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1.
《IEEE sensors journal》2009,9(3):235-236
Carbon dioxide $({rm CO}_{2})$ is one of the major indicators of fire and therefore its measurement is very important for low-false-alarm fire detection and emissions monitoring. However, only a limited number of ${rm CO}_{2}$ sensing materials exist due to the high chemical stability of ${rm CO}_{2}$. In this work, a novel ${rm CO}_{2}$ microsensor based on nanocrystalline tin oxide $({rm SnO}_{2})$ doped with copper oxide (CuO) has been successfully demonstrated. The ${rm CuO}hbox{-}{rm SnO}_{2}$ based ${rm CO}_{2}$ microsensors are fabricated by means of microelectromechanical systems technology and sol-gel nanomaterial-synthesis processes. At a doping level of ${rm CuO}:{rm SnO}_{2} =1:8$ (molar ratio), the resistance of the sensor has a linear response to ${rm CO}_{2}$ concentrations for the range of 1% to 4% ${rm CO}_{2}$ in air at 450$^{circ}{rm C}$. This approach has demonstrated the use of ${rm SnO}_{2}$, typically used for the detection of reducing gases, in the detection of an oxidizing gas.   相似文献   

2.
《IEEE sensors journal》2008,8(11):1856-1861
In order to develop a pH sensor having a good pH-sensing characteristic, electrolyte-insulator-semiconductor capacitors using a high-k Pr$_{2}$O$_{3}$ thin film as the sensing membrane were fabricated on silicon substrates by reactive radio frequency sputtering. The structural and morphological features of these films with annealing at various temperatures were studied by X-ray diffraction, atomic force microscopy, and X-ray photoelectron spectroscopy. The Pr$_{2}$O $_{3}$ sensing film after annealing at 900$;^{circ}$C is suggested to the increase in the interfacial SiO $_{2}$ and silicate formation, and the high surface roughness. Therefore, a physical vapor deposition Pr$_{2}$O $_{3}$ film is adopted as a new pH-sensing layer. The result produces a pH response of 52.9 mV/pH $({rm pH}=2hbox{--}12)$, a hysteresis voltage of 17.5 mV $({rm pH}=7 to 4 to 7to 10 to 7)$, and a drift rate of 2.15 mV/h (${rm pH}=7$ buffer solution).   相似文献   

3.
《IEEE sensors journal》2009,9(3):199-206
Capacitive (C) pressure sensors typically sense quadratic changes in $C$ as a pressure difference $(P)$ deflects a flexible conducting diaphragm near a rigid ground plane. Touch-mode capacitive pressure (C-P) sensors, where the conducting diaphragm touches a dielectric coated ground plane, often show a more linear response, but with less sensitivity, particularly at low-$P$ . Initial contact of the diaphragm often occurs at a critical $P$. Until $P_{rm crit}$ is reached, the sensitivity is typically too low for accurate measurements. In this work, two different types of electrodes with “parabolic” and “donut” cavity-shapes have been designed, fabricated, and tested to achieve high-sensitivity at low-pressures. A flexible conducting diaphragm touches the bottom electrode smoothly, and both cavity shapes permit initial contact at a zero-pressure differential. This type of C-P sensors can have touch-mode and peeling-mode operations. The sensitivities of these sensors in two operation modes were measured, and their resolutions were smaller than 0.1 Pa at a mean pressure of ${10} ^{5}~{rm Pa}$. Both sensors in two modes have the resolution over total-pressure less than ${10} ^{-6}$, which is difficult to achieve at atmospheric pressure.   相似文献   

4.
《IEEE sensors journal》2010,10(2):311-315
The thermal history of a material with initially filled trap states may be probed using thermoluminescence. Since luminescent microparticles are composed of robust oxides, they are viable candidates for sensing temperature under conditions where all other types of direct-contact sensors fail. ${rm Mg}_{2}{rm SiO}_{4}:{rm Tb},{rm Co}$ particles with two thermoluminescent peaks have been heated using micromachined heaters over a 232 $~^{circ} hbox{C}$ to 313 $~^{circ} hbox{C}$ range on time scales of less than 200 ms. The effect of maximum temperature during excitation on the intensity ratio of the two luminescent peaks has been compared with first-order kinetics theory and shown to match within an average error of 4.4%.   相似文献   

