Microstructural and optoelectronic properties of rf magnetron sputtered ZnO:(Ga,Ti) semiconductor thin films

Applying radio-frequency (rf) magnetron sputtering technique, Ga–Ti co-doped ZnO [ZnO:(Ga,Ti)] transparent conductive oxide films were deposited onto glass substrates. The films were characterized by X-ray diffraction, four-point probe and UV–visible spectrophotometer. The influence of sputtering pressure on microstructure and optoelectronic properties of the films was investigated. The results show that all the films are polycrystalline with a hexagonal wurtzite structure and grow preferentially in the (002) direction. The ZnO:(Ga,Ti) films deposited at sputtering pressure of 0.4 Pa exhibit the maximum grain size of 86.6 nm, the highest transmittance of 85.9 %, the lowest resistivity of 1.67 × 10^?3 Ω cm, and the highest figure of merit of 1.38 × 10^?2 Ω^?1. The optical constants such as refractive index, extinction coefficient, dielectric constant and dissipation factor were determined using the method of whole optical spectrum fitting. Meanwhile, the dispersion behaviour of the films was studied by the single electronic oscillator model. The oscillator parameters and optical energy gaps were achieved. The results demonstrate that the microstructure and optoelectronic properties of the films are closely related to the sputtering pressure.     

Growth of CZTS thin films by sulfurization of sputtered single-layered Cu–Zn–Sn metallic precursors from an alloy target

Cu₂ZnSnS₄ (CZTS) thin films were prepared by sulfurizing single-layered metallic Cu–Zn–Sn precursors which were deposited by DC magnetron sputtering using a Cu–Zn–Sn ternary alloy target. The composition, microstructure and properties of the CZTS thin films prepared under different sputtering pressure and DC power were investigated. The results showed that the sputtering rate of Cu atom increases as the sputtering pressure and DC power increased. The microstructure of CZTS thin films can be optimized by sputtering pressure and DC power. The CZTS thin film prepared under 1 Pa and 30 W showed a pure Kesterite phase and a dense micro-structure. The direct optical band gap of this CZTS thin film was calculated as 1.49 eV with a high optical absorption coefficient over 10⁴ cm^?1. The Hall measurement showed the film is a p-type semiconductor with a resistivity of 1.06 Ω cm, a carrier concentration of 7.904 × 10¹⁷ cm^?3 and a mobility of 7.47 cm² Vs^?1.     

Low indium content In–Zn–O system towards transparent conductive films: structure,properties and comparison with AZO and GZO

In this work, low content indium doped zinc oxide (IZO) thin films were deposited on glass substrates by RF magnetron sputtering using IZO ceramic targets with the In₂O₃ doping content of 2, 6, and 10 wt%, respectively. The influences of In₂O₃ doping content and substrate temperature on the structure and morphology, electrical and optical properties, and environmental stability of IZO thin films were investigated. It was found that the 6 wt% doped IZO thin film deposited at 150?°C exhibited the best crystal quality and the lowest resistivity of 9.87?×?10^?4 Ω cm. The corresponding Hall mobility and carrier densities were 9.20 cm² V^?1 s^?1 and 6.90?×?10²⁰ cm^?3, respectively. Compared with 2 wt% Al₂O₃ doped ZnO and 5 wt% Ga₂O₃ doped ZnO thin films, IZO thin film with the In₂O₃ doping content of 6 wt% featured the lowest surface roughness of 1.3 nm. It also showed the smallest degradation with the sheet resistance increased only about 4.4% at a temperature of 121?°C, a relative humidity of 97% for 30 h. IZO thin film with 6 wt% In₂O₃ doping also showed the smallest deterioration with the sheet resistance increased only about 2.8 times after heating at 500?°C for 30 min in air. The results suggested that low indium content doped ZnO thin films might meet practical requirement in environmental stability needed optoelectronic devices.     

