影响单点金刚石切削表面质量的因素

单点金刚石切削(single point diamond turning,简称SPDT)是一种使用纳米金刚石刀具进行加工的生产过程。而纳米单晶金刚石刀具具有刃口锋利、可反复成形和耐磨性高等特点。该方法能够使微米至亚微米级制造组件的形状精度和表面粗糙度控制在纳米级的范围内。单点金刚石切削优异的表面成形质量和面形精度,使该技术被广泛地应用于制造各种精密机械和光学部件,如注射成型塑料镜头和扫描反射镜。虽然单点金刚石切削满足了很多高精密零件的制造需求,但目前所了解的影响因素和表面生成的机制仍不完善,在生产中有很多因素会影响到单点金刚石的表面质量和面形精度,如主轴转速、进给速度和切削深度等,本文对此进行了分析。     

热压硫化锌的超精密磨削加工

针对用传统车削或研磨抛光方法加工大尺寸非球面热压硫化锌透镜存在的不足,采用金刚石砂轮磨削加工方法对热压硫化锌材料进行了加工实验。通过压痕、单颗粒金刚石刻划和磨削正交实验,研究了该方法在磨削加工过程中的塑性域去除机理及其亚表面损伤情况,并优化了超精密磨削加工工艺参数。压痕实验发现热压硫化锌材料在载荷作用下易于出现径向裂纹和微裂纹,其断裂韧性为2.643842MPa/m1/2,临界切削深度为1.808μm。单颗粒金刚石刻划实验结果表明,热压硫化锌材料在较小的切削深度下可以实现塑性域去除,但在机械去除过程中易出现多种形式的亚表层损伤。磨削实验结果表明,磨削深度是影响表面光洁度的主要因素,随着磨削深度的增大表面光洁度降低,最佳表面粗糙度为7.6nm。工作台进给速度是影响面形精度的主要因素,且平面磨削的面形精度PV值为0.185~0.395μm。研究结果表明,磨削加工热压硫化锌材料可以获得纳米级表面粗糙度。     

微纳V槽脆/塑性域切削的3D激光检测及评价

针对微纳米级功能V槽微细加工及评价困难的问题,采用单点金刚石切削方法在超精密机床上对光学玻璃进行V槽的微纳尺度加工,且利用非接触激光检测技术展现V槽的加工形貌。研究目的是分析V槽的微纳米尺度加工的可行性以及找出如何评价V槽加工精度的方法。首先,采用单点金刚石在光学玻璃上进行V槽的微纳尺度切削试验。然后,利用3D激光超精密检测仪器检测加工的V切痕,构建微V槽切痕的形貌图,建立V槽形状误差PV值和V槽尖角圆弧半径的评价模式。最后,分析在微纳尺度加工中切除深度与V槽角度的形成机理以及切削深度对V槽形状误差及其尖角圆弧半径的作用机制。结果表明,在亚微米级尺度加工中存在一个脆/塑性域切除加工状态转变的临界切削深度。在塑性域切削中,金刚石刀具尖角形状可以复制到工件表面,形成深度小于0.386μm、形状误差PV值约0.103μm、尖角半径约为0.182μm的V槽。此外,V槽形状误差PV值在塑性域切除加工中始终保持不变,但在脆性域切除加工中随着切削深度增大而逐渐剧烈加大。而且,V槽尖角圆弧半径在塑性域切削中随着切削深度减小而减小,但为了获得完整的V槽轮廓还需被控制在V槽成型临界界线以下。因此,在处理非接触激光检测的3D数据的基础上,V槽形状误差PV值和尖角圆弧半径可以用来评价V槽微纳尺寸加工的加工精度和微细程度。     

加强我国精密、超精密加工技术的研究与发展

精密、超精密加工技术在提高机电产品的性能、质量和发展高新技术中起着至关重要的作用。并且随着科学技术的发展,机械加工所能达到的精度也有很大的提高。因此,精密、超精密加工的概念范围也在发生变化。现在国内外文献中谈论的精密、超精密加工,几乎都是指微米级(形状尺寸误差为3～0.3μm,表面粗糙度为 Ra 0.3～0.03μm)、亚微米级(精度为0.3～0.03μm,粗糙度为 Ra 0.03～0.005μm)和纳米级(误差小于0.03μm,粗糙度值小于 Ra 0.005μm)精度的加工。人们常把微米级精度加工称为精密加工,而亚微级和纳米级精度加工则称为超精密加工。为了…     

