Ga2O3(Gd2O3)/InGaAsenhancement-mode n-channel MOSFETs

We have demonstrated the first Ga₂O₃(Gd₂O₃) insulated gate n-channel enhancement-mode In_0.53Ga_0.47As MOSFET's on InP semi-insulating substrate. Ga₂O₃(Gd₂ O₃) was electron beam deposited from a high purity single crystal Ga₅Gd₃O₁₂ source. The source and drain regions of the device were selectively implanted with Si to produce low resistance ohmic contacts. A 0.75-μm gate length device exhibits an extrinsic transconductance of 190 mS/mm, which is an order of magnitude improvement over previously reported enhancement-mode InGaAs MISFETs. The current gain cutoff frequency, f_t, and the maximum frequency of oscillation, f_max, of 7 and 10 GHz were obtained, respectively, for a 0.75×100 μm² gate dimension device at a gate voltage of 3 V and drain voltage of 2 V     

Demonstration of GaN MIS diodes by using AlN and Ga2O3(Gd2O3) as dielectrics

GaN MIS diodes were demonstrated utilizing AlN and Ga₂O₃(Gd₂O₃) as insulators. A 345 Å of AlN was grown on the MOCVD grown n-GaN in a MOMBE system using trimethylamine alane as Al precursor and nitrogen generated from a SVT RF N₂ plasma. For the Ga₂O₃(Gd₂O₃) growth, a multi-MBE chamber was used and a 195 Å oxide was E-beam evaporated from a single crystal source of Ga₅Gd₃O₁₂. The forward breakdown voltage of AlN and Ga₂O₃(Gd₂O₃) diodes are 5 and 6 V, respectively, which are significantly improved over 1.2 V from that of a Schottky contact. From the C–V measurements, both kinds of diodes showed good charge modulation from accumulation to depletion at different frequencies. The insulator/GaN interface roughness and the thickness of the insulator were measured with X-ray reflectivity.     

Carbon agent chemical vapor transport growth of Ga2O3 crystal

Beta-type gallium oxide (β-Ga₂O₃) is a new attractive material for optoelectronic devices. Different methods had been tried to grow high quality β-Ga₂O₃ crystals. In this work, crystal growth of Ga₂O₃ has been carried out by chemical vapor transport (CVT) method in a closed quartz tube using C as transport agent and sapphire wafer as seed. The CVT mass flux has been analyzed by theoretical calculations based on equilibrium thermodynamics and 1D diffusional mass transport. The crystal growth experimental results are in agreement with the theoretical predictions. Influence factors of Ga₂O₃ crystal growth, such as temperature distribution, amount of C as transport agent used, have also been discussed. Structural (XRD) and optical (Raman spectroscopy, photoluminescence spectrum) properties of the CVT-Ga₂O₃ crystal are presented.     

Self-healing wearable self-powered deep ultraviolet photodetectors based on Ga2O3

Gallium oxide(Ga₂O₃) based flexible heterojunction type deep ultraviolet(UV) photodetectors show excellent solarblind photoelectric performance, even when not powered, which makes them ideal for use in intelligent wearable devices. However, traditional flexible photodetectors are prone to damage during use due to poor toughness, which reduces the service life of these devices. Self-healing hydrogels have been demonstrated to have the ability to repair damage and their combi...     

Recent advances in NiO/Ga2O3 heterojunctions for power electronics

Beta gallium oxide(β-Ga₂O₃) has attracted significant attention for applications in power electronics due to its ultrawide bandgap of ～ 4.8 eV and the large critical electric field of 8 MV/cm. These properties yield a high Baliga’s figures of merit(BFOM) of more than 3000. Though β-Ga₂O₃ possesses superior material properties, the lack of p-type doping is the main obstacle that hinders the development of β-Ga₂O₃-based power device...     

