Modeling, analysis, simulation, scheduling, and control ofsemiconductor manufacturing systems: A Petri net approach

This paper presents a Petri net approach to modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems. These systems can be characterized as discrete event systems that exhibit sequential, concurrent, and conflicting relations among the events and operations. Their evolution is dynamic over time. The system complexity is tremendous owing to the complex semiconductor manufacturing processes and test procedures. A formal approach such as Petri nets enables one to describe such complex discrete event systems precisely and thus allows one to perform both qualitative and quantitative analysis, scheduling and discrete-event control of them. This paper also serves as a tutorial paper. It briefly reviews applications of Petri nets in semiconductor manufacturing automation. It then introduces definitions and concepts of Petri nets. It proceeds with a discussion of basic Petri net modules in system modeling, a modeling method and a practical system's modeling example. Next, the paper presents their properties and their implications in manufacturing systems, as well as their analysis methods. Timed Petri nets are introduced for system simulation, performance evaluation, and scheduling purposes. An application-oriented case study is presented. Finally, the paper concludes with the active research areas in applying Petri nets to design of semiconductor manufacturing systems     

Comparing ladder logic diagrams and Petri nets for sequencecontroller design through a discrete manufacturing system

Design methods for sequence controllers play a very important role in advancing industrial automation. The increasing complexity and varying needs of modern discrete manufacturing systems have challenged the traditional design methods such as the use of ladder logic diagrams (LLDs) for programmable logic controllers. The methodologies based on research results in computer science have recently received growing attention by academic researchers and industrial engineers in order to design flexible, reusable, and maintainable control software. Particularly, Petri nets are emerging as a very important tool to provide an integrated solution for modeling, analysis, simulation, and control of industrial automated systems. This paper identifies certain criteria to compare LLDs and Petri nets in designing sequence controllers and responding to the changing control requirements. The comparison is performed through a practical system after introducing “real-time Petri nets” for discrete-event control purposes. The results reported in this paper will help: (a) further establish Petri net based techniques for discrete-event control of industrial automated systems; and (b) effectively convince industrial practitioners and researchers that it is worthy and timely to consider and promote the applications of Petri nets to their particular discrete-event control problems     

Computation of Performance Bounds for Real-Time Systems Using Time Petri Nets

Time Petri nets (TPNs) have been widely used for the verification and validation of real-time systems during the software development process. Their quantitative analysis consists in applying enumerative techniques that suffer the well known state space explosion problem. To overcome this problem, several methods have been proposed in the literature, that either provide rules to obtain equivalent nets with a reduced state space or avoid the construction of the whole state space. In this paper, we propose a method that consists in computing performance bounds to predict the average operational behavior of TPNs by exploiting their structural properties and by applying operational laws. Performance bound computation was first proposed for timed (Timed PNs) and stochastic Petri nets (SPNs). We generalize the results obtained for Timed PNs and SPNs to make the technique applicable to TPNs and their extended stochastic versions: TPN with firing frequency intervals (TPNFs) and extended TPNs (XTPNs). Finally, we apply the proposed bounding techniques on the case study of a robot-control application taken from the literature.     

有界Petri网等价性的判定算法

Petri网语言是系统行为分析的一种重要工具,为了分析有界Petri网的行为等价,借助于有限自动机的等价性问题和算法,研究了有界Petri网的等价性问题和算法.定义了带标注Petri网语言等价性,证明了带标注的有界Petri网到有限自动机的等价转化,给出了判定有界Petri网的等价性算法,为模拟系统的性能比较提供了处理方法.     

