Ballistic electron emission microscopy studies of the temperature dependence of Schottky barrier height distribution in CoSi2/n-Si(1 0 0) diodes formed by solid phase reaction

Ballistic electron emission microscopy (BEEM) and ballistic electron emission spectroscopy have been performed on polycrystalline and epitaxial CoSi₂/n-Si(1 0 0) contacts at temperatures ranging from −144°C to −20°C. The ultra-thin CoSi₂ films (10 nm) were fabricated by solid state reaction of a single layer of Co (3 nm) or a multilayer of Ti (1 nm)/Co (3 nm)/amorphous-Si(1 nm)/Ti (1 nm) with a Si substrate, respectively. The spatial distribution of barrier height over the contact area obeys a Gaussian function at each temperature. The mean barrier height increases almost linearly with decreasing temperature with a coefficient of −0.23±0.02 meV/K for polycrystalline CoSi₂/Si diodes and −0.13±0.03 meV/K for epitaxial diodes. This is approximately equal to one or one-half of the temperature coefficient of the indirect energy gap in Si, respectively. It suggests that the Fermi level is pinned to different band positions of Si. The width of the Gaussian distribution is about 30–40 meV, without clear dependence on the temperature. The results obtained from conventional current–voltage and capacitance–voltage (I–V/C–V) measurements are compared to BEEM results.     

Spectroscopic and electrical characteristics of highly efficient tetraphenylsilane-carbazole organic compound as host material for blue organic light emitting diodes

Thermal, electrical and spectroscopic properties have been studied for bis(3,5-di(9H-carbazol-9-yl) phenyl)diphenylsilane (SimCP2) which has exhibited high external quantum efficiency of 17.7% and power efficiency of 24.2 lm/W when it is used as host material for iridium bis(4,6-difluorophenypyridinato)picolate (FIrpic) blue emitter. They are compared with 1,3-bis (9-carbazolyl) benzene (mCP) and 3,5-bis (9-carbazolyl) tetraphenylsilane (SimCP) which have been also used as host for blue emitters. SimCP2 exhibits a highest glass transition temperature (148 °C) and is morphologically more stable. The electron and hole mobilities are higher (4.8 × 10⁻⁴ and 2.7 × 10⁻⁴ cm² V⁻¹ s⁻¹, respectively, at electric field of 9 × 10⁴ V cm⁻¹) than those of mCP and SimCP. The zero-phonon S₁ emission band is observed at 344 nm, while the T₁ emission band at 412 nm, i.e., this material preserves the characteristics of wide band-gap of 3.56 eV and high T₁ triplet energy of 3.01 eV. From the intensity ratio of the T₁ emission to the S₁ emission, it is suggested that the intersystem crossing rate is smaller for SimCP2 than for mCP and SimCP. From these results, we clarify the reasons why SimCP2 is superior to mCP and SimCP as the host material for blue phosphorescence emitter in organic light emitting diodes.     

Low temperature processed hafnium oxide: Structural and electrical properties

In this work hafnium oxide (HfO₂) was deposited by r.f. magnetron sputtering at room temperature and then annealed at 200 °C in forming gas (N₂+H₂) and oxygen atmospheres, respectively for 2, 5 and 10 h. After 2 h annealing in forming gas an improvement in the interface properties occurs with the associated flat band voltage changing from −2.23 to −1.28 V. This means a reduction in the oxide charge density from 1.33×10¹² to 7.62×10¹¹ cm⁻². After 5 h annealing only the dielectric constant improves due to densification of the film. Finally, after 10 h annealing we notice a degradation of the electrical film's properties, with the flat band voltage and fixed charge density being −2.96 V and 1.64×10¹² cm⁻², respectively. Besides that, the leakage current also increases due to crystallization. On the other hand, by depositing the films at 200 °C or annealing it in an oxidizing atmosphere no improvements are observed when comparing these data to the ones obtained by annealing the films in forming gas. Here the flat band voltage is more negative and the hysteresis on the C–V plot is larger than the one recorded on films annealed in forming gas, meaning a degradation of the interfacial properties.     

