90nm DUV光刻物镜重力变形及其对波像差影响分析

本文基于数值孔径为0.75,满足90 nm技术节点的DUV光刻物镜系统,采用在透镜边缘施加支撑力的方式进行重力变形控制。采用有限元法研究透镜表面非球面变形与补偿力的关系,分析补偿后透镜重力变形对系统波像差的影响并与补偿前系统进行对比。结果表明:加边缘补偿力后,透镜非球面变形均方根最大值由50.877 nm减小至26.675 nm,但补偿后系统波像差均方根最大值由0.041λ增大到0.055λ。由此可以得出结论:该补偿方式能够有效补偿透镜表面非球面变形,但补偿后系统波像差反而增大,所以要降低系统的波像差,不仅需要减小透镜变形,同时还需考虑各透镜变形之间的相互补偿作用。     

介电润湿液体透镜仿生复眼的设计与仿真

为解决仿生复眼系统不能自适应变焦的问题,提出了一种基于介电润湿液体透镜曲面阵列的可变焦仿生复眼系统。分析系统结构对成像性能的影响,计算系统的自适应变焦能力及相应像平面可移动范围。结果表明:系统成像的视场角随着基底曲率的增大而增大。相比于非均匀透镜阵列,均匀透镜阵列可明显降低系统的离焦像差。适当减小子透镜单元尺寸,也可以达到降低边缘透镜离焦像差的目的。当物距或者接收器位置发生改变时,通过调整子透镜单元焦距降低系统的离焦像差。系统接收器可移动范围为1.9 mm~15 mm。     

复合静电-磁浸没透镜的宽束曲轴聚焦性质及像差理论

研究了新型的复合静电 磁浸没透镜的曲光轴高斯电子光学性质及像差特性。应用宽束曲轴理论 ,导出了三维局部正交坐标系中的电子运动的中心轨迹方程和曲光轴的近轴轨迹方程 ;利用数学软件Mathematica推导出了复合静电 磁浸没透镜全部曲轴二级像差系数。作为实例 ,文中针对轴上磁场和电场具有某种解析表达式的旋转对称的静电 磁浸没透镜系数 ,计算了它的曲轴高斯聚焦特性和二级像差 ,并给出了二级像差分布图形     

机器人视觉用双远距型傅立叶变换透镜

将光电信息技术运用于机器人视觉系统,使视觉信息处理速度达到光速。在光学信息系统 中,傅立叶变换透镜是关键的运算部件。根据傅立叶光学原理和视觉系统的要求,研制一组远距型的傅立叶变换透镜。透镜前、后焦点间的距离缩短到傅立叶透镜焦距的0.7倍,在整个视场范围内波像差小于1/10波长,其它性能指标均符合设计要求。     

放映镜头的结构与使用注意事项

一、单片透镜的各种像差单片透镜存在许多缺点 ,它所成的像不能完全反映原物体的真实面貌。这种影像与原物体不一致的现象称为像差。透镜的像差可分为两种 ,由于透镜对各色光的折射率不同而引起的像差称色像差 ;由于透镜各部分对光的折射作用不同而引起的同一色光的像差 ,称单色像差。单色像差又分为球面像差、彗形像差、像散及像场弯曲和畸变等。1.球面像差(1)凸透镜的球面像差 :对凸透镜照射一束宽阔而与光轴平行的光线 ,经过透镜后不在光轴一点上汇集 ,这样一种被透镜折射后的光线焦点不一致的现象称为球面像差 ,如图 1所示。近轴光线在…     

复合静电—磁浸没透镜的宽束曲轴聚焦性质及像差理论

研究了新型的复合静电－磁浸没透镜的曲光轴高斯电子光学性质及像差特性。应用宽束曲轴理论，导出了三维局部正交坐标系中的电子运动的中心轨迹方程和曲光轴的近轴轨迹方程；利用数学软件Mathematica推导出了复合静电－磁浸没透镜全部曲轴二级像差系数。作为实例，中针对轴上磁场和电场具有某种解析表达式的旋转对称的静电－磁浸没透镜系数，计算了它的曲轴高斯聚焦特性和二级像差，并给出了二级像差分布图形。     