Structural,optical, and electrical properties of ZnTe:Cu thin films by PLD

In this work, ZnTe and ZnTe:Cu films were obtained by pulsed laser deposition using the co-deposition method. ZnTe and Cu₂Te were used as targets and the shots ratio were varied to obtain 0.61, 1.47, 1.72, and 3.46% Cu concentration. Doping of ZnTe films with Cu was performed with the purpose of increasing the p-type carrier concentration and establishing the effect of concentration of Cu on structural, optical, and electrical properties of ZnTe thin films to consider their potential application in electronic devices. According to X-ray diffraction, X-ray photoelectron spectroscopy, UV–visible spectroscopy, and Hall effect results, ZnTe and ZnTe:Cu films correspond to polycrystalline zinc–blende phase with preferential orientation in (111) plane. Optical characterization results indicate that as-deposited films (band gap?=?2.16 eV) exhibit a band gap decrease as function of the increase of Cu concentration (2.09–1.64 eV), while, annealed films exhibit a decrease from 1.75 to 1.46 eV, as the Cu concentration increases. Lastly, Hall effect results show that ZnTe films correspond to a p-type semiconductor with a carrier concentration of 3?×?10¹³ cm^?3 and a resistivity of 1.64?×?10⁵ Ω?cm. ZnTe:Cu films remain like a p-type material and present an increasing carrier concentration (from 3.8?×?10¹⁵ to 1.26?×?10¹⁹ cm^?3) as function of Cu concentration and a decreasing resistivity (from 7.01?×?103 to 2.6?×?10^?1 Ω cm). ZnTe and ZnTe:Cu thin films, with the aforementioned characteristics, can find potential application in electronic devices, such as, solar cells and photodetectors.     

P-type conductivity in doped and codoped ZnO thin films synthesized by RF magnetron sputtering

N-doped and Al–N codoped ZnO thin films with different volume ratios of N₂ reactive gas were deposited on plane glass substrates using the radio frequency magnetron sputtering method. The phase transition temperature and absorption edge of the ZnO powder were studied by differential scanning calorimetry at different heating rates and with Fourier transform infrared spectroscopy, respectively. The target used for the sputtering was synthesized using a palletize machine. It was sintered at 450 °C for 5 h. The X-ray diffraction results confirm that the thin films have wurtzite hexagonal structures with a very small distortion. The results indicate that the ZnO thin films have obviously enhanced transmittance of up to 80% on an average in the visible region. The Al–N codoped ZnO thin films exhibited the best p-type conductivity with a resistivity of 0.825 Ω-cm, a hole concentration of 6.55 × 10¹⁹ cm^?3, and a Hall mobility of 1.25 cm²/Vs. The p-type conductivity was observed after doping and codoping of the ZnO thin film.     

Exciting Dilute Magnetic Semiconductor: Copper-Doped ZnO

The present study is focused on the copper-doped ZnO system. Bulk copper-doped ZnO pellets were synthesized by a solid-state reaction technique and used as target material in pulsed laser deposition. Thin films were grown for different Cu doped pellets on sapphire substrates in vacuum (5×10^?5 mbar). Thin films having (002) plane of ZnO showed different oxidation states of dopants. M–H curves exhibited weak ferromagnetic signal for 1–3 % Cu doping but for 5 % Cu doped thin film sample showed the diamagnetic behavior. For deeper information, thin films were grown for 5 % Cu doped ZnO bulk pellet in different oxygen ambient pressures and analyzed. PL measurement at low temperature showed the emission peak in thin films samples due to acceptor-related transitions. XPS results show that copper exists in Cu²⁺ and Cu⁺¹ valence states in thin films and with increasing O₂ ambient pressure the valence-band maximum in films shifts towards higher binding energy. Furthermore, in lower oxygen ambient pressure (1×10^?2 mbar) thin films showed magnetic behavior but this vanished for the film grown at higher ambient pressures of oxygen (6×10^?2 mbar), which hints towards the decrease in donor defects.     

Growth and characterizations of dual ion beam sputtered CIGS thin films for photovoltaic applications

