双光子三维微细加工技术及实验系统的开发

介绍了一种新型的三维微细加工技术,描述了自行开发的双光子微细加工实验系统.双光子三维微细加工技术利用材料与飞秒激光束在焦点局域发生的双光子激发,通过逐点扫描,实现微器件的三维成型.由于材料发生双光子激发的几率与激发光强的平方成正比,所以具有极高瞬时光强的飞秒激光器和可以对光束进行强聚焦的显微镜装置成为系统的关键部件,对此进行了详细的说明.最后,给出了部分利用上述加工系统所获得的初步实验结果.     

UV-LIGA和微细电火花加工技术组合制作三维金属微结构的研究

研究了UV-LIGA和微细电火花加工技术组合制作三维金属微结构的工艺方法。首先通过UV-LIGA制作二维金属微结构,再对该微结构进行微细电火花加工得到三维金属微结构。该方法具有加工精度高、可实现自由曲面三维金属微结构制作的优点。制作出了局部为梯形凸台和锥形凹槽三维微结构的镍模具。分析了微细电火花加工中放电参数对表面粗糙度的影响,通过减小放电电压和电容的方法降低了表面粗糙度。     

飞秒激光双光子聚合三维微细加工技术及系统研发

阐述了飞秒激光双光子聚合（TPP）制造三维零件微快速原型技术和成形系统的搭建及其实现的理论基础,分析该技术的两大显著技术优势以及双光子吸收特性、双光子聚合工艺流程、成形材料及双光子触媒的特性,并在此基础上进行工艺参数影响分析和优化组合,给出初步实验结果,提出系统未来发展提升空间。     

UV-LIGA和微细电火花加工技术组合制作三维金属微结构

为了制作三维金属微结构,研究了UV-LIGA和微细电火花加工技术组合的工艺方法。使用UV-LIGA技术制作了准三维金属微结构,然后,对该微结构进行微细电火花加工制作三维金属微结构。使用提出的方法制作出了局部为梯形凸台和锥形凹槽三维微结构的镍模具,给出了梯形凸台和锥形凹槽的尺寸。分析了微细电火花加工中放电参数对表面粗糙度的影响,在工作电压为65V,标称电容为100pF时得到了Ra为0.08μm的微细电火花加工表面。研究结果表明,使用该方法可实现三维金属微结构的制作;通过减小工作电压和标称电容的方法可降低微细电火花加工的表面粗糙度。     

逐层微细电阻滑焊工艺制备三维微结构

采用飞秒激光切割和微细电阻滑焊组合的方法制备了高深宽比的三维微结构。为了提高每层二维微结构的叠加精度和连接强度,用逐层微细电阻滑焊对每层二维微结构进行滑焊以获得较好的工艺参数。对上述工艺参数所制备的微结构进行了抗剪切能力测试,测试结果显示:随着滑焊放电次数的增加,微结构的极限剪切力由8.04N逐渐增加至65.97N。而后,通过能量分散光谱仪(EDS)对电极的沉积效应进行了研究。最后,在120mW的飞秒激光,50μm/s的切割速度,0.21V的焊接电压,0.2MPa的焊接压强,100ms的预压时间,10ms的焊接时间以及160次的滑焊放电次数等工艺参数下制备了基本尺寸为50μm×50μm的微方孔阵列以及微齿轮结构。实验结果表明:通过逐层微细电阻滑焊制备的微结构表面质量良好,各层微结构之间叠加较好,显示逐层微细电阻滑焊可以较好地保证三维微结构中各层二维微结构的连接强度和叠层精度。     

折射率失配对双光子三维信息存储中信息点的影响

根据Torok的光在多层介质中传播的理论,模拟了在折射率失配情况下点扩展函数的强度分布.在介质折射率为1.48,多种物镜数值孔径NA=0.25、0.45、0.65、0.85条件下,分析了信息点轴向尺寸及读出信号强度变化趋势.选取合适的光学参数(如物镜的数值孔径NA=0.45,存储介质的折射率1.48),能够使信息点在深度200μm内轴向尺寸变化率小于4%,信号读出强度变化率小于30%,提高了存储效果.对选取各种物镜和介质折射率的情况下信息点的变化趋势分析表明,折射率失配使信息点横向尺寸随深度变化不大,而轴向尺寸及信号读出强度产生较大的变化,变化的程度与物镜NA、介质的折射率及存储深度密切相关.采用与模拟时相同的光学参数,在光致变色材料中进行了双光子三维存储实验.通过观察信息点的轴向及横向扫描图像和信号的读出强度,证实了这种变化趋势.实验结果为双光子三维存储提供了参考依据.     

