Structural investigation of thin TiO2 films prepared by evaporation and post‐heating

Thin films of TiO₂ have been prepared by reactive evaporation of Ti₂O₃ at substrate temperatures from 150 °C to 350 °C and by post‐heating at 150 °C to 850 °C. The mass density of the films increases with increasing substrate and annealing temperature. The crystalline structure of the film prepared at 350 °C is anatase and becomes rutile upon annealing at 850 °C. All other films are amorphous as‐prepared and become anatase upon annealing above 250 °C. The crystallinity is higher for films prepared at lower temperature and does not increase with annealing temperature. Coatings with reproducible optical properties are obtained when deposited and post‐annealed at 250 °C.     

TiO2 thin films for dyes photodegradation

The aim of the present study is to investigate the influence of the TiO₂ specific surface (powder, film) on the photocatalytic degradation of methyl orange. Porous TiO₂ films were deposited on transparent conducting oxide substrates by spray pyrolysis deposition. The films were characterized by X-ray diffraction (XRD), Scanning Electronic Microscopy, and the UV-Vis spectroscopy. The XRD spectra of nanoporous TiO₂ films revealed an anatase, crystalline structure that is known as the most suitable structure in photocatalysis. The average thickness of the films was 260 nm and the measured band gap is 3.44 eV. The influence of the operational parameters (dye concentration, contact time) on the degradation rate of the dye on TiO₂ was examined. There were calculated the kinetic parameters and the process efficiency. Using thin films of TiO₂ is technologically recommended but raises problems due to lowering the amount of catalyst available for the dye degradation.     

Hydrophilicity of anatase TiO2/Cr-doped TiO2 thin films with different band gaps

Based on the concept that the electron-hole separation effect caused by a different band-gap structure would improve its hydrophilicity, anatase-TiO₂/Cr-doped TiO₂ thin films were synthesized by DC magnetron sputtering. The optical band gaps of TiO₂ thin films decreased from 3.23 to 2.95 eV with increasing Cr-doping content. Multilayer TiO₂ thin films with different band gaps exhibited a superhydrophilicity under UV illumination. In particular, in anatase TiO₂ (3.23 eV)/4.8% Cr-doped TiO₂ (2.95 eV), the hydrophilicity, which indicated a contact angle of less than 20°, lasted for 48 h in the dark after UV illumination was discontinued. This outstanding result has rarely been reported for TiO₂ thin films, which confirmed that the prominent superhydrophilicity of anatase TiO₂/Cr-doped TiO₂/glass could be attributed to the retardation of electron-hole recombination caused by the band-gap difference.     

Fabrication of TiO2 thin film memristor device using electrohydrodynamic inkjet printing

In this paper, we are reporting the fabrication of memristor device (Ag/TiO₂/Cu) using electrohydrodynamic inkjet printing technology. The titanium oxide (TiO₂) active layer was deposited using electrohydrodynamic atomization technique. The metal electrodes were patterned by using electrohydrodynamic printing technique. The crystalline nature, surface morphology and optical properties of as deposited TiO₂ films were characterized using X-ray diffraction (XRD), scanning electron microscope (SEM) and UV-visible spectroscopic analysis respectively. XRD and SEM studies revealed that the presence of anatase TiO₂ with uniform deposition. The optical transmittance of the deposited TiO₂ films was observed to be 87% in the visible region. The fabricated memristor device (Ag/TiO₂/Cu) exhibits bipolar resistive switching behavior within the low operating voltage (± 0.7 V). Our results ensure that the printed technology provides breakthrough solution in the electronic memory device fabrication.     

Hydrophilicity on carbon-doped TiO2 thin films under visible light

Carbon-doped TiO₂ thin films in the anatase phase with dopant concentrations of 1.1, 0.9, and 0.7 mol% were fabricated by a radio-frequency magnetron sputtering method. Dopant carbons were located at the oxygen sites. Carbon substitution caused the absorbance edge and/or the shoulder of TiO₂ to shift to a higher wavelength region. Carbon-doped TiO₂ thin films underwent a hydrophilic conversion when irradiating with visible light (400–530 nm). The hydrophilic property under visible light was inferior to that under ultraviolet light, which is explained by considering that the visible light sensitivity originates from the localized C 2p formed in the band-gap.     