Synchronization representation and traffic source modeling inorchestrated presentation

Multimedia applications comprise several media streams, which are semantically synchronized at different time instants. The application behavior is stored along with the multimedia database using representation mechanisms such as OCPN (object composition Petri nets) or dynamic timed Petri nets (DTPN). It is imperative that one translates the application behavior to the corresponding schedulable entities, such as packets, so that the performance engineering of any system can be done, using the traffic model arising out of the (media related) application behavior as opposed to individual media level behavior. This requires that a function be defined, which takes the stored temporal representation as input and produces packets as output, preserving the semantic relationships among the streams. The authors propose a methodology based on probabilistic, attributed context free grammar (PACFG) to address this issue. They demonstrate the appropriateness of this methodology by applying it to the OCPN/DTPN representation of a typical multimedia application vis-a-vis orchestrated presentation     

Integrated scheduling of flexible manufacturing systems employingautomated guided vehicles

Centralized and distributed automated guided vehicle system (AGVS) models for materials handling, and the model for part processing are integrated into a single coherent model. This formulation can be used to collectively schedule and control the entire flexible manufacturing system (FMS) as opposed to the traditional separate scheduling of part processing and material handling. The two AGVS models are based on Petri nets and can be directly used in the scheduling method that uses Petri nets for formulation and heuristic search for solution. This method employs a global search to seek the optimal operation of an entire FMS. Scheduling examples are presented and the method compares favorably with the results simulated using heuristic dispatch rules     

Modeling and analysis of message passing in distributedmanufacturing systems

This paper addresses the information flow between devices and programs in computer integrated manufacturing systems. Specifically, it presents modeling techniques and methods for detecting the existence of message paths among hardware and software components and the upper bound on time delays along that message path. The modeling technique can be used to analyze interoperability between hardware and software components in the system in initial design and specification. The modeling technique has three components: an object model to describe the message passing protocols between communicating components; a color timed Petri net to describe the dynamic behavior and state dependency within each individual component; and an object synthesis method that integrates the Petri nets of individual objects and message protocols between objects to describe the dynamics of the entire system. The graphical modeling can enhance communication among different groups involved in system design and the analytical method can provide component specifications. The use of the modeling technique and method in early system design can result in time and cost savings in system integration due to better communication, better component selection and early problem identification     

TOPNET: a tool for the visual simulation of communication networks

TOPNET is a software package for the simulation of communication networks that is being developed with the aim of exploiting as much as possible the visual aspects of a simulation experiment. The communication network topology and architecture are described by drawings, the system dynamics are represented with a class of timed Petri nets, the simulation experiment is controlled through menus and buttons activated with a mouse, and results are graphically displayed on the screen. With the help of an example, the main characteristics of the user interface and the internal architecture of TOPNET are described     

随机Petri网同步并发行为的定量分析方法

传统的随机Ｐｅｔｒｉ网定量分析都是针对顺序行为的，而并发描述却是Ｐｅｔｒｉ网引以为骄傲的内容，这就形成Ｐｅｔｒｉ擅长描述并发，却没有在并发活动下分析系统的手段。本文研究同步并发机制下随机Ｐｅｔｒｉ网定量分析法，旨在改进传统的分析方法，使Ｐｅｔｒｉ网真正成为并发系统建模与分析的有力工具。     

用于检测数据库一致性的Petri网模型

本文通过建立事务调度的Ｐｅｔｒｉ网模型，给出了并发控制系统判断数据库一致性的形式化方法，得到了判定可串行化调度的充要条件。本方法简便、实用，大大改进了以往的方法，为实现数据库一致性的自动判定提供了前提。最后从方法学角度提出了应用Ｐｅｔｒｉ网的新方法。     

一种价格时间Petri网的状态空间计算

价格时间Petri网是对web服务过程和工作流模型等进行时间和成本分析的一种新工具.而价格时间自动机则是一种相对成熟的工具.提出一种状态空间计算方法,可以将价格时间Petri网的状态空间构造为一个价格时间自动机.该方法的核心思想是在扩展状态类中增加价格参数.进一步证明了构造出的价格时间自动机和初始的价格时间Petri网是双相似的.     

