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1.
AlGaN MSM紫外探测器   总被引:2,自引:0,他引:2  
用通过MOCVD生长的未掺杂的n-Al0.3Ga0.7N制备了金属-半导体-金属 (MSM)结构紫外探测器。器件在2.5V偏压时的暗电流为1pA,在6.5V偏压时的暗电流为1nA.在1V偏压下和298nm波长处,探测器的电流响应率为0.038A/W,在300nm 波长处有陡峭的截止边,这与文献中介绍的AlxGa1-xN探测器在x=0.3时截止波长为 300nm相一致。  相似文献   

2.
用MOCVD生长未掺杂n-Al0.3Ga0.7N制备了MSM结构紫外探测器,并通过电击穿MSM右边肖特基势垒而制成了横向肖特基二极管.器件在零偏电压处的背景光电流为87.3 pA.从器件的室温I-V特性曲线计算出理想因子n、零偏势垒高度B0和串联电阻RS分别为1.99、0.788 eV和10.2 kΩ.器件在305 nm波长处有陡峭的截止边,300 nm峰值波长处电流响应率为0.034 A/W.  相似文献   

3.
在蓝宝石上用MOCVD生长的材料制备了背入射Al0.42Ga0.58N/Al0.40Ga0.60N异质结p-I-n太阳光盲紫外探测器.从器件的正向Ⅰ-Ⅴ特性曲线计算了理想因子n与串联电阻Rs分别为3和93?器件在零偏压下275nm峰值波长处的外量子效率与探测率分别为9%和4.98×1011cm·Hz1/2/W,分析表明Al0.42Ga0.58N窗口层在275nm波长处的透过率仅为15.7%,是器件外量子效率和探测率偏低的原因之一.  相似文献   

4.
在蓝宝石衬底上,用金属有机物气相沉积(MOCVD)法外延生长AlGaN/GaN异质结样品.溅射Ti/Al/Ni/Au和Ni/Au金属膜,在氮气气氛中高温快速退火,分别与样品形成欧姆接触和肖特基接触.随着退火时间的增加,金属-半导体金属(MSM)结构的I V特性曲线保持良好的对称性,但C V曲线逐渐失去其对称性.MSM探测器的紫外响应曲线具有良好的对比度和选择性,出现明显的光电导增益效应.  相似文献   

5.
在蓝宝石上用MOCVD生长的材料制备了背入射Al0.42Ga0.58N/Al0.40Ga0.60N 异质结 p-i-n 太阳光盲紫外探测器. 从器件的正向I-V特性曲线计算了理想因子n与串联电阻RS分别为3和93Ω. 器件在零偏压下275nm峰值波长处的外量子效率与探测率分别为9%和4.98e11cm·Hz1/2/W,分析表明Al0.42Ga0.58N窗口层在275nm波长处的透过率仅为15.7%,是器件外量子效率和探测率偏低的原因之一.  相似文献   

6.
在蓝宝石衬底上,用MOCVD(金属有机物气相沉积)法外延生长AlGaN/GaN异质结样品.溅射Ti/Al/Ni/Au和Ni/Au金属膜,在氮气气氛中高温快速退火,分别与样品形成欧姆接触和肖特基接触.随着退火时间的增加,MSM(金属-半导体-金属)结构的I-V特性曲线保持良好的对称性,但C-V曲线逐渐失去其对称性.MSM探测器的紫外响应曲线具有良好的对比度和选择性,出现明显的光电导增益效应.  相似文献   

7.
在蓝宝石衬底上,用MOCVD(金属有机物气相沉积)法外延生长AlGaN/GaN异质结样品.溅射Ti/Al/Ni/Au和Ni/Au金属膜,在氮气气氛中高温快速退火,分别与样品形成欧姆接触和肖特基接触.随着退火时间的增加,MSM(金属-半导体-金属)结构的I-V特性曲线保持良好的对称性,但C-V曲线逐渐失去其对称性.MSM探测器的紫外响应曲线具有良好的对比度和选择性,出现明显的光电导增益效应.  相似文献   

8.
在蓝宝石衬底上,用MOCVD(金属有机物气相沉积)法外延生长AlGaN/GaN异质结样品. 溅射Ti/Al/Ni/Au和Ni/Au金属膜,在氮气气氛中高温快速退火,分别与样品形成欧姆接触和肖特基接触. 随着退火时间的增加,MSM(金属-半导体-金属)结构的I-V特性曲线保持良好的对称性,但C-V曲线逐渐失去其对称性. MSM探测器的紫外响应曲线具有良好的对比度和选择性,出现明显的光电导增益效应.  相似文献   