Plasma-enhanced chemical vapor deposition of TiO2 thin films for dielectric applications

Amorphous TiO₂ thin films were formed by plasma-enhanced chemical vapor deposition (PECVD) from mixtures of titanium IV isopropoxide (Ti(O-i-C₃H₇)₄) and oxygen. The deposition rate was found to be weakly activated, with an apparent activation energy of 4.5 kJ/mol. The deposition rate increased with equivalence ratio and decreased with plasma power. This dependence on atomic oxygen density was consistent with behavior observed in other metal oxide PECVD systems. Metal-insulator-silicon devices were fabricated, and characterized using capacitance-voltage measurements. The apparent dielectric constant of the TiO₂ thin films increased from 15 to 82 with film thickness. The observed variations were consistent with the formation of an interfacial SiO₂ layer. Assuming that a TiO₂/SiO₂ bilayer behaves as two capacitors in series, an intrinsic TiO₂ dielectric constant of 82 ± 10 and an interfacial SiO₂ layer thickness of 3 ± 1 nm were extracted from electrical measurements.     

Effect of crystallization on humidity sensing properties of sol-gel derived nanocrystalline TiO2 thin films

In the present work, we describe the effect of crystallization on humidity sensing properties of nanocrystalline TiO₂ thin films prepared by sol-gel techniques. Here, we report an enhancement in the relative humidity (RH) sensitivity just after the crystallization at 375 °C, which is attributed to increased surface activity near crystallization and lower crystallite size. After crystallization, the RH sensitivity was found to decrease with increasing grain size. The complex impedance of the sensor, measured using impedance spectroscopy, fits well with an equivalent circuit consisting of inter-granular resistance and capacitance in parallel. It was found that with the change in RH, only resistance changes significantly, when compared with the capacitance.     

Fabrication of TiO2 nanotube film by well-aligned ZnO nanorod array film and sol-gel process

High density TiO₂ nanotube film with hexagonal shape and narrow size distribution was fabricated by templating ZnO nanorod array film and sol-gel process. Well-aligned ZnO nanorod array films obtained by aqueous solution method were used as template to synthesize ZnO/TiO₂ core-shell structure through sol-gel process. Subsequently, TiO₂ nanotube array films survived by removing the ZnO nanorod cores using wet-chemical etching. Polycrystalline anatase TiO₂ nanotube films were ∼ 1.5 μm long and ∼ 100 nm in inter diameter with a wall thickness of ∼ 10 nm.     

Preparation and antibacterial behavior of Fe-doped nanostructured TiO2 thin films

Fe³⁺-doped nanostructured TiO₂ thin films with antibacterial activity were prepared on soda–lime–silica glass slides by using sol–gel technology. Water containing Escherichia coli K-12 with TiO₂ thin films in was exposed to low intensity fluorescent light and antibacterial efficiency was evaluated with spread plate techniques. The films are porous and have anatase phase. Iron ions increased luminous energy utilization as the absorption edge of the Fe³⁺-doped film has a red shift compared to that of the pure TiO₂ film in the UV–VIS absorption spectrum. The bacterial removal efficiency reached 95% at the optimum concentration of iron ion (about 0.5% (mol)) after 120 min irradiation. The antibacterial behavior of the doped TiO₂ films was explicitly observed using scanning electron microscopy and cell wall damage was found.     

Further work function and interface quality improvement on Al2O3 capped high-k/metal gate p-type metal-oxide-semiconductor field-effect-transistors by incorporation of fluorine

The impact of fluorine (F) incorporation into TiN/HfO₂/SiO₂ on work function has been investigated. By process scheme optimization, F implanted through sacrificial oxide layer reveals sufficient the flat-band voltage (V_FB) shift ~ 170 mV without an equivalent oxide thickness (EOT) penalty. On the contrary, apparent EOT increasing was observed if F implanted directly through Si. Moreover, F incorporation into TiN/Al₂O₃/HfO₂/SiO₂, the V_FB shift can be up to about 250 mV or 410 mV at 10 keV with a dose of 2 × 10¹⁵ cm^− 2 or 5 × 10¹⁵ cm^− 2, respectively. Effective work function has been boosted to 4.95 eV closer to the valence band edge. Besides, interface defect density also can be improved ~ 20% by F incorporation from charge pumping result.     

Photodecomposition effects of graphene oxide coated on TiO2 thin film prepared by electron-beam evaporation method

Morphological, structural and photocatalytic properties of graphene oxide (GO)/TiO₂ thin-film deposited on quartz substrate were investigated. The TiO₂ film was prepared by electron-beam evaporation and the GO film by spin coating method. The photocatalytic activities of the GO/TiO₂ film were evaluated by photodecomposition of methylene blue. There was synergistic effect between TiO₂ and GO which causes a rapid photo-induced charge separation and the reduction of the recombination of electron-hole pairs under the UV-visible light irradiation. GO on TiO₂ film also promotes the properties of adsorption of the dye, photon scattering probability, and interacting surface area. As a result, it leads to the enhancement of the efficiency of the photodegradation in GO/TiO₂ film.     