全景环形成像的转像系统设计

在全景环形透镜成像系统的设计中，为保证增大角视场情形下的成像性能，通过对全景环形透镜的第二反射面与第二折射面的几何参数间的有效平衡，以及对转像系统的优化设计，增大了成像视场，实现了全景环形透镜成像系统前后组之间的像差补偿；设计了一套具有良好成像性能的全景环形成像的光学系统。     

微透镜列阵成像光刻调焦方法

本文分析了离焦量对微透镜列阵成像光刻图形质量的影响,给出了系统离焦量的容差.同时提出了一种结构简单、可应用于微透镜列阵成像光刻系统调焦的新方法.并将基于该调焦方法的实验装置应用于微透镜列阵成像光刻系统,进行了光刻实验.实验表明,利用该方法时微透镜列阵成像光刻系统调焦,可得到接近微透镜列阵极限像质的光刻图形.     

激光探测告警光学系统设计

为满足激光探测告警光学系统对大视场和光学增益的要求,提出了宽视场有增益光学系统。该系统工作波长范围1.06~1.54μm,全视场角60°,最大口径28mm,PIN光电探测器光敏面直径2mm。物镜采用二片式反远距结构,增大了视场和后工作距离。弯月型负透镜在前,具有平衡像差和棱镜的偏向作用;物镜后放置高折射率标准超半球型浸没透镜,满足小光敏面探测器接收。分析结果表明,系统像高0.99mm,光学增益达15.33,结构简单,可有效降低激光辐射源功率、增强探测距离。     

微分代数在高阶复合几何像差—色像差分析中的应用

微分代数是计算机数值计算领域中的一种强有力的新型数学方法,它为任意高阶微分的计算提供了一种可达到机器精度的极为简便的手段。本根据微分代数的基本原理,研究了它在高阶复合几何像差－色像差分析计算中的应用,得到了系统的任意阶传递性质的微分代数表达,并具体给出了一至三阶复合几何像差－色像差所对应的微分代数系数。中还以一个轴上电位分布具有解析表达式的静电电子透镜为例,计算了它的一至三阶复合几何像差－色像差系数,并给出了一阶色差分布图形。     

Lens Systems with Frontal Aperture Stops

The requirements for the aberration correction in lenses with frontal aperture stops (FASs) are determined. The theory of distortion and field curvature correction is examined in such asymmetrical optical configurations. Computed results for an orthoscopic telecentric objective of the OR-3 type are given. A design for an f/1·6 photographic lens with field 65° is given. Some conclusions for the trends in FAS system development are drawn. The theoretical results of the synthesis and aberration correction for this type of lens system are given.     

二元平场透镜

讨论二元平场透镜的光学特性和象差。这种透镜不引入光焦度,当物体们我限远处孔径光阑与透镜重合时,不产生初级球差、彗差、轴用和轴外色差,但是它对场曲、畸变和轴上色差有贡献。给上用于校正双胶爱镜组的场曲的二元透镜实例。计算结果表明,二元透镜在平场光学系统中具有实用价值。     

Optimizing chromatic aberration calibration using a novel genetic algorithm

Advances in digitalized image optics has increased the importance of chromatic aberration. The axial and lateral chromatic aberrations of an optical lens depends on the choice of optical glass. Based on statistics from glass companies worldwide, more than 300 optical glasses have been developed for commercial purposes. However, the complexity of optical systems makes it extremely difficult to obtain the right solution to eliminate small chromatic aberration. Even the damped least-squares technique, which is a ray-tracing-based method, is limited owing to its inability to identify an enhanced optical system configuration. Alternatively, this study instead attempts to eliminate even negligible axial and lateral colour aberration by using algorithms involving the theories of geometric optics in triplet lens, binary and real encoding, multiple dynamic crossover and random gene mutation techniques.     

Aberrations in Optical ProcessorsPhase Errors in the Transformed Plane

Compensations of phase errors on the Fourier transformed plane in coherent optical processors are studied by introducing suitable aberrations in the image reconstructing lens. The contributions of each type of aberration to those errors are analysed for the cases of convolution and optical correlation. Tolerance limits are obtained for the transforming lens and calculated for a typical case.     