无结合剂碳化钨非球面模具的超精密磨削加工

针对无结合剂碳化钨材料,进行非球面模具的法向磨削试验研究。分析法向磨削非球面时的砂轮对刀误差对磨削精度的影响,研究无结合剂碳化钨非球面模具的磨削表面形貌特征和最终表面质量,优化误差补偿工艺,并利用聚焦离子束对磨削后的非球面亚表层损伤进行成像分析。研究结果表明利用推导的砂轮对刀误差方程,可以在磨削加工前对砂轮的初始位置进行精确调整,提高磨削加工精度。磨削后无结合剂碳化钨非球面模具不同区域的表面质量不同,距非球面中心越近,磨削质量越好,距中心越远,磨削质量越差。经过3次误差补偿磨削加工后,最终的无结合剂碳化钨非球面模具的面形精度误差均小于0.3μm(PV值),表面粗糙度平均值小于8 nm(Ra值),亚表层没有明显的裂纹产生。     

超精密车削时切屑形成及表面微观形貌形成机理的研究

在亚微米级CNC超精密车床上进行了单晶金刚石刀具切削试验 ,根据试验结果分析了切屑形成机理和最小切削厚度与表面粗糙度之间的关系 ,建立了加工表面微观形貌的几何模型。研究结果表明 :通过计算最小切削厚度值可预测金刚石车削加工可获得的表面粗糙度值。     

微透镜阵列单点金刚石车削补偿技术

为了提高微透镜阵列单点金刚石车削的加工精度与一致性,提出了加工误差的理论模型,并针对其补偿方法进行了理论分析和实验研究.将微透镜阵列加工等效为自由曲面加工,通过建立单点金刚石慢刀伺服切削模型,计算了理论曲面在每一个切削点处沿切削方向的曲率半径;结合刀具等效倾斜角模型和机床加工时延模型,进一步得到了慢刀伺服切削微透镜阵列...     

国内外超精密加工技术与机床的发展状况

1 前言 超精密加工是指亚微米级和纳米级精度的加工.超精密加工主要包括3个领域:(1)超精密切削加工,如金刚石刀具的超精密切削,各种镜面及激光核聚变系统和天体望远镜的大型抛物面镜的加工.     

单晶硅激光辅助超精密切削工艺优化与表面特性

为了获得优化的单晶硅激光辅助超精密切削工艺,探究切削加工后单晶硅元件的表面特性,采用正交实验方法对单晶硅的激光原位辅助单点金刚石切削工艺参数进行优化,并对切削加工单晶硅表面质量、面形精度、残余应力和光学透过率等表面特性进行了测量与分析。通过正交实验数据的表面粗糙度方差分析和信噪比分析,获得的优化工艺参数组合为主轴转速为1 500 r/min、进给速率为5 mm/min、切削深度为3 μm、激光功率为4.5 W。采用上述工艺参数加工的165 mm口径单晶硅非球面光学元件的表面粗糙度和面形精度PV分别为2.74 nm和0.52 μm。激光辅助切削加工后的单晶硅表面存在(-1 760.8±362.1) MPa的残余压应力。激光辅助超精密切削加工的单晶硅光学元件在3～5 μm中红外波段镀膜前后的透过率分别为55%和98%,折射率为3.43。实验结果表明,激光辅助超精密切削技术可作为单晶硅光学元件的半精加工或最终精加工工序,以提升复杂面形单晶硅元件的制造效率。     

星载复杂结构钛合金薄壁件超声振动切削研究

为了实现轻量化设计,航天器常采用复杂结构钛合金薄壁件作为承载、连接和定位元件,但是这类零件在切削过程中容易产生刀具磨损和变形,导致加工精度低,难以满足工作要求.基于钛合金薄壁件切削特性研究,采用超声振动金刚石车削方式控制切削力、装夹力引起的加工变形和残余应力,通过在线补偿修正刀具磨损误差;对壁厚(3～5)mm的典型星载钛合金薄壁件进行椭圆形超声振动切削,尺寸精度达到5μm,圆度误差为2.83μm,满足加工精度和稳定性要求.     