双光子受激发射损耗复合显微成像技术研究

鉴于双光子受激发射损耗（STED）复合显微镜在神经疾病临床诊断及脑科学研究中的重要作用,对双光子STED复合显微成像中多波长选通、多光束合束、关键技术指标等进行了研究,完成了复合显微镜样机系统集成研制和复合成像。该复合显微镜可以对荧光标记的样本进行扫描成像,具备红绿双色荧光扫描成像功能、双光子绿色荧光成像功能和STED超分辨绿色荧光成像功能。测试结果表明,该复合显微镜成像深度达到700 μm,分辨率优于60 nm。     

飞秒激光切割与微细电阻滑焊组合制备三维金属微结构

提出了一种采用飞秒激光切割结合微细电阻滑焊制备3D金属微结构的工艺方法(微型化双工位金属箔叠层制造法,(Micro-DLOM)),并通过制备具有复杂形状的3D微型腔模具验证了该工艺方法的可行性。首先,以厚度为10μm的0Cr18Ni9不锈钢箔为基材,在110mW的飞秒激光功率、100μm/s的切割速度和0.75μm的切割补偿量下获得二维微结构,并分析了激光功率和切割速度对切割精度的影响;然后,利用微细电阻滑焊对多层二维微结构进行热扩散焊接,通过多层二维微结构的叠加拟合形成具有曲面特征的微型腔,并对焊接区进行了X射线衍射(XRD)分析。分析发现:微细电阻滑焊所产生的热量仅使焊接区主要物相的相对含量发生了变化,而没有使该区域产生新的物相。与UV-LIGA工艺相比,本工艺可以加工具有自由曲面特征的三维微结构,并且单层钢箔越薄,成形精度越高;与飞秒激光分层平面扫描烧蚀工艺相比,本工艺仅需切割每层二维结构的轮廓,提高了成形效率;与微细电火花加工工艺相比,虽然所成形的微型腔表面粗糙度相对较差,但却省去了制备微电极的工艺步骤,并且不存在微电极工作过程中的损耗问题,所以可以加工深宽比不受限制的微模具。     

可控微结构支架光固化快速成形间接构造方法

提出一种以计算机辅助设计(CAD)和光固化快速成形为基础,精确设计和控制支架内部微观结构,实现支架外形与内部可控微结构一体化制造的方法。根据实际CT数据,应用三维CAD软件重构骨骼外形;依据利于细胞生长和促进成骨的原则,设计不同结构的支架内部微管道,控制微管道的尺寸、形状、走向、分支以及相互连通性。利用光固化快速成形技术构造相应的树脂模具,在模具中填充生物材料,待其固化后,通过热分解去除树脂模具,形成具有可控微结构的支架。光学显微镜下观察支架内部微管道结构,其结果与设计相符合。与传统支架构造方法相比,该方法在对支架外形重构和内部微结构制造的控制方面得到了改善。     

基于快速伺服刀架技术的菲涅尔微结构金刚石超精密加工及其控制技术

微结构功能表面的金刚石超精密加工技术是近年来国外兴起的一项新技术,国内在这一研究领域处于起步阶段。并且由于受加工设备所限,使得该技术在国内的开展显得异常艰难,为了克服这一困难,自行设计带有快速伺服刀架(Fasttoolservo,FTS)的超精密加工机床,提出按照自适应指数趋近律来设计滑动模态控制律,并将滑膜变结构控制策略引入FTS的控制中,同时,将FTS的PID控制策略和滑膜变结构控制策略进行试验对比,试验结果显示,在滑模变结构控制策略下,FTS的响应时间与PID控制相近,但滑模变结构控制算法下几乎无超调,稳态精度高,正弦跟踪控制效果优于常规PID控制算法;最后,根据滑膜变结构控制策略对菲涅尔微结构表面进行金刚石超精密车削加工试验,成功地加工出半径5mm,浮雕深度10μm,表面粗糙度约35nm的菲涅尔微结构。     