5.
An evanescent wave biosensor is designed and developed using a single mode planar optical waveguide based on a spin coated clad of leaf extract of Alstonia Scholaris. The fabricated sensor showed ${rm CO}_{2}$ concentration dependent response. The specialty of this sensor is that it can be used when stored at room temperature (25$~^{circ}{rm C}$) up to a maximum of 25–30 days with 90% retention of original sensitivity. These ${rm CO}_{2}$ sensing biochips showed good operational efficiency for 10 cycles. The planar optical waveguide is versatile, easy to fabricate and can be used for ppm level ${rm CO}_{2}$ measurement with good sensitivity. Cross sensitivity with respect to humidity is studied. The sensor exhibited a short response time of 4–5 s and recovery time of 25 s with good repeatability and reproducibility.   相似文献   

6.
《IEEE sensors journal》2009,9(6):609-615
Microelectrode arrays (MEAs) offer numerous benefits over macroelectrodes due to their smaller sample size requirement, small form factor, low-power consumption, and higher sensitivity due to increased rates of mass transport. These features make MEAs well suited for microfluidic lab-on-a-chip applications. This paper presents two implementations of MEAs with and without an on chip potentiostat. We first describe an 8$,times,$ 8 array of 6 $mu{rm m}$ circular microelectrodes with center to center 37 $mu{rm m}$ spacing fabricated on silicon using conventional microfabrication techniques. Pads are provided for external connections to a potentiostat for electrochemical analysis. The second implementation is an individually addressable 32$,times,$32 array of 7 $mu{rm m}$ square microelectrodes with 37 $mu{rm m}$ center to center spacing on a CMOS chip with built-in very-large-scale integration potentiostat for electrochemical analysis. The integrated CMOS MEA is post processed at the die level to coat the exposed Al layers with Au. To verify microelectrode array behavior with individual addressability, cyclic voltammetry was performed using a potassium ferricyanide $({rm K} _{3}{rm Fe}({rm CN})_{6})$) solution.   相似文献   

7.
《IEEE sensors journal》2010,10(2):235-242
This paper presents the modeling and simulation of a tin dioxide (${rm SnO}_{2}$) field-effect transistor (FET)-based nanobelt gas sensor. The model results are compared to numerical simulations and experimental data obtained from published results describing the fabrication of single crystal nanobelts grown through thermal evaporation techniques. The fabricated sensor shows good response when exposed to oxygen (${rm O} _{2}$) and hydrogen (${rm H} _{2}$) at room temperature. Gas adsorption causes changes in the electrical contacts due to oxygen vacancies in the bulk. As a result, the ${rm I}$ -${rm V}$ characteristics are very different when the device is exposed to (${rm O} _{2}$) versus (${rm H} _{2}$ ). In the presence of ${rm H} _{2}$, the behavior of the contacts is ohmic and saturation is caused by pinch-off of the channel at the drain contact. However, in the presence of ${rm O} _{2}$ , the behavior of the contacts is Schottky, and device saturation occurs at the source end of the device. Our model is based on a depletion mode MOSFET and it accounts for both ohmic and Schottky contacts when the device is exposed to oxygen or hydrogen. It also provides a possible explanation for the gate bias dependence of the saturation current seen in some published characterization data.   相似文献   

8.
Using the open-cell photoacoustic technique, we have measured the room-temperature thermal diffusivities of the colossal magnetoresistive material La$_{0.67}$Ca$_{0.33}$MnO$_{3 }$, sintered between 1100$;^{circ}$ C and 1350$;^{circ}$ C, with average grain sizes 1, 3, 5, and 10 $mu$m. We obtained the thermal diffusivities by analyzing the phase of photoacoustic signals in thermally thick samples using Calderon's method. We found that the insulator-metal transition temperature does not depend on the grain size ($T_{rm IM} sim 272$ K). However, the thermal diffusivity increases with grain size, with values between 0.431 and 0.969 mm $^{2}$s $^{-1}$. Other related electrical and thermal properties, including the electrical conductivity, thermal conductivity, and phonon mean free path, are also dependent on the grain size. The electronic contribution to the thermal conductivity is 2%–3% of the total thermal conductivity for smaller grain sizes (1–5 $mu$m) and increases to about 24% when the grain size is increased to 10 $mu$ m.   相似文献   

