涂层和渗氮层;离子氮化过渡层能显著提高TiN涂层的膜基结合力并改善薄膜的韧性;涂层能有效限制硬质颗粒对基体的压嵌和切削。涂层在苜蓿草粉软磨料下的磨损机制既包括硬质颗粒磨料条件下的切削磨损,也包括软磨料条件下的多次塑性变形和周期疲劳磨损。涂层硬度和韧性的共增可以提高其对软磨料的耐磨性。     

Si3N4球/DLC膜摩擦副在真空环境下的摩擦学行为研究

采用非平衡磁控溅射技术在高速钢基体上制备了类金刚石(DLC)膜。采用球盘式摩擦磨损试验机考察了DLC膜在大气和真空环境干摩擦条件下的摩擦学性能,并比较分析了GCr15钢球和Si3N4球不同摩擦配副对DLC膜的摩擦学性能。采用光学显微镜及扫描电镜观察了摩擦副的磨损表面形貌。研究结果表明:由于转移膜的形成Si3N4球/DLC膜摩擦副在大气下具有良好的摩擦学性能;而在真空条件下摩擦副易发生明显的粘着磨损,使摩擦系数、磨斑增加,磨损表面上存在着较多的片状磨屑和微米级颗粒。     

基于RFPECVD方法不锈钢上沉积类金刚石薄膜的机械与摩擦特性

讨论用射频等离子体增强化学气相沉积(RFPECVD)工艺,在室温下实现在1Cr18Ni9Ti不锈钢基底上镀类金刚石(DLC)膜.为提高DLC膜的结合力,首先在不锈钢基底上沉积Ti/TiN/TiC功能梯度膜.借助所设计的界面过渡层,成功地在不锈钢基底上沉积了一定厚度的DLC膜.通过优化沉积参数,所沉积的DLC膜在与100Cr6钢球对磨时摩擦系数低于0.020.在摩擦过程中DLC膜的磨损机制借助SEM、Raman分析进行了研究.     

类金刚石薄膜在干摩擦、油和脂润滑条件下的摩擦学性能分析

通过钢/类金刚石(DLC)薄膜摩擦副在干摩擦4、122油和L252脂润滑条件下的球-盘摩擦学试验,对比分析润滑条件、载荷、速度对DLC膜摩擦系数的影响,利用原子力显微镜分析膜层磨损性能,研究润滑条件对膜层磨损寿命的影响。结果表明:油、脂润滑下DLC膜最大静摩擦系数分别减小了17%和38%;从0～2000 r/min转速范围内,DLC膜摩擦系数随转速增加而减小,油润滑下相比干摩擦DLC膜摩擦系数小15%～48%,脂润滑下相比干摩擦DLC膜摩擦系数在0～500 r/min转速范围小,超过500 r/min后干摩擦DLC膜摩擦系数小;油和脂润滑条件下,DLC膜层的磨损程度明显降低,磨损率相比干摩擦条件下分别减小了7.4倍和15.5倍。     

工业纯铁等离子体氮化及Ti/TiN多层薄膜沉积复合处理研究

为改善工业纯铁的耐磨抗腐蚀性能,本文采用低偏压高频等离子浸没离子注入及氮化技术(HLPⅢ)对工业纯铁进行表面改性,然后利用非平衡磁控溅射技术(UBMS)在低压高频等离子浸没离子注入及氮化处理样品表面制备Ti/TiN多层膜.研究发现,工业纯铁在3.5kV脉冲电压(频率15.15kHz,占空比25%)下等离子注入及氮化3h后,表面形成了深度达4μm的氮化层,其相结构以ε-Fe_3N和γ-Fe_4N结构为主.等离子氮化及Ti/TiN多层薄膜沉积复合处理后,工业纯铁的硬度、耐磨损性能以及抗腐蚀性能均得到大大提高,等离子注入及氮化形成的氮化层有利于提高Ti/TiN多层薄膜与工业纯铁基体之间的结合力和耐磨性.     

