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1.
利用磁控溅射的方法,在玻璃基片上制备了FeCoSiB非晶薄膜,研究了溅射心气压强对薄膜表面形貌及磁特性的影响。结果表明,薄膜的表面形貌显著依赖于心气压强,随着山Ar压强的增加,薄膜表面颗粒增大,粗糙度增加并形成柱状微结构。心气压强对薄膜磁特性有显著的影响,随血压强增加,薄膜的矫顽力增加,而剩磁则呈下降趋势。从薄膜的磁滞回线、矫顽力以及剩磁随溅射气压的变化规律可知,溅射气压较小时制备的薄膜软磁性能较好.  相似文献   

2.
直流磁控溅射制备铝薄膜的工艺研究   总被引:3,自引:0,他引:3  
陈国良  郭太良 《真空》2007,44(6):39-42
采用直流磁控溅射方法,以高纯Al为靶材,高纯Ar为溅射气体,在玻璃衬底上成功地制备了铝薄膜,并对铝膜的沉积速率、结构和表面形貌进行了研究。结果表明:A1膜的沉积速率随着溅射功率的增大先几乎呈线性增大而后缓慢增大;随着溅射气压的增加,沉积速率先增大,在一定气压时达到峰值后继续随气压的增大而减小。X射线衍射图谱表明Al膜结构为多晶态;用扫描电子显微镜对薄膜进行表面形貌的观察,溅射功率为2600W,溅射气压为0.4Pa时制备的Al膜较均匀致密。  相似文献   

3.
刘建华  徐可为 《功能材料》2004,35(Z1):292-294
利用射频反应磁控溅射在显微玻璃、单晶硅片、NaCl和石英上沉积ZrO2薄膜.膜厚60~80nm.研究发现,溅射气压升高,薄膜结晶程度降低,同时存在单斜相和四方相;晶粒尺寸增大;折射率上升;透射率在700~1000nm波段上升.这些结果表明溅射气压影响ZrO2薄膜生长机制、微观结构和成份,进而影响其光学性能.  相似文献   

4.
微电子技术的迅速发展要求电子元件薄膜化,从而促进了磁性薄膜的发展.为了达到控制溅射非晶态薄膜磁性的目的,从溅射非晶态薄膜的组成成分、溅射工艺参数、基体材料及温度、膜层厚度和镀后热处理工艺等几方面论述了影响非晶态溅射薄膜磁性的因素,结果表明,薄膜组成、膜厚、基材、溅射工艺及镀后热处理对溅射非晶态薄膜的磁性有较大的影响,应根据不同磁性要求加以控制.  相似文献   

5.
利用磁控共溅射方法采用不同的溅射工艺在单晶硅基片沉积制备了Al-Cu-Fe薄膜.运用原子力显微镜镜(AFM)分析了Al-Cu-Fe薄膜的表面形貌、表面粗糙度和晶粒尺寸.结果表明:随着溅射气压的减小,薄膜表面粗糙度和晶粒尺寸均有所减小.当基底温度升高至450℃时,Al-Cu-Fe薄膜的粗糙度和晶粒尺寸明显增加.溅射时间的延长导致了薄膜的表面粗糙度下降和晶粒尺寸的长大.增加溅射功率会使薄膜表面粗糙度有所增加.  相似文献   

6.
利用磁控共溅射方法采用不同的溅射工艺在单晶硅基片沉积制备了Al-Cu-Fe薄膜.运用原子力显微镜镜(AFM)分析了Al-Cu-Fe薄膜的表面形貌、表面粗糙度和晶粒尺寸.结果表明:随着溅射气压的减小,薄膜表面粗糙度和晶粒尺寸均有所减小.当基底温度升高至450℃时,Al-Cu-Fe薄膜的粗糙度和晶粒尺寸明显增加.溅射时间的延长导致了薄膜的表面粗糙度下降和晶粒尺寸的长大.增加溅射功率会使薄膜表面粗糙度有所增加.  相似文献   

