钢球表面粗糙度的白光干涉非接触测量法

介绍了一种利用垂直位移台来实现钢球表面粗糙度高精度测量的垂直扫描白光干涉仪。该仪器是在6JA型干涉显微镜基础上加以改造,采用白光干涉,通过检测干涉信号的光强峰值,实现高精度的钢球表面三维形貌测量。通过试验验证该系统可对精度等级为3级的钢球进行精确的表面形貌测量。     

金刚石砂轮表面形貌测量系统

为了实现对金刚石砂轮表面形貌的非接触精密测量,开发了基于干涉原理的金刚石砂轮表面形貌专用测量系统,研究了该系统的测量原理和关键技术。根据垂直扫描白光干涉显微测量原理以及被测对象的特征,提出了适用于砂轮测量的方法,研究了系统的自动扫描范围、垂直方向的扫描方法、单次测量三维表面的恢复算法和磨粒的识别算法。结合自行设计的夹具搭建了砂轮测量系统,并对多次测量拼接算法进行了实验分析。实验结果表明:基于区域重合大小(重合度为30%~50%)的拼接算法获得的拼接前后重合区域的相关系数均大于0.8,拼接后重合区域的高度差均小于0.4μm。得到的结果显示所搭建的系统可以恢复砂轮的形貌,其测量范围和精度满足砂轮磨粒评定和分析的要求。     

一种基于白光扫描干涉法表面形貌测量仪的研究

本文介绍了一种利用白光扫描干涉法测量表面三维形貌的仪器原理及其整体结构,分析了影响测量精度的主要因素,给出了最佳干涉位置的识别算法,并用实际测量结果加以论证。     

菲涅耳微透镜芯模表面形貌的检测及加工误差分析

采用扫描白光干涉法对菲涅耳微透镜芯模表面浮雕结构进行了检测,并对元件表面微观形貌进行了三维重建.根据其表面形貌数据,引入幅度参数表征法,分别计算出横向线宽误差以及样品的系统刻蚀深度误差和随机刻蚀深度误差等纵向加工偏差.通过表面高度分布的偏斜度、表面高度分布的峭度等参数获得了有关微芯模表面误差和缺陷的量化信息.实验研究表明,扫描白光干涉法能精确定量化表征微芯模表面形貌特征,这对探索适用于新型微光学器件表面三维形貌误差的无损检测评价方法具有实际意义.     

合金韧窝断口微观形貌的扫描白光干涉三维检测重构及Motif表征

针对30CrMnSiA合金韧窝断口复杂的表面特征,运用扫描白光干涉法检测微观形貌.系统采用Linnik结构,并通过空间频域分析算法重建断口表面三维形貌,试验中扫描行程达120μm,纵向检测精度优于5 nm,频域分析表现出很强的位相提取和噪声抑制能力.研究韧窝断口的三维Motif表征方法,提出包含深度、长度、宽度、面积、方向角和各向异性率等6参数的定义,以及基于面积和深度阈值的合并算法.考虑到韧窝三维形态的各向异性,对基于纵横比的表面微观粗糙度定义进行修正.采用3D-Motif法对试验获得的断口三维形貌进行表面纹理分割,提取韧窝个体特征参数和统计数据,其中测得断口表面微观粗糙度为0.15～0.70,从而为定量化研究材料的断裂机理提供客观依据.     

用扫描白光干涉术检测合金韧窝断口微观三维形貌

运用扫描白光干涉法对30CrMnSiA合金韧窝断口复杂的三维表面微观形貌进行了检测.系统采用Linnik干涉结构,并通过基于扫描空间余弦傅里叶频域分析的算法重建断口表面三维形貌.实验中扫描行程达120 μm,纵向检测精度优于5 nm,余弦傅里叶分析表现出很强的位相提取和噪声抑制能力,韧窝断口微观形貌的三维重建效果理想....     

波长轮换与相移扫描相结合的表面形貌测量系统

用光学显微干涉法进行表面形貌测量时其深度测量范围的扩大和形貌测量精度的提高是一对矛盾。为此,本文设计出了一种基于波长轮换与相移扫描相结合的三波长表面形貌测量系统,并提出了一种基于椭圆拟合与相位差大小尺度相结合的相位提取与识别算法。将这种算法运用于多波长干涉图像的数据处理,有效地提高了形貌的整体测量精度,并拓展了深度测量范围。实验结果表明:在深度测量范围扩大近15倍的条件下,采用粗糙度国家基准校准的方波多刻线样板得到的表面粗糙度数据与校准数据的相对误差仅为4.12%,表明该系统在一定的深度范围内能够实现表面形貌的高精度测量。另外,针对该系统设计的多波长相位识别算法对环境噪声要求不高,可以支持系统的高噪声或在线测量。     

