Highly transparent and conducting In doped CdO synthesized by sol-gel solution processing

Cadmium oxide (CdO) is a much-studied wide gap semiconductor with an inherent high mobility of?>?100 cm²/Vs, high electron concentration of?>?10²¹ cm^?3 and a wide optical transparency window of?>?1800 nm. These unique properties make CdO a potential transparent conductor for full spectrum photovoltaics. However, in order to achieve optimum material properties for optoelectronic applications, CdO was grown by vacuum-based physical or chemical vapor deposition methods. In this work, we explored the application of a low-cost sol-gel spin coating method to achieve highly conducting and transparent CdO thin films doped with 0–10% In (CdO:In). We find that while as-grown CdO:In films are nanocrystalline/amorphous with a high resistivity of?~?1 Ω-cm, polycrystalline and highly conducting films can be obtained after optimized annealing at?≥?400 °C. However, the electron concentration n saturates at?~?5?×?10²⁰ cm^?3 for In concentration?>?5% (or N_In?~?1.9?×?10²¹ cm^?3). This low activation of In may be attributed to the high density of native defects and/or impurities incorporated in the sol-gel process. With 5% In doping, we obtained a low resistivity of ρ?~?2.5?×?10^–4 Ω-cm and a high mobility μ?~?50 cm²/Vs. These values of σ and µ are better than those reported for other TCOs synthesized by solution processes and comparable to conventional commercial TCOs grown by physical vapor deposition methods. Benefiting from their high mobility, these sol-gel CdO:In films are optically transparent over a wide spectral range up to λ?>?1800 nm, making them promising as transparent conductors for optoelectronic devices utilizing the infrared photons.

     

Quality enhancement of AZO thin films at various thicknesses by introducing ITO buffer layer

Due to the simultaneously superior optical transmittance and low electrical resistivity, transparent conductive electrodes play a significant role in semiconductor electronics. To enhance the electrical properties of these films, one approach is thickness increment which degrades the optical properties. However, a preferred way to optimize both electrical and optical properties of these layers is to introduce a buffer layer. In this work, the effects of buffer layer and film thickness on the structural, electrical, optical and morphological properties of AZO thin films are investigated. Al-doped zinc oxide (AZO) is prepared at various thicknesses of 100 to 300 nm on the bare and 100 nm-thick indium tin oxide (ITO) coated glass substrates by radio frequency sputtering. Results demonstrate that by introducing ITO as a buffer layer, the average values of sheet resistance and strain within the film are decreased (about 76 and 3.3 times lower than films deposited on bare glasses), respectively. Furthermore, the average transmittance of ITO/AZO bilayer is improved nearly 10% regarding single AZO thin film. This indicates that bilayer thin films show better physical properties rather than conventional monolayer thin films. As the AZO film thickness increases, the interplanar spacing, d₍₀₀₂₎, strain within the film and compressive stress of the film in the hexagonal lattice, decreases indicating the higher yield of AZO crystal. Moreover, with the growth in film thickness, carrier concentration and optical band gap (E_g) of AZO film are increased from 4.62?×?10¹⁹ to 8.21?×?10¹⁹ cm^?3 and from 3.55 to 3.62 eV, respectively due to the Burstein-Moss (BM) effect. The refractive index of AZO thin film is obtained in the range of 2.24–2.26. With the presence of ITO buffer layer, the AZO thin film exhibits a resistivity as low as 6?×?10^?4 Ω cm, a sheet resistance of 15 Ω/sq and a high figure of merit (FOM) of 1.19?×?10⁴ (Ω cm)^?1 at a film thickness of 300 nm. As a result, the quality of AZO thin films deposited on ITO buffer layer is found to be superior regarding those grown on a bare glass substrate. This study has been performed over these two substrates because of their significant usage in the organic light emitting diodes and photovoltaic applications as an enhanced carrier injecting electrodes.     

