Drilling,bonding, and forming conductive path in the hole by laser percussion drilling

Several studies have focused on the electrical connections between the front and rear surfaces of stacked substrates in order to improve device performance. The fabrication and mounting process of the substrates involves three steps: (1) through-hole drilling, (2) formation of a conductive path inside the hole, and (3) physical bonding and electrical wiring connection of the substrates. In this paper, we demonstrate a technique for performing the process above simultaneously by laser percussion drilling. A borosilicate glass sample was used as the substrate, while copper was used as the wiring material. The substrate was drilled to a diameter of ~30 μm by laser radiation, while the copper was evaporated and deposited in a ~12-μm-thick layer on the inner surface of a glass-copper hole. Hence, a conductive path was formed inside the glass hole, facilitating bonding and conduction between the glass substrate and the copper sheet. The conductivity and bonding strength per 100 points between the glass surface and the copper sheet were ~5 Ω and ~1 N respectively. Furthermore, gaps were observed between the glass substrate and the copper sheet by energy dispersive X-ray analysis using a scanning electron microscope. However, the glass substrate and the copper sheet were bonded by the formation of a redeposited layer on the inner surface of the hole and in the gap between the glass and copper surfaces.     

Optical emission monitoring for defocusing laser percussion drilling

This paper presents a novel method for controlling the laser-drilling process for a hole by monitoring induced plasma emission. The variation of light brightness from laser-induced plasma is used as an indicator to control laser percussion drilling. Through on-line plasma emission acquisition and analysis, we obtain the positive association between the increased depth and the optical signal output. A coaxial photodiode is used to estimate the brightness levels of laser-induced plasma. The above constitute an inexpensive and practical on-line feedback system that can be easily implemented in the laser systems. All of the processing work is performed in air under standard atmospheric conditions without gas assist. The acquired signal for drilling could also be used as an input to a focus point process control scheme. Moreover, the technology demonstrates the feasibility to develop an automated laser micromachining system. Experimental results show that drilling efficiency was increased 47% by applying the proposed defocusing laser percussion drilling.     

An investigation of accuracy,repeatability and reproducibility of laser micromachining systems

Component technologies of laser micro machining systems are key factors affecting their overall performance. The effects of these technologies on accuracy, repeatability and reproducibility (ARR) in different implementations of such systems have to be investigated to quantify their contributions to the overall processing uncertainty, especially those with the highest impact on beam delivery sub-systems. The aim of this research was to evaluate the capabilities of state-of-the-art machining platforms that were specially designed and implemented for laser micro structuring and texturing. An empirical comparative study was conducted to quantify the effects of key component technologies on ARR of four state-of-the-art systems. In particular, the capabilities of the optical and mechanical axes were investigated when they were utilised separately or in combination for precision laser machining. Conclusions are made about the positional accuracy of the mechanical and optical axes and the importance of their proper calibration on the systems’ overall performance is discussed. It is shown that the laser machining platforms can achieve repeatability and reproducibility better than 2 μm and 6 μm, respectively.     

激光打孔陶瓷微裂纹现象理论研究

采用倾斜回转法进行激光陶瓷打孔,并对打孔后的缺陷试件的断口形貌进行分析,同时对打孔过程中出现的陶瓷材料产生微裂纹的现象进行了初步的理论研究。     

Curved drilling via inner hole laser reflection

In this paper, we describe curved hole drilling via the reflection of a laser beam off the sidewall of the drilled hole. A slightly offset laser beam forms a tilted surface at the bottom of the hole, controlling the angle of curvature. An ultraviolet laser beam operating at a wavelength of 266 nm was used. To visualize the hole formation process, borosilicate glass was used as the laser workpiece. This method was able to drill a curved hole with an average angle of ∼3° with curvature beginning at a depth of 400–600 μm. A curved hole with a diameter of <50 μm was achieved. A branched hole was also demonstrated by using the reflection of the tilted sidewall. The curved hole formation process was recorded with a high speed camera. Once the ablated sidewall reached a certain depth, drilling ceased as the laser energy fell below the ablation threshold. Ultimately, judicious selection of an appropriate laser fluence and sidewall angle allow the formation of curved holes.     