7.
郭俊婷  徐阳 《功能材料》2015,(5):5123-5127
采用卷绕型磁控溅射设备在涤纶(PET)针刺毡表面沉积了纳米结构Cu薄膜,利用X射线衍射仪(XRD)对薄膜的组分和结晶状态进行了分析,用原子力显微镜(AFM)分析了不同溅射工艺参数对纳米Cu薄膜微观结构和颗粒直径的影响,并较为系统地分析了溅射功率、工作气压和沉积时间对镀铜PET针刺毡导电性能的影响。结果表明,增大溅射功率,镀铜PET针刺毡导电性和Cu膜均匀性变好,但应控制在6kW以下;随工作气压的增大,薄膜方块电阻先减小后增大,薄膜厚度更加均匀;随着沉积时间的延长,Cu粒子的直径增大,Cu膜的导电性和均匀性明显变好。  相似文献   

8.
采用中频磁控溅射方法制备用于CIGS薄膜太阳能电池背电极的Mo膜。研究了靶面磁场强度、溅射气压、溅射电流等工艺参数对Mo膜沉积速率、电阻率、形貌及应力的影响。研究表明:随着靶面磁场强度的增强,Mo膜电阻率和沉积速率均下降;使用较高的溅射电流可以获得较高的沉积速率和较低的电阻率,使用较低的溅射气压可以获得较低的电阻率和较高的沉积速率。在本试验条件下制备的Mo膜基本上呈现拉应力状态并且随溅射气压的升高而增大。  相似文献   

9.
磁控溅射法制备低电阻率Ta薄膜研究   总被引:1,自引:0,他引:1  
邵花  王文东  刘训春  夏洋 《功能材料》2013,(18):2625-2629
在无匹配层、常温、溅射气体为纯Ar的条件下,利用直流磁控溅射法在Si表面制备了Ta薄膜,系统研究了工作气压及直流功率对薄膜电阻率及微观结构的影响。分别用四探针测试仪、X射线衍射仪、原子力显微镜对不同条件下制备的Ta薄膜电阻率、相结构及表面形貌进行表征。结果发现,随溅射气压升高,高阻β相出现,薄膜电阻率随之增大;在相同溅射气压下,随着溅射功率的增加,薄膜电阻率先降低后升高。优化溅射工艺后制得的Ta薄膜的电阻率低至29.7μΩ·cm。  相似文献   

10.
采用直流磁控溅射在钢基体上制备了钽薄膜,研究了溅射气压和电流对钽膜相结构、表面形貌、硬度以及耐磨性的影响。XRD结果表明:钽膜主要由α(体心立方结构) β(四方体结构)混合相组成,在合适的实验条件下(0.65 Pa、0.6 A)可以得到单一的α相结构,并呈现(110)择优取向。随着溅射电流的提高,钽膜中β相减少,α相由(110)择优取向变成随机取向;压强的提高导致了α相减少,并且在0.8 Pa时发生了部分β相转变,膜层逐渐转变成以β相为主的两相结构。AFM结果表明粗糙度随压强的增大而提高。随着气压和电流的提高,钽膜的显微硬度增大,而耐磨性则呈现下降的趋势。大的电流和低的气压有利于获得-αTa。  相似文献   

11.
凝固科学技术与材料   总被引:8,自引:0,他引:8  
从凝固科学与实践发展的角度介绍了当前凝固材料体系的基本框架和凝固科学主要发展阶段的基本理论。作为材料科学与工程的基本组成,凝固科学技术正在现代科学理论的基础上针对传统材料的改性提高和新材料的发展需求,以控形、控构、控性为目标开展优质铸件的定向、晶体生长、快凝、深过冷及各种新型和超常领域凝固过程的研究,并介绍了其中某些方面和展望了可能的发展趋势。  相似文献   

12.
13.
Production planning and scheduling are becoming the core of production management, which support the decision of a petrochemical company. The optimization of production planning and scheduling is attempted by every refinery because it gains additional profit and stabilizes the daily production. The optimization problem considered in industry and academic research is of different levels of realism and complexity, thus increasing the gap. Operation research with mathematical programming is a conventional approach used to address the planning and scheduling problem. Additionally, modeling the processes, objectives, and constraints and developing the optimization algorithms are significant for industry and research. This paper introduces the perspective of production planning and scheduling from the development viewpoint.  相似文献   

