Preparation of rare earth CeO<Subscript>2</Subscript> thin films using metal organic decomposition method for metal-oxide–semiconductor capacitors

Investigation of metal organic decomposed rare earth cerium oxide thin films deposited on Si substrate by sol–gel spin coating technique was carried out. The structural properties have been examined by using XRD, Fourier transform infrared spectroscopy (FTIR), field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM). The XRD confirms the cubic phase of CeO₂ thin films with (111) plane observed at 28.54°. The FTIR and EDAX spectra confirm the formation of CeO₂ films with atomic percentage of 19.39 and 54.82% of Ce and O₂, respectively. Thickness of 60.11 nm of CeO₂ film measured by cross sectional FESEM image, the average roughness of ~0.6 nm of 400?°C annealed CeO₂ films were observed from AFM micrograph. The MOS capacitors were fabricated by using Ti/Au bilayer metal contact depositing by E-beam evaporator on CeO₂/Si thin film for electrical measurements. Capacitance and conductance voltage measurement was carried out to determine the effective oxide charges (Q_eff), interface trap density (D_it) and dielectric constant (k) and are 2.48?×?10¹² cm^?2, 1.26?×?10¹² eV^?1cm^?2 and ~39, respectively. The effective metal work function of 5.68 for Ti/Au bilayer is observed to be higher than the work function of Ti or Au metals in vacuum.     

Structural,optical, and electrical properties of ZnTe:Cu thin films by PLD

In this work, ZnTe and ZnTe:Cu films were obtained by pulsed laser deposition using the co-deposition method. ZnTe and Cu₂Te were used as targets and the shots ratio were varied to obtain 0.61, 1.47, 1.72, and 3.46% Cu concentration. Doping of ZnTe films with Cu was performed with the purpose of increasing the p-type carrier concentration and establishing the effect of concentration of Cu on structural, optical, and electrical properties of ZnTe thin films to consider their potential application in electronic devices. According to X-ray diffraction, X-ray photoelectron spectroscopy, UV–visible spectroscopy, and Hall effect results, ZnTe and ZnTe:Cu films correspond to polycrystalline zinc–blende phase with preferential orientation in (111) plane. Optical characterization results indicate that as-deposited films (band gap?=?2.16 eV) exhibit a band gap decrease as function of the increase of Cu concentration (2.09–1.64 eV), while, annealed films exhibit a decrease from 1.75 to 1.46 eV, as the Cu concentration increases. Lastly, Hall effect results show that ZnTe films correspond to a p-type semiconductor with a carrier concentration of 3?×?10¹³ cm^?3 and a resistivity of 1.64?×?10⁵ Ω?cm. ZnTe:Cu films remain like a p-type material and present an increasing carrier concentration (from 3.8?×?10¹⁵ to 1.26?×?10¹⁹ cm^?3) as function of Cu concentration and a decreasing resistivity (from 7.01?×?103 to 2.6?×?10^?1 Ω cm). ZnTe and ZnTe:Cu thin films, with the aforementioned characteristics, can find potential application in electronic devices, such as, solar cells and photodetectors.     

Quality enhancement of AZO thin films at various thicknesses by introducing ITO buffer layer