Investigating the recast layer formed during the laser trepan drilling of Inconel 718 using the Taguchi method

This paper presents an investigation into the recast layer formed during the laser trepan drilling of Inconel 718 by a Nd:YAG laser. Laser drilling has evolved into the method of choice for the drilling of cooling holes in aerospace components. However, holes drilled with this particular technique are liable to display a variety of defects, including spattering, tapering, microcracks, and a recast layer. In order to meet the standards specified by the original engine manufacturer, this paper investigates the effects of the various laser drilling parameters on the recast layer thickness in the trepan drilling mode. A total of eight laser drilling parameters are considered in a series of experiments arranged using a Taguchi L18 orthogonal array. Taguchi analytical techniques are employed to establish the optimum set of parameters which yields a minimum recast layer thickness. The results indicate that the assist gas pressure, the peak power, and the focal position exert the greatest influence on the recast layer thickness. Having performed a confirmation experiment based on the initial Taguchi design experiments, the recast layer thickness is reduced further by adjusting the values of the assist gas pressure and the trepanning speed.     

Percussion drilling with laser: hole completion criterion

The criterion for ensuring formation of a through hole is an important aspect of laser drilling. Close observation of the process has indicated that drilling of the substrate is achieved in six successive microstages. The stages have been time resolved and the behaviour of laser induced plasma (LIP) during the microstages of drilling has been carefully examined. The LIP behaviour during the percussion laser drilling has been explained with the help of the contemporary understanding of plasma. This paper proposes a drilling completion criterion that is based on the behaviour of LIP during laser percussion drilling of SUPERNI 263A with a Nd-doped yttrium aluminium garnet laser. The completion of formation of a hole is marked by the momentarily increased luminescence of the plasma plume emanating from the laser beam exit side of the workpiece during drilling. The criterion has been experimentally verified. The criterion is versatile and can help in augmenting productivity during manufacturing.     

Numerical simulation of metal removal in laser drilling using symmetric smoothed particle hydrodynamics

A simple numerical model is proposed for predicting the penetration depth of metal laser drilling. A simplified 2D axisymmetric model for transient metal laser drilling is introduced. Strong-form of Symmetric Smoothed Particle Hydrodynamics (SSPH) method is used to harness its significant reduction in computational time. The 2D axisymmetric domain is discretized, then SSPH formulation is used to obtain shape functions. Collocation method is used to discretize governing and boundary conditions equations to construct the global stiffness matrix. Laser beam is assumed to be continuous wave with Gaussian distribution. MATLAB code is constructed for numerical simulation, and the results are compared with published work. A good agreement is shown, and thus the proposed numerical model is found to be computationally efficient and accurate standalone platform for predicting the penetration depth of metal laser drilling process.     

Statistical investigation of die wear in metal extrusion processes

The aim of this paper is the statistical process control analysis of the tool wear evolution during metal extrusion process for better understanding the principal causes that generate the variability of such a complex phenomenon. The wear prediction is carried out using finite element simulation including the Archard wear model. The tool wear modeling is presented briefly as well as the response surface methodology. The study is based on the application of the central composites designs and allows for the analysis of the response (wear) sensitivity of the tool. The statistical investigation of the process makes it possible to study the influence of each process parameter on the response sensitivity.     

Measurement and analysis of thrust force in drilling of particle board (PB) composite panels

Particleboard is a wood based composite extensively used in wood working. Drilling is the most commonly used machining process in furniture industries. The surface characteristics and the damage free drilling are significantly influenced by the machining parameters. The thrust force developed during drilling play a major role in gaining the surface quality and minimizing the delamination tendency. The objective of this study is to measure and analyze the cutting conditions which influences the thrust force in drilling of particle board panels. The parameters considered are spindle speed, feed rate and point angle. The drilling experiments are performed based on Taguchi’s design of experiments and a response surface methodology (RSM) based mathematical model is developed to predict the influence of cutting parameters on thrust force. The results showed that high spindle speed with low feed rate combination minimizes the thrust force in drilling of pre-laminated particle board (PB) panels.     