Nitrogen ion implantation effects on the structural,optical and electrical properties of CdSe thin film

In the present study, thin films of cadmium selenide (CdSe) are deposited on ITO substrate by electrodeposition method using aqueous solution of 3CdSO₄·8H₂O and SeO₂. These films are implanted with 40 keV N⁺ ions with different fluencies i.e. 1?×?10¹⁵, 5?×?10¹⁵, 1?×?10¹⁶ and 5?×?10¹⁶ ions/cm² using a beam current of 0.9 µA. The structural, morphological, optical and electrical properties of pristine and nitrogen ion-implanted CdSe thin films are analyzed using XRD, SEM, AFM, UV-PL Spectrophotometer and I–V four probes setup. XRD analysis revealed the effects of nitrogen ions on the structural parameters such as grain size, FWHM, micro strain and dislocation density etc. Crystallanity of the material increased with increase in implantation dose. SEM and AFM analysis show decrease in the surface roughness with implantation. From the optical studies, band gap value decreased from 2.50 to 2.29 eV with increase in N⁺ implantation doses. Noticeable changes in the electrical properties are also reported. The effect of N⁺ ion implantation on the properties of CdSe thin films are discussed on the basis of lattice disorder.     

Structural,optical, and electrical properties of ZnTe:Cu thin films by PLD

In this work, ZnTe and ZnTe:Cu films were obtained by pulsed laser deposition using the co-deposition method. ZnTe and Cu₂Te were used as targets and the shots ratio were varied to obtain 0.61, 1.47, 1.72, and 3.46% Cu concentration. Doping of ZnTe films with Cu was performed with the purpose of increasing the p-type carrier concentration and establishing the effect of concentration of Cu on structural, optical, and electrical properties of ZnTe thin films to consider their potential application in electronic devices. According to X-ray diffraction, X-ray photoelectron spectroscopy, UV–visible spectroscopy, and Hall effect results, ZnTe and ZnTe:Cu films correspond to polycrystalline zinc–blende phase with preferential orientation in (111) plane. Optical characterization results indicate that as-deposited films (band gap?=?2.16 eV) exhibit a band gap decrease as function of the increase of Cu concentration (2.09–1.64 eV), while, annealed films exhibit a decrease from 1.75 to 1.46 eV, as the Cu concentration increases. Lastly, Hall effect results show that ZnTe films correspond to a p-type semiconductor with a carrier concentration of 3?×?10¹³ cm^?3 and a resistivity of 1.64?×?10⁵ Ω?cm. ZnTe:Cu films remain like a p-type material and present an increasing carrier concentration (from 3.8?×?10¹⁵ to 1.26?×?10¹⁹ cm^?3) as function of Cu concentration and a decreasing resistivity (from 7.01?×?103 to 2.6?×?10^?1 Ω cm). ZnTe and ZnTe:Cu thin films, with the aforementioned characteristics, can find potential application in electronic devices, such as, solar cells and photodetectors.     

The variation of the features of SnO2 and SnO2:F thin films as a function of V dopant

V doped SnO₂ and SnO₂:F thin films were successfully deposited on glass substrates at 500 °C with spray pyrolysis. It was observed that all films had SnO₂ tetragonal rutile structure and the preferential orientation depended on spray solution chemistry (doping element and solvent type) by X-ray diffraction measurements. The lowest sheet resistance and the highest optical band gap, figure of merit, infrared (IR) reflectivity values of V doped SnO₂ for ethanol and propane-2-ol solvents and V doped SnO₂:F films were found to be 88.62 Ω–3.947 eV–1.02 × 10^?4 Ω^?1–65.49 %, 65.35 Ω–3.955 eV–8.54 × 10^?4 Ω^?1–72.58 %, 5.15 Ω–4.076 eV–6.15 × 10^?2 Ω^?1–97.32 %, respectively, with the electrical and optical measurements. Morphological properties of the films were investigated by atomic force microscope and scanning electron microscope measurements. From these analysis, the films consisted of nanoparticles and the film morphology depended on doping ratio/type and solvent type. It was observed pyramidal, polyhedron, needle-shaped and spherical grains on the films’ surfaces. The films obtained in present study with these properties can be used as front contact for solar cells and it can be also one of appealing materials for other optoelectronic and IR coating applications.     