Due to the simultaneously superior optical transmittance and low electrical resistivity, transparent conductive electrodes play a significant role in semiconductor electronics. To enhance the electrical properties of these films, one approach is thickness increment which degrades the optical properties. However, a preferred way to optimize both electrical and optical properties of these layers is to introduce a buffer layer. In this work, the effects of buffer layer and film thickness on the structural, electrical, optical and morphological properties of AZO thin films are investigated. Al-doped zinc oxide (AZO) is prepared at various thicknesses of 100 to 300 nm on the bare and 100 nm-thick indium tin oxide (ITO) coated glass substrates by radio frequency sputtering. Results demonstrate that by introducing ITO as a buffer layer, the average values of sheet resistance and strain within the film are decreased (about 76 and 3.3 times lower than films deposited on bare glasses), respectively. Furthermore, the average transmittance of ITO/AZO bilayer is improved nearly 10% regarding single AZO thin film. This indicates that bilayer thin films show better physical properties rather than conventional monolayer thin films. As the AZO film thickness increases, the interplanar spacing, d₍₀₀₂₎, strain within the film and compressive stress of the film in the hexagonal lattice, decreases indicating the higher yield of AZO crystal. Moreover, with the growth in film thickness, carrier concentration and optical band gap (E_g) of AZO film are increased from 4.62?×?10¹⁹ to 8.21?×?10¹⁹ cm^?3 and from 3.55 to 3.62 eV, respectively due to the Burstein-Moss (BM) effect. The refractive index of AZO thin film is obtained in the range of 2.24–2.26. With the presence of ITO buffer layer, the AZO thin film exhibits a resistivity as low as 6?×?10^?4 Ω cm, a sheet resistance of 15 Ω/sq and a high figure of merit (FOM) of 1.19?×?10⁴ (Ω cm)^?1 at a film thickness of 300 nm. As a result, the quality of AZO thin films deposited on ITO buffer layer is found to be superior regarding those grown on a bare glass substrate. This study has been performed over these two substrates because of their significant usage in the organic light emitting diodes and photovoltaic applications as an enhanced carrier injecting electrodes.     

Effect of stacking type in precursors on composition, morphology and electrical properties of the CIGS films

The copper-indium-gallium (CIG) metallic precursors with different stacking type (A: CuGa/CuIn/CuGa/glass and B: CuInGa/CuIn/CuInGa/glass) were prepared onto glass substrates by magnetron sputtering method. In order to prepare Cu(In_1?xGa_x)Se₂ (CIGS) thin films, the CIG precursors were then selenized with solid Se powder using a three-step reaction temperature profile. The influence of stacking type in precursors on structure, composition, morphology and electrical properties of the CIGS films is investigated by X-ray diffraction, energy dispersive spectrometer, scanning electron microscope and Hall effect measurement. The results reveal that the stacking type of the precursor has a strong influence on composition, morphology and properties of the CIGS thin films. The atomic ratios of Cu/(In+Ga)/Se of the CIGS films A and B are 1.61:1:2.11 and 1.39:1:2.04, respectively. The better quality CIGS thin films can be obtained through selenization of metallic precursor of CuInGa/CuIn/CuInGa/glass. The CIGS films are p-type semiconductor material. The hole concentration, resistivity and hole mobility of the CIGS thin films is 2.51 × 10¹⁷ cm^?3, 3.11 × 10⁴ Ω cm and 19.8 cm² V^?1 s^?1, respectively.     

Low indium content In–Zn–O system towards transparent conductive films: structure,properties and comparison with AZO and GZO

In this work, low content indium doped zinc oxide (IZO) thin films were deposited on glass substrates by RF magnetron sputtering using IZO ceramic targets with the In₂O₃ doping content of 2, 6, and 10 wt%, respectively. The influences of In₂O₃ doping content and substrate temperature on the structure and morphology, electrical and optical properties, and environmental stability of IZO thin films were investigated. It was found that the 6 wt% doped IZO thin film deposited at 150?°C exhibited the best crystal quality and the lowest resistivity of 9.87?×?10^?4 Ω cm. The corresponding Hall mobility and carrier densities were 9.20 cm² V^?1 s^?1 and 6.90?×?10²⁰ cm^?3, respectively. Compared with 2 wt% Al₂O₃ doped ZnO and 5 wt% Ga₂O₃ doped ZnO thin films, IZO thin film with the In₂O₃ doping content of 6 wt% featured the lowest surface roughness of 1.3 nm. It also showed the smallest degradation with the sheet resistance increased only about 4.4% at a temperature of 121?°C, a relative humidity of 97% for 30 h. IZO thin film with 6 wt% In₂O₃ doping also showed the smallest deterioration with the sheet resistance increased only about 2.8 times after heating at 500?°C for 30 min in air. The results suggested that low indium content doped ZnO thin films might meet practical requirement in environmental stability needed optoelectronic devices.     