Effect of Sb implantation on copper silicides formation and morphology after annealing of Cu/Si structures

In this work, the solid state reaction between a thin film of copper and silicon has been studied using Rutherford backscattering spectroscopy, X-ray diffraction, scanning electron microscopy and microprobe analysis. Cu films of 400 and 900 Å thicknesses are thermally evaporated on Si(1 1 1) substrates, part of them had previously been implanted with antimony ions of 5×10¹⁴ or 5×10¹⁵ at. cm⁻² doses. The samples are heat-treated in vacuum at temperatures in the range 200–700 °C for various times. The results show the growth and formation of Cu₃Si and Cu₄Si silicides under crystallites shape dispatched on the sample surface, independently of the implantation dose. On the other hand, it is established that the copper layer is less and less consumed as the antimony dose increases, resulting in the accumulation of Sb⁺ ions at silicide/Si interface and in the silicide layer close to surface. The exposure of samples to air at room temperature shows the stability of Cu₄Si phase whereas the Cu₃Si silicide disappears to the benefit of the silicon dioxide formation. The observed phenomena are discussed.     

High temperature characterization of high-κ dielectrics on SiC

We have fabricated thin catalytic metal–insulator–silicon carbide based structure with palladium (Pd) gates using TiO₂ as the dielectric. The temperature stability of the capacitor is of critical importance for use in the fabrication of electronics for deployment in extreme environments. We have evaluated the response to temperatures in excess of 450 °C in air and observed that the characteristics are stable. Results of high temperature characterization are presented here with extraction of interface state density up to 650 °C. The results show that at temperatures below 400 °C the capacitors are stable, with a density of interface traps of approximately 6×10¹¹ cm² eV⁻¹. Above this temperature the C–V and G–V characteristics show the influence of a second set of traps, with a density around 1×10¹³ cm² eV⁻¹, which is close to that observed for slow states near the conduction band edge. The study of breakdown field as a function of temperature shows two distinct regions, below 300 °C where the breakdown voltage has a strong temperature dependence and above 300, where it is weaker. We hypothesize that the oxide layer dominates the breakdown voltage at low temperature and the TiO₂ layer above 300 °C. These results at high temperatures confirms the suitability of the Pd/TiO₂/SiO₂/SiC capacitor structure for stable operation in high temperature environments.     

Electron recombination between Landau-levels in n-InSb

Experimental and theoretical investigations of electron recombination between Landau levels and associated impurity levels have been performed for n-InSb. The electronic lifetime in the first Landau level is found to be determined by electron-electron scattering what is experimentally confirmed by an inversely linear dependence on the electron concentration n₁ in the 1st Landau level. Values of 10⁻¹⁰ sec are obtained for n₁ 10¹³ cm⁻³. For n₁ ≤ 10¹⁰ cm⁻¹ acoustic phonon scattering determines the lifetime in the first Land level. For the recombination of electrons between the lowest Landau level and the impurity ground state times between 200 nsec and 50 nsec dependent on the magnetic field but independent of electron concentration are found indicating a phonon capture process. These times are also responsible for the observation that relaxation times from the (110) impurity level to the (000) ground state are the bottle neck in a three step process.     

Study of electrically active defects in n-GaN layer

Deep level defects in both p⁺/n junctions and n-type Schottky GaN diodes are studied using the Fourier transform deep level transient spectroscopy. An electron trap level was detected in the range of energies at E_c−E_t=0.23–0.27 eV with a capture cross-section of the order of 10⁻¹⁹–10⁻¹⁶ cm² for both the p⁺/n and n-type Schottky GaN diodes. For one set of p⁺/n diodes with a structure of Au/Pt/p⁺–GaN/n–GaN/n⁺–GaN/Ti/Al/Pd/Au and the n-type Schottky diodes, two other common electron traps are found at energy positions, E_c−E_t=0.53–0.56 eV and 0.79–0.82 eV. In addition, an electron trap level with energy position at E_c−E_t=1.07 eV and a capture cross-section of σ_n=1.6×10⁻¹³ cm² are detected for the n-type Schottky diodes. This trap level has not been previously reported in the literature. For the other set of p⁺/n diodes with a structure of Au/Ni/p⁺–GaN/n–GaN/n⁺–GaN/Ti/Al/Pd/Au, a prominent minority carrier (hole) trap level was also identified with an energy position at E_t−E_v=0.85 eV and a capture cross-section of σ_n=8.1×10⁻¹⁴ cm². The 0.56 eV electron trap level observed in n-type Schottky diode and the 0.23 eV electron trap level detected in the p⁺/n diode with Ni/Au contact are attributed to the extended defects based on the observation of logarithmic capture kinetics.     