A new function block modeling language based on Petri nets for automatic code generation

A component based modeling language with the component interfaces derived from the elements of the Petri net theory called CNet is presented in this paper. In contrast to IEC 61499 function blocks that define the flow of events and data separately, CNet models them combined as colored tokens. The event-discrete behavior of CNet components is described by a special class of colored Petri nets with timed arcs and sharpened semantics in order to allow automatic generation of possibly concurrent Java code. In this paper, the state space of CNet components is analyzed and a novel event-discrete "handler-based" execution model that implicitly models an automaton is introduced.     

用Petri网对点击拨号业务的建模

该文提出一种将协议转换方法学和Petri网理论相结合来研究应用层协议转换的新方法。按照协议转换方法学的流程,对IIN(Internet Intelligent Network)模型中的点击拨号(CTD)业务进行分析。在用Petri网对CTD业务的建模过程中提炼出通用的Petri网模型协议转换耦合原则,丰富了协议转换方法学的内容。利用Petri网的分析能力分析了CTD业务协议转换模型的特性,达到了检错纠错的目的。 在该方法的指导下开发了业务控制网关(SCGF)和CTD业务,证明了这种新方法的可行性和适用性。     

一种基于逻辑Petri网的过程挖掘方法

逻辑Petri网是抑制弧Petri网和高级Petri网的抽象和扩展,可在过程挖掘中简洁准确的表示活动之间复杂的业务逻辑关系.本文在传统Petri网挖掘方法的基础上,为了进一步提高复杂系统挖掘模型的简洁度和拟合度,尤其是对并行活动间存在复杂与或关系的系统,提出了一种基于逻辑Petri网的过程挖掘方法,并给出了逻辑Petri网中逻辑变迁的挖掘算法.它可以充分挖掘活动之间的业务逻辑,并且业务逻辑可用逻辑表达式表示.通过与相应Petri网模型的实例比较分析,例证了本文方法的正确性和有效性,且逻辑Petri网模型更加适合日志行为.     

A Petri Net Control Unit for High-Speed Modular Signal Processors

This paper proposes a hierarchical representation of digital signal processing algorithms suitable for real-time implementations. Petri net models are used to demonstrate every possible operating parallelism in their graphical expression, the marked Petri graph. Moreover, a hierarchical algorithm execution control based on delayed Petri graphs is presented. A strictly modular system architecture suitable for VLSI implementation and data-driven processing is reviewed in its main components. The algorithm representation is then applied to the design of the control part of the system modules. Details at the logic level of the controllers for an array of digital signal processors are presented as an application of the proposed methodology.     

Petri net as a modeling tool

Over the last decade, Petri nets have emerged as a most suitable, powerful and widely acceptable modeling tool for representing and studying the asynchronous concurrent hardware (or software) systems/processes. Petri nets can be viewed as formal automata or as an automation which can generate the formal languages or a model to analyse and synthesize various kinds of systems. The structure of Petri nets, their markings, extensions and subclasses are briefly discussed. Several examples of Petri net models of computer hardware and software are presented. Various applications of reachability concepts are also given.     

双总线结构工业控制计算机网性能指标评估

对双总线结构工业控制计算机网,给出了其Petri网和高级Petri网的建模及性能指标评估方法。文中考虑了信包缓冲区容量有限、信包最大允许服务时间有限、不同的站点优先级和系统总线故障率等因素影响下的网络性能指标评估问题。克服了以往对网络性能评估的某些局限。讨论了带计数禁止弧的高级随机Petri网(HDSPN)的特性.并对给出的DSPN模型进行了仿真计算,对影响网络性能的系统指标进行了讨论。     

基于FPGA的有色Petri网仿真系统设计

为了实现大规模有色Petri网模型的性能测试,设计了基于FPGA的高速仿真系统。该系统实现了库所、变迁模块到硬件结构的映射,采用C语言实现了有色Petri网的硬件自动生成工具。通过分析有色Petri网的特征,该工具生成对应的Verilog代码和基于Quartus的自动脚本。以通信中"包传输"的模型为例,在FPGA中对生成的代码进行测试,验证了设计的正确性。