Form error compensation in single-point inclined axis nanogrinding for small aspheric insert

Based on an examination of traditional arc-enveloped grinding method, a single-point inclined axis nanogrinding method is presented to grind an aspheric insert by compensating tool setting error, radius error, and residual form error. Profile data from on-machine measurement are used to obtain the tool setting error and radius error of grinding wheel, as well as the normal residual form error. Compensation method of single-point inclined axis nanogrinding is built up for generating new compensation path. Grinding test of aspheric tungsten carbide insert with diameter 9.5 mm is conducted to evaluate performances of the grinding mode and compensation method. A last form error of 200 nm in peak to valley and surface roughness of 2.243 nm in Ra are achieved. These results indicated that the form error compensation method and single-point inclined axis nanogrinding mode can significantly improve form accuracy and surface roughness of ground surface.     

光学自由曲面快速刀具伺服车削误差的补偿

受各种误差因素以及周期性变化的切削力的影响,快速刀具伺服金刚石车削技术往往难以用一次车削获得满足光学性能要求的自由曲面。本文提出了一种利用线性差动传感器(LVDT)实现高精度接触式自由曲面在位测量的方法。该方法结合两自由度快速刀具伺服系统,实现了基于快速刀具伺服(FTS)的自由曲面车削加工的误差补偿。试验结果表明,该技术将自由曲面的加工精度提高了20%,表面粗糙度降低18.1%,解决了FTS系统与机床运动的同步问题,可补偿机床xyz三向运动误差,可用于自由曲面加工误差的修正。该方法还可用于不对称幅度较大的曲面或硬脆性材料的加工等,故促进了高精度光学自由曲面的推广应用。     

F-Theta自由曲面透镜的精密与镜面磨削

针对光学玻璃的F-Theta自由曲面透镜加工困难等问题,提出将金刚石砂轮的椭圆环面代替圆环面,进行F-Theta自由曲面磨削加工,研究形状误差的补偿磨削方法和光学玻璃的镜面磨削工艺。根据F-Theta透镜的自由曲面建立砂轮与工件相切的刀具轨迹法向算法。采用#46粗金刚石砂轮修整成椭圆环面,提出自由曲面磨削的法向误差补偿加工模式。最后,采用#3000超细金刚石砂轮的椭圆环面进行轴向磨削试验。试验结果表明:传统的垂直误差补偿磨削可减小面形误差45.9%及其PV值11.6%;而新提出的法向误差补偿磨削可减小面形误差47.9%及其PV值41.5%。此外,超细砂轮磨削可使得自由曲面的粗糙度达到28 nm,其镜面磨削工艺有别于较粗砂轮磨削工艺。因此,椭圆环面砂轮的法向补偿磨削是提高自由曲面加工精度的有效方法,而且,无需研磨抛光就可以实现光学玻璃的自由曲面镜面磨削。     

Precise bi-arc curve fitting algorithm for machining an aspheric surface

With the rapid development of the information/image system and aero-space industries, high quality optic aspheric surface lenses play an increasingly important role for completion of the functionalities. Aspheric lenses are non-spherical surfaces having rotation symmetry about the lens axis. The aspheric lens has various shapes according to its application and often requires tens nanometer order form accuracy since surface roughness and form accuracy play essential roles in the functional performance of the optical products. Interpolation of the aspherical surface path must precisely meet the allowable tolerance. Linear interpolation of the aspheric surface path for CNC machining generates an enormous amount of NC code to satisfy the extremely small tolerance, and produces scallops on the machined surface due to the acceleration and deceleration of the tool during every linear motion. Alternatively, interpolations with bi-arcs are used. In this paper, in order to minimize the error induced by the cutting tool path and to shorten the calculation time of interpolation, a precise -arc interpolation method is proposed. The developed algorithm of bi-arc interpolation meets the given tolerance precisely. This is guaranteed by an analytical proof and error maps. Another advantage is its ability to calculate about five times faster than the existing arc interpolation, since iterative calculations for the maximum error can be omitted. The developed algorithm has been used for the precise aspheric machining.     