High temperature transport kinetics in heteroepitaxial LaFeO3 thin films

Heteroepitaxial LaFeO₃(1 1 0) thin films with a thickness of 150 nm were grown on LaAlO₃(0 0 1) by reactive sputtering in an inverted cylindrical magnetron geometry. Equilibrium conductivity was measured as a function of partial pressure of oxygen at T=1000 °C, and logσ plotted vs. logP(O₂) showed a minimum in conductivity for P(O₂)=10⁻¹¹ atm and a linear response between 10⁻¹⁰ and 1 atm. This linear response makes thin films of LaFeO₃ a promising material for oxygen sensor applications. We have also measured the time response of the film conductivity upon an abrupt change in the partial pressure of ambient oxygen from 10⁻² to 10⁻³ atm, which was determined at 60 s for T=700 °C and <3.5 s at T=1000 °C.     

Vibrational spectroscopy characterization of low-dielectric constant SiOC:H films prepared by PECVD technique

Low-dielectric constant SiOC:H films were prepared by plasma enhanced chemical vapour deposition (PECVD) from trimethyl-silane (H–Si–(CH₃)₃) and ozone (O₃) gas mixture. The samples were preliminarily annealed at 400 °C in N₂ atmosphere and then in N₂+He plasma. Afterwards, they were treated in vacuum at some fixed temperatures in the range between 400 and 900 °C. Structural investigations of the annealed films were carried out by means of vibrational spectroscopy techniques. FT-IR spectrum of a preliminarily treated sample shows absorption bands due to stretching modes of structural groups like Si–CH₃ at 1270 cm⁻¹, Si–O–Si at 1034 cm⁻¹ and C–H_x in the region between 2800 and 3000 cm⁻¹. No significant spectral change was observed in the absorption spectra of samples annealed up to 600 °C, indicating that the preliminarily treated film retains a substantial structural stability up to this temperature. Above 600 °C, absorption spectra show a strong quenching of H-related peaks while the band due to Si–O–Si anti-symmetric stretching mode shifts towards higher energy, approaching the value observed for thermally grown SiO₂. Raman spectra of samples treated at temperatures T500 °C exhibit both D and G bands typical of sp²-hybridised carbon, due to the formation of C–C bonds within the film which is accompanying the release of hydrogen. The intensity of D and G bands becomes more pronounced in samples annealed at higher temperatures, thus suggesting a progressive precipitation of carbon within the oxide matrix.     

Properties of Bi-doped PbTe epitaxial layers and pn junction diodes grown by TDM-CVP

Effects of Bi-doping in PbTe liquid-phase epitaxial layers grown by the TDM-CVP have been investigated. For Bi concentration in the solution, x_Bi, lower than 0.2 at.%, Hall mobility is low. In contrast, for x_Bi>0.2 at.%, Hall mobility is high, while carrier concentration is in the range 10¹⁷ cm⁻³. However, ICP emission analysis shows that, for x_Bi=1.0 at.%, Bi concentration in epitaxial layer is N_Bi=2.3–2.7×10¹⁹ cm⁻³.These results indicate that Bi behaves not only as a donor but also as an acceptor; the nearest neighbor or very near DA pairs are formed. Carrier concentration for Bi-doped layers takes a minimum value at a Te vapor pressure of 2.2×10⁻⁵ Torr for growth temperature 470°C, which is coincident with that of the undoped PbTe. And broad contact pn junctions with highly Bi-doped layers easily cause laser emission compared to undoped junctions. The result suggests that the nearest lattice site Bi–Bi DA pairs behave as strong radiative centers in PbTe.     

