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直流磁控溅射制备铝薄膜的工艺研究 总被引:3,自引:0,他引:3
采用直流磁控溅射方法,以高纯Al为靶材,高纯Ar为溅射气体,在玻璃衬底上成功地制备了铝薄膜,并对铝膜的沉积速率、结构和表面形貌进行了研究。结果表明:A1膜的沉积速率随着溅射功率的增大先几乎呈线性增大而后缓慢增大;随着溅射气压的增加,沉积速率先增大,在一定气压时达到峰值后继续随气压的增大而减小。X射线衍射图谱表明Al膜结构为多晶态;用扫描电子显微镜对薄膜进行表面形貌的观察,溅射功率为2600W,溅射气压为0.4Pa时制备的Al膜较均匀致密。 相似文献
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利用射频反应磁控溅射在显微玻璃、单晶硅片、NaCl和石英上沉积ZrO2薄膜.膜厚60~80nm.研究发现,溅射气压升高,薄膜结晶程度降低,同时存在单斜相和四方相;晶粒尺寸增大;折射率上升;透射率在700~1000nm波段上升.这些结果表明溅射气压影响ZrO2薄膜生长机制、微观结构和成份,进而影响其光学性能. 相似文献
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周细应徐祖健刘延辉徐洲 《材料工程》2008,(1):235-238
利用磁控共溅射方法采用不同的溅射工艺在单晶硅基片沉积制备了Al-Cu-Fe薄膜.运用原子力显微镜镜(AFM)分析了Al-Cu-Fe薄膜的表面形貌、表面粗糙度和晶粒尺寸.结果表明:随着溅射气压的减小,薄膜表面粗糙度和晶粒尺寸均有所减小.当基底温度升高至450℃时,Al-Cu-Fe薄膜的粗糙度和晶粒尺寸明显增加.溅射时间的延长导致了薄膜的表面粗糙度下降和晶粒尺寸的长大.增加溅射功率会使薄膜表面粗糙度有所增加. 相似文献
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采用卷绕型磁控溅射设备在涤纶(PET)针刺毡表面沉积了纳米结构Cu薄膜,利用X射线衍射仪(XRD)对薄膜的组分和结晶状态进行了分析,用原子力显微镜(AFM)分析了不同溅射工艺参数对纳米Cu薄膜微观结构和颗粒直径的影响,并较为系统地分析了溅射功率、工作气压和沉积时间对镀铜PET针刺毡导电性能的影响。结果表明,增大溅射功率,镀铜PET针刺毡导电性和Cu膜均匀性变好,但应控制在6kW以下;随工作气压的增大,薄膜方块电阻先减小后增大,薄膜厚度更加均匀;随着沉积时间的延长,Cu粒子的直径增大,Cu膜的导电性和均匀性明显变好。 相似文献
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采用直流磁控溅射在钢基体上制备了钽薄膜,研究了溅射气压和电流对钽膜相结构、表面形貌、硬度以及耐磨性的影响。XRD结果表明:钽膜主要由α(体心立方结构) β(四方体结构)混合相组成,在合适的实验条件下(0.65 Pa、0.6 A)可以得到单一的α相结构,并呈现(110)择优取向。随着溅射电流的提高,钽膜中β相减少,α相由(110)择优取向变成随机取向;压强的提高导致了α相减少,并且在0.8 Pa时发生了部分β相转变,膜层逐渐转变成以β相为主的两相结构。AFM结果表明粗糙度随压强的增大而提高。随着气压和电流的提高,钽膜的显微硬度增大,而耐磨性则呈现下降的趋势。大的电流和低的气压有利于获得-αTa。 相似文献
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Production planning and scheduling are becoming the core of production management, which support the decision of a petrochemical company. The optimization of production planning and scheduling is attempted by every refinery because it gains additional profit and stabilizes the daily production. The optimization problem considered in industry and academic research is of different levels of realism and complexity, thus increasing the gap. Operation research with mathematical programming is a conventional approach used to address the planning and scheduling problem. Additionally, modeling the processes, objectives, and constraints and developing the optimization algorithms are significant for industry and research. This paper introduces the perspective of production planning and scheduling from the development viewpoint. 相似文献
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目的 探索江门世遗文化的传承、发展和转化的新思路,践行国家在《粤港澳大湾区发展规划》纲要中要求江门承担与港澳地区文化创意合作与开发任务的分工。方法 与澳门高校紧密合作,开展专业培训课程,以开平碉楼为例,从人文视角开展设计研究,梳理开平碉楼的文化脉络,把世遗文化的元素和其背后的文化融入文创产品中,提升文创产品的附加值,推动当地文创产业结构的变革。结果 两地高校构建了稳定的科研团队,开设长期有效的设计培训课程,与景区建立了研究协作关系,帮助景区构建了一套产销研的商业模式。结论 以跨区域高校合作为平台,以文创产品为抓手,依托江澳两地的资源优势,可以构建江门世遗文化全新的品牌形象,最终推动开平世遗文化的活化。 相似文献
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Error and uncertainty in modeling and simulation 总被引:1,自引:0,他引:1
William L. Oberkampf Sharon M. DeLand Brian M. Rutherford Kathleen V. Diegert Kenneth F. Alvin 《Reliability Engineering & System Safety》2002,75(3)
This article develops a general framework for identifying error and uncertainty in computational simulations that deal with the numerical solution of a set of partial differential equations (PDEs). A comprehensive, new view of the general phases of modeling and simulation is proposed, consisting of the following phases: conceptual modeling of the physical system, mathematical modeling of the conceptual model, discretization and algorithm selection for the mathematical model, computer programming of the discrete model, numerical solution of the computer program model, and representation of the numerical solution. Our view incorporates the modeling and simulation phases that are recognized in the systems engineering and operations research communities, but it adds phases that are specific to the numerical solution of PDEs. In each of these phases, general sources of uncertainty, both aleatory and epistemic, and error are identified. Our general framework is applicable to any numerical discretization