High tolerance to spherical aberrations and defects of focus with a birefringent lens

We report a systematic investigation of the imaging behavior of an optical system consisting of a lens from a uniaxial birefringent crystal sandwiched between two linear polarizers into which primary spherical aberration has been introduced. The proposed system has higher tolerance to primary spherical aberration and has a larger depth of focus than an imaging system found with an isotropic lens. Some specific cases are computed and illustrated graphically.     

眼镜式虚拟显示折射/衍射塑料光学系统设计

研究了塑料透镜在3D虚拟显示头盔光学系统中的应用,设计了适用于眼镜式虚拟微显示器的全塑料(聚甲基丙烯酸甲脂-PMMA)光学系统.引入反射镜来折叠光路以缩短系统长度,引入衍射面,利用其负色散性和波面任意整形特性来消除系统色差及改善波前像差.该系统重量仅为9.8 g.目视系统中需重点校正的像散和垂轴色差的最大值分别为0.31 mm和8.8μm,最大畸变<7%.系统最小角分辨力为0.8mrad,全视场为32..     

Finite conjugate spherical aberration compensation in high numerical-aperture optical disc readout

Spherical aberration arising from deviations of the thickness of an optical disc substrate from a nominal value can be compensated to a great extent by illuminating the scanning objective lens with a slightly convergent or divergent beam. The optimum conjugate change and the amount and type of residual aberration are calculated analytically for an objective lens that satisfies Abbe's sine condition. The aberration sensitivity is decreased by a factor of 25 for numerical aperture values of approximately 0.85, and the residual aberrations consist mainly of the first higher-order Zernike spherical aberration term A60. The Wasserman-Wolf-Vaskas method is used to design biaspheric objective lenses that satisfy a ray condition that interpolates between the Abbe and the Herschel conditions. Requirements for coma by field use allow for only small deviations from the Abbe condition, making the analytical theory a good approximation for any objective lens used in practice.     

Improvement of chromatic aberration of a plastic rod lens array. 1. Combination-color lens arrays consisting of several kinds of rod lenses with different gradient constants and different color filter functions

We propose a new type of rod lens array with improved chromatic aberration. The new rod lens array consists of several kinds of rod lenses with different gradient constants and different color filter functions. The gradient constant of each lens was prepared such that the total conjugate length was identical to the specific wavelength of the lens with a constant lens length. We call our new type of rod lens array a combination-color lens array. The characteristics of this color-type lens array are as follows: high angular aperture, short focal length, and ease of production with established procedures. The optical resolution of the rod lens array is 300 dpi in a wide wavelength range that is high enough to be applied to color scanners.     

光学系统设计中降低公差灵敏度的方法

基于初级像差理论提出了一种降低系统公差灵敏度的方法,即通过控制光学系统各元件表面的初级像差值以“小像差互补”达到像差平衡.首先阐明“小像差互补”含义,然后通过理论公式指出了初级像差与公差灵敏度的关系,最后举出一个航空相机光学系统的设计实例,通过对其“大像差互补”与“小像差互补”两种设计结果进行公差分析,结果表明利用“小...     

Modelling the primary chromatic aberrations and secondary spectrum of conceptual thick-lens modules

A virtual thick-lens module comprising three air-spaced thin lenses is proposed, which is able to have the identical primary chromatic aberrations and secondary spectrum for just real thick lenses, or groups or components within any thick lens, hence it is capable of studying the chromatic aberration behaviours of conceptual lenses without their detailed structures. The three thin-lens powers are first evaluated to match the required first-order quantities. Then the chromatic aberration coefficients of each thin lens are solved to satisfy the given system aberrations associated with the reference optical configuration. When the incident rays are changed, each thin lens will induce new chromatic aberrations according to the thin-lens formulae. The new system aberrations are obtained by adding those individual thin-lens aberrations together. The module can be directly applied to finite and infinite conjugates, focal and afocal lenses, as well as telecentric and non-telecentric lenses. Evaluations of the chromatic aberration variations of three different types of lenses are demonstrated.