The characteristics of transparent conducting Al-doped zinc oxide thin films deposited on polymer substrates

Al-doped zinc oxide (AZO) transparent, conductive thin films were deposited on inexpensive polyethylene terephthalate substrates, using radio frequency (rf) magnetron sputtering, with an AZO ceramic target (the Al₂O₃ content is approximately 2 wt%). This paper presents an effective method for the optimization of the parameters for the deposition process for AZO thin films with multiple performance characteristics, using the Taguchi method, combined with grey relational analysis. Using the Taguchi quality design concept, an L₉ orthogonal array was chosen for the experiments. The effects of various process parameters (rf power, substrate-to-target distance, substrate temperature and deposition time) on the electrical, structural, morphological and optical properties of AZO films were investigated. In the confirmation runs, using grey relational analysis, the electrical resistivity of the AZO films was found to have decreased from 5.0?×?10^?3 to 1.6?×?10^?3?Ω-cm and the optical transmittance was found to have increased from 74.39 to 79.40%. The results demonstrate that the Taguchi method combined with grey relational analysis is an economical way to obtain the multiple performance characteristics of AZO films with the fewest experimental data. Additionally, by applying an Al buffer layer, of thickness 10?nm, the results show that the electrical resistivity was 3.1?×?10^?4?Ω-cm and the average optical transmittance, in the visible part of the spectrum, was approximately 79.12%.     

Preparation of Sb:SnO2 thin films and its effect on opto-electrical properties

The present study focuses on pure and antimony (Sb)-doped tin oxide thin film and its influence on their structural, optical, and electrical properties. Both undoped and Sb-doped SnO₂ thin films have been grown by using simple, inexpensive pyrolysis spray technique. The deposition temperature was optimized to 450 °C. X-ray diffractions pattern have revealed that the films are polycrystalline and have tetragonal rutile-type crystal structure. Undoped SnO₂ films grow along (110) preferred orientation, while the Sb-doped SnO₂ films grow along (200) direction. The size of Sb-doped tin oxide crystals changes from 26.3 to 58.0 nm when dopant concentration is changed from 5 to 25 wt%. The transmission spectra revealed that all the samples are transparent in the visible region, and the optical bandgap varies between 3.92 and 3.98 eV. SEM analysis shows that the surface morphology and grain size are affected by the doping rate. All the films exhibit a high transmittance in the visible region and show a sharp fundamental absorption edge at about 0.38–0.40 nm. The maximum electrical conductivity of 362.5 S/cm was obtained for the film doped with 5 wt% Sb. However, the carrier concentration is increased from 0.708?×?10¹⁸ to 4.058?×?10²⁰ cm³. The electrical study reveals that the films have n-type electrical conductivity and depend on Sb concentration. We observed a decrease in sheet resistance and resistivity with the increase in Sb dopant concentration. For the dopant concentration of 5 wt% of Sb in SnO₂, the Rs and ρ were found minimum with the values of 88.55 (Ω cm^?2) and 2.75 (Ω cm), respectively. We observed an increase in carrier concentration and a decrease in mobility with the addition of Sb up to 25 wt%. The highest figure of merit values 2.5?×?10^–3 Ω^?1 is obtained for the 5wt% Sb, which may be considered potential materials for solar cells' transparent windows.

