共查询到18条相似文献,搜索用时 421 毫秒
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为了实现高速度切割碳化硅(SiC)晶圆,采用自行研制的高能量皮秒脉冲光纤激光器进行了隐形切割实验。依据切片的截面形貌、表面热损伤区和边缘直线度,分析了皮秒激光器的切割结果,并探究了单脉冲能量和扫描速度对切片质量的影响。结果表明,当使用中心波长为1 030 nm、重复频率为100 kHz、单脉冲能量为20μJ、脉冲宽度约为100 ps的皮秒脉冲隐形切割360μm厚度的SiC晶圆时,切片的质量能够满足实际应用要求,且激光的扫描速度可达400 mm/s,相应的切割速度为44.44 mm/s,高于其他相关报道。 相似文献
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快速轴流型CO2激光器和密封型CO2激光器超脉冲运转时,能够获得前沿迅速上升、脉宽窄、峰值功率高的激光脉冲输出,在激光加工和激光医疗等领域有重要应用价值。本文从理论和实验两个方面对快速轴流型与密封型CO2激光器超脉冲特性进行了研究,设计并研制了适合CO2激光器超脉冲运转的控制电源,在国内首次实现了快速轴流型与密封型CO2激光器的超脉冲运转。 相似文献
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《制造技术与机床》2019,(4)
电力铁塔安装过程中两角钢预置孔位常出现错位,螺栓无法穿过,为解决这一问题,需要采用激光切割机进行扩孔切割。提出并设计了一套基于机器视觉的便携式激光切割打孔系统,实现了对远距离、高空铁塔上错位孔位的切割打孔作业。系统主要由激光器系统、控制与执行系统、传输线缆三部分构成。为保证设备便携,激光器系统由多个可拆解和组合的模块组成,设计并实现了将多束小功率激光器进行合束,从而达到大功率输出,实现高能量切割作业。控制与执行系统利用机器视觉进行图像采集与切割路径规划,以实现在地面完成对高塔上切割过程的监控和引导伺服系统完成自动切割。实验结果表明,机器视觉算法准确性高,切割效果较为理想。 相似文献
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This paper describes the Laser Assisted Machining (LAM) that cuts and removes softened parts by locally heating the ceramic
with laser. Silicon nitride ceramics can be machined with general machining tools as well, because YSiAlON, which was made
up ceramics, is soften at about 1,000°C. In particular, the laser, which concentrates on highly dense energy, can locally
heat materials and very effectively control the temperature of the heated part of specimen. Therefore, this paper intends
to propose an efficient machining method of ceramic by deducing the machining governing factors of laser assisted machining
and understanding its mechanism. While laser power is the machining factor that controls the temperature, the CBN cutting
tool could cut the material more easily as the material gets deteriorated from the temperature increase by increasing the
laser power, but excessive oxidation can negatively affect the quality of the material surface after machining. As the feed
rate and cutting depth increase, the cutting force increases and tool lifespan decreases, but surface oxidation also decreases.
In this experiment, the material can be cut to 3mm of cutting depth. And based on the results of the experiment, the laser
assisted machining mechanism is clarified. 相似文献
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H.Y. Zheng H. Liu S. Wan G.C. Lim S. Nikumb Q. Chen 《The International Journal of Advanced Manufacturing Technology》2006,27(9-10):925-929
The capability of direct writing makes ultrashort pulse laser significant in the microfabrication of MEMS devices based on polymer and glass. In particular, nanosecond and femtosecond lasers are able to transfer the adequate energy in femtosecond intervals for the removal of the materials. Because of its advantages, just like the small feature size, smooth finishing surface, flexible structuring and the minimum thermal effect, ultrashort pulse lasers have become a convincing technique with the high peak power. This paper presents the femtosecond laser machining results of the polycarbonate, aluminosilicate glasses and nanosecond laser machining of aluminosilicate glasses. The microchannels with the critical micron-scale dimensions and the sub-micron scale surface roughness were achieved by the optimized operating parameters of the laser. The major influence factors such as cutting speed, power energy, and power stability were analyzed to obtain the optimized parameters for the fabrication of the microchannels for a bubble switch. The ultrashort pulse laser micromachining was applied in the prototype of a bubble optical switch. By miniaturization of the structure of the microchannel, the switch speed can be promisingly improved. 相似文献
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D. Dhupal B. Doloi B. Bhattacharyya 《The International Journal of Advanced Manufacturing Technology》2008,36(9-10):883-893
Pulsed Nd:YAG Laser offers an excellent role for various micro-machining operations of a wide range of engineering materials such as ceramics, composites, diamond etc. The micro-machining of ceramics are highly demanded in the present industry because of its wide and potential uses in various field such as automobile, electronic, aero-space, and bio-medical engineering applications etc. Aluminum titanate (Al2TiO5) has tremendous application in automobile and aero engine industry due to its excellent thermal property. The present research paper deals with the response surface methodology based mathematical modeling and analysis on machining characteristics of pulsed Nd:YAG laser during micro-grooving operation on a work piece of aluminum titanate. In this present study, lamp current, pulse frequency, pulse width, assist air pressure and cutting speed of laser beam are considered as machining process parameters during pulsed Nd:YAG laser micro-grooving operation. The response criteria selected for analysis are deviation of taper and deviation of depth characteristics of micro-groove produced on a work piece made of aluminum titanate (Al2TiO5). The analysis of variance test has also been carried out to check the adequacy of the developed regression mathematical models. The optimal process parameter settings are assist air pressure of 1.3 kgf/cm2, lamp current of 20.44 amp, pulse frequency of 1.0 kHz, pulse width of 10% of duty cycle, and cutting speed of 10 mm/s for achieving the predicted minimum deviation of taper and deviation of depth of laser micro-groove. From the analysis, it is evident that the deviation of taper angle and deviation of depth of the micro-groove can be reduced by a great extent by proper control of laser machining process parameters during micro-grooving on aluminum titanate (Al2TiO5). 相似文献
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采用正交试验方法对影响水导激光切割碳纤维增强复合材料(CFRP)的关键工艺参数进行了深入研究,得出了进给速度、水射流速度、脉冲频率和激光功率对切割CFRP的影响规律,并用直接对比法和极差分析法所得最优参数进行单次划槽切割对比。研究结果表明:在极差分析法所得最优参数下切割CFRP时,切缝深度增大3.2%、切缝宽度减小9.2%、切缝锥度减小11.8%、线粗糙度减小40.2%。通过与干式激光加工方法对比发现,水导激光加工技术在切割CFRP方面优势明显,由于水射流的冲刷和冷却作用,材料切割表面几乎无热影响区和纤维拔出。另外,采用正交试验所得最优工艺参数实现了4 mm厚度CFRP的无锥度切割。 相似文献