Performance of Ar/sup +/-milled Ti:sapphire rib waveguides as single transverse-mode broadband fluorescence sources

Rib waveguides have been fabricated in pulsed-laser-deposited Ti:sapphire layers using photolithographic patterning and subsequent Ar/sup +/-beam milling. Fluorescence output powers up to 300 /spl mu/W have been observed from the ribs following excitation by a 3-W multiline argon laser. Mode intensity profiles show high optical confinement and the measured beam propagation factors M/sub x//sup 2/ and M/sub y//sup 2/ of 1.12 and 1.16, respectively, indicate single transverse-mode fluorescence emission. Loss measurements using the self-pumped phase conjugation technique have yielded comparable values (1.7 dB/cm) for the ribs and the unstructured planar waveguide counterparts. The combination of optimum modal properties and strong optical confinement, together with sufficient levels of fluorescence output, make the single-moded Ti:sapphire rib waveguides a very interesting candidate as a fluorescence source for optical coherence tomography applications.     

Optical subthreshold current method for extracting the interface states in MOS systems

Optical subthreshold current method (OSCM) is proposed for characterizing the interface states in MOS systems using the current-voltage characteristics under a photonic excitation. An optical source with a subbandgap (E/sub ph/相似文献   

A resonant tunneling quantum-dot infrared photodetector

A novel device-resonant tunneling quantum-dot infrared photodetector-has been investigated theoretically and experimentally. In this device, the transport of dark current and photocurrent are separated by the incorporation of a double barrier resonant tunnel heterostructure with each quantum-dot layer of the device. The devices with In/sub 0.4/Ga/sub 0.6/As-GaAs quantum dots are grown by molecular beam epitaxy. We have characterized devices designed for /spl sim/6 /spl mu/m response, and the devices also exhibit a strong photoresponse peak at /spl sim/17 /spl mu/m at 300 K due to transitions from the dot excited states. The dark currents in the tunnel devices are almost two orders of magnitude smaller than those in conventional devices. Measured values of J/sub dark/ are 1.6/spl times/10/sup -8/ A/cm/sup 2/ at 80 K and 1.55 A/cm/sup 2/ at 300 K for 1-V applied bias. Measured values of peak responsivity and specific detectivity D/sup */ are 0.063 A/W and 2.4/spl times/10/sup 10/ cm/spl middot/Hz/sup 1/2//W, respectively, under a bias of 2 V, at 80 K for the 6-/spl mu/m response. For the 17-/spl mu/m response, the measured values of peak responsivity and detectivity at 300 K are 0.032 A/W and 8.6/spl times/10/sup 6/ cm/spl middot/Hz/sup 1/2//W under 1 V bias.     

AlGaAsSb-InGaAsSb HPTs with high optical gain and wide dynamic range

Novel heterojunction phototransistors based on AlGaAsSb-InGaAsSb material systems are fabricated and their characteristics are demonstrated. Responsivity of a phototransistor is measured with applied bias voltage at four different wavelengths. The maximum responsivity around 1400 A/W and minimum noise equivalent power of 1.83/spl times/10/sup -14/ W/Hz/sup 1/2/ from this phototransistor with bias of 4.0 V at a wavelength of 2.05 /spl mu/m were measured at 20/spl deg/C and -20/spl deg/C, respectively. Noise equivalent power of the phototransistor is considerably lower compared with commercially available InGaAs p-i-n photodiodes. Collector current measurements with applied incident power are performed for two phototransistors. Currents of 400 nA at low intensity of 0.425 /spl mu/W/cm/sup 2/ and of 30 mA at high intensity of 100 mW/cm/sup 2/ are determined. Collector current increases nearly by five orders of magnitude between these two input intensities. High and constant optical gain of 500 in the 0.46-nW to 40-/spl mu/W input power range is achieved, which demonstrates high dynamic range for such devices at these power levels.     