     

Analysis of different vacuum annealing levels for ZnSe thin films as potential buffer layer for solar cells

In order to seek potential buffer layer, the influence of different vacuum annealing levels on physical properties to e-beam evaporated Zinc Selenide (ZnSe) thin films are meticulously investigated herein. The X-ray diffraction patterns of vacuum-annealed ZnSe films confirmed the prominent (111) reflection of the cubic phase where the crystallite size is found maximum (29 nm). The wavy optical transmittance spectra are observed for these ZnSe films, where higher transparency is observed in the visible region. A blue shift in the optical band gap (2.56–2.81 eV) and shrink in refractive index from 2.49 to 2.40 is observed with increasing vacuum levels. The HRTEM images demonstrated (111), (220), and (311) orientations of the lattice planes, and EDS patterns confirmed deposition of ZnSe films. The ohmic nature of the analyzed ZnSe thin films is validated by the I–V characteristics where the resistivity is found in the order of 10² Ω-cm for vacuum-annealed and 10⁴ Ω-cm for the pristine films. The AFM images indicated hill-like structures where the roughness is found to vary with vacuum level. The physical properties of ZnSe films are conspicuously tailored by vacuum annealing levels, and the findings recommend the use of?~?5?×?10^?3 mbar vacuum-annealed ZnSe thin films as potential buffer layer to the solar cells.

     

Nanocrystalline CuO thin films: synthesis, microstructural and optoelectronic properties

Nanocrystalline copper oxide (CuO) thin films have been synthesized by a sol–gel method using cupric acetate Cu (CH₃COO) as a precursor. The as prepared powder was sintered at various temperatures in the range of (300–700?°C) and has been deposited onto a glass substrates using spin coating technique. The structural, compositional, morphological, electrical optical and gas sensing properties of CuO thin films have been studied by X-ray diffraction, Scanning Electron Microscopy (SEM), Four Probe Resistivity measurement and UV–visible spectrophotometer. The variation in annealing temperature affected the film morphology and optoelectronic properties. X-ray diffraction patterns of CuO films show that all the films are nanocrystallized in the monoclinic structure and present a random orientation. The crystallite size increases with increasing annealing temperature (40–45?nm).The room temperature dc electrical conductivity was increased from 10^?6 to 10^?5 (Ω?cm)^?1, after annealing due to the removal of H₂O vapor which may resist conduction between CuO grain. The thermopower measurement shows that CuO films were found of n-type, apparently suggesting the existence of oxygen vacancies in the structure. The electron carrier concentration (n) and mobility (μ) of CuO films annealed at 400–700?°C were estimated to be of the order of 4.6–7.2?×?10¹⁹?cm^?3 and 3.7–5.4?×?10^?5?cm²?V^?1?s^?1?respectively. It is observed that CuO thin film annealing at 700?°C after deposition provide a smooth and flat texture suited for optoelectronic applications. The optical band gap energy decreases (1.64–1.46?eV) with increasing annealing temperature. It was observed that the crystallite size increases with increasing annealing temperature. These modifications influence the morphology, electrical and optical properties.     

Optical and hall properties of Al-doped ZnO thin films fabricated by pulsed laser deposition with various substrate temperatures

The 3 wt% Al-doped zinc oxide (AZO) thin films were fabricated on quartz substrates at a fixed oxygen pressure of 200 mTorr with various substrate temperatures (room temp. ～500 °C) by using pulsed laser deposition in order to investigate the microstructure, optical, and electrical properties of AZO thin films. All thin films were shown to be c-axis oriented, exhibiting only a (002) diffraction peak. The AZO thin film, fabricated at 200 mTorr and 400 °C, showed the highest (002) orientation and the full width at half maximum (FWHM) of the (002) diffraction peak was 0.42°. The c-axis lattice constant decreased with increasing substrate temperature. The electrical property indicated that the highest carrier concentration (1.27 × 10²¹ cm^?3) and the lowest resistivity (6.72 × 10^?4 Ωcm) were obtained in the AZO thin film fabricated at 200 mTorr and 400 °C. The optical transmittance in the visible region was higher than 80 %. The Burstein-Moss effect, which shifts to a high photon energy, was observed.     