白光干涉表面结构测量仪的优化设计与应用

为测量微机电系统的表面结构,研制了一种基于白光干涉法的表面结构测量仪。设计了显微干涉仪,通过实验分析了显微干涉仪关键设计参数中的光源带宽、物镜数值孔径、孔径光阑大小对垂直扫描白光显微干涉测量中干涉条纹光强分布的影响;设计了Z向一维位移工作台,提出了一种以显微干涉图像灰度值归一化标准方差为依据的白光干涉测量条纹自动搜索定位方法。相关实验结果为白光干涉表面结构测量仪的优化设计提供了参考依据。     

基于白光干涉法测量微光栅形貌及相关几何参量的研究

基于显微白光干涉术,利用扫描干涉显微镜对四台阶面阵微光栅记录了128幅白光干涉图,并分别运用重心法、空间频域算法、移相算法及包络曲线拟合法对扫描干涉图进行了分析处理。被测微光栅的形貌及周期在各算法下均完全吻合,台阶总高最大相差0.8%。同时,用美国Veeco白光轮廓仪对同一样品的形貌及光栅周期进行了测试,数据显示两者结果非常吻合,仅台阶总高相差0.7%。研究结果表明,所采用的四种算法均适用于微观三维形貌的测量。     

非金属材料表面粗糙度非接触测量试验研究

基于白光技术研究聚酰亚胺、F3和F46等3种非金属材料表面粗糙度的测量方法。分别利用基于白光共焦技术设计的粗糙度轮廓仪和基于白光干涉技术设计的三维形貌测量仪对三种不同材料的试件进行测量试验,重点关注上述3种非金属材料的吸光程度对测量精度的影响,并以触针式接触测量法的测量结果为参考,对测量结果进行不确定度评定。试验数据的分析结果表明,白光共焦法的测量不确定度为9.2%,白光干涉法的测量不确定度为9.8%,这2种基于白光技术的测量方法都是可行的。     

金刚石复合片与硬质合金的钎焊研究

通过聚晶金刚石复合片与YG8硬质合金的高频感应钎焊试验,研究了不同钎料钎剂搭配对高频感应钎焊接头抗剪强度、焊缝厚度的影响,并用扫描电镜和电子探针观察、分析了焊缝的微观结构。结果表明,690℃钎焊温度下含Mn的1号钎料和活性温度较高的QJ102钎剂是最佳搭配方案。探讨了聚晶金刚石复合片的特殊钎焊工艺,认为采用复焊方法可以大幅提高钎焊接头的抗剪强度。     

Recognition of diamond grains on surface of fine diamond grinding wheel

The accurate evaluation of grinding wheel surface topography, which is necessary for the investigation of the grinding principle, optimism, modeling, and simulation of a grinding process, significantly depends on the accurate recognition of abrasive grains from the measured wheel surface. A detailed analysis of the grain size distribution characteristics and grain profile wavelength of the fine diamond grinding wheel used for ultra-precision grinding is presented. The requirements of the spatial sampling interval and sampling area for instruments to measure the surface topography of a diamond grinding wheel are discussed. To recognize diamond grains, digital filtering is used to eliminate the high frequency disturbance from the measured 3D digital surface of the grinding wheel, the geometric features of diamond grains are then extracted from the filtered 3D digital surface, and a method based on the grain profile frequency characteristics, diamond grain curvature, and distance between two adjacent diamond grains is proposed. A 3D surface profiler based on scanning white light interferometry is used to measure the 3D surface topography of a #3000 mesh resin bonded diamond grinding wheel, and the diamond grains are then recognized from the 3D digital surface. The experimental result shows that the proposed method is reasonable and effective. __________ Translated from Journal of Dalian University of Technology, 2007, 47(3): 358–362 [译自: 大连理工大学学报]     

Recognition of diamond grains on surface of fine diamond grinding wheel

The accurate evaluation of grinding wheel surface topography, which is necessary for the investigation of the grinding principle, optimism, modeling, and simulation of a grinding process, significantly depends on the accurate recognition of abrasive grains from the measured wheel surface. A detailed analysis of the grain size distribution characteristics and grain profile wavelength of the fine diamond grinding wheel used for ultra-precision grinding is presented. The requirements of the spatial sampling interval and sampling area for instruments to measure the surface topography of a diamond grinding wheel are discussed. To recognize diamond grains, digital filtering is used to eliminate the high frequency disturbance from the measured 3D digital surface of the grinding wheel, the geometric features of diamond grains are then extracted from the filtered 3D digital surface, and a method based on the grain profile frequency characteristics, diamond grain curvature, and distance between two adjacent diamond grains is proposed. A 3D surface profiler based on scanning white light interferometry is used to measure the 3D surface topography of a #3000 mesh resin bonded diamond grinding wheel, and the diamond grains are then recognized from the 3D digital surface. The experimental result shows that the proposed method is reasonable and effective.     