The growth of CIGS thin films on soda-lime glass substrates at different substrate temperatures by dual ion beam sputtering system in a single-step route from a single quaternary sputtering target with the composition of Cu (In_0.70 Ga_0.30) Se₂ was reported. The effects of the substrate temperature on structural, optical, morphological and electrical properties of CIGS films were investigated. Stoichiometry of one such film was investigated by X-ray photoelectron spectroscopy. All CIGS films had demonstrated a strong (112) orientation located at 2θ ~26.70^o, which indicated the chalcopyrite structure of films. The value of full-width at half-maximum of (112) peak was reduced from 0.58° to 0.19° and crystallite size was enlarged from 14.98 to 43.05 nm as growth temperature was increased from 100 to 400 °C. However, atomic force microscope results showed a smooth and uniform surface at lower growth temperature and the surface roughness was observed to increase with increasing growth temperature. Hall measurements exhibited the minimum film resistivity of 0.09 Ω cm with a hole concentration of 2.42 × 10¹⁸ cm^?3 and mobility of 28.60 cm² V^?1 s^?1 for CIGS film grown at 100 °C. Film absorption coefficient was found to enhance nominally from 1 × 10⁵ to 2.3 × 10⁵ cm^?1 with increasing growth temperature from 100 to 400 °C.     

Structural and optical properties of sulfurized Cu2ZnSnS4 thin films from Cu–Zn–Sn alloy precursors

This study reports the preparation of Cu₂ZnSnS₄ (CZTS) thin films by magnetron sputtering deposition with a Cu–Zn–Sn ternary alloy target and sequential sulfurization. The effects of substrate temperatures on the structural, morphological, compositional as well as optical and electrical properties were characterized. The results showed the CZTS thin films prepared by sulfurization at substrate temperature of 570 °C yielded secondary phases along with CZTS compound. The relatively good properties of CZTS thin film were obtained after sulfurization at substrate temperature of 550 °C. This CZTS film showed compact structure with large grain size of 900 nm, direct optical band gap of 1.47 eV, optical absorption coefficient over 10⁴ cm^?1, resistivity of 4.05 Ω cm, carrier concentration of 8.22 × 10¹⁸ cm^?3, and mobility of 43.38 cm² V^?1 S^?1.     

Effect of stacking type in precursors on composition, morphology and electrical properties of the CIGS films

The copper-indium-gallium (CIG) metallic precursors with different stacking type (A: CuGa/CuIn/CuGa/glass and B: CuInGa/CuIn/CuInGa/glass) were prepared onto glass substrates by magnetron sputtering method. In order to prepare Cu(In_1?xGa_x)Se₂ (CIGS) thin films, the CIG precursors were then selenized with solid Se powder using a three-step reaction temperature profile. The influence of stacking type in precursors on structure, composition, morphology and electrical properties of the CIGS films is investigated by X-ray diffraction, energy dispersive spectrometer, scanning electron microscope and Hall effect measurement. The results reveal that the stacking type of the precursor has a strong influence on composition, morphology and properties of the CIGS thin films. The atomic ratios of Cu/(In+Ga)/Se of the CIGS films A and B are 1.61:1:2.11 and 1.39:1:2.04, respectively. The better quality CIGS thin films can be obtained through selenization of metallic precursor of CuInGa/CuIn/CuInGa/glass. The CIGS films are p-type semiconductor material. The hole concentration, resistivity and hole mobility of the CIGS thin films is 2.51 × 10¹⁷ cm^?3, 3.11 × 10⁴ Ω cm and 19.8 cm² V^?1 s^?1, respectively.     

Effect of growth temperature on structural, electrical and optical properties of dual ion beam sputtered ZnO thin films

ZnO epitaxial thin films were grown on p-type Si(100) substrates by dual ion beam sputtering deposition system. The crystalline quality, surface morphology, optical and electrical properties of as-deposited ZnO thin films at different growth temperatures were studied. Substrate temperature was varied from 100 to 600 °C at constant oxygen percentage O₂/(O₂ + Ar) % of 66.67 % in a mixed gas of Ar and O₂ with constant chamber pressure of 2.75 × 10^?4 mBar. X-Ray diffraction analyses revealed that all the films had (002) preferred orientation. The minimum value of stress was reported to be ?0.32 × 10¹⁰ dyne/cm² from ZnO film grown at 200 °C. Photoluminescence measurements demonstrated sharp near-band-edge emission (NBE) was observed at ~375 nm along with deep level emission (DLE) in the visible spectral range at room temperature. The DLE Peak was found to have decrement as ZnO growth temperature was increased from 200 to 600 °C. The minimum FWHM of the NBE peak of 16.76 nm was achieved at 600 °C growth temperature. X-Ray photoelectron spectroscopy study revealed presence of oxygen interstitials and vacancies point defects in ZnO film grown at 400 °C. The ZnO thin film was found to be highly resistive when grown at 100 °C. The ZnO films were found to be n-type conducting with decreasing resistivity on increasing substrate temperature from 200 to 500 °C and again increased for film grown at 600 °C. Based on these studies a correlation between native point defects, optical and electrical properties has been established.     