Influence of rapid thermal annealing on morphological and electrical properties of RF sputtered AlN films

Aluminum nitride films were deposited, at 200 °C, on silicon substrates by RF sputtering. Effects of rapid thermal annealing on these films, at temperatures ranging from 400 to 1000 °C, have been studied. Fourier transform infrared spectroscopy (FTIR) revealed that the characteristic absorption band of Al–N, around 684 cm⁻¹, became prominent with increased annealing temperature. X-ray diffraction (XRD) patterns exhibited a better, c-axis, (0 0 2) oriented AlN films at 800 °C. Significant rise in surface roughness, from 2.1 to 3.68 nm, was observed as annealing temperatures increased. Apart from these observations, micro-cracks were observed at 1000 °C. Insulator charge density increased from 2×10¹¹ to 7.7×10¹¹ cm⁻² at higher temperatures, whereas, the interface charge density was found minimum, 3.2×10¹¹ eV⁻¹cm⁻², at 600 °C.     

Valence band structures and optical transitions of Ga1−xInxNyAs1−y/GaAs compressively strained quantum wells

The electronic structures of the Ga_1−xIn_xN_yAs_1−y/GaAs compressively strained quantum wells (QW) are investigated using 6×6 k·p Hamiltonian including the heavy hole, light hole and spin–orbit splitting band. The curves of dependence of transition energy on well width and N mole fraction are obtained. The valence subband energy dispersion curves, density of state and TE and TM squared optical transition matrix elements of three possible QW structures for emitting 1.3 μm wavelength are given.     

Electron states at the (1 0 0)Ge/HfO2 Interface

The energy distribution of extended and localized electron states at the Ge/HfO₂ interface is determined by combining the internal photoemission of electrons and holes from Ge into the Hf oxide and AC capacitance/conductance measurements. The inferred offsets of the conduction and valence band at the interface, i.e., 2.0 ± 0.1 and 3.0 ± 0.1 eV, respectively, suggest the possibility to apply the deposited HfO₂ layer as a suitable insulator on Ge. The post-deposition annealing of the Ge/HfO₂ structures in oxygen results in 1 eV reduction of the valence band offset, which is attributed to the growth of a GeO₂ interlayer. However, this treatment enables one to substantially reduce the density of Ge/HfO₂ interface traps, approaching ≈1×10¹² cm⁻² eV⁻¹ near the Ge midgap.     

Electrical properties of oxidized polycrystalline silicon as a gate insulator for n-type 4H-SiC MOS devices

MOS capacitors were produced on n-type 4H-SiC using oxidized polycrystalline silicon (polyoxide). The polyoxide samples grown by dry oxidation without an anneal had a high interface state density (D_it) of 1.8 × 10¹² cm⁻² eV⁻¹ and the polyoxide samples grown by wet oxidation had a lower D_it of 1.2 × 10¹² cm⁻² eV⁻¹ (both at 0.5 eV below the conduction band). After 1 h Ar annealing, the D_it of wet polyoxide was reduced significantly to 2.6 × 10¹¹ cm⁻² eV⁻¹ (at 0.5 eV below the conduction band). Dry polyoxide exhibits higher breakdown electric fields than wet polyoxide. The interface quality and breakdown characteristics of polyoxide are comparable to published results of low-temperature CVD deposited oxides.     

Correlation between infrared transmission spectra and the interface trap density of SiO2 films

This work is an attempt to estimate the electrical properties of SiO₂ thin films by recording and analyzing their infrared transmission spectra. In order to study a big variety of films having different infrared and electrical properties, we studied SiO₂ films prepared by low pressure chemical vapor deposition (LPCVD) from SiH₄ + O₂ mixtures at 425 °C and annealed at 750 °C and 950 °C for 30 min. In addition thermally grown gate quality SiO₂ films of similar thickness were studied in order to compare their infrared and electrical properties with the LPCVD oxides. It was found that all studied SiO₂ films have two groups of Si–O–Si bridges. The first group corresponds to bridges located in the bulk of the film and far away from the interfaces, the grain boundaries and defects and the second group corresponds to all other bridges located near the interfaces, the grain boundaries and defects. The relative population of the bulk over the boundary bridges was found equal to 0.60 for the LPCVD film after deposition and increased to 4.0 for the LPCVD films after annealing at 950 °C. Thermally grown SiO₂ films at 950 °C were found to have a relative population of Si–O–Si bridges equal to 3.9. The interface trap density of the LPCVD film after deposition was found equal to 5.47 × 10¹² eV⁻¹ cm⁻² and decreases to 6.50 × 10¹⁰ eV⁻¹ cm⁻² after annealing at 950 °C for 30 min. The interface trap density of the thermally grown film was found equal to 1.27 × 10¹¹ eV⁻¹ cm⁻² showing that films with similar Si–O–Si bridge populations calculated from the FTIR analysis have similar interface trap densities.     