TiN与DLC涂层在船用低速柴油机柱塞上的应用研究

为提高船用低速柴油机柱塞的耐磨性和柱塞偶件使用寿命,采用离子镀技术与多弧磁控耦合镀膜技术分别在柱塞上涂覆了TiN涂层和DLC涂层。利用扫描电镜（SEM）、轮廓仪和X射线衍射仪（XRD）技术表征了TiN与DLC涂层的微观形貌、表面粗糙度及物相组成,采用纳米压痕仪检测了TiN与DLC涂层的纳米硬度及弹性模量;运用划痕法和压痕法测试了TiN和DLC涂层的结合力,通过往复磨损试验考察了这2种涂层在空气中与在重柴油环境下的摩擦系数,同时结合光学显微镜定性评判TiN和DLC涂层磨损程度,通过台架试验评价了TiN涂层与DLC涂层柱塞的实际磨损情况。结果表明：这2种涂层晶体生长良好、结构连续致密,均未出现分层、开裂及剥离的现象,DLC涂层相对光滑,粗糙度R_a为0.10μm,而TiN涂层R_a为0.16μm; DLC涂层表面纳米硬度、弹性模量及泊松比均高于TiN涂层;无论在空气中还是重油环境下,TiN涂层摩擦系数均高于DLC涂层,耐磨性低于DLC涂层;台架试验后TiN涂层柱塞表面出现比较明显的平行状沟槽磨痕,而且整体磨损比较严重,而DLC涂层柱塞表面的磨痕非常窄...     

椭圆形路径载荷下的微动疲劳失效特征

为了解微动疲劳失效机理,通过柱面对柱面的接触方式,研究了60Si2Mn钢在椭圆形路径、拉扭耦合作用下的多轴低周微动疲劳特性,深入分析讨论了不同轴向循环拉伸应力幅值对摩擦磨损表面和断口形貌的影响.结果认为：磨损区产生的氧化物磨屑对微动区磨擦损伤行为具有显著影响;微动摩擦磨损对试样表面的影响深度只有数十微米;微动疲劳裂纹源...     

高功率脉冲磁控溅射制备TiNx涂层研究

采用高功率复合脉冲磁控溅射技术(HPPMS)在316不锈钢、硬质合金基体上沉积了TiN薄膜,研究不同N2流量下TiNx膜层的沉积速率、硬度、晶体生长取向、摩擦磨损等性能,并在相同的平均靶电流下与直流磁控溅射制备的TiN薄膜对比.结果表明:HPPMS制备的膜层更加致密,在氩氮流量比为7.4∶1时膜层显微硬度达2470 HV,晶粒尺寸也明显小于直流磁控溅射制备的TiN,摩擦磨损性能也得到了改善.     

铝合金等离子体基离子注入形成AlN/TiN层及其耐磨性能

用X射线光电子能谱 (XPS)和小掠射角X射线衍射 (GAXRD)研究了铝合金LY12等离子体基离子注入形成AlN/TiN改性层的成分分布及相结构 .在此基础上测量了改性层的纳米硬度 ,并进行了摩擦磨损试验 .结果表明 ,氮和钛都能有效地注入到铝合金里 ,后注入的元素对先注元素的含量和分布有重要影响 .钛、氮同时注入在试样表面形成一层稳定的钛、氮化合层 .和未改性试样相比 ,所形成的AlN/TiN改性层纳米硬度及承载能力都提高 5倍以上 .在低滑动载荷下 ,摩擦系数减小 70 %以上 ,耐磨性提高近 10倍 ,耐磨寿命提高了近 6倍 ,粘着磨损程度显著减轻 .随着载荷的增加 ,相应的耐磨性能有所降低 .适当的改性层结构及其中分布的TiO2 、TiN、TiAl3、Al2 O3、AlN等相是性能改善的主要原因     

不同温度下等离子渗氮后TC4钛合金的摩擦磨损性能EI北大核心CSCD

采用等离子渗氮技术提升TC4钛合金的耐磨性并探究最优渗氮温度。利用LDM 1-100型等离子渗氮设备,在650,700,750,800,850℃和900℃温度下对TC4钛合金进行渗氮处理,保温时间均为10 h。利用光学显微镜、扫描电子显微镜、白光三维形貌仪、X射线衍射仪和显微硬度计分别对不同温度渗氮试样的微观组织结构、表面形貌、表面粗糙度、相结构和硬度进行表征。利用CETR UMT-3型多功能摩擦磨损试验机测试等离子渗氮后TC4钛合金的摩擦学性能。结果表明:TC4钛合金表面显微硬度和粗糙度随温度升高而增大,在900℃渗氮后TC4钛合金表面显微硬度达到了1318HV 0.05,约为基体(360HV 0.05)的4倍。硬度的升高是由于渗氮后试样表面形成了硬质氮化物相(TiN和Ti2N相),且随着渗氮温度升高氮化物的含量增加。相较于低温渗氮(低于750℃)的试样,850℃和900℃渗氮试样的承载能力显著提升。与原始TC4试样相比,渗氮处理后试样的磨损体积显著降低。当渗氮温度为850℃时,试样磨损体积为未处理试样磨损体积的1.2%(1 N),3.0%(3 N)和62.2%(5 N),试样的耐磨性提升更为显著。     

Wear behaviour and rolling contact fatigue life of Ti/TiN/DLC multilayer films fabricated on bearing steel by PIIID