9.
We present a combined experimental investigation of magnetic normal modes in an antidot lattice using both Brillouin light scattering and broadband ferromagnetic resonance. It was fabricated on a silicon substrate using optical ultraviolet lithography. The sample consisted of a 30-nm-thick ${rm Ni}_{80}{rm Fe}_{20}$ squared antidot array with circular holes whose diameter and edge-to-edge spacing are 250 and 150 nm, respectively. Experiments were performed as a function of the applied magnetic field $mu_{0}{rm H}_{rm ext}$ in the range from $-$100 to 100 mT, with ${rm H}_{rm ext}$ applied along both the square lattice axis and its diagonal. Several peaks were observed in both the Brillouin light scattering and ferromagnetic resonance spectra, and their evolution with the intensity and the direction of the applied field ${rm H}_{rm ext}$ was measured. Micromagnetic simulations enabled us to identify the modes in terms of their symmetry obtaining a good quantitative agreement with the measured frequencies. In addition, we show how the inhomogeneity of the internal field affected the properties of the magnetic eigenmodes and their localization in different regions of the antidot lattice.   相似文献   

10.
We varied the composition and sintering temperature of Sr–La–Co ferrite magnets to analyze the effects of various important factors on coercivity $(H_{rm cJ})$. We examined the effects of crystal grain size and distribution, the mechanism of magnetization reversal, the degree of crystal grain orientation (OD), and the anisotropy field $(H_{rm A})$ on $H_{rm cJ}$. We proposed an equation based on the experimental results that expresses the measured $H_{rm cJ}$ and considers these effects as $H_{rm cJ} = C_{rm t}(0.4/R_{rm h})$ OD $(H_{rm A} - H_{rm d} - H_{rm in})$, where $C_{rm t}, R_{rm h}, H_{rm d}$, and $H_{rm in}$ are the crystal grain size effects on $H_{rm cJ}$ of sintered magnet, rotational hysteresis integral corresponding to the mechanism of magnetization reversal, demagnetizing field of shape anisotropy, and interaction field between crystal grains, respectively. We found that apart from the volume ratio for single-domain crystal grains and $H_{rm A}$, the mechanism of magnetization reversal had significant effects on $H_{rm cJ}$ for Sr–La–Co sintered ferrite magnets.   相似文献   

11.
《IEEE sensors journal》2009,9(10):1173-1180
This paper describes the structural properties and sensing characteristics of thin Nd$_{2}$O$_{3}$ sensing membranes deposited on silicon substrates by means of reactive sputtering. X-ray diffraction, X-ray photoelectron spectroscopy, and atomic-force microscopy were used to study the chemical and morphological features of these films as functions of the growth conditions (argon-to-oxygen flow ratios of $20/5, 15/10$ and $10/15$; temperatures ranging from 600$~^{circ}$C to 800$~^{circ}$C). The thin Nd$_{2}$O$_{3}$ electrolyte-insulator-semiconductor devices prepared under a 15/10 flow ratio with subsequent annealing at 700$~^{circ}$C exhibited a higher sensitivity (56.01 mV/pH, in the solutions from pH 2 to 12), a smaller hysteresis voltage (4.7 mV in the pH loop $7 to 4 to 7to 10 to 7$), and a lower drift rate (0.41 mV/h in the pH 7 buffer solution) than did those prepared at the other conditions. We attribute this behavior to the optimal oxygen content in this oxide film forming a high density of binding sites and a small surface roughness.   相似文献   

12.
We compare the direct and inverse techniques of measuring magnetostriction in magnetic thin films. We chose a set of four magnetic thin film samples (Co$_{95}$Fe$_5$, Co$_{60}$Fe$_{20}$B$_{20}$, Ni$_{65}$Fe$_{15}$Co$_{20}$, and Ni$_{80}$Fe$_{20}$) for the measurements, representing positive and negative magnetostriction and having saturation magnetostriction of magnitudes ranging from $10^{-7}$ to $10^{-5}$. We made the direct measurements on a high-precision optical cantilever beam system, and we carried out the inverse magnetostriction measurements on a nondestructive inductive $Bhbox{-}H$ looper with three-point bending stage.   相似文献   