Effect of annealing time on the structural,optical and electrical characteristics of DC sputtered ITO thin films

Using an Indium tin oxide (ITO) ceramic target (In₂O₃:SnO₂, 90:10 wt%), ITO thin films were deposited by conventional direct current magnetron sputtering technique onto glass substrates at room temperature. The obtained ITO films were annealed at 400 °C for different annealing times (1, 2, 5, 7, and 9 h). The effect of annealing time on their structural, optical and electrical properties was investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microcopy (AFM), ultra violet–visible (UV–Vis) spectrometer, and temperature dependence Hall measurements. XRD data of obtained ITO films reveal that the films were polycrystalline with cubic structure and exhibit (222), (400) and (440) crystallographic planes of In₂O₃. AFM and Scanning Electron Microscopy SEM have been used to probe the surface roughness and the morphology of the films. The refractive index (n), thickness and porosity (%) of the films were evaluated from transmittance spectra obtained in the range 350–700 nm by UV–Vis. The optical band gap of ITO film was found to be varying from 3.35 to 3.47 eV with the annealing time. The annealing time dependence of resistivity, carrier concentration, carrier mobility, sheet resistance, and figure of merit values of the films at room temperature were discussed. The carrier concentration of the films increased from 1.21 × 10²⁰ to 1.90 × 10²⁰ cm^?3, the Hall mobility increased from 11.38 to 18 cm² V^?1 s^?1 and electrical resistivity decreased from 3.97 × 10^?3 to 2.13 × 10^?3 Ω cm with the increase of annealing time from 1 to 9 h. Additionally, the temperature dependence of the carrier concentration, and carrier mobility for the as-deposited and 400 °C annealed ITO films for 2 and 9 h were analysed in the temperature range of 80–350 K.     

Structure transition and multiferroic properties of Mn-doped BiFeO3 thin films

Pure BiFeO₃ (BFO) and Mn-doped BiFe_1?yMn_yO₃ thin films were prepared on FTO/glass (SnO₂: F) substrates by using a sol–gel method. The effects of Mn-doping on the structure and electric properties of the BFO thin films were studied. The X-ray diffraction (XRD) analysis reveals a structure transition in the Mn-doped BiFe_0.96Mn_0.04O₃ (BFMO) thin film. The Rietveld refined XRD patterns conform the trigonal (R3c: H) and tetragonal (P422) symmetry for the BFO and BFMO thin films, respectively. The structure transition and the mixed valences of Mn ions substantially improve the electric properties of the BFMO thin film. The remnant polarization (P _r) of the BFMO thin film was 105.86 μC/cm² at 1 kHz in the applied electric field of 865 kV/cm. At an applied electric field of 150 kV/cm, the leakage current density of BFMO thin film is 1.42 × 10^?5 A/cm². It is about two orders of magnitude lower than that of the pure BFO thin film (1.25 × 10^?3 A/cm²). And the enhanced saturated magnetization of the BFMO thin film is 4.45 emu/cm³.     

Effects of growth temperature on electrical and structural properties of sputtered GaN films with a cermet target

GaN films have been deposited at 100–400 °C substrate temperature on Si (100) and sapphire (0001) substrates by RF reactive sputtering in an (Ar + N₂) atmosphere. A (Ga + GaN) cermet target for sputtering was made by hot pressing the mixed powders of metallic Ga and ceramic GaN. The effects of substrate temperature on the GaN formation and its properties were investigated. The diffraction results showed that GaN films with a preferential (10–10) growth plane had a wurtzite crystalline structure. GaN films became smoother at higher substrate temperature. The Hall effect measurements showed the electron concentration and mobility were 1.04 × 10¹⁸ cm^?3 and 7.1 cm² V^?1 s^?1, respectively, for GaN deposited at 400 °C. GaN films were tested for its thermal stability at 900 °C in the N₂ atmosphere. Electrical properties slightly degraded after annealing. The smaller bandgap of ~3.0 eV is explained in terms of intrinsic defects and lattice distortion.     