In order to improve the friction and wear behaviours and rolling contact fatigue (RCF) life of bearing steel materials, Ti/TiN/DLC (diamond-like carbon) multilayer hard films were fabricated onto AISI52100 bearing steel surface by plasma immersion ion implantation and deposition (PIIID) technique. The micro-Raman spectroscopy analysis confirms that the surface film layer possess the characteristic of diamond-like carbon, and it is composed of a mixture of amorphous and crystalline phases, with a variable ratio of sp²/sp³ carbon bonds. Atomic force microscope (AFM) reveals that the multilayer films have extremely smooth area, excellent adhesion, high uniformity and efficiency of space filling over large areas. The nanohardness (H) and elastic modulus (E) measurement indicates that the H and E of DLC multilayer films is about 32 GPa and 410 GPa, increases by 190.9% and 86.4%. The friction and wear behaviours and RCF life of DLC multilayer films specimen have also been investigated by ball-on-disc and three-ball-rod fatigue testers. Results show that the friction coefficient against AISI52100 steel ball decreases from 0.92 to 0.25, the longest wear life increases nearly by 22 times. In addition, wear tracks of the PIIID samples as well as wear tracks of the sliding steel ball were analyzed with the help of optical microscopy and scanning electron microscopy (SEM). The L₁₀, L₅₀, L_a and mean RCF life L of treated bearing samples, in 90% confidence level, increases by 10.1, 4.2, 3.5 and 3.4 times, respectively. Compared with the bearing steel substrate, the RCF life scatter extent of Ti/TiN/DLC multilayer films sample is improved obviously.     

Microstructural and tribological characterization of plasma- and gas-nitrided 2Cr13 steel in vacuum

Plasma- and gas-nitrided 2Cr13 samples were characterized using optical microscopy, scanning electron microscopy (SEM), X-ray diffraction (XRD), and microhardness testing techniques. Nitrogen concentration profiles in the cross-sections of the nitrided samples were obtained by glow discharge optical spectroscopy (GDOS). Residual stress profiles along depth of the nitrided samples were measured using an X-ray stress tester. The tribological behaviour of the plasma- and the gas-nitrided samples in vacuum was investigated in order to analyse the effect of nitriding on wear resistance of the 2Cr13 steel. The results show the tribological properties of the 2Cr13 steel in vacuum are improved considerably by plasma nitriding and gas nitriding resulted from microstructure modification and surface hardening during nitriding. The plasma-nitrided samples have better wear resistance than the gas-nitrided samples under 30 N, while the gas-nitrided samples have higher wear resistance under 90 N. With increasing normal load from 30 N to 90 N, the wear mechanism shows a transition from mild adhesive and abrasive wear to severe adhesive or even delamination wear. The plasma-nitrided sample has thicker compound layer than the gas-nitrided sample, resulting that it exhibits more intensive delamination under high load of 90 N.     

Tribology of ultra high molecular weight polyethylene film on Si substrate with chromium nitride, titanium nitride and diamond like carbon as intermediate layers

This paper presents tribological studies on composite films consisting of different intermediate hard layers (chromium nitride (CrN), titanium nitride (TiN) and diamond like carbon (DLC)) on Si substrate followed by soft ultra high molecular weight polyethylene (4-5 μm thick) as the top layer. The tribological properties of the composite films were evaluated on a ball-on-disc tribometer (composite film sliding against a 4 mm diameter Si₃N₄ ball) at a normal load of 40 mN and a linear speed of 0.052 m/s. The wear durability of the composite films increases with increasing hardness of the intermediate layers. The composite film with harder intermediate layers (TiN with 24 GPa and DLC layers with 57 GPa and 70 GPa of hardness) provides the best tribological performance with more than 300,000 cycles of sliding when the experiments were stopped. The critical loads of scratching correlate with the wear performances of the composite films. Application of only a few nanometer overcoat of perfluoropolyether on the most wear resistant composite films can further increase the wear lives (more than one million cycles) even at a higher normal load of 70 mN.     

Relative performance of hydrogenated, argon-incorporated and nitrogen-incorporated diamond-like carbon coated Ti-6Al-4V samples under fretting wear loading

Hydrogenated diamond-like carbon (DLC) (H-DLC), argon-incorporated DLC (Ar-DLC) and nitrogen-incorporated DLC (N-DLC) coatings were deposited on flat rectangular Ti-6Al-4V samples. The DLC coatings were characterised by Raman spectroscopy and nanoindentation. Fretting wear tests were conducted on uncoated and DLC coated samples with an alumina ball as the counterbody. As the Ar-DLC and N-DLC coatings had relatively more sp² network compared to the H-DLC coating, they exhibited lower values of hardness and elastic modulus. At both loads of 4.9 N and 14.7 N, all DLC coated specimens showed lower values of tangential force coefficient (TFC), wear volume and specific wear rate compared to the uncoated samples. While the Ar-DLC coated sample exhibited the lowest TFC, wear volume and specific wear rate at 4.9 N load, the N-DLC coated specimen exhibited the lowest TFC, wear volume and specific wear rate at 14.7 N load.     