Two-colour two-photon confocal microscopy with isotropic three-dimensional resolution and parallel excitation

We demonstrate a novel design of two-colour two-photon fluorescence microscope in which isotropic three-dimensional imaging resolution and high scanning speed can be achieved simultaneously. In our scheme, a three-dimensional optical lattice constructed by multi-beam interference is used for two-colour two-photon fluorescence excitation. Our simulation results show that a resolution of 113.5 nm can be achieved in both transverse and axial directions with two pump pulses at the wavelengths of 400 and 800 nm, respectively; meanwhile, imaging speed can be greatly improved compared with that of traditional two-photon scanning fluorescence microscopes.     

Comparison of two-photon excitation laser scanning microscopy with UV-confocal laser scanning microscopy in three-dimensional calcium imaging using the fluorescence indicator Indo-1

Two-photon excitation laser scanning fluorescence microscopy (2p-LSM) was compared with UV-excitation confocal laser scanning fluorescence microscopy (UV-CLSM) in terms of three-dimensional (3-D) calcium imaging of living cells in culture. Indo-1 was used as a calcium indicator. Since the excitation volume is more limited and excitation wavelengths are longer in 2p-LSM than in UV-CLSM, 2p-LSM exhibited several advantages over UV-CLSM: (1) a lower level of background signal by a factor of 6–17, which enhances the contrast by a factor of 6–21; (2) a lower rate of photobleaching by a factor of 2–4; (3) slightly lower phototoxicity. When 3-D images were repeatedly acquired, the calcium concentration determined by UV-CLSM depended strongly on the number of data acquisitions and the nuclear regions falsely exhibited low calcium concentrations, probably due to an interplay of different levels of photobleaching of Indo-1 and autofluorescence, while the calcium concentration evaluated by 2p-LSM was stable and homogeneous throughout the cytoplasm. The spatial resolution of 2p-LSM was worse by 10% in the focal plane and by 30% along the optical axis due to the longer excitation wavelength. This disadvantage can be overcome by the addition of a confocal pinhole (two-photon excitation confocal laser scanning fluorescence microscopy), which made the resolution similar to that in UV-CLSM. These results indicate that 2p-LSM is preferable for repeated 3-D reconstruction of calcium concentration in living cells. In UV-CLSM, 0.18-mW laser power with a 2.φ pinhole (in normalized optical coordinate) gives better signal-to-noise ratio, contrast and resolution than 0.09-mW laser power with a 4.9-φ pinhole. However, since the damage to cells and the rate of photobleaching is substantially greater under the former condition, it is not suitable for repeated acquisition of 3-D images.     

Comparison of three-dimensional imaging properties between two-photon and single-photon fluorescence microscopy

The imaging performance in single-photon (1-p) and two-photon (2-p) fluorescence microscopy is described. Both confocal and conventional systems are compared in terms of the three-dimensional (3-D) point spread function and the 3-D optical transfer function. Images of fluorescent sharp edges and layers are modelled, giving resolution in transverse and axial directions. A comparison of the imaging properties is also given for a 4Pi confocal system. Confocal 2-p 4Pi fluorescence microscopy gives the best axial resolution in the sense that its 3-D optical transfer function has the strongest response along the axial direction.     