13.
The core-type synchronous permanent-magnet planar motor (SPMPM) discussed in this paper includes one or more planar armatures each of which contains two sets of three-phase windings named ${rm x}$-winding and ${rm y}$-winding. For each planar armature, a magnetic field energy equation is established first. This equation describes the mechanism of the coupling between the permanent-magnet array, the ${rm x}$-winding and the ${rm y}$ -winding in the core-type SPMPM. By using virtual work principle, ${rm x}$-direction thrust force, ${rm y}$ -direction thrust force and vertical force acting on the planar armature are modeling analytically. For eliminating the coupling in these force models, the excitation flux linkages and phase currents are all transformed into ${rm d}hbox{-}{rm q}$ synchronous reference frame. From the decoupling force equations, some characteristics of the vertical component of force on the planar armature are obtained. The electromagnetic force model is helpful for the design of the contactless planar bearing and the servo control system of the SPMPM.   相似文献   

14.
This paper deals with the planar Hall effect (PHE) of Ta(5)/NiFe$(t_{rm F})$/Cu(1.2)/NiFe$(t_{rm P})$/IrMn(15)/Ta(5) (nm) spin-valve structures. Experimental investigations are performed for 50 $mu$m$times hbox{50} mu$m junctions with various thicknesses of free layer ( $t_{rm F} = 4, 8, 10, 12, 16, 26$ nm) and pinned layer ($t_{rm P} = 1, 2, 6, 8, 9, 12$ nm). The results show that the thicker free layers, the higher PHE signal is observed. In addition, the thicker pinned layers lower PHE signal. The highest PHE sensitivity $S$ of 196 $mu$V/(kA/m) is obtained in the spin-valve configuration with $t_{rm F} = 26$ nm and $t_{bf P} = 1$ nm. The results are discussed in terms of the spin twist as well as to the coherent rotation of the magnetization in the individual ferromagnetic layers. This optimization is rather promising for the spintronic biochip developments.   相似文献   

15.
A fully integrated time-to-digital converter (TDC) for a pulsed time-of-flight laser rangefinder has been designed and fabricated by a standard 0.18-$muhbox{m}$ CMOS process. The time-to-digital conversion is realized by counting the full clock cycles of an on-chip ring oscillator between timing signals and by recording the state of its 12 phases at the moment of arrival of the timing signals and their delayed replicas. The frequency of the oscillator is stabilized to an on-chip voltage reference by means of a frequency-to-voltage-converter-based feedback loop. The resolution and single-shot precision (standard deviation) of the TDC are $sim$60 ps and less than $sim$50 ps, respectively, in a range of 80 ns. The worst-case temperature dependence of the TDC is less than 50 $hbox{ppm}/^{circ}hbox{C}$ in the temperature range of 0 $^{circ}hbox{C}$ to 70 $^{circ}hbox{C}$, corresponding to 0.6 $hbox{mm}/^{circ}hbox{C}$ at a distance of 12 m (80 ns). The power consumption of the TDC is less than 18 mW.   相似文献   

16.
Quantum-dots-tagged poly (styrene-acrylamide-acrylic acid) microspheres (QDsAAMs) were synthesized and modified with hydrazine hydrate through hydrazinolysis. Azidocarbonyl groups, which can be rapidly coupled with proteins under mild conditions, were introduced onto the surface of QDsAAM using azido reaction. Bovine serum albumin (BSA) was selected as model protein to be covalently immobilized on the azidocarbonyl QDsAAM. Instruments such as fluorescence microscope, optical microscope, confocal laser scanning microscope, UV–visible spectrometer, Fourier transform infrared spectrometer, size analyzer, and fluorescence spectrophotometer were used to characterize QDsAAM. Results showed that QDsAAM had a regular double-layer spherical shape and an average diameter of 11.2  $mu$m. It also displayed high fluorescence intensity ( ${lambda}_{{rm ex}}/{lambda}_{{rm em}} = hbox{250}$ nm/370 nm), which showed linearity with concentrations ranging from $hbox{3.0} timeshbox{10}^{-3}$ to $hbox{90.0} times hbox{10}^{-3} hbox{g}{cdot}hbox{L}^{-1}$. In addition, external factors such as pH and ionic strength exerted little influence on fluorescent characteristic. BSA immobilization indicated that QDsAAM with azidocarbonyl groups could be covalently coupled with BSA at the rate of $hbox{40} times hbox{10}^{-3}$ g/g (BSA/QDsAAM), while fluorescence linearity correlation was also found. This functional azidocarbonyl QDsAAM with sensitive fluorescence and active azidocarbonyl groups could be used as a promising fluorescent probe for quantitative detection, protein immobilization, and early rapid clinical diagnostics.   相似文献   