Design and fabrication of zinc oxide thin-film ridge waveguides on silicon substrate with ultraviolet amplified spontaneous emission

Zinc oxide (ZnO) thin-film ridge waveguides have been designed and fabricated on n-type (100) silicon substrate. A filtered cathodic vacuum arc technique is used to deposit high-crystal-quality ZnO thin films on lattice-mismatched silicon substrates at 230/spl deg/C. A ridge waveguide of width /spl sim/2 /spl mu/m and height /spl sim/0.1 /spl mu/m is defined on the ZnO thin film by plasma etching. Room-temperature amplified spontaneous emission is observed with peak wavelength at /spl sim/385 nm under 355-nm optical excitation. It is found that the net optical gain of the ZnO thin-film ridge waveguides can be as large as 120 cm/sup -1/ at a pump intensity of /spl sim/1.9 MW/cm/sup 2/.     

Integrated semiconductor vertical-cavity surface-emitting lasers and PIN photodetectors for biomedical fluorescence sensing

Vertical-cavity surface-emitting lasers (VCSELs), optical emission filters, and PIN photodetectors were fabricated as part of a monolithically integrated near-infrared fluorescence detection system. The integration of these micro-fabricated components with micro-arrays, flow channel arrays, and biochips can drastically reduce cost and enable parallel sensing architectures. An optoelectronic design is presented that integrates VCSELs, optical filters, and photodetectors through a modification to a typical VCSEL structure. System designs were simulated and compared, leading to several innovative approaches for integrated sensors. The laser and detector modules were characterized independently and subsequently integrated to form a complete sensor. VCSELs with oxidation apertures measuring 4, 7, 14, and 20 /spl mu/m showed a lasing wavelength of /spl lambda/=773 nm, threshold current densities from 6400 to 1300 A/spl middot/cm/sup -2/, and maximum output powers of 0.6-4 mW, with transverse single-mode and multimode operation. PIN photodetectors were fabricated with integrated emission filters. Quantum efficiencies above 85% were observed with a dark current of 500 fA/(mm detector diameter). Complete sensor units were tested and near-infrared fluorescent molecules (IR-800) were detected. A theoretical detection limit of 10/sup 5/ fluorophores//spl mu/m/sup 2/ was determined. The compact parallel architecture, high-power laser, and low-noise photodetector make this sensor a good candidate for biomedical fluorescence-based sensing applications.     

Room-temperature InAsSb photovoltaic detectors for mid-infrared applications

Novel noncryogenic InAsSb photovoltaic detectors grown by molecular beam epitaxy are proposed and demonstrated. The quaternary alloy In/sub 0.88/Al/sub 0.12/As/sub 0.80/Sb/sub 0.20/ is introduced as a wide bandgap barrier layer lattice matched to the GaSb substrate. The valence band edge of In/sub 0.88/Al/sub 0.12/As/sub 0.80/Sb/sub 0.20/ nearly matches with InAs/sub 0.91/Sb/sub 0.09/, leading to more efficient transport of photogenerated holes. The resulting mid-infrared photovoltaic detector exhibits a 50% cutoff wavelength of 4.31 /spl mu/m and a peak responsivity of 0.84 A/W at room temperature. High Johnson-noise-limited detectivity (D/sup */) of 2.6/spl times/10/sup 9/ cm/spl middot/Hz/sup 1/2//W at 4.0 /spl mu/m, and 4.2/spl times/10/sup 10/ cm/spl middot/Hz/sup 1/2//W at 3.7 /spl mu/m are achieved at 300 K and 230 K, respectively.     