On-machine precision preparation and dressing of ball-headed diamond wheel for the grinding of fused silica

In the grinding of high quality fused silica parts with complex surface or structure using ball-headed metal bonded diamond wheel with small diameter,the existing dressing methods are not suitable to dress the ball-headed diamond wheel precisely due to that they are either on-line in process dressing which may causes collision problem or without consideration for the effects of the tool setting error and electrode wear.An on-machine precision preparation and dressing method is proposed for ball-headed diamond wheel based on electrical discharge machining.By using this method the cylindrical diamond wheel with small diameter is manufactured to hemispherical-headed form.The obtained ball-headed diamond wheel is dressed after several grinding passes to recover geometrical accuracy and sharpness which is lost due to the wheel wear.A tool setting method based on high precision optical system is presented to reduce the wheel center setting error and dimension error.The effect of electrode tool wear is investigated by electrical dressing experiments,and the electrode tool wear compensation model is established based on the experimental results which show that the value of wear ratio coefficient K’ tends to be constant with the increasing of the feed length of electrode and the mean value of K’ is 0.156.Grinding experiments of fused silica are carried out on a test bench to evaluate the performance of the preparation and dressing method.The experimental results show that the surface roughness of the finished workpiece is 0.03 μm.The effect of the grinding parameter and dressing frequency on the surface roughness is investigated based on the measurement results of the surface roughness.This research provides an on-machine preparation and dressing method for ball-headed metal bonded diamond wheel used in the grinding of fused silica,which provides a solution to the tool setting method and the effect of electrode tool wear.     

小型非球面数控抛光技术的研究

用计算机控制抛光的方法对小型非球面数控抛光技术进行了研究。对计算机控制小磨头抛光的材料去除作用进行了计算机模拟;依据计算机模拟结果,调整驻留时间函数,进行抛光补偿;最后,在自行研制的三轴联动非球面数控抛光原理样机上高效地完成了70 mm左右非球面的抛光,各项指标达到了中等精度要求,表面粗糙度为2.687 nm,面形精度为0.45 μm,且重复精度良好。结果表明,该技术有效提高了小型非球面光学零件的批量生产效率。     

Experimental investigation of surface and geometrical characteristics of rotary ultrasonic drilling of soda glass

Edge-chipping, surface roughness and dimensional accuracy are crucial quality aspects of drilled holes in hard-to-cut material such as glass, ceramics and carbon fiber reinforced plastics. In this article, an experimental study was conducted to investigate the quality measures of holes produced by rotary ultrasonic drilling (RUD) and conventional drilling. Edge-chipping width at tool exit side, the surface roughness (Ra and Rz), out-of-roundness, cylindricity error and hole conicity were the main responses when drilling soda glass using diamond abrasive tools and a cutting fluid. Statistically designed experiments were carried out for rotary ultrasonic and conventional drilling (CD) at two levels of tool feed rate (0.6 and 6?mm/min), spindle speed (3,000 and 8,000?rpm) and tool particles-concentration. Analysis of variance was used to define the significant factors and their interactions and build models for predicting the responses. The results showed that reducing the chipping, surface roughness and roundness error. The normal tool concentration showed a substantial effect in improving the surface quality and reducing the hole-geometrical errors.     

Ф420mm高次非球面透镜的加工与检测

介绍了Ф420mm熔石英高次非球面透镜的加工与检测方法。对现有数控加工工艺进行了优化,通过分工序加工方式,依次采用机器人研磨、抛光和离子束修形技术完成了透镜的加工。进行非球面透镜检测时,考虑透镜的凹面为球面,利用球面波干涉仪对其面形进行了直接检测,剔除干涉仪标准镜镜头参考面误差后,透镜凹面的精度达到0.011λ-RMS;针对透镜的凸面为高次非球面,采用基于背后反射自准法的零位补偿技术对其进行面形检测,其精度达到0.013λ-RMS。最后,采用一块高精度标准球面镜对加工后透镜的透射波前进行了自消球差检测,得到其波前误差为0.013λ-RMS。试验结果表明,非球面透镜各项技术指标均满足设计要求。所述工艺方法亦适用于更大口径的非球面透镜及其他类型非球面光学元件的高精度加工.     

ZF6重火石玻璃非球面数控加工技术的研究

由于重火石玻璃的密度很大,材料较软,在数控加工过程中难以控制材料的去除量。现主要针对Ф62mm ZF6非球面凸透镜,对铣磨成型工艺、抛光工艺、抛光设备及抛光液等相关工艺参数进行了研究,采用弹性模预抛光与小抛头修正抛光相结合的两步研抛法对零件表面快速抛光,给出了一套规范的ZF6玻璃非球面的数控加工工艺,同时保证了零件具有较高的面形精度,实现了该非球面元件的快速批量生产。Ф62mm口径非球面最终面形精度达到0．5μm以下,表面光洁度达到Ⅲ级,明显改善成像质量,减少系统中光学零件数目,满足了非球面的使用要求。