Effect of film thickness on properties of aluminum doped zinc oxide thin films deposition on polymer substrate

A series of aluminum doped zinc oxide thin films with different thickness (25–150 nm) were deposited on indium tin oxide coated polyethylene terephthalate substrates by radio frequency magnetron sputtering method at room temperature. The structural, optical and electrical properties of the films were investigated by X-ray Diffractometer, UV–Vis spectrometer and Hall Effect Measurement System. All the obtained films were polycrystalline with a hexagonal structure and a preferred orientation along [002] direction with the c-axis perpendicular to the substrate surface. The optical energy band gap (E_g) values of the films were found to be in the range from 3.36 to 3.26 eV, and their average optical transmissions were about 75 % in the visible region. The films had excellent electrical properties with the resistivities in the range from 2.78 × 10^?5 to 2.03 × 10^?4 Ω cm, carrier densities more than 3.35 × 10²¹ cm^?3 and Hall mobilities between 5.77 and 11.13 cm²/V s.     

Carrier properties of B atomic-layer-doped Si films grown by ECR Ar plasma-enhanced CVD without substrate heating

Abstract

The atomic-layer (AL) doping technique in epitaxy has attracted attention as a low-resistive ultrathin semiconductor film as well as a two-dimensional (2-D) carrier transport system. In this paper, we report carrier properties for B AL-doped Si films with suppressed thermal diffusion. B AL-doped Si films were formed on Si(100) by B AL formation followed by Si cap layer deposition in low-energy Ar plasma-enhanced chemical-vapor deposition without substrate heating. After fabrication of Hall-effect devices with the B AL-doped Si films on unstrained and 0.8%-tensile-strained Si(100)-on-insulator substrates (maximum process temperature 350°C), carrier properties were electrically measured at room temperature. Typically for the initial B amount of 2?×?10¹⁴ cm^?2 and 7?×?10¹⁴ cm^?2, B concentration depth profiles showed a clear decay slope as steep as 1.3 nm/decade. Dominant carrier was a hole and the maximum sheet carrier densities as high as 4?×?10¹³ cm^?2 and 2?×?10¹³ cm^?2 (electrical activity ratio of about 7% and 3.5%) were measured respectively for the unstrained and 0.8%-tensile-strained Si with Hall mobility around 10–13 cm² V^?1 s^?1. Moreover, mobility degradation was not observed even when sheet carrier density was increased by heat treatment at 500–700 °C. There is a possibility that the local carrier (ionized B atom) concentration around the B AL in Si reaches around 10²¹ cm^?3 and 2-D impurity-band formation with strong Coulomb interaction is expected. The behavior of carrier properties for heat treatment at 500–700 °C implies that thermal diffusion causes broadening of the B AL in Si and decrease of local B concentration.     

Preparation and photoelectric properties of Ti doped ZnO thin films annealed in vacuum

In the present paper, Ti doped ZnO films with higher conductive properties were grown on room temperature glass substrates by radio frequency magnetron sputtering and followed by annealing in vacuum. The microstructures and surface figures of the films were investigated by X-ray diffraction and scanning electronic microscopy, and its optical and electrical properties were measured using a four-point probe technique and 756-type spectrophotometer at room temperature. The results show that the preferred growth orientation of the films is (002) orientation, and after annealing in vacuum at 400 °C for 3 h, the average transmittance reduces from 90 to 80%, and resistivity reduces from 4.53 × 10^?2 to 8.78 × 10^?4 Ω cm.     

Characterization of aluminum-doped zinc oxide thin films by RF magnetron sputtering at different substrate temperature and sputtering power

In this study, transparent conductive Al doped zinc oxide (ZnO: Al, AZO) thin films with a thickness of 40 nm were prepared on the Corning glass substrate by radio frequency magnetron sputtering. The properties of the AZO thin films are investigated at different substrate temperatures (from 27 to 150 °C) and sputtering power (from 150 to 250 W). The structural, optical and electrical properties of the AZO thin films were investigated. The optical transmittance of about 78 % (at 415 nm)–92.5 % (at 630 nm) in the visible range and the electrical resistivity of 7 × 10^?4 Ω-cm (175.2 Ω/sq) were obtained at sputtering power of 250 W and substrate temperature of 70 °C. The observed property of the AZO thin films is suitable for transparent conductive electrode applications.     