Plasma-Enhanced Atomic Layer Deposition of Amorphous Ga2O3 for Solar-Blind Photodetection

Wide-bandgap gallium oxide(Ga₂O₃) is one of the most promising semiconductor materials for solar-blind(200 nm to 280 nm) photodetection. In its amorphous form, amorphous gallium oxide(a-Ga₂O₃) maintains its intrinsic optoelectronic properties while can be prepared at a low growth temperature, thus it is compatible with Si integrated circuits(ICs) technology. Herein, the a-Ga₂O₃ film is directly deposited on pre-fabricated Au inter...     

具有界面依赖光致发光的双层WS2/Ga2O3异质结的能带工程(英文)

利用垂直WS₂/Ga₂O₃异质结构中异质界面诱导了反常的光致发光(PL)发射。垂直堆栈的WS₂/Ga₂O₃异质界面使其形成了II型能带结构,导致与Ga₂O₃层接触的底层WS₂的PL强度下降。而异质界面的强耦合作用也影响了双层WS₂中的同质层间相互作用,使得上层WS₂出现反常的PL增强。这种堆栈新型二维异质结构为定制目标能带结构并控制其光子和电子行为提供一种新的手段。     

一种柔性自供电Ga2O3基日盲光电探测器的设计及性能研究北大核心CSCD

近年来,氧化镓(Ga2O3)日盲光电探测器因其高灵敏度和低虚警率及广泛的应用前景,受到了科学家们的高度关注.为了满足现代社会对低损耗、环保、高集成、轻便和柔性器件的需求,可自供电的柔性器件备受关注.然而,到目前为止,Ga2O3基柔性自供电光电探测器鲜有报道.本文通过原位生长技术在耐高温的柔性衬底玻璃纤维布上生长了β-Ga2O3纳米线,并构筑Ag/β-Ga2O3肖特基结.在肖特基结的作用下,光生载流子可在无外加偏压下分离和传输,并展现出超低的暗电流(0.2 pA)、高光暗比(～500)、快响应时间(0.46/0.41 s)和高探测率(6.8×109 Jones).该探测器也表现出良好的机械性能.结果表明,Ag/β-Ga2O3肖特基结探测器在深紫外探测器领域具有广阔的应用前景,为柔性自供电探测技术的发展提供了新的思路.     

Heterogeneous integration technology for the thermal management of Ga2O3 power devices

<正>The more severe phonon-phonon scattering in gallium oxide(Ga₂O₃) crystals leads to lower thermal conductivity compared to most other semiconductor materials. To address this issue and enhance the heat dissipation in Ga₂O₃ devices, one practical solution is to integrate Ga₂O₃ with a highly thermally conductive substrate, such as SiC and Si. Currently,there are three methods employed for the heterogeneous integration of Ga<...     

Preparation of Sn-doped Ga2O3 thin films and their solar-blind photoelectric detection performance

Sn doping is an effective way to improve the response rate of Ga₂O₃ film based solar-blind detectors. In this paper,Sn-doped Ga₂O₃ films were prepared on a sapphire substrate by radio frequency magnetron sputtering. The films were characterized by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy and ultraviolet visible spectroscopy, and the effect of annealing atmosphere on the properties of films was studied. The Ga     

Characterization of the annealing impact on La2O3/HfO2 and HfO2/La2O3 stacks for MOS applications

The impact of various rapid thermal annealing used during the integration on the La₂O₃/HfO₂ and HfO₂/La₂O₃ stacks deposited by Atomic Layer deposition was analyzed. The consequences of lanthanum localization in such stacks on the evolution of the films during the rapid thermal annealing are investigated in term of morphology, crystalline structure, silicate formation and film homogeneity as a function of the depth. It appeared that the La₂O₃ location has an impact on the temperature of the quadratic phase formation which could be linked to the formation of SiOHfLa silicate and the resistance of the films to dissolution in HF 0.05 wt%.     

