微加速度计中新型微杠杆机构设计和分析

设计谐振式微加速度计时,需要考虑一个最关键的问题是提高其灵敏度.放大质量块产生的惯性力是提高灵敏度的最有效方法.基于柔性铰链技术设计一种新型两级微杠杆放大机构,并建立了放大机构的力学和数学模型,在此基础上进行了解析法分析和参数优化设计;同时利用有限元分析方法对其进行了仿真计算.计算结果显示机构的放大倍数约为102倍.这一设计方案极大地提高了微加速度计的灵敏度.     

基于三梁结构的电热驱动谐振式微加速度传感器研究

为了提高电热激励/压阻拾振谐振式微加速度传感器的品质因数和消除交叉灵敏度,提出一种基于三梁结构的新设计.依据有限元模拟得到的固有振型来选择三梁结构参数,以减少能量耗散,提高品质因数.分析本设计消除交叉灵敏度的机制和独特的三梁结构的激振方式并对其进行有限元模拟.模拟结果证实这种谐振式微加速度传感器的灵敏度高于1000 Hz/g.     

硅微振梁式加速度传感器中微杠杆结构的设计

提出了一种采用微杠杆结构进行惯性力放大的硅微振梁式加速度传感器结构,阐述了其工作机理.在此基础上,讨论了两种不同的支点形式,分别推导了这两种结构形式的放大倍数计算公式,发现Ⅰ型支点形式的放大倍数略高于Ⅱ型支点,并采用有限元方法进行了仿真;分析了支点刚度以及输出轴刚度对放大倍数的影响;提出了微杠杆结构设计的原则.     

谐振式微加速度传感器的有限元分析

有限元分析用来评估一种新颖的谐振微加速度传感器,仔细分析新结构的几个主要振动模态,优化结构参数,证实这种硅基谐振式微加速度传感器的灵敏度高于1 000 Hz/gn.而且在有限元分析的基础上对实际制造的非完全匹配的双端固定音叉的特点和对于测量的不良影响进行分析.     

谐振式微机械加速度计设计的关键技术

谐振式微机械加速度计直接输出频率信号,具有稳定性好、精度高的特点.分析了谐振式微机械加速度计的工作机理,建立了第一级敏感结构、杠杆机构和第二级敏感结构的数学模型,指出了实现高灵敏度加速度测量的关键技术在于支撑梁、质量块、谐振器和杠杆机构的设计.提出了一种谐振式微机械加速度计结构,进行了结构的优化设计和仿真计算,得出的性能指标:谐振频率98 858 Hz,Q值673.9,灵敏度24.52 Hz/gn.     

推挽式谐振加速度传感器设计及仿真研究

设计了一种基于微杠杆原理的推挽式高精度、高灵敏度的硅微谐振加速度传感器.采用微杠杆放大结构,并通过单连接梁推挽谐振器实现力放大和差分输出,具有结构对称,尺寸易于加工的特点.通过设计结构、优化尺寸,并进行模态分析、静力分析和谐响应分析来完成整个结构的设计与仿真研究.结果表明:加速度计工作谐振频率分别为21.708 kHz...     

基于MEMS的参量放大的设计与实现

参量放大效应是一种非线性振动放大效应,利用该效应可以极大地增加MEMS陀螺和加速度计等谐振式传感器的振幅,从而提高谐振式传感器检测灵敏度和信噪比。根据理论分析和有限元仿真结果,设计了一种MEMS参量放大结构。该结构采用SOG工艺加工,在950Pa左右的气压环境下对该结构进行了实验研究,并得到了该结构参激电压、相位与放大倍数之间的关系。实验结果表明：参量放大效应的实测结果与理论分析结果吻合很好,当参数激励电压为5.7V时,参量放大倍数超过50倍,大幅提高了结构的振幅,为以后应用参量放大效应提高MEMS惯性仪表性能提供了一种新方法。     