Ion implantation effects of negative oxygen on copper nanowires

Copper nanowires of diameter 80 nm were synthesized in polycarbonate membrane using template technique. Samples were then implanted with 160 keV O^?1 ion beam with varying particle fluence of 1?×?10¹², 5?×?10¹² and 1?×?10¹³ ions/cm². The SRIM (Stopping and range of ions in matter) software was used to study the processes involved. Compositional analysis confirms implantation of oxygen ions and the stoichiometry of Cu:O was found to be 6:1 by weight % when implanted at 1?×?10¹³ ions/cm². Scanning electron microscopy reveals no changes in morphology of nanowires on implantation. X-ray diffraction analysis showed no shifting in the ‘2θ’ position of diffraction peaks however some new diffraction peaks of oxygen were seen. Implantation with oxygen ion led to the increased crystallite size and reduced strain. The conductivity of the nanowires was found to increase linearly with the ion fluence presenting constructive effect of negative ion implantation on copper nanowires.     

Study of optoelectronics and microstructures on the AZO/nano-layer metals/AZO sandwich structures

In this study, growth nano-layer metals (Al, Cu, Ag) and Al-doped ZnO (AZO) thin films are deposited on glass substrates as the transparent conducting oxides (TCOs) to form AZO/nano-layer metals/AZO sandwich structures. The conductivity properties of thin films are enhanced when the average transmittance over the wavelengths 400–800 nm is maintained at higher than 80 %. A radio frequency magnetron sputtering system is used to deposit the metal layers and AZO thin films of different thickness, to form AZO/Al/AZO (ALA), AZO/Cu/AZO (ACA) and AZO/Ag/AZO (AGA) structures. X-ray diffraction and field emission scanning electron microscopy are used to analyze the crystal orientation and structural characteristic. The optical transmission and resistivity are measured by UV–VIS–NIR spectroscopy and Hall effect measurement system, respectively. The results show that when the Ag thickness is maintained at approximately 9 nm, the TCOs thin film has the lowest resistivity of 8.9 × 10^?5 Ω-cm and the highest average transmittance of 81 % over the wavelengths 400–800 nm. The crystalline Ag nano-crystal structures are observed by high-resolution transmission electron microscopy. In addition, the best figure of merit for the AZO/Ag/AZO tri-layer film is 2.7 × 10^?2 (Ω^?1), which is much larger than that for other structures.     

Structural, electrical and optical properties of Si doped ZnO films grown by atomic layer deposition

Si doped ZnO (SZO) films with various Si concentrations were deposited by atomic layer deposition at 300 °C using triethyzinc, tris(dimethylamino)silane and H₂O₂ as the precursors. The influences of Si doping concentration on structural, electrical and optical properties of ZnO films have been investigated. All the films exhibited a highly preferential c-axis orientation. A minimum resistivity of 9.2 × 10^?4 Ω cm, with a carrier concentration of 4.3 × 10²⁰ cm^?3 and a Hall mobility of 15.8 cm²/Vs, was obtained for SZO film prepared with the Si concentration of 2.1 at%. The increase of conductivity with Si doping was attributed to the presence of Si in +3 valence state acting as donor in ZnO and the increases of oxygen vacancies with Si concentration as proven by XPS measurements. The optical bandgap of SZO films initially increased from 3.25 to 3.55 eV with increasing of Si concentration to 2.1 at%, then decreased with further increase of Si concentration. The blue shift of band gap of SZO films with increasing carrier concentration can be explained by the Burstein-Moss (B-M) effects.     