Low indium content In–Zn–O system towards transparent conductive films: structure,properties and comparison with AZO and GZO

In this work, low content indium doped zinc oxide (IZO) thin films were deposited on glass substrates by RF magnetron sputtering using IZO ceramic targets with the In₂O₃ doping content of 2, 6, and 10 wt%, respectively. The influences of In₂O₃ doping content and substrate temperature on the structure and morphology, electrical and optical properties, and environmental stability of IZO thin films were investigated. It was found that the 6 wt% doped IZO thin film deposited at 150?°C exhibited the best crystal quality and the lowest resistivity of 9.87?×?10^?4 Ω cm. The corresponding Hall mobility and carrier densities were 9.20 cm² V^?1 s^?1 and 6.90?×?10²⁰ cm^?3, respectively. Compared with 2 wt% Al₂O₃ doped ZnO and 5 wt% Ga₂O₃ doped ZnO thin films, IZO thin film with the In₂O₃ doping content of 6 wt% featured the lowest surface roughness of 1.3 nm. It also showed the smallest degradation with the sheet resistance increased only about 4.4% at a temperature of 121?°C, a relative humidity of 97% for 30 h. IZO thin film with 6 wt% In₂O₃ doping also showed the smallest deterioration with the sheet resistance increased only about 2.8 times after heating at 500?°C for 30 min in air. The results suggested that low indium content doped ZnO thin films might meet practical requirement in environmental stability needed optoelectronic devices.     

Electrical,optical and magnetoresistive behavior of nanostructured ZnO:Cu thin films deposited by sputtering

Copper doped ZnO (ZnO:Cu) nanostructured films with magnetoresistive behavior were produced by growing ZnO/Cu/ZnO arrays at room temperature (RT) by the sputtering technique on corning glass substrates. The arrays were made with two electrical insulating ZnO films of 50 and 105 nm, and a Cu film of 5 nm, both materials were deposited at RT by the RF- and DC-sputtering technique, respectively. The processing method involves two stages that proceed in the course of the growth process, the main one is originated by the non-equilibrium regime of the sputtering technique, and the second is the diffusion-redistribution of the intermediate Cu film towards the neighborhood ZnO layers aided by the nanocrystalline films character. The influence of applying an additional annealing stage to the arrays in N₂ atmosphere at 250 and 350 °C by periods of 30 min were studied. The resistivity of the ZnO:Cu films can be varied from 0.0034 to 2.83 Ω-cm, corresponding to electron concentrations of 1.12?×?10²¹ and 7.85?×?10¹⁷ cm^?3 with carrier mobility of 1.6 and 2.8 cm²/V s. Measured changes on the magnetoresistance behavior of the films at RT were of ?R?~?3% for annealed samples with electron concentration of 1.12?×?10²¹ cm^?3. The X-ray diffraction measurements show that the films are comprised of nanocrystallites with dimensions between 13 and 20 nm in size with preferred (002) orientation. The transmittance of the films in the visible region was of 83% with an optical band gap of ~?3.3 eV for the low-resistivity samples.     

Comparative studies on structural, optoelectronic and electrical properties of SILAR grown PbS thin films from acidic, neutral and alkaline cationic reaction bath

Thin films of Lead sulphide (PbS) were grown on soda lime glass substrate by Successive Ionic Layer Adsorption and Reaction method from acidic, neutral and alkaline cationic precursor reaction bath by keeping the pH of the anionic precursor invariant. The structural and morphological aspects of the as prepared samples were investigated using XRD and SEM results. The as-prepared samples were polycrystalline with nanometer sized grains and identified as galena type cubic structure. The values of average crystallite size were found to be in the range 22–30?nm. The SEM micrographs show variations in morphology. Optical studies revealed the existence of both direct and indirect band gap with values in the range of 1.65–1.98 and 0.61–0.90?eV respectively. The room temperature conductivity of the PbS thin films were in the range 1.19?×?10^?8–5.92?×?10^?8?Ω?cm^?1. The optical band gap energy has inverse relation with grain size and electrical conductivity is closely related to structural parameters like grain size, crystallinity and micro strain. The estimated lattice parameter, grain size, optical band gaps, solid state and electrical properties were correlated with pH of the cationic solution. In this work, we establish that the pH of the cationic precursor media has colossal effect on the structural, morphological, optoelectronic, solid-state and electrical properties of PbS thin films.     