Structure transition and enhanced ferroelectric properties of (Mn, Cr) co-doped BiFeO3 thin films

Pure BiFeO₃ (BFO) and (Mn, Cr) co-doped BiFe_0.96?yMn_0.04Cr_yO₃ thin films were prepared on FTO/glass (SnO₂:F) substrates by using a sol–gel method. The effects of (Mn, Cr) co-doped on the microstructure and electric properties of the BiFeO₃ thin films were studied. The result indicates that the co-doped BiFe_0.94Mn_0.04Cr_0.02O₃ (BFMCO) thin film has a structure transition and better ferroelectric properties compared with the pure BFO thin film. The Rietveld refined XRD patterns of BFO and BFMCO thin films conform the trigonal (R3c:H) and the biphasic (R3c:H + R3m:R) structure, respectively. The co-existence of two phases and the mixed valences of Cr^3+/6+ and Mn^2+/3+, which apparently improves the electric properties of the (Mn, Cr) co-doped BFMCO thin films. The remnant polarization (P _r) of the BFMCO thin film was 93.58 μC/cm² at 1 kHz in the applied electric field of 636 kV/cm. At an applied electric field of 100 kV/cm, the leakage current density of (Mn, Cr) co-doped BFMCO thin film is 6.2 × 10^?6 A/cm². It is about three orders much lower than that of the BFO thin film (1.43 × 10^?3 A/cm²).     

Surface hardening in N<Superscript>+</Superscript> implanted polycarbonate

The influence of low energy nitrogen ions on the surface hardness of polycarbonate has been studied by implanting some of these specimens with 100 keV N⁺ ions at a beam current of 1 μA/cm² in the dose range of 1 × 10¹⁵ to 1 × 10¹⁷ ions cm^?2. Knoop microhardness has been found to be increased nearly 24 times at a load of 9.8 mN, for the dose of 1 × 10¹⁷ ions cm^?2. The structural changes occurred in implanted specimens were studied by Raman analysis, UV–Visible spectroscopy, and X-ray diffraction techniques. Raman studies point toward the formation of a structure resembling hydrogenated amorphous carbon. Disordering in the surface structure (I _D/I _G ratio) has also been found to increase with ion fluence using Raman technique. UV–Visible spectroscopic analysis shows a clear enhancement in Urbach energy (disorder parameter) from a value of 0.61 eV (virgin sample) to 1.72 eV (at a fluence of 1 × 10¹⁷ N⁺ cm^?2) with increasing ion dose. The increase in Urbach energy has been found to be correlated linearly with the increase in Knoop microhardness number. Results of X-ray diffraction analysis also indicate disordering in implanted layers as a result of implantation. In the present work, the possible mechanism behind the formation of harder surfaces due to implantation has been discussed in detail.     

Bi2MoO6 dielectric thin films fabricated by thermal oxidation of Bi/Mo thin films at ultra-low temperature

Bi/Mo multilayer thin films are deposited on Si/SiO₂/Pt substrates by direct current magnetron sputtering. The effect of annealing temperature on the microstructure, dielectric and electrical properties of the as-sputtered films is characterized systematically. X-ray diffraction data indicate that the films annealed at 450–600 °C are a mixture of diphase with the main phase Bi₂MoO₆ and secondary phase Bi₂Mo₂O₉. Results of scanning electron microscope observation show that the films annealed at 500–550 °C are dense and uniform, in particular the films annealed at 500 °C exhibit optimal dielectric and electrical properties with dielectric constant as high as 37.5, dielectric loss 1.06 %, temperature coefficient of dielectric constant ?10.86 ppm °C^?1 at 1 kHz, and leakage current density of 1.46 × 10^?7 A mm^?2 at an electric field of 18.2 kV mm^?1. With the advantages of ultralow densification temperature (500 °C) and very high sputtering deposition rate (76 nm min^?1), it is anticipated that thermal oxidation method of the sputtered Bi/Mo thin films could be a promising technique for fabrication of Bi₂MoO₆ ceramic thin film embedded-capacitors.     