procedure for solving ODEs or PDEs. To demonstrate this framework, we describe a system-level example: the flight of an unguided, rocket-boosted, aircraft-launched missile. This example is discussed in detail at each of the six phases of modeling and simulation. Two alternative models of the flight dynamics are considered, along with aleatory uncertainty of the initial mass of the missile and epistemic uncertainty in the thrust of the rocket motor. We also investigate the interaction of modeling uncertainties and numerical integration error in the solution of the ordinary differential equations for the flight dynamics. 相似文献
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New measurements are reported for the density and viscosity of tetralin and trans-decalin. The density was determined from room temperature to 60°C for tetralin and to 95°C for trans-decalin. The kinematic viscosity was measured up to temperatures slightly above 100°C. Our results improve upon the values recommended by the American Petroleum Institute for these liquids. 相似文献
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Ravinder Koul 《工程教育杂志》2018,107(2):219-237
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Masao Doyama 《Bulletin of Materials Science》1999,22(3):723-728
By making a step on one surface (
) of a rectangular small paralellepiped copper crystal, dislocations could be created by the molecular dynamic method. The
dislocation created was not a complete edge dislocation but a pair of Heidenreich-Shockley partial dislocations. Each time
a dislocation was created, the stress on the surface was released. Small copper crystals having a notch were pulled (until
fracture), compressed and buckled by use of the molecular dynamic method. An embedded atom potential was used to represent
the interaction between atoms. Dislocations were created near the tip of the notch. A very sharp yield stress was observed.
The results of high speed deformations of pure silicon small crystals using the molecular dynamics are presented. The results
suggest that plastic deformation may be possible for the silicon with a high speed deformation even at room temperature. Another
small size single crystal, the same size and the same surfaces, was compressed using molecular dynamic method. The surfaces
are {110}, {112} and {111}. The compressed direction was [111]. It was found that silicon crystals are possible to be compressed
with a high speed deformation. This may suggest that silicon may be plastically deformed with high speed deformation. 相似文献
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SMC/BMC废弃物对工业及环境造成了很大影响,指出了SMC/BMC回收再利用的紧迫性。通过对目前国际上SMC/BMC回收再利用的3种典型途径优缺点的对比,参照国外SMC/BMC回收再利用的先进方法,对我国SMC/BMC回收再利用提供了可行的建议. 相似文献
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Albert C. Parr 《Journal of research of the National Institute of Standards and Technology》2001,106(1):151-186
The national measurement system for photometric and radiometric quantities is presently based upon techniques that make these quantities traceable to a high-accuracy cryogenic radiometer. The redefinition of the candela in 1979 provided the opportunity for national measurement laboratories to base their photometric measurements on optical detector technology rather than on the emission from high-temperature blackbody optical sources. The ensuing technical developments of the past 20 years, including the significant improvements in cryogenic radiometer performance, have provided the opportunity to place the fundamental maintenance of photometric quantities upon absolute detector based technology as was allowed by the 1979 redefinition. Additionally, the development of improved photodetectors has had a significant impact on the methodology in most of the radiometric measurement areas. This paper will review the status of the NIST implementation of the technical changes mandated by the 1979 redefinition of the candela and its effect upon the maintenance and dissemination of optical radiation measurements. 相似文献