Structural,optical and electrical properties of SnO<Subscript>2</Subscript>:F thin films deposited by spray pyrolysis for application in thin film solar cells

Fluorine doped tin oxide (FTO) thin films with adequate properties to be used as transparent electrical contact for PV solar cells were synthesised using the spray pyrolysis technique, which provides a low cost operation. The deposition temperature and the fluorine doping have been optimized for achieving a minimum resistivity and maximum optical transmittance. No post-deposition annealing treatments were carried out. The X-ray diffraction study showed that all the FTO films were polycrystalline with a tetragonal crystal structure and preferentially oriented along the (200) direction. The grain size ameliorates with the increase in substrate temperature. The samples deposited with the substrate temperature at 440 °C and fluorine content of 20 wt % exhibited the lowest electrical resistivity (1.8 × 10^?4 Ω cm), as measured by four-point probe. Room-temperature Hall measurements revealed that the 20 wt% films are degenerate and exhibit n-type electrical conductivity with carrier concentration of ~4.6 × 10²⁰ cm^?3, sheet resistance of 6.6 Ω/□ and a mobility of ~25 cm² V^?1 s^?1. In addition, the optimized growth conditions resulted in thin films (~500 nm thickness) with average visible transmittance of 89 % and optical band-gap of 3.90 eV. The electrical and optical characteristics of the deposited films revealed their excellent quality as a TCO material.     

Electronic transport and optical properties of nano-structured Pt-doped CdO films: evaluate the effect of treatment in hydrogen gas

Cadmium oxide (CdO) has various applications related to its natural optoelectronic properties as an oxide, which belongs to group of transparent conducting oxides. However, those properties could be controlled to a desired choice by doping method. For developing the application in the field of optoelectronics, the conduction parameters (conductivity, carrier mobility, and carrier concentration) together with the transparency in the NIR should be improved. Therefore, it is important to seek ways to realise those improvements. Doping method is the way that used to attain that aim. In the present work, CdO thin films doped with different amounts of platinum (Pt) ions were deposited on glass and silicon substrates by the method of physical vapour deposition. The deposited films were characterized by X-ray fluorescence, X-ray diffraction, optical absorption spectroscopy, and electrical measurements. A variety of results was obtained in the present work; the optimum improvement in the electrical properties was found with CdO film doped with 0.13 wt% Pt. A combination of low resistivity (1.74?×?10^?4 Ω cm), high carrier concentration (1.02?×?10²¹ cm^?3) and relatively high mobility (35.4 cm²/V s) were obtained under hydrogenation.     

Characterization of aluminum-doped zinc oxide thin films by RF magnetron sputtering at different substrate temperature and sputtering power

In this study, transparent conductive Al doped zinc oxide (ZnO: Al, AZO) thin films with a thickness of 40 nm were prepared on the Corning glass substrate by radio frequency magnetron sputtering. The properties of the AZO thin films are investigated at different substrate temperatures (from 27 to 150 °C) and sputtering power (from 150 to 250 W). The structural, optical and electrical properties of the AZO thin films were investigated. The optical transmittance of about 78 % (at 415 nm)–92.5 % (at 630 nm) in the visible range and the electrical resistivity of 7 × 10^?4 Ω-cm (175.2 Ω/sq) were obtained at sputtering power of 250 W and substrate temperature of 70 °C. The observed property of the AZO thin films is suitable for transparent conductive electrode applications.     