Effect of different solvents on the key structural,optical and electronic properties of sol–gel dip coated AZO nanostructured thin films for optoelectronic applications

Transparent conducting aluminum (i.e. 2 at.%) doped zinc oxide (AZO) thin films were prepared on glass substrates by sol–gel dip coating technique using different solvents. This inexpensive dip coating method involves dipping of substrate consecutively in zinc solution and tube furnace for required cycles. Prepared films were investigated by XRD, SEM, PL, Raman spectroscopy optical and electrical studies. From the XRD studies, it confirmed the incorporation of aluminum in ZnO lattice. The prepared samples are polycrystalline nature, and these films reveal hexagonal wurtzite arrangement with (002) direction. The structural parameters such as crystallite size, dislocation density, micro strain, texture coefficient and lattice constant were investigated. SEM study showed well defined smooth and uniformed ganglia shaped grains are regularly distributed on to the entire glass substrate without any pinholes and cracks, and the average grain size is 75 nm. From the optical studies, the observed highest transmittance is 93% in the visible range and the band gap (E_g) is 3.26 eV. Room temperature PL spectra exhibited strong UV emission peak located at 386 nm for all the films. The electrical properties of the AZO thin films were studied by Hall-Effect measurements and found as n-type conductivity with high carrier concentrations (n), 2.76?×?10¹⁹ cm^??3 and low resistivity (ρ), 7.56?×?10^??3 Ω cm for the film deposed using methanol as solvent.     

Structural,optical and electrical properties of PbS and PbSe quantum dot thin films

PbS and PbSe were prepared by hot injection method. The powders were used for preparing the corresponding films by using thermal evaporation technique. The structural, optical and electrical properties of PbS and PbSe thin films were investigated. The structural properties of PbS and PbSe were investigated by X-ray diffraction, transmission electron microscopy and energy dispersive X-ray techniques (EDX). PbS and PbSe films were found to have cubic rock salt structure. The particles size ranged from 1.32 to 2.26 nm for PbS and 1.28–2.48 nm for PbSe. EDX results showed that PbS films have rich sulphur content, while PbSe films have rich lead content. The optical constants (absorption coefficient and the refractive index) of the films were determined in the wavelength range 200–2500 nm. The optical energy band gap of PbS and PbSe films was determined as 3.25 and 2.20 eV, respectively. The refractive index, the optical dielectric constant and the ratio of charge carriers concentration to its effective mass were determined. The electrical resistivity, charge carriers concentration and carriers mobility of PbS at room temperature were determined as 0.55 Ω cm, 1.7 × 10¹⁶ cm^?3 and 656 cm² V^?1 s^?1, respectively, and for PbSe films they were determined as 0.4 Ω cm, 9 × 10¹⁵ cm^?3 and 1735 cm² V^?1 s^?1, respectively. These electrical parameters were investigated as a function of temperature.     

Effect of annealing time on the structural,optical and electrical characteristics of DC sputtered ITO thin films

Using an Indium tin oxide (ITO) ceramic target (In₂O₃:SnO₂, 90:10 wt%), ITO thin films were deposited by conventional direct current magnetron sputtering technique onto glass substrates at room temperature. The obtained ITO films were annealed at 400 °C for different annealing times (1, 2, 5, 7, and 9 h). The effect of annealing time on their structural, optical and electrical properties was investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microcopy (AFM), ultra violet–visible (UV–Vis) spectrometer, and temperature dependence Hall measurements. XRD data of obtained ITO films reveal that the films were polycrystalline with cubic structure and exhibit (222), (400) and (440) crystallographic planes of In₂O₃. AFM and Scanning Electron Microscopy SEM have been used to probe the surface roughness and the morphology of the films. The refractive index (n), thickness and porosity (%) of the films were evaluated from transmittance spectra obtained in the range 350–700 nm by UV–Vis. The optical band gap of ITO film was found to be varying from 3.35 to 3.47 eV with the annealing time. The annealing time dependence of resistivity, carrier concentration, carrier mobility, sheet resistance, and figure of merit values of the films at room temperature were discussed. The carrier concentration of the films increased from 1.21 × 10²⁰ to 1.90 × 10²⁰ cm^?3, the Hall mobility increased from 11.38 to 18 cm² V^?1 s^?1 and electrical resistivity decreased from 3.97 × 10^?3 to 2.13 × 10^?3 Ω cm with the increase of annealing time from 1 to 9 h. Additionally, the temperature dependence of the carrier concentration, and carrier mobility for the as-deposited and 400 °C annealed ITO films for 2 and 9 h were analysed in the temperature range of 80–350 K.