The synthesis and characterization of Cu<Subscript>2</Subscript>ZnSnS<Subscript>4</Subscript> thin films from melt reactions using xanthate precursors

Kesterite, Cu₂ZnSnS₄ (CZTS), is a promising absorber layer for use in photovoltaic cells. We report the use of copper, zinc and tin xanthates in melt reactions to produce Cu₂ZnSnS₄ (CZTS) thin films. The phase of the as-produced CZTS is dependent on decomposition temperature. X-ray diffraction patterns and Raman spectra show that films annealed between 375 and 475 °C are tetragonal, while at temperatures <375 °C hexagonal material was obtained. The electrical parameters of the CZTS films have also been determined. The conduction of all films was p-type, while the other parameters differ for the hexagonal and tetragonal materials: resistivity (27.1 vs 1.23 Ω cm), carrier concentration (2.65 × 10⁺¹⁵ vs 4.55 × 10⁺¹⁷ cm^?3) and mobility (87.1 vs 11.1 cm² V^?1 s^?1). The Hall coefficients were 2.36 × 10³ versus 13.7 cm³ C^?1.     

Effect of very low to high Sb-doping on the structural,electrical, photo-conductive and thermoelectric properties of fluorine-doped SnO<Subscript>2</Subscript> (FTO) thin films prepared by spray pyrolysis technique

Transparent conducting fluorine and Sb-doped [SnO₂: (F, Sb)] thin films have been deposited onto preheated glass substrates using the spray pyrolysis technique by the various dopant quantity of spray solution. The effect of antimony impurities on the structural, morphological, electrical, Thermo-electrical, optical and photoconductive properties of films has been investigated. The [F/Sn] atomic concentration ratio (x) in the spray solution is kept at value of 0.7 and the [Sb/Sn] atomic ratio (y) varied at values of 0, 0.0005, 0.001, 0.002, 0.01, 0.03, 0.05, 0.07 and 0.10. It is found that the films are polycrystalline in nature with a tetragonal crystal structure corresponding to SnO₂ phase having orientation along the (110) and (200) planes. SEM images indicated that nanostructure of the films has a particle type growth. The average grain size increases with increasing spraying quantity of Sb-dopant. The compositional analysis of SnO₂: (F, Sb) thin films were studied using EDAX. SEM and AFM study reveals the surface of SnO₂: (F, Sb) to be made of nanocrystalline particles. The Hall Effect measurements have shown n-type conductivity in all deposited films. The lowest sheet resistance and highest the carrier concentration about 7.7 Ω/□ and 6.6 × 10²², respectively, were obtained for the film deposited with y = [Sb/Sn] = 0.001 and x = [F/Sn] = 0.7. The maximum of the Seebeck coefficient equal to 12.8 μV K^?1 was obtained at 400 K for the film deposited with y = [Sb/Sn] = 0.10. The average transmittance of films varied over the range 10–80 % with change of Sb-concentration. The band gap values of samples were obtained in the range of 3.19–3.8 eV. From the photoconductive studies, the Sb-doped films exhibited sensitivity to incident light especially in y = 0.001. The electrical resistivity and carrier concentration vary in range 5.44 × 10^?4 to 1.02 × 10^?2Ω cm and 2.6 × 10²²–6.6 × 10²² cm^?3, respectively.     