Analysis of plastic deformation in diamond like carbon films-steel substrate system with tribological tests

The influence of plastic deformation of the substrate on the tribological properties of diamond like carbon (DLC) films was investigated in DLC films-steel substrate system. The tribological properties of DLC films deposited on different hardness steel were evaluated by a ball on disk rotating-type friction tester at room temperature under different environments. In dry nitrogen, DLC films on soft steel exhibited excellent tribological properties, especially obvious under high load (such as 20 N and 50 N). However, DLC films on hard steel were worn out quickly at load of 20 N. Plastic deformation was observed on soft steel after tribological tests. The width and depth of plastic deformation track increased with increase of the experimental load. Super low friction and no measurable wear were kept in good condition even large plastic deformation under high load conditions in DLC films-soft steel system. In open air, DLC films on soft steel exhibited high coefficient of friction and DLC films on ball were worn out quickly. Plastic deformation was not observed on soft steel because the contact area increased and the thick hardened layer on contact surface were formed by DLC films and debris particles together on the steel substrate. The wear track on steel became deep and wide with increase of loads and DLC films were worn out. The experimental results showed that super low friction and high wear resistance of DLC films on soft steel can be attributed to the good adhesion and plastic deformation. Plastic deformation played an active role in the tribological properties of DLC films on soft steel in the present work.     

Influence of Ti/TiN bilayered and multilayered films on the axial fatigue performance of Ti46Al8Nb alloy

The effects of Ti/TiN bi- and multilayered films on the fatigue performance of the Ti46Al8Nb alloy were investigated. Ti/TiN films with a total thickness of 1 μm were deposited on the Ti46Al8Nb alloy substrate by the hollow cathode deposition method. The samples were examined with various analytical techniques including nanoindentation, scratch test, stripping layer substrate curvature test and scanning electron microscopy. The results show that multilayered Ti/TiN films can enhance the fatigue strength of the Ti46Al8Nb alloy, whereas bilayered films have no obvious effect. Compared with the bilayer, the multilayer exhibits higher hardness, higher residual compressive stress and higher adhesion strength to the substrate. It is also demonstrated that the multilayer is responsible for retarding fatigue crack growth. All the superior properties make the hard Ti/TiN multilayer to be an effective protection coating for the enhanced fatigue strength of the brittle substrate.     

DLC膜在磨损、表面改性及力电耦合作用下损伤特性

为评价超薄类金刚石（DLC）膜在使用过程中的安全状况，利用原子力显微镜（AFM）的多模式功能，从磨损、表面改性、力电失效3个方面对DLC膜进行了试验研究．研究结果表明：相同法向力作用在不同厚度薄膜的磨损深度不同；对DLC膜的形貌和电学特性进行比较发现，磨损区域导电性比未磨损区域强；在厚度为64．09nm薄膜施加正向25V电场作用下，当针尖作用在表面的压力超过一定临界压力（375nN）之后，薄膜发生击穿，形成凹坑。     

Hydrogen-free nitriding of ZrTiAlV by double glow plasma discharge improving the wear resistance

A hydrogen-free nitriding method through double glow plasma metallurgy is exploited and a nitrided layer was formed on ZrTiAlV alloy. The nitrided layer was characterised through X-ray diffraction, optical microscopy, scanning electron microscopy and energy-dispersive spectroscopy techniques, as well as through Vickers hardness and friction and wear tests. Results showed that the nitrided layer is 580?µm thick, homogeneous and dense. It mainly consists of TiN, Ti₂N and ZrN phases. The hardness of the nitrided layer on the surface of the ZrTiAlV alloy is nearly 2.5 times higher than that of the ZrTiAlV substrate. The friction coefficient and wear resistance of the alloy considerably improved after nitriding.     

真空弧源沉积类金刚石薄膜及其性能研究

采用真空弧源沉积技术在钛合金及Si(100)表面合成DLC薄膜．通入不同的氩气．控制DLC薄膜中的SP3／SP2比值。研究表明，薄膜硬度可达96GPa．随着氩气流量的增加，薄膜的硬度先增加．后有明显降低。随着氩气流量的增加，类金刚石薄膜中．SP2键增加，SP3键减少，而血液相容性明显提高。DLC薄膜具有优异的耐磨性，摩擦系数低，与钛合金基体结合牢固。