Effect of SnO2 on the photocatalytical properties of TiO2 films

TiO₂/SnO₂ thin films with different tin atomic percentages were successfully prepared on glass substrates by the spray pyrolysis method from an alcoholic solution of TiO[C₅H₇O₂]₂ with different concentrations of SnCl₄. The TiO₂/SnO₂ thin films prepared at 450 °C presented the anatase phase in polycrystalline configuration from %Sn = 0 in the starting solution up to %Sn = 20, at higher tin content the films present an amorphous configuration. The resulting thin films have a homogeneous surface structure with some porosity. The photocatalytical properties of the films were evaluated with the degradation of methylene blue. The products of the degradation reaction were identified by ¹H nuclear magnetic resonance and the film properties were studied by atomic force microscopy, scanning electron microscopy, UV–Vis spectroscopy, and X-ray diffraction.     

Microanalysis of Pd and V-doped TiO2 thin films prepared by sputtering

Thin films of TiO₂ doped with vanadium and palladium, prepared by the magnetron sputtering method, were studied by means of X-ray diffraction (XRD), Scanning Electron Microscopy with Energy Disperse Spectrometer (SEM-EDS) and Atomic Force Microscopy (AFM). Investigations have brought important information about microstructure due to dopant incorporation in the TiO₂ host lattice. Directly after deposition thin films were XRD-amorphous and SEM investigations did not reveal details on the microstructure. Analysis of the topography of prepared thin films required application of Atomic Force Microscope. The AFM images show that as-deposited sample was dense with grain sizes varied in the range of 5.5 nm-10 nm, that indicated high quality nanocrystalline behavior. Additional annealing results in the formation of three phases in the thin film, e.g. (Ti,V)O₂ — solid solution, PdO and metallic inclusions of Pd. SEM-EDS system allowed analysis of the elemental composition, especially the V one, which lines have not been evidenced in the XRD diffraction pattern. EDS maps show homogenous distribution of elements Ti, O, V, Pd in prepared thin films.     

Characterization of TiO2 thin films prepared by electrolytic deposition for lithium ion battery anodes

The electrolytic deposition of TiO₂ thin films on platinum for lithium batteries is carried out in TiCl₄ alcoholic solution and the films are subsequently annealed. The as-prepared films are amorphous TiO(OH)₂·H₂O, transformed into anatase TiO₂ at 350 °C, and then gradually into rutile TiO₂ at 500 °C. Cyclic voltammograms show oxidation and reduction peaks at 2.20 and 1.61 V, respectively, corresponding to charge and discharge plateaus at 1.98 and 1.75 V vs. Li⁺/Li. The specific capacity decreases with increasing current density for film of 128-nm thickness in the initial discharge. It is observed that the diffusion flux of Li⁺ insertion/extraction into/from TiO₂ controls the reaction rate at higher current densities. Consequently, at low film thickness, high discharge capacity (per weight) is found for the initial cycle at a current density of 10 μA cm^− 2. However, the capacity of prepared films in various thicknesses approach 103 ± 5 mAh g^− 1 after 50 cycles, since the formation of cracks for thicker films offers shorter diffusion paths for Li⁺. In addition, TiO₂ films show electrochromic properties during lithiation and delithiation.     

High-performance ZnO thin film transistors with sputtering SiO2/Ta2O5/SiO2 multilayer gate dielectric

A high-performance ZnO thin film transistor （ZnO-TFT） with SiO₂/Ta₂O₅/SiO₂ (STS) multilayer gate insulator is fabricated by sputtering at room temperature. Compared to ZnO-TFTs with sputtering SiO₂ gate insulator, its electrical characteristics are significantly improved, such as the field effect mobility enhanced from 11.2 to 52.4 cm²/V s, threshold voltage decreased from 4.2 to 2 V, and sub-threshold swing improved from 0.61 to 0.28 V/dec. The improvements are attributed to the high gate capacitance (from 50 to 150 nF/cm²) as well as nice surface morphology by using dielectric with high～k Ta₂O₅ sandwiched by SiO₂ layers. The capacitance-voltage characteristic of a metal-insulator-semiconductor capacitor with the structure of Indium Tin Oxide/STS/ZnO/Al was investigated and the trap charges at the interface or bulk is evaluated to be 2.24 × 10¹² cm⁻². From the slope of C⁻² versus gate voltage, the doping density N_D of ZnO is estimated to be 1.49 × 10¹⁶ cm⁻³.     