Three-dimensional laser scanning two-photon fluorescence confocal microscopy of polymer materials using a new,efficient upconverting fluorophore

Three-dimensional confocal imaging of polymer samples was achieved by the use of two-photon excited fluorescence in both positive and negative contrast modes. The fluorophore was a new and highly efficient two-photon induced upconverter, resulting in improved signal strength at low pumping power. Because of the relatively long wavelength of the excitation source (798 nm from a mode-locked Ti:Sap-phire laser), this technique shows a larger penetration depth into the samples than provided by conventional single-photon fluorescence confocal microscopy. Single-photon and two-photon images of the same area of each sample show significant differences. The results suggest the possibility of using two-photon confocal microscopy, in conjunction with highly efficient fluorophores, as a tool to study the surface, interface, and fracture in material science applications.     

激光冲击强化对TiAl合金组织和性能的影响

为研究激光冲击强化对TiAl合金组织和性能的影响,利用波长为1 064nm、脉宽为20ns、单脉冲能量为0～22J的Nd:YAG激光器对TiAl合金试件进行了实验研究。采用显微硬度计、表面粗糙度仪和扫描电镜分别测量了激光冲击强化前后的表面显微硬度、粗糙度和表面微观形貌,利用X射线应力分析仪测量了激光冲击强化表面残余应力和晶面极性,并分析了其高温稳定性。实验结果表明:当单脉冲能量增加到9J时,表面显微硬度增加了33.4%,粗糙度由0.042μm增大到了0.285μm,表面残余压应力由20MPa增加到了297MPa,表面微观形貌出现了凸凹不平,局部纹理和层状微结构。将9J激光冲击强化后的试件在650℃下保温4h后,残余压应力值从297MPa降到230MPa,显微硬度值从377HV0.2降到345HV0.2,(002)晶面取向有向中心移回的趋势。得到的数据显示,激光冲击强化能够极大地改善TiAl合金的组织和性能,且具有一定的高温稳定性。     

高速切削刀具材料及其应用

高速切削能加工出精度较高的零件,还能降低加工成本。高速切削技术已经成为最有前途的先进制造技术之一,其应用领域正在持续扩展。高速切削技术是随着刀具技术如刀具材料等的发展而发展起来的。介绍了高速切削中所使用的金刚石、立方氮化硼、陶瓷、金属陶瓷和涂层刀具等的性能、适用范围和发展方向,并介绍涂层刀具、超细晶粒硬质合金和高速钢刀具的制备技术,以促进高速切削技术的推广应用。     

Fabrication of macroscopic solid models of three-dimensional microscopic data by selective laser sintering

We discuss and give examples of the use of selective laser sintering to fabricate solid macroscopic models of microscopic specimens that have been imaged with a confocal microscope. The digital image processing necessary to create structurally sound models of both translucent and opaque specimens is presented. The fabricated models offer the ultimate in data visualization since they can be physically handled and manipulated to investigate the shape and features of the specimen. Such a powerful visualization tool is useful in both research and educational environments.     

Continuous wave excitation two-photon fluorescence microscopy exemplified with the 647-nm ArKr laser line

We report on efficient two-photon fluorescence imaging in beam scanning microscopy by exciting UV dyes at the 647-nm line of a continuous wave ArKr mixed gas laser. For a numerical aperture of 1.4 (oil), we used an illumination power of up to 210 mW at the sample. High-resolution images were obtained for DAPI-labelled cell nuclei within 4–60 s. Our method is a simple two-photon alternative to UV confocal imaging with the potential of becoming a very useful feature of laser scanning microscopy.     

热处理温度对高钒高速钢显微组织和硬度的影响

研究了淬火温度和回火温度对高钒高速钢显微组织和硬度的影响.结果表明:在空冷条件下,当淬火温度低于1 040℃时,随着淬火温度的升高,钢的硬度逐渐升高;超过1 040℃后,随着淬火温度的升高,其硬度又逐渐降低;同时随着淬火温度的升高,钢中碳化物的数量逐渐减少,马氏体不断粗化,而残余奥氏体含量逐渐增加;在1 040℃淬火后,当回火温度低于500℃时,钢的硬度变化不明显;超过500℃后随着回火温度的升高,其硬度先升高,并在520℃时达到最高值,此后钢的硬度又逐渐降低;随着回火温度的升高,马氏体中弥散析出的碳化物数量逐渐增加并聚集长大,同时马氏体和部分残余奥氏体转变为回火马氏体.