用第一性原理研究Sn掺杂 Ga1.375In0.625O3的电子结构和导电性

用第一性原理计算了Sn 替位Ga1.375In0.625O3化合物的Ga 原子(Ga1.25In0.625Sn0.125O3)和Sn 替位Ga1.375In0.625O3化合物的In原子(Ga1.375In0.5Sn0.125O3)的结构、电子能带和态密度。Ga1.25In0.625Sn0.125O3半导体材料比Ga1.375In0.5Sn0.125O3材料具有大的晶格参数和强的Sn–O离子键。在Sn掺杂 Ga1.375In0.625O3化合物中,Sn 原子优先取代In 原子。Sn掺杂 Ga1.375In0.625O3化合物显示n型导电性, 杂质能带主要由Sn 5s 态组成。Ga1.375In0.5Sn0.125O3化合物的光学带隙大于Ga1.25In0.625Sn0.125O3化合物的光学带隙。 Ga1.25In0.625Sn0.125O3 具有小的电子有效质量和大的电子迁移率,Ga1.375In0.5Sn0.125O3 具有多的相对电子数和好的导电性。     

Effect of substrate temperature on the properties of deep ultraviolet transparent conductive ITO/Ga2O3 films

正ITO/Ga_2O_3 bi-layer films were deposited on quartz glass substrates by magnetron sputtering.The effect of substrate temperature on the structure,surface morphology,optical and electrical properties of ITO/Ga_2O_3 films was investigated by an X-ray diffractometer,a scanning electron microscope,a double beam spectrophotometer and the Hall system,respectively.The structural characteristics showed a dependence on substrate temperature. The resistivity of the films varied from 6.71×10~(-3) to 1.91×10~3Ω·cm as the substrate temperature increased from 100 to 350℃.ITO(22 nm)/Ga_2O_3(50 nm) films deposited at 300℃exhibited a low sheet resistance of 373.3Ω/□and high deep ultraviolet transmittance of 78.97%at the wavelength of 300 nm.     

磁控溅射制备Ga2O3/ITO深紫外透明导电膜的光电性能

采用磁控溅射方法在石英玻璃基底上制备了Ga2O3/ITO膜,用紫外-可见分光光度计、四探针测试仪对ITO膜和 Ga2O3/ITO膜的光学透过率和面电阻进行了表征,详细研究了ITO层和Ga2O3层的厚度对Ga2O3/ITO双层膜光电性能的影响。研究表明,Ga2O3(50nm) /ITO(23nm)膜在280nm处的深紫外光学透过率高达77.6%,面电阻为323Ω/sq;ITO层控制Ga2O3/ITO膜的面电阻,影响Ga2O3/ITO膜的紫外透过率;Ga2O3层厚度调控Ga2O3/ITO膜的紫外区域的光谱形状。     

Low Dit, thermodynamically stable Ga2O3-GaAs interfaces: fabrication, characterization, and modeling

Thermodynamically stable, low D_it amorphous Ga₂ O₃-(100) GaAs interfaces have been fabricated by extending molecular beam epitaxy (MBE) related techniques. We have investigated both in situ and ex situ Ga₂O₃ deposition schemes utilizing molecular beams of gallium oxide. The in situ technique employs Ga₂O₃ deposition on freshly grown, atomically ordered (100) GaAs epitaxial films in ultrahigh vacuum (UHV); the ex situ approach is based on thermal desorption of native GaAs oxides in UHV prior to Ga₂O₃ deposition. Unique electronic interface properties have been demonstrated for in situ fabricated Ga₂O₃-GaAs interfaces including a midgap interface state density D_it in the low 10¹⁰ cm^-2 eV^-1 range and an interface recombination velocity S of 4000 cm/s. The existence of strong inversion in both n- and p-type GaAs has been clearly established. We will also discuss the excellent thermodynamic and photochemical interface stability. Ex situ fabricated Ga₂O₃-GaAs interfaces are inferior but still of a high quality with S=9000 cm/s and a corresponding D_it in the upper 10¹⁰ cm^-2 eV^-1 range. We also developed a new numerical heterostructure model for the evaluation of capacitance-voltage (C-V), conductance-voltage (G-V), and photoluminescence (PL) data. The model involves selfconsistent interface analysis of electrical and optoelectronic measurement data and is tailored to the specifics of GaAs such as band-to-band luminescence and long minority carrier response time τ_R. We will further discuss equivalent circuits in strong inversion considering minority carrier generation using low-intensity light illumination     