硅岛式微谐振压力传感器灵敏度分析与仿真

微谐振式压力传感器尺寸小、重量轻、精度高并具有效字输出,在航空航天等领域有着广阔的应用前景.然而由于微机械加工工艺的限制,复杂结构的制作存在很多困难,因而为实现高灵敏度压力测量,微谐振式压力传感器的结构设计就显得尤为重要,因此提出一种新型硅岛式谐振梁支撑结构,它利用硅薄膜作为典型的一次敏感元件,并在其上表面中央部位设计了两个硅岛凸起平台,用以固定硅谐振梁,并通过有限元软件ANSYS进行仿真.分析结果表明,在一定量程内,该结构能有效提高谐振梁内的应力放大倍数,进而提高微压力传感器的灵敏度.     

高灵敏度谐振式微加速度传感器的设计与制作

为提高加速度传感器灵敏度,提出一种新的加速度敏感机制,并基于此原理设计了一种新的微机械谐振式加速度传感器结构.分析了加速度传感器的数学模型及影响灵敏度的关键参数,并以此为依据对传感器结构参数进行优化设计.采用扩散硅层作为谐振子,提高器件性能的同时简化了制作工艺,利用KOH溶液湿法腐蚀硅在各晶向上的各向异性,实现了支撑梁...     

一种基于谐振音叉的新型差动式硅微加速度计设计与分析

为提高谐振式加速度计灵敏度、稳定性以及减小加速度计体积,本文提出一种结构新颖的谐振式硅微加速度计。采用一级微杠杆机构对质量块惯性力进行放大,通过一对差动布置的双端固支音叉谐振器的固有频率变化检测惯性力,从而实现对加速度的测量。该加速度计可采用体硅加工工艺,给出了总体工艺流程。采用解析和有限元分析方法对加速度计敏感元件进行了分析,有限元分析结果与解析分析结果相吻合,有限元分析可得加速度计灵敏度为57.4 Hz/gn。分析结果表明该加速度计结构具有高灵敏度、高温度稳定性和小体积等优点。     

电容式微加速度计的刻度温漂的半解析模型

针对电容式微加速度计的刻度温漂,根据微加速度计的检测原理及热变形的分析结果,建立了刻度温漂的半解析模型,并在此基础上分析了刻度温漂的主要影响因素.分析结果表明,刻度温漂由两部分组成,第一部分主要由单晶硅的弹性模量的温度系数决定,可以通过高掺杂降低;第二部分由微加速度计的热变形引起,它的大小与封装胶的弹性模量、梳齿的宽度、大电容间隙与小电容间隙的比值以及固定梳齿锚点的位置相关;第一部分和第二部分分别是正数和负数,因此相互补偿.基于MEMS体硅微加工工艺,制造了微加速度计的实验样品,刻度温漂的测量结果验证了理论分析结果的正确性.     

A new analytical model of single-stage microleverage mechanism in resonant accelerometer

Microleverage mechanism which is widely applied in microelectromechanical systems (MEMS) transfers and amplifies force or displacement from input to output. In this work, one-stage microleverage mechanism is integrated into a biaxial micro resonant accelerometer to improve sensitivity. Force amplification factor of the microleverage is analyzed and deduced by integral method. The results from theoretical model match well with the ones from finite element method (FEM) simulation, which proves that the proposed model is relatively accurate and the width of lever beam is a quite important parameter in design. The resonant accelerometer is successfully fabricated by MEMS technology. Preliminary experiments are conducted and demonstrate differential sensitivity of 71 Hz/g for the accelerometer with resonant frequency of 267.726 kHz.     