Exciting Dilute Magnetic Semiconductor: Copper-Doped ZnO

The present study is focused on the copper-doped ZnO system. Bulk copper-doped ZnO pellets were synthesized by a solid-state reaction technique and used as target material in pulsed laser deposition. Thin films were grown for different Cu doped pellets on sapphire substrates in vacuum (5×10^?5 mbar). Thin films having (002) plane of ZnO showed different oxidation states of dopants. M–H curves exhibited weak ferromagnetic signal for 1–3 % Cu doping but for 5 % Cu doped thin film sample showed the diamagnetic behavior. For deeper information, thin films were grown for 5 % Cu doped ZnO bulk pellet in different oxygen ambient pressures and analyzed. PL measurement at low temperature showed the emission peak in thin films samples due to acceptor-related transitions. XPS results show that copper exists in Cu²⁺ and Cu⁺¹ valence states in thin films and with increasing O₂ ambient pressure the valence-band maximum in films shifts towards higher binding energy. Furthermore, in lower oxygen ambient pressure (1×10^?2 mbar) thin films showed magnetic behavior but this vanished for the film grown at higher ambient pressures of oxygen (6×10^?2 mbar), which hints towards the decrease in donor defects.     

The variation of the features of SnO2 and SnO2:F thin films as a function of V dopant

V doped SnO₂ and SnO₂:F thin films were successfully deposited on glass substrates at 500 °C with spray pyrolysis. It was observed that all films had SnO₂ tetragonal rutile structure and the preferential orientation depended on spray solution chemistry (doping element and solvent type) by X-ray diffraction measurements. The lowest sheet resistance and the highest optical band gap, figure of merit, infrared (IR) reflectivity values of V doped SnO₂ for ethanol and propane-2-ol solvents and V doped SnO₂:F films were found to be 88.62 Ω–3.947 eV–1.02 × 10^?4 Ω^?1–65.49 %, 65.35 Ω–3.955 eV–8.54 × 10^?4 Ω^?1–72.58 %, 5.15 Ω–4.076 eV–6.15 × 10^?2 Ω^?1–97.32 %, respectively, with the electrical and optical measurements. Morphological properties of the films were investigated by atomic force microscope and scanning electron microscope measurements. From these analysis, the films consisted of nanoparticles and the film morphology depended on doping ratio/type and solvent type. It was observed pyramidal, polyhedron, needle-shaped and spherical grains on the films’ surfaces. The films obtained in present study with these properties can be used as front contact for solar cells and it can be also one of appealing materials for other optoelectronic and IR coating applications.     

Effects of annealing on thermoelectric properties of Sb2Te3 thin films prepared by radio frequency magnetron sputtering

Antimony telluride (Sb₂Te₃) thin films were deposited on silicon substrates at room temperature (300 K) by radio frequency magnetron sputtering method. The effects of annealing in N₂ atmosphere on their thermoelectric properties were investigated. The microstructure and composition of these films were characterized using scanning electron microscopy, energy dispersive X-ray spectroscopy and X-ray diffraction, respectively. The electrical transport properties of the thin films, in terms of electrical conductivity and Seebeck coefficient were determined at room temperature. The carrier concentration and mobility were calculated from the Hall coefficient measurement. Both of the Seebeck coefficient and Hall coefficient measurement showed that the prepared Sb₂Te₃ thin films were p-type semiconductor materials. By optimizing the annealing temperature, the power factor achieved a maximum value of 18.02 μW cm^?1 K^?2 when the annealing temperature was increased to 523 K for 6 h with a maximum electrical conductivity (1.17 × 10³ S/cm) and moderate Seebeck coefficient (123.9 μV/K).     

Stress tuning in AIN thin films

Aluminium nitride films were deposited on fused silica by reactive dc magnetron sputtering from an Al-target in an Ar/N₂ atmosphere. In-situ measurements during deposition provided data concerning mechanical stresses inherent to the growing thin films. By variation of both the gas composition (Ar, N₂) and the total gas flow in the vacuum chamber, the occuring intrinsic stresses could be shifted in magnitude and direction. Stress values of the AIN films ranged from ?0.9 GPa (compressive) to +1.2 GPa (tensile) when the Ar/N₂ ratio was varied between 3:1 and 1:3 for the different total gas flows of 50 sccm, 100 sccm, and 200 sccm (corresponding to total gas pressures of approximately 2 × 10^?1 Pa, 4 × 10^?1 Pa, and 8 × 10^?1 Pa respectively). Investigations of optical and structural film properties were carried out and the results were related to the observed film stress.     