误差补偿技术在相位偏移干涉测量中的应用

在研究泰曼—格林相位偏移干涉仪测量原理基础上，分析了位移驱动器移相误差对五幅移相计算结果的影响，一阶线性误差和二阶非线性误差是相位偏移干涉测量技术中产生相位误差的主要因素；提出了五幅算法移相误差补偿技术，该方法直接从相位偏移干涉图中计算移相过程中存在的一阶及二阶移相误差，对五幅算法结果进行误差修正；采用玻璃平晶为测试对象，建立了泰曼一格林干涉仪移相误差补偿原理试验系统。试验结果表明在同时存在一阶移相误差及二阶移相误差情况下，采用提出的移相误差补偿方法可以将位移测量精度提高6倍，相当于采用氦氖激光器的倍程干涉仪中位移精度达到1．0nm。     

无偏差最小二乘法伺服控制系统参数辨识

为准确辨识伺服控制系统参数,针对高性能运动控制算法的要求,在分析典型伺服控制系统结构模型基础上,基于“库仑摩擦+黏性摩擦”模型,设计了无偏差最小二乘方法,研究其在“工控机+运动控制卡”数控系统平台上的实现方法。实时采集电机角速度数据,利用设计的方法估算伺服系统转动惯量、黏性摩擦和库仑转矩,通过角速度重构,对比理论计算和实际测量角速度,验证参数辨识的有效性和准确性。理论分析和实验结果表明,所设计的参数辨识方法能够准确辨识系统参数。     

Vibration-resistant interference microscope with assistant focusing for on-machine measurement of surface topography

The interference microscope is a powerful tool for surface topography measurement, but its high sensitivity to vibration hinders its application to on-machine use. To measure surface roughness on a machine for the ultra-precision machining, a vibration-resistant interference microscope (VRIM) with an assistant focusing function is developed. The basic principle of VRIM is an error-compensated phase-shifting interferometry. An iterative algorithm is presented to calculate the surface phase with the phase shift amounts as unknown variables, where the phase shift amounts are calculated and compensated with least-squares method. A narrow bandwidth illumination is employed to alleviate coherence envelop influence, and a simplified intensity model is established to decouple the variables. Assisting the microscope to find fringe quickly, the focusing is realized by introducing an off-axis thin beam to generate two spots, of which their relative position relates to the defocus. The focusing method is directional and determinant, and has a large range up to 0.3 mm. In the vibration disturbances of 0.2 μm and 0.4 μm amplitudes over 0 Hz to 20 Hz frequency region, the roughness accuracy and repeatability of measuring an ultra-precision machined surface are both up to the sub-nanometer level. The developed instrument is applied to a single-point diamond turning machine and achieves a sub-nanometer accuracy and repeatability.     

基于光散射及灰度值作为判据的光学薄膜激光损伤阈值测量系统

基于ISO11254国际标准,构建了基于半导体激光光散射检测光学薄膜损伤与否的光学薄膜激光损伤阈值测试系统。运用图像处理以及灰度值作为判断薄膜损伤与否的判据,对TiO2/SiO2增透膜进行了阈值测试。由图像处理可得,当光斑图像有效区域内灰度值最大的前50个像素点的平均灰度值在25到33之间时,该区域为薄膜损伤的临界区域,并将测量结果与在Veeco白光轮廓仪观测到的损伤形貌进行对比,具有较好的一致性。     

3-D Surface roughness profile of 316-stainless steel using vertical scanning interferometry with a superluminescent diode

Surface roughness is one of many parameters that influences on mass stability of standard weight, commonly used as a transfer standard of mass SI unit. One of the most famous non-invasive methods for determining surface roughness from a surface profile of material is a vertical scanning interferometry (VSI) with a white light source. In this research, 3-D surface profiles of 316-stainless steel, usually used as a material for standard weights, are constructed by using VSI, based on Michelson interferometer (MI). Because of its low-coherent properties, low cost, and compact light source, a superluminescent diode (SLD) is chosen as a low-coherence light source in our interferometry system. Since a continuous wavelet transform (CWT) algorithm provides accuracy results, it is also used as a numerical analyzing method for the interferogram signals, taking from our VSI. The surface roughness and measurement uncertainty, calculated from the constructed 3-D surface roughness profiles of 316-stainless steel samples, are discussed.