High-temperature 4.5-/spl mu/m type-II quantum-well laser with Auger suppression

Laser emission at 4.2-4.5 /spl mu/m has been observed at temperatures up to 310 K in pulsed optical pumping experiments on type-II quantum-well (QW) lasers with four constituents in each period (InAs-Ga/sub 1-x/In/sub x/Sb-InAs-AlSb). The characteristic temperature, T/sub 0/, is 41 K, and a peak output power exceeding 2 W/facet is observed at 200 K. The power conversion efficiency per facet of /spl ap/0.2% up to 200 K is within a factor of 2 of the theoretical value. The 300 K Auger coefficient of 4/spl times/10/sup -27/ cm/sup 6//s extracted from the threshold pump intensity demonstrates that Auger losses have been suppressed by a factor of four.     

16 W continuous-wave output power from 100 /spl mu/m-aperture laser with quantum well asymmetric heterostructure

16 W continuous-wave room temperature front facet output optical power and 74% wallplug efficiency were attained in 100 /spl mu/m-aperture 1.06 /spl mu/m-emitting laser diodes with 2-3 mm cavity length. The lasers are based on AlGaAs/GaAs/InGaAs quantum well asymmetric heterostructures with 1.7 /spl mu/m-thick waveguide having 0.34 cm/sup -1/ internal optical loss.     

Effect of the doping level of a p-cladding layer on the performance of GaAs-AlGaAs multiquantum-well lasers

CW performance of multiquantum-well (MQW) GaAs-AlGaAs lasers operating near 850 nm at 300 K is investigated as a function of the doping level in the p-cladding layer. Laser structures have been grown by metal-organic chemical vapor deposition using Zn diethyl as a carrier for acceptor dopant. An undoped sublayer (setback) has been introduced to separate the heavily doped part of the cladding from the mode volume. The doping level of zinc ranges from 4/spl times/10/sup 17/ to 6.5/spl times/10/sup 18/cm/sup -3/. Along with this increase of the doping level, the threshold current density increases from 370 to 612 A/cm/sup 2/ whereas the slope efficiency of the laser increases from 0.71 to 1.33 W/A with an improvement of the characteristic temperature constant T/sub 0/ from 150 to 250 K. At the highest level of doping, the internal quantum yield is found to be close to unity and optical losses are as low as 1.36 cm/sup -1/. An increase of the stable single-mode output is also obtained in 3-/spl mu/m-wide ridge-waveguide diodes up to /spl sim/180 mW.     

Room temperature performance of low threshold 1.34-1.44-/spl mu/m GaInNAs-GaAs quantum-well lasers grown by molecular beam epitaxy

Room temperature lasing emission at 1.338 and 1.435 /spl mu/m with threshold current densities of 1518 and 1755 A/cm/sup 2/, respectively, is obtained in broad area GaInNAs-GaAs laser diodes (LDs) grown by molecular beam epitaxy. The 1.338-/spl mu/m LDs show a power output per facet up to 0.20 W/A, a characteristic temperature (T/sub 0/) of 78 K, and an external transparency current density (J/sub tr/) of 0.77 kA/cm/sup 2/. Increasing the lasing wavelength to 1.435 /spl mu/m results in a larger J/sub tr/ of 1.16 kA/cm/sup 2/ and a lower T/sub 0/ of 62 K, due to larger nonradiative recombination. However, the 1.435-/spl mu/m LDs still display a power output per facet up to 0.15 W/A, and a high internal quantum efficiency of 52%. These improved performances are achieved without the need to use strain compensation layers, Sb as a surfactant during the quantum-well growth, or a postgrowth thermal anneal cycle.     