14.
单贺飞 《包装工程》2022,43(18):341-349
目的 探索江门世遗文化的传承、发展和转化的新思路,践行国家在《粤港澳大湾区发展规划》纲要中要求江门承担与港澳地区文化创意合作与开发任务的分工。方法 与澳门高校紧密合作,开展专业培训课程,以开平碉楼为例,从人文视角开展设计研究,梳理开平碉楼的文化脉络,把世遗文化的元素和其背后的文化融入文创产品中,提升文创产品的附加值,推动当地文创产业结构的变革。结果 两地高校构建了稳定的科研团队,开设长期有效的设计培训课程,与景区建立了研究协作关系,帮助景区构建了一套产销研的商业模式。结论 以跨区域高校合作为平台,以文创产品为抓手,依托江澳两地的资源优势,可以构建江门世遗文化全新的品牌形象,最终推动开平世遗文化的活化。  相似文献   

15.
Error and uncertainty in modeling and simulation   总被引:1,自引:0,他引:1  
This article develops a general framework for identifying error and uncertainty in computational simulations that deal with the numerical solution of a set of partial differential equations (PDEs). A comprehensive, new view of the general phases of modeling and simulation is proposed, consisting of the following phases: conceptual modeling of the physical system, mathematical modeling of the conceptual model, discretization and algorithm selection for the mathematical model, computer programming of the discrete model, numerical solution of the computer program model, and representation of the numerical solution. Our view incorporates the modeling and simulation phases that are recognized in the systems engineering and operations research communities, but it adds phases that are specific to the numerical solution of PDEs. In each of these phases, general sources of uncertainty, both aleatory and epistemic, and error are identified. Our general framework is applicable to any numerical discretization procedure for solving ODEs or PDEs. To demonstrate this framework, we describe a system-level example: the flight of an unguided, rocket-boosted, aircraft-launched missile. This example is discussed in detail at each of the six phases of modeling and simulation. Two alternative models of the flight dynamics are considered, along with aleatory uncertainty of the initial mass of the missile and epistemic uncertainty in the thrust of the rocket motor. We also investigate the interaction of modeling uncertainties and numerical integration error in the solution of the ordinary differential equations for the flight dynamics.  相似文献   

16.
New measurements are reported for the density and viscosity of tetralin and trans-decalin. The density was determined from room temperature to 60°C for tetralin and to 95°C for trans-decalin. The kinematic viscosity was measured up to temperatures slightly above 100°C. Our results improve upon the values recommended by the American Petroleum Institute for these liquids.  相似文献   

17.
18.
By making a step on one surface ( ) of a rectangular small paralellepiped copper crystal, dislocations could be created by the molecular dynamic method. The dislocation created was not a complete edge dislocation but a pair of Heidenreich-Shockley partial dislocations. Each time a dislocation was created, the stress on the surface was released. Small copper crystals having a notch were pulled (until fracture), compressed and buckled by use of the molecular dynamic method. An embedded atom potential was used to represent the interaction between atoms. Dislocations were created near the tip of the notch. A very sharp yield stress was observed. The results of high speed deformations of pure silicon small crystals using the molecular dynamics are presented. The results suggest that plastic deformation may be possible for the silicon with a high speed deformation even at room temperature. Another small size single crystal, the same size and the same surfaces, was compressed using molecular dynamic method. The surfaces are {110}, {112} and {111}. The compressed direction was [111]. It was found that silicon crystals are possible to be compressed with a high speed deformation. This may suggest that silicon may be plastically deformed with high speed deformation.  相似文献   

19.
罗林  黄志雄赵颖 《功能材料》2007,38(A09):3470-3472
SMC/BMC废弃物对工业及环境造成了很大影响,指出了SMC/BMC回收再利用的紧迫性。通过对目前国际上SMC/BMC回收再利用的3种典型途径优缺点的对比,参照国外SMC/BMC回收再利用的先进方法,对我国SMC/BMC回收再利用提供了可行的建议.  相似文献   

20.
The national measurement system for photometric and radiometric quantities is presently based upon techniques that make these quantities traceable to a high-accuracy cryogenic radiometer. The redefinition of the candela in 1979 provided the opportunity for national measurement laboratories to base their photometric measurements on optical detector technology rather than on the emission from high-temperature blackbody optical sources. The ensuing technical developments of the past 20 years, including the significant improvements in cryogenic radiometer performance, have provided the opportunity to place the fundamental maintenance of photometric quantities upon absolute detector based technology as was allowed by the 1979 redefinition. Additionally, the development of improved photodetectors has had a significant impact on the methodology in most of the radiometric measurement areas. This paper will review the status of the NIST implementation of the technical changes mandated by the 1979 redefinition of the candela and its effect upon the maintenance and dissemination of optical radiation measurements.  相似文献   

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