Optical and electrical characterization of the electron beam gun evaporated TiO2 film

We report measured evolutions of the optical band gap, refractive index and relative dielectric constant of TiO₂ films obtained by electron beam gun evaporation and annealed in an oxygen environment. A negative shift of the flat band voltage with increasing annealing temperatures, for any film thickness, is observed. A dramatic reduction of the leakage current by about four orders of magnitude to 5×10⁻⁶ A cm⁻² (at 1 MV cm⁻¹) after 700°C and 60 min annealing is found for films thinner than 15 nm. The basic carrier transport mechanisms at different ranges of applied voltage such as hopping, space charge limited current and Fowler–Nordheim is established. An equivalent SiO₂ thickness in order of 3.5 nm is demonstrated.     

Silicon dioxide deposited by ECR-PECVD for low-temperature Si devices processing

Silicon dioxide films have been deposited at temperatures less than 270 °C in an electron cyclotron resonance (ECR) plasma reactor from a gas phase combination of O₂, SiH₄ and He. The physical characterization of the material was carried out through pinhole density analysis as a function of substrate temperature for different μ-wave power (E_w). Higher E_w at room deposition temperature (RT) shows low defects densities (<7 pinhole/mm²) ensuring low-temperatures process integration on large area. From FTIR analysis and Thermal Desorption Spectroscopy we also evaluated very low hydrogen content if compared to conventional rf-PECVD SiO₂ deposited at 350 °C. Electrical properties have been measured in MOS devices, depositing SiO₂ at RT. No significant charge injection up to fields 6–7 MV/cm and average breakdown electric field >10 MV/cm are observed from ramps I–V. Moreover, from high frequency and quasi-static C–V characteristics we studied interface quality as function of annealing time and annealing temperature in N₂. We found that even for low annealing temperature (200 °C) is possible to reduce considerably the interface state density down to 5 × 10¹¹ cm⁻² eV⁻¹. These results show that a complete low-temperatures process can be achieved for the integration of SiO₂ as gate insulator in polysilicon TFTs on plastic substrates.     

Raman spectra of GaPAs–GaP heterostructure waveguides

A GaPAs waveguide with GaP cladding layers, has been fabricated in only two steps of LPE growth. One-way optical loss of the fabricated GaPAs–GaP waveguide is 12% mm⁻¹ (α=1.9 cm⁻¹). The free carrier concentration of the GaPAs layer is 1×10¹⁶ cm⁻³ (α=0.05 cm⁻¹). The backward spontaneous Raman spectrum from the GaPAs waveguide shows a GaP-like longitudinal optical (LO) phonon line. The LO band is intensified and shifted to a higher frequency compared to the LO phonon of GaP bulk crystal.     

Effects of bonding temperature on the properties and reliabilities of anisotropic conductive films (ACFs) for flip chip on organic substrate application

The effects of bonding temperatures on the composite properties and reliability performances of anisotropic conductive films (ACFs) for flip chip on organic substrates assemblies were studied. As the bonding temperature decreased, the composite properties of ACF, such as water absorption, glass transition temperature (T_g), elastic modulus (E′) and coefficient of thermal expansion (α), were improved. These results were due to the difference in network structures of cured ACFs which were fully cured at different temperatures. From small angle X-ray scattering (SAXS) test result, ACFs cured at lower temperature, had denser network structures. The reliability performances of flip chip on organic substrate assemblies using ACFs were also investigated as a function of bonding temperatures. The results in thermal cycling test (−55 °C/+150 °C, 1000 cycles) and PCT (121 °C, 100% RH, 96 h) showed that the lower bonding temperature resulted in better reliability of the flip chip interconnects using ACFs. Therefore, the composite properties of cured ACF and reliability of flip chip on organic substrate assemblies using ACFs were strongly affected by the bonding temperature.