Two-stage compliant microleverage mechanism optimization in a resonant accelerometer

Compliant microleverage mechanisms can be used in micro-electro-mechanical systems (MEMS) to transfer an input force/displacement to an output to achieve mechanical/geometrical advantages. By stacking multiple stages of microlevers together, a compound microleverage mechanism is obtained with a higher amplification factor. This paper presents the analysis and optimization of a two-stage microleverage mechanism in a resonant output micro-accelerometer for force amplification. It is found that the compliance of the two-stage mechanism needs to be appropriately distributed in order for both stages to have the desired amplification effect. June 13, 2000     

静电梳微振子结构和特性研究

较系统地研究了静电梳驱动微振子的结构和工作原理，导出了微振子的谐振频率、品质因子及跨导等参数，以及相应的力学和电学模型，并研究了空气粘滞效应对品质因子的影响，在此基础上，设计出几种不同尺寸，不同形状的微型谐振子结构，并用表面微机械加工方法成功地制成了能横向振动的静电梳微振子，实测得到的谐振频率在７．５￣９．０ｋＨｚ范围内，在空气中品质因子为１００左右，与理论计算能较好符合。     

Design,modeling and test of a novel compliant orthogonal displacement amplification mechanism for the compact micro-grasping system

In the compact micro-grasping system, the combination of precisely orthogonal movement transformation, displacement amplification and simple structure is important. The typical solution of the combination issue requires bidirectional symmetric input forces/displacements. However, under a certain driving condition, numerous actuators used in micro-manipulation only supply unidirectional input froce/displacement for the driven mechanism, which makes the typical solution infeasible. In this study, a novel compliant orthogonal displacement amplification mechanism (DAM) is proposed to solve the combination issue for numerous actuators used in micro-grasping. The proposed mechanism is a triangulation amplification-based mechanism with undetermined structural parameters. The number of the undetermined parameters and the solution principle are analyzed. The design process is presented. Finite element analysis (FEA) is used to verify the design method. The FEA results show that, for the design examples, the errors evaluating the orthogonal movement transformation are smaller than 0.56 % and 0.15 % respectively, and the displacement amplification ratios are larger than 4.6. The orthogonal displacement amplification is realized. A precise model of the displacement amplification ratio is derived. The dynamic performances of the proposed orthogonal DAM are modeled and FEA verified. Furthermore, a microgripper utilizing the proposed mechanism is presented. The performances of the gripper, including the displacement amplification and the parallel movement of the jaws, are verified by FEA and experiments.

     

Performance optimization and mechanical modeling of uniaxial piezoresistive microaccelerometers

The acceleration measurements in automotive, navigation, biomedical and consumer applications demand high-performance microaccelerometers. This paper presents an optimization model to maximize the bandwidth of uniaxial piezoresistive microaccelerometers based on cantilever-type beams. The proposed model provides a high sensitivity as well as normal stress levels lower than the material rupture stress of these microaccelerometers. This model uses the Rayleigh method to determine the objective function of the bandwidth and the maximum-normal-stress failure theory to obtain a stress constraint that guarantees safe operation for the microaccelerometer structure. The Box-Complex optimization method is used to solve the optimization model due to its easy programming algorithm. Finite element models (FE) are developed to determine the mechanical behavior of the optimized piezoresistive microaccelerometers. The results of the FE models agree well with those of the optimization model. The optimization model can be easily used by designers to find the optimum geometrical dimensions of piezoresistive microaccelerometers to maximize their performance.     

Electrothermal-driven gap adjustable MEMS comb structure: modeling and simulation of the equivalent circuit macromodel

Theoretical model of gap adjustable comb structure has been presented in this paper. This structure can be used to increase the sensitivity of sensor. As an example, an electrothermal-driven gap adjustable comb structure has been proposed, and the mechanical–electrical coupling equations of the system have been derived. According to the coupling equations, a macromodel of the comb structure has been presented through the combine of equivalent circuit method and nodal analysis method. Simulation of the macromodel has been carried out with SPICE, and the result agreed with the FEA result in a certain range of accuracy. The result has also been compared with theoretical analysis, which coincide the theoretical solution fully. Amplitude modulation characteristics of the gap adjustable comb structure have also been studied with SPICE in this paper.