Optimized second-harmonic generation in quantum cascade lasers

Optimized second-harmonic generation (SHG) in quantum cascade (QC) lasers with specially designed active regions is reported. Nonlinear optical cascades of resonantly coupled intersubband transitions with giant second-order nonlinearities were integrated with each QC-laser active region. QC lasers with three-coupled quantum-well (QW) active regions showed up to 2 /spl mu/W of SHG light at 3.75 /spl mu/m wavelength at a fundamental peak power and wavelength of 1 W and 7.5 /spl mu/m, respectively. These lasers resulted in an external linear-to-nonlinear conversion efficiency of up to 1 /spl mu/W/W/sup 2/. An improved 2-QW active region design at fundamental and SHG wavelengths of 9.1 and 4.55 /spl mu/m, respectively, resulted in a 100-fold improved external linear-to-nonlinear power conversion efficiency, i.e. up to 100 /spl mu/W/W/sup 2/. Full theoretical treatment of nonlinear light generation in QC lasers is given, and excellent agreement with the experimental results is obtained. For the best structure, a second-order nonlinear susceptibility of 4.7/spl times/10/sup -5/ esu (2/spl times/10/sup 4/pm/V) is calculated, about two orders of magnitude above conventional nonlinear optical materials and bulk III-V semiconductors.     

High-voltage normally off GaN MOSFETs on sapphire substrates

Gallium nitride self-aligned MOSFETs were fabricated using low-pressure chemical vapor-deposited silicon dioxide as the gate dielectric and polysilicon as the gate material. Silicon was implanted into an unintentionally doped GaN layer using the polysilicon gate to define the source and drain regions, with implant activation at 1100/spl deg/C for 5 min in nitrogen. The GaN MOSFETs have a low gate leakage current of less than 50 pA for circular devices with W/L=800/128 /spl mu/m. Devices are normally off with a threshold voltage of +2.7 V and a field-effect mobility of 45 cm/sup 2//Vs at room temperature. The minimum on-resistance measured is 1.9 m/spl Omega//spl middot/cm/sup 2/ with a gate voltage of 34 V (W/L=800/2 /spl mu/m). High-voltage lateral devices had a breakdown voltage of 700 V with gate-drain spacing of 9 /spl mu/m (80 V//spl mu/m), showing the feasibility of self-aligned GaN MOSFETs for high-voltage integrated circuits.     

Nano-Watt silicon-on-sapphire ADC using 2C-1C capacitor chain

An analogue-to-digital converter (ADC) in a 0.5 /spl mu/m silicon-on-sapphire CMOS technology is reported. This innovative ADC uses a 2C-1C capacitor chain and a switched capacitor comparator. The ADC is capable of sampling at 409 kS/s, consuming 900 nW at 1.1 V power supply and 1.35 /spl mu/W at 1.5 V. It uses an active area of 300/spl times/700 /spl mu/m/sup 2/ and 640/spl times/1070 /spl mu/m/sup 2/ with pads.     

Fabrication and characteristics of GaP-AlGaP tapered waveguide semiconductor Raman amplifiers

We have fabricated GaP-AlGaP tapered waveguide semiconductor Raman amplifiers, and analyzed the effect of tapering in pulse-pumped high-gain operation. The finesse measurement and 80-ps pulse pumped Raman amplification experiment were performed. Although the tapering has caused additional optical loss, the highest gain of 23 dB has been obtained for a tapered waveguide with input facet of 6.0 /spl mu/m/sup 2/ and back facet of 2.9 /spl mu/m/sup 2/ at averaged input power of 170 mW (peak power 26 W). It is shown that the optical loss of the pump light is more severe than the linear optical loss of the signal light when the gain is higher than 20 dB.     

Germania-based core optical fibers

Germania-glass-based core silica glass cladding single-mode fibers (/spl Delta/n up to 0.143) with a minimum loss of 20 dB/km at 1.9 /spl mu/m were fabricated by the modified chemical vapor deposition (MCVD) method. The fibers exhibit strong photorefractivity with the type-IIa-induced refractive-index modulation of 2/spl times/10/sup -3/. The Raman gain of 300 to 59 dB/(km/spl middot/W) was determined at 1.07 to 1.6 /spl mu/m, respectively, in a 75 mol.% GeO/sub 2/ core fiber. Only 3 m of such fibers are enough for the creation of a 10-W Raman laser at 1.12 /spl mu/m with a 13-W pump at 1.07 /spl mu/m. Raman generation in optical fiber at a wavelength of 2.2 /spl mu/m was obtained for the first time.     