Effect of Ga doping concentrations,substrate temperatures and working pressures on the electrical and optical properties of ZnO thin films

We fabricated Ga-doped ZnO (GZO) thin films on glass substrate by RF magnetron sputtering method with different conditions of Ga₂O₃ concentration, substrate temperature and working pressure. Next we investigated the electrical, optical and structural properties of the GZO thin films. At a substrate temperature of 300 °C, a working pressure of 1 mTorr, and a Ga₂O₃ concentration of 3 wt%, the GZO thin films showed the lowest resistivity of 3.16 × 10^?4 Ω cm, a carrier concentration of 7.64 × 10²⁰ cm^?3 and a Hall mobility of 25.8 cm²/Vs. Moreover, the GZO thin films exhibited the highest (002) orientation under the same conditions and the full width at half maximum of X-ray peak was 0.34°. All GZO thin films showed the optical transmittance of more than 80 % in the visible range regardless of working conditions. The Burstein–Moss effect was observed by the change of doping concentration of Ga₂O₃. The GZO thin films were fabricated to have the good electrical and optical properties through optimizing doping concentration of Ga₂O₃, substrate temperature, working pressure. Therefore, we confirmed the possibility of application of GZO thin film as transparent conductive oxide used in flat panel display and solar cell.     

Effect of aluminum and indium co-doping on zinc oxide films prepared by dc magnetron sputtering

Aluminum and indium co-doped zinc oxide (AIZO) thin films were prepared by direct current (dc) magnetron sputtering on glass substrate in pure argon atmosphere. Three inches of zinc oxide ceramic with 0.5 wt.% of aluminum and indium doping was used as a target in static mode. The influence of sputtering conditions i.e. substrate-target distance, pressure and power on AIZO films was studied. The electrical resistivity and microstructure of thin films were investigated by the four point probe technique and the scanning electron microscope, respectively. The optical transmittance of AIZO films was measured by UV visible spectrophotometer in the wavelength of 300-1100 nm. Depending on the deposited conditions, highly transparent films up to 80% with low resistivities in the range of 2.6-7.9 × 10^− 4 Ω cm were achieved at room temperature. Possible mechanism in the processing which, ultimately, determines the physical properties of AIZO films will be discussed.     

Investigation of dual ion beam sputtered transparent conductive Ga-doped ZnO films

Ga-doped ZnO (GZO) transparent conducting films were deposited on sapphire (0001) substrates using dual ion beam sputtering deposition system. The impact of growth temperature on the structural, morphological, elemental, optical, and electrical properties was thoroughly investigated and reported. X-ray diffraction measurements explicitly confirmed that all GZO films had (002) preferred crystal orientation. The film deposited at 400 °C exhibited the narrowest full-width at half-maximum value of 0.24° for (002) crystalline plane and the lowest room temperature electrical resistivity of 4.11 × 10^?3 Ω cm. The Raman spectra demonstrated the vibrational modes at 576 and 650–670 cm^?1, associated with native oxygen vacancies and elemental Ga doping in ZnO lattice, respectively. All doped films showed an overall transmittance of above 95 % in the visible spectra. A correlation between structural, optical, elemental, and electrical properties with GZO growth temperature was established.     

Preparation of rare earth CeO<Subscript>2</Subscript> thin films using metal organic decomposition method for metal-oxide–semiconductor capacitors

Investigation of metal organic decomposed rare earth cerium oxide thin films deposited on Si substrate by sol–gel spin coating technique was carried out. The structural properties have been examined by using XRD, Fourier transform infrared spectroscopy (FTIR), field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM). The XRD confirms the cubic phase of CeO₂ thin films with (111) plane observed at 28.54°. The FTIR and EDAX spectra confirm the formation of CeO₂ films with atomic percentage of 19.39 and 54.82% of Ce and O₂, respectively. Thickness of 60.11 nm of CeO₂ film measured by cross sectional FESEM image, the average roughness of ~0.6 nm of 400?°C annealed CeO₂ films were observed from AFM micrograph. The MOS capacitors were fabricated by using Ti/Au bilayer metal contact depositing by E-beam evaporator on CeO₂/Si thin film for electrical measurements. Capacitance and conductance voltage measurement was carried out to determine the effective oxide charges (Q_eff), interface trap density (D_it) and dielectric constant (k) and are 2.48?×?10¹² cm^?2, 1.26?×?10¹² eV^?1cm^?2 and ~39, respectively. The effective metal work function of 5.68 for Ti/Au bilayer is observed to be higher than the work function of Ti or Au metals in vacuum.