9.
在蓝宝石衬底上,用金属有机物气相沉积(MOCVD)法外延生长AlGaN/GaN异质结样品。溅射Ti/Al/Ni/Au和Ni/Au金属膜,在氮气气氛中高温快速退火,分别与样品形成欧姆接触和肖特基接触。随着退火时间的增加,金属一半导体金属(MSM)结构的I-V特性曲线保持良好的对称性,但C-V曲线逐渐失去其对称性。MSM探测器的紫外响应曲线具有良好的对比度和选择性,出现明显的光电导增益效应。  相似文献   

10.
在利用金属有机化学气相沉积(MOCVD)方法生长的Al0.3Ga0.7N材料上制备了平面和台面结构的肖特基探测器.I-V和光谱响应测试结果表明:台面结构器件的反向漏电流大于平面结构器件的反向漏电流,它们的势垒高度分别为0.71 eV和0.90 eV,理想因子分别为1.12和1.02;峰值响应率分别为0.07 A/W和0.005 A/W,台面结构器件的响应光谱曲线在响应波段比较平坦,而平面结构器件的光谱响应是一条随着波长的减小而降低的曲线.这些现象可能主要是由于台面结构的欧姆接触电阻及串联电阻相对较小和离子束刻蚀对台面结构所带来的损伤所致.  相似文献   

11.
We have measured and analyzed the extended fine structure on the Sn K-shell x-ray absorption spectra of GaAs and Ga0.7Al0.3As doped with ∼5 x 1018 cm−3 Sn. Our results and their implications for the atomic structure of DX centers are discussed.  相似文献   

12.
设计并研制了一种新型复合沟道Al0.3Ga0.7N/Al0.05Ga0.95N/GaN HEMT(CC-HEMT)微波单片集成压控振荡器(VCO),且测试了电路的性能.CC-HEMT的栅长为1μm,栅宽为100μm.叉指金属-半导体-金属(MSM)变容二极管被设计用于调谐VCO频率.为提高螺旋电感的Q值,聚酰亚胺介质被插入在电感金属层与外延在蓝宝石上GaN层之间.当CC-HEMT的直流偏置为Vgs=-3V,Vds=6V,变容二极管的调谐电压从5.5V到8.5V时,VCO的频率变化从7.04GHz到7.29GHz,平均输出功率为10dBm,平均功率附加效率为10.4%.当加在变容二极管上电压为6.7V时,测得的相位噪声为-86.25dBc/Hz(在频偏100KHz时)和-108dB/Hz(在频偏1MHz时),这个结果也是整个调谐范围的平均值.据我们所知,这个相位噪声测试结果是文献报道中基于GaN HEMT单片VCO的最好结果.  相似文献   

13.
We describe the design of a microwave oscillator using resonant tunneling diodes. The devices are fabricated from Al0.3Ga0.7As-GaAs double barrier hetero-structures grown by molecular beam epitaxy. Design criteria improving current drivability are established from a theoretical study of tunneling transmission probabilities. Very high peak current densities up to 3.104 A/cm2, favorable for high frequency operation as an oscillator, have been achieved experimentally. The devices exhibit stable oscillations at liquid nitrogen temperature and at room temperature when the tunnel diode oscillator is constructed with a stabilizing network.  相似文献   

14.
The electric fields in Al0.3Ga0.7N/Al0.4Ga0.6N quantum wells are estimated. The quantum wells are grown by plasma-assisted molecular-beam epitaxy with plasma activation of nitrogen. The three-dimensional and planar modes of buffer layer growth are used. The transition to the three-dimensional mode of growth yields a substantial increase in the photoluminescence intensity of the quantum wells and a shift of the photoluminescence line to shorter wavelengths. These effects are attributed to the fact that, because of the extra three-dimensional localization of charge carriers in the quantum-well layer, the quantum-confined Stark effect relaxes. The effect of localization is supposedly due to spontaneous composition fluctuations formed in the AlGaN alloy and enhanced by the three-dimensional growth.  相似文献   

15.
在室温下,通过光致发光实验研究了用MBE生长的GaAs/Al0.3Ga0.7As超晶格材料的光致发光特性,对测得的发光峰进行了指认.理论计算和实验结果符合很好.  相似文献   

16.
Ni/AlGaN/GaN Schottky barrier diodes were characterized by electrical and optical measurements. Analysis of temperature-dependent (80?K to 550?K) current–voltage characteristics considering various transport mechanisms shows that the tunneling current dominates in the samples investigated. Thermionic emission current, extracted from the total current by a fitting procedure, yielded an effective barrier height of 1.36?eV to 1.39?eV at 300?K, and its slight decrease with increased temperature. This result shows that significantly lower barrier heights reported before (0.73?eV to 0.96?eV) follow from an assumption that the measured and thermionic currents are equal. The barrier height of 1.66?eV extracted from photoemission measurements confirms that electrically evaluated barrier heights are underestimated. The tunneling current contribution is considered to be dislocation governed, and a dislocation density of about 2?×?108?cm?2 is calculated.  相似文献   

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