Multi-watt, high efficiency, diffraction-limited Nd:YAG planar waveguide laser

An efficient, longitudinally diode-pumped, diffraction-limited, Nd:YAG double-clad planar waveguide laser was operated on four transitions of the Nd/sup 3+/ ion. Optimized output powers of 4.3, 3.5, and 2.7 W were obtained for absorbed pump powers of /spl sim/7 W, for the transitions at the lasing wavelengths of 1.064 /spl mu/m, 946 nm, and 1.3 /spl mu/m, respectively. Operation of the weak /sup 4/F/sub 3/2//spl rarr//sup 4/I/sub 5/2/ transition, lasing at 1.833 /spl mu/m, was demonstrated at an absorbed pump power threshold of 300 mW and an output power of 400 mW, with a nonoptimized output coupling. Diffraction-limited performance was obtained in both the guided and nonguided axes.     

Low-loss, high-voltage 6H-SiC epitaxial p-i-n diode

The p-i-n diodes were fabricated using 31 /spl mu/m thick n/sup -/- and p-type 6H-SiC epilayers grown by horizontal cold-wall chemical vapor deposition (CVD) with nitrogen and aluminum doping, respectively. The diode exhibited a very high breakdown voltage of 4.2 kV with a low on-resistance of 4.6 m/spl Omega/cm/sup 2/. This on-resistance is lower (by a factor of five) than that of a Si p-i-n diode with a similar breakdown voltage. The leakage current density was substantially lower even at high temperatures. The fabricated SiC p-i-n diode showed fast switching with a turn-off time of 0.18 /spl mu/s at 300 K. The carrier lifetime was estimated to be 0.64 /spl mu/s at 300 K, and more than 5.20 /spl mu/s at 500 K. Various characteristics of SiC p-i-n diodes which have an advantage of lower power dissipation owing to conductivity modulation were investigated.     

Superlattice microrefrigerators fusion bonded with optoelectronic devices

A three-dimensional (3-D) electrothermal model was developed to study the InP-based thin-film In/sub 0.53/Ga/sub 0.47/As/In/sub 0.52/Al/sub 0.48/As superlattice (SL) microrefrigerators for various device sizes, ranging from 40/spl times/40 to 120/spl times/120/spl mu/m /sup 2/. We discussed both the maximum cooling and cooling power densities (CPDs) for experimental devices, analyzed their nonidealities, and proposed an optimized structure. The simulation results demonstrated that the experimental devices with an optimized structure can achieve a maximum cooling of 3/spl deg/C, or equivalently, a CPD over 300W/cm/sup 2/. Furthermore, we found it was possible to achieve a maximum cooling of over 10/spl deg/C; equivalently, a CPD over 900W/cm/sup 2/, when the figure of merit (ZT) of InGaAs/InAlAs SL was enhanced five times with nonconserved lateral momentum structures. Besides monolithic growth, we also proposed a fusion bonding scheme to simply bond the microrefrigerator chip on the back of the hot spots, defined as two-chip integration model in this paper. The cooling effect of this model was analyzed using ANSYS simulations.     

Arrays of AC-excited, silicon microdischarge devices as large as 40 000 (200/spl times/200) pixels: electrical and optical characteristics for operation in neon

Electrical characteristics of arrays of (50 /spl mu/m)/sup 2/ Si microplasma devices operating in 500-900 Torr of Ne are presented. Arrays as large as 200/spl times/200 pixels have been AC-excited at frequencies of 5-20 kHz and all exhibit reproducible ignition voltages and lifetimes. At 700 Torr, the power consumed per pixel for a 200/spl times/200 pixel array is 85/spl plusmn/2 /spl mu/W, 190/spl plusmn/2 /spl mu/W, and 290/spl plusmn/2 /spl mu/W for excitation frequencies of 5, 10, and 15 kHz, respectively, and 5.5, 12.0, and 17.8 mA, respectively, of total current (RMS) drawn by the array.