17.
《IEEE sensors journal》2009,9(6):673-677
A miniature optical biosensing system based on a PMOS phototransistor and absorption photometry is proposed. The phototransistor was manufactured in a standard 0.35-$mu{rm m}$ CMOS process, and it exhibited a responsivity higher than 1000 A/W for 650-nm light. For biochemical applications, the ${rm TMB/H}_{2}{rm O}_{2}/{rm HRP}$ method was adopted as a useful basis in our system. A sample volume of only 10 $mu{rm l}$ was required to be dropped on the slide above the phototransistor. Experimental results demonstrated that a high sensitivity of 2.5 $mu{rm A/pM}$ was achieved, and the minimum HRP concentration successfully detected was 2.7 pM. This detection limit is three orders of magnitude better than that of a lately reported silicon biosensor, and is even comparable to that of a commercial spectrophotometer.   相似文献   

18.
The dielectric constant, magnetic permeability, and refractive index are the fundamental optical parameters of a material. To investigate these optical parameters, a mixed-type common-path heterodyne interferometer is developed in this paper. By using this interferometer to detect the amplitudes and phases of both the transmission and reflection coefficients, the complex dielectric constant, magnetic permeability, and refractive index can be obtained using the algorithm discussed here. The validity of the mixed-type common-path heterodyne interferometer is demonstrated for visible lights, such as red, green, and blue, using lasers as light sources. Furthermore, the specifications for characterizing the optical properties of samples using the mixed-type common-path heterodyne interferometer are investigated. For example, dielectric constant $varepsilon$ , magnetic permeability $mu$, and the refractive index $n$ of $2.161 + i0.002$ , $0.9997 - i0.0009$, and $1.4699 - i3.4 times 10^{-7}$ with low uncertainties of $0.003 + i0.002$, $0.0003 + i0.0009$, and $0.0007 + i8 times 10^{-8}$, respectively, for a fused quartz measuring 632.8 nm are investigated. It also demonstrated that, in the case of the investigation in visible ranges, the measurement procedure is performed by only the common-path transmission type heterodyne interferometer.   相似文献   

19.
Giant Magnetoimpedance Current Sensor With Spiral Structure Double-Probe   总被引:1,自引:0,他引:1  
A novel giant magnetoimpedance (GMI) noncontact current sensor with spiral structure double-probe is designed. Differing from the formerly reported sensors, the probes of this sensor consist of annealed commercial amorphous ribbons which are curled to spiral tubes. Two couples of permanent magnets are applied to provide bias magnetic field. The distance between the probes and the permanent magnets is fixed at 2.4 cm. The sensor shows sensitivity of 1 V/A in the current range of $pm$ 1.5 A, measurement precision of less than 0.16% at room temperature, and good thermal stability in the temperature range between $-$20 and 30 $;^{circ}{rm C}$.   相似文献   

20.
《IEEE sensors journal》2009,9(8):983-986
We frequency stabilize a fiber laser for use in low-frequency sensing applications. Using a radio frequency locking technique, an Erbium-doped single longitudinal mode fiber laser is stabilized to a Mach–Zehnder interferometer. The low-frequency fiber laser noise was suppressed by more than 1.5 orders of magnitude at frequencies below 300 Hz reaching a minimum of 2 ${rm Hz}/sqrt {rm Hz}$ between 60 and 250 Hz. The corresponding strain sensitivities are 2 ${rm p}epsilon /sqrt {rm Hz}$ at 1 Hz and 15 ${rm f}epsilon /sqrt {rm Hz}$ from 60 to 250 Hz.   相似文献   

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