Ion implantation effects of negative oxygen on copper nanowires

Copper nanowires of diameter 80 nm were synthesized in polycarbonate membrane using template technique. Samples were then implanted with 160 keV O^?1 ion beam with varying particle fluence of 1?×?10¹², 5?×?10¹² and 1?×?10¹³ ions/cm². The SRIM (Stopping and range of ions in matter) software was used to study the processes involved. Compositional analysis confirms implantation of oxygen ions and the stoichiometry of Cu:O was found to be 6:1 by weight % when implanted at 1?×?10¹³ ions/cm². Scanning electron microscopy reveals no changes in morphology of nanowires on implantation. X-ray diffraction analysis showed no shifting in the ‘2θ’ position of diffraction peaks however some new diffraction peaks of oxygen were seen. Implantation with oxygen ion led to the increased crystallite size and reduced strain. The conductivity of the nanowires was found to increase linearly with the ion fluence presenting constructive effect of negative ion implantation on copper nanowires.     

A study of the structural,optical, and electrical properties of SnS<Subscript>2</Subscript>:Cu optical semiconductor thin films deposited by the spray pyrolysis technique

Cu-doped tin-sulfide thin films were deposited onto glass substrates at T = 400 °C through spray pyrolysis. The effects of Cu doping on the structural, optical, and electrical properties of the thin films were investigated. The precursor solution was prepared by dissolving tin chloride (SnCl₄·5H₂O) and thiourea (CS(NH₃)₂) in deionized water and then adding copper chloride (Cl₂Cu₂H₂O). SnS₂:Cu thin films were prepared with \(\frac{{\left[ {Cu} \right]}}{{\left[ {Sn} \right]}}\% = 0, 1, 2, 3, 4 \,{\text{at}}.\%\). X-ray diffraction analysis showed that the thin films had a preferred (001) orientation of the SnS₂ phase and that the intensity of the (001) peak decreased with increased doping concentration from 1–4 at.%. Scanning electron microscopy studies indicated that the thin films had spherical grains. Characterization results of thin films showed that single-crystal grains, average grain size, optical band gap, carrier concentration, Hall mobility, and electrical resistance varied within 5–14 nm, 46–104 nm, 2.81–2.99 eV, 2.42 × 10¹⁶–26.73 × 10¹⁶ cm^?3, 2.41 × 10^?3–20.04 × 10^?3 cm²/v.s, and 9.05–12.89 Ω cm, respectively. Hall effect studies further revealed that the films exhibited n-type conductivity.     

Effect of Ga doping concentrations,substrate temperatures and working pressures on the electrical and optical properties of ZnO thin films

We fabricated Ga-doped ZnO (GZO) thin films on glass substrate by RF magnetron sputtering method with different conditions of Ga₂O₃ concentration, substrate temperature and working pressure. Next we investigated the electrical, optical and structural properties of the GZO thin films. At a substrate temperature of 300 °C, a working pressure of 1 mTorr, and a Ga₂O₃ concentration of 3 wt%, the GZO thin films showed the lowest resistivity of 3.16 × 10^?4 Ω cm, a carrier concentration of 7.64 × 10²⁰ cm^?3 and a Hall mobility of 25.8 cm²/Vs. Moreover, the GZO thin films exhibited the highest (002) orientation under the same conditions and the full width at half maximum of X-ray peak was 0.34°. All GZO thin films showed the optical transmittance of more than 80 % in the visible range regardless of working conditions. The Burstein–Moss effect was observed by the change of doping concentration of Ga₂O₃. The GZO thin films were fabricated to have the good electrical and optical properties through optimizing doping concentration of Ga₂O₃, substrate temperature, working pressure. Therefore, we confirmed the possibility of application of GZO thin film as transparent conductive oxide used in flat panel display and solar cell.