TiO2 coated SnO2 nanosheet films for dye-sensitized solar cells

TiO₂-coated SnO₂ nanosheet (TiO₂-SnO₂ NS) films about 300 nm in thickness were fabricated on fluorine-doped tin oxide glass by a two-step process with facile solution-grown approach and subsequent hydrolysis of TiCl₄ aqueous solution. The as-prepared TiO₂-SnO₂ NSs were characterized by scanning electron microscopy and X-ray diffraction. The performances of the dye-sensitized solar cells (DSCs) with TiO₂-SnO₂ NSs were analyzed by current-voltage measurements and electrochemical impedance spectroscopy. Experimental results show that the introduction of TiO₂-SnO₂ NSs can provide an efficient electron transition channel along the SnO₂ nanosheets, increase the short current density, and finally improve the conversion efficiency for the DSCs from 4.52 to 5.71%.     

Broad band optical characterization of sol-gel TiO2 thin film microstructure evolution with temperature

Titanium dioxide (TiO₂) thin films have been produced by spin coating a titanium isopropoxide sol on silicon wafer substrates. The structural evolution of the thin films in terms of decomposition, crystallization and densification has been monitored as a function of annealing temperature from 100 to 700 °C using optical characterization and other techniques. The effect of annealing temperature on the refractive index and extinction coefficient of these TiO₂ thin films was studied in the range of 0.62 to 4.96 eV photon energy (250-2000 nm wavelength) using spectroscopic ellipsometry. Thermal gravimetric analysis and atomic force microscopy support the ellipsometry data and provide information about structural transformations in the titania thin films with respect to different annealing temperatures. These data help construct a coherent picture of the decomposition of the sol-gel precursors and the creation of dense layers of TiO₂. It was observed that the refractive index increased from 2.02 to 2.45 at 2.48 eV (500 nm) in sol-gel spin coated titania films for annealing temperatures from 100 °C to 700 °C.     

Optical and hydrophilic properties of nanostructure Cu loaded brookite TiO2 thin film

Copper loaded TiO₂ brookite thin films were deposited on glass substrates using the dip-coating method. The crystalline structure of the films was characterized by X-ray diffraction analysis. X-ray photoelectron spectroscopy was used to evaluate the properties of the film surfaces. The transmittance spectra of the films were obtained by the Shimadzu multi-purpose spectrophotometer. The water contact angle on the film surfaces during irradiation and storage in a dark place was measured by a contact angle analyzer. The results indicate that Cu loading did not affect the transmittance spectra, whereas it had a significant effect on the hydrophilicity of the TiO₂ film surface.     

Silicon releasing sol-gel TiO2-SiO230/70 films

TiO₂-SiO₂30/70 mol% sol-gel films were prepared on glass slides by a dip-coating method. The sols were prepared by a two-step hydrolysis process, where either the Si- or Ti-sol was prehydrolyzed before mixing the sols together. The acidity of the prehydrolyzed sol was varied. The surface structure and composition of formed films were characterized by contact angle meter, atomic force microscope and X-ray photoelectron spectroscopy. The silicon dissolution was performed in tris(hydroxymethyl)aminomethane buffer. The films were able to release silicon and the surface chemistry of films was dependent on the preparation method. The prehydrolysis of Si-sol and aging of mixed sol increased surface silica concentration of the formed films. The surface morphology was dependent on the preparation method so that through Si-sol prehydrolysis it was possible to make rougher nanosurfaces with needle-like particles.     

Structural, optical and electrical characterization of spray-deposited TiO2 thin films

Titanium oxide (TiO₂) thin films were deposited onto glass substrates by means of spray pyrolysis method using methanolic titanyl acetyl acetonate as precursor solution. The thin films were deposited at three different temperatures namely 350, 400 and 450 °C. As-deposited thin films were amorphous having 100–300 nm thickness. The thin films were subsequently annealed at 500 °C in air for 2 h. Structural, optical and electrical properties of TiO₂ thin films have been studied. Polycrystalline thin films with rutile crystal structure, as evidenced from X-ray diffraction pattern, were obtained with major reflexion along (1 1 0). Surface morphology and growth stages based on atomic force microscopy measurements are discussed. Electrical properties have been studied by means of electrical resistivity and thermoelectric power measurements. Optical study shows that TiO₂ possesses direct optical transition with band gap of 3.4 eV.