溅射气压对氧化镓薄膜光学特性的影响

采用射频磁控溅射法在石英衬底上制备了氧化镓(Ga2O3)薄膜.利用X射线衍射仪和紫外-可见-红外分光光度计分别对Ga2O3薄膜的晶体结构和光学带隙进行了表征,并在室温下测量了 Ga2O3薄膜的光致发光(PL)谱.结果表明:制备的Ga2O3薄膜呈非晶态.吸收边随着溅射气压的增加先蓝移后红移,光学带隙值范围为5.06～5.37 eV,溅射气压为1 Pa时,制备的Ga2O3薄膜具有最大的光学带隙.在325 nm激光激发下,400 nm附近和525 nm附近处出现与缺陷能级相关的发光峰.     

MgO-Y_2O_3对热压烧结Al_2O_3性能的影响

以高纯的硫酸铝氨分解的无定形Al2O3为原料,MgO-Y2O3为烧结助剂,在N2气氛下热压烧结制备Al2O3陶瓷。研究了烧结助剂掺量对Al2O3材料的相组成、显微结构、烧结性能、力学性能、热导率和介电性能的影响。结果表明:所制Al2O3陶瓷具有细晶的显微结构特征和超高的抗弯强度。随着MgO-Y2O3掺量的增加,晶粒尺寸、抗弯强度和热导率先增大后减小,而介电损耗则呈现先减小后增大的变化规律。当MgO和Y2O3掺量均为质量分数2%时,Al2O3陶瓷呈现为较佳的综合性能:抗弯强度达最大值为603 MPa,热导率为36.47 W.m–1.K–1,介电损耗低至6.32×10–4。     

Layered Al2O3-TiO2 compositedielectric resonators

Aluminium oxide displays a very low tanδ at microwave frequencies. It also possesses a remarkably high thermal conductivity, ideal for heat dissipation in high power satellite filters. However, its temperature coefficient of the resonant frequency (τ_f) is approximately 60 ppm/K. It is shown that the application of a film of titanium oxide which has a T_f of opposite sign (45O ppm/K) produces a composite in which the τ_f can be tuned to be zero over a wide temperature range. The tanδ of the composite at zero T_f is 3.3×10⁵ (Q=30000) at room temperature and at 10 GHz     

Bi_2O_3和Sb_2O_3的预复合对ZnO压敏电阻性能的影响

采用固相法对Bi2O3和Sb2O3进行了预复合,并研究了不同比例的Bi2O3与Sb2O3预复合对ZnO压敏电阻致密度,晶粒结构和电学性能的影响。结果表明:当Bi2O3与Sb2O3的摩尔比为0.7:1.0时,ZnO压敏电阻的综合性能最优,其晶粒生长得最为均匀致密,电位梯度达到361V/mm,非线性系数为86,漏电流密度为7×10–8A/cm2;另外,在耐受5kA电流下的8/20μs脉冲电流波后,其残压比和压敏电压变化率分别为2.6和2.5%。     

Excellent performance of gas sensor based on In2O3-Fe2O3 nanotubes

In₂O₃-Fe₂O₃ nanotubes are synthesized by an electrospinning method. The as-synthesized materials are characterized by scanning electron microscope and X-ray powder diffraction. The gas sensing results show that In₂O₃-Fe₂O₃ nanotubes exhibit excellent sensing properties to acetone and formaldehyde at different operating temperatures. The responses of gas sensors based on In₂O₃-Fe₂O₃ nanotubes to 100 ppm acetone and 100 ppm formaldehyde are 25 (240℃) and 15 (260℃), and the response/recovery times are 3/7 s and 4/7 s, respectively. The responses of In₂O₃-Fe₂O₃ nanotubes to 1 ppm acetone (240℃) and formaldehyde (260℃) are 3.5 and 1.8, respectively. Moreover, the gas sensor based on In₂O₃-Fe₂O₃ nanotubes also possesses an excellent selectivity to acetone and formaldehyde.