Experimental investigation and analysis of thrust force in drilling cast hybrid metal matrix (Al–15%SiC–4%graphite) composites

Composite materials are used in different engineering applications and are continuously displacing conventional materials due to their excellent properties. This paper discusses the influence of drilling parameter on thrust force in drilling Al 6061/15%SiC 4%Gr metal matrix composites. The composite materials are fabricated by stir casting method. The experiments are conducted on computer numeric control vertical machining centre using titanium nitride coated solid carbide twist drills of 4 mm, 8 mm and 12 mm diameter under dry conditions. A response surface analysis is carried out. The effect of drilling parameters on thrust force is studied and presented. The results indicated that feed rate is the main parameter which influences the thrust force in drilling of hybrid metal matrix composites.     

毫秒激光金属打孔的解析和实验

研究了用毫秒脉宽的长脉冲激光单个脉冲打深孔的成形过程和打孔速率.首先,由切割法得到了1 ms脉宽的Nd:YAG高斯激光对厚铝板打孔时孔的形貌,激光能量为7.9和28.9 J时,对应的孔深分别为1.849和2.975 mm.根据实验建立了轴对称模型,通过热传导方程得到了固相温度的解析解.然后,假设物质一旦熔融就离开孔,由...     

Response surface analysis of electro jet drilled holes

Modern trend towards miniaturization has given a new impetus to the development of nontraditional small hole drilling techniques. Electro jet drilling (EJD) is one such promising technique which is finding ever increasing applications in several industries including aerospace, space, medical, automobile and microfabrication (electronic and computers). The present study investigates the relationships and parametric interactions between three controllable variables on the material removal, radial overcut and hole taper in the EJD process. Experiments have been conducted on SUPERNI 263A workpieces. Applied voltage, electrolyte concentration and feed rate were selected as independent process variables. The responses have been modelled using a response surface model based on a central composite rotatable experimental design. The significant coefficients were obtained by performing analysis of variance (ANOVA) at 1% and 5% level of significance. It was found that applied voltage, electrolyte concentration and feed rate have significant effect on the material removal, radial overcut and hole taper.     

基于ANSYS的钻井泵泵阀有限元分析

运用ANSYS对BF700I新型钻井泵泵阀的带筋阀座进行了三维有限元分析。结果表明,改进的泵阀阀座具有较好的稳定性;在泵阀小端面接近内锥面处,应力变形最大;阀座外锥面底部边缘的应力较大;中间阀盘的底部轴孔边缘也有很大的应力集中。     

凿岩台车推进器有限元分析及优化设计

凿岩台车井下作业工作环境苛刻,推进器部件易出现疲劳损坏,有必要对台车推进器受载情况进行分析研究。首先以某一型号凿岩台车为例,利用有限元软件ANSYS Workbench 对正常工作状况下凿岩台车推进器进行有限元分析,得出推进器鞍架处存在显著应力集中现象的结论。然后对推进器存在显著应力集中的部件进行了相应的优化设计,优化后推进器鞍架显著应力集中现象得到改善。最后对推进器系统进行了振动模态分析,得到了系统的各阶固有频率,为整个台车系统力学性能的改善与优化提供了理论依据。     

麻花钻钻削钼圆材料过程有限元分析

通过对标准麻花钻数学模型的研究,用Deform 3D建立了麻花钻钻削钼材料的有限元模型,并对钻削过程的应力应变、钻削温度和钻削轴向力的情况做了仿真研究。结果表明切削温度和轴向力都随麻花钻的转速及进给量的增加而增大,而选择合适的转速和进给量能使得材料的应变变小,切削形状良好。为钼材料的钻孔加工,工艺参数的选择提供了相关的理论依据。     

钻柱横向非线性振动分析

利用同伦分析法求解了钻柱横向非线性振动方程,得到了该非线性振动的频率和主振动的一阶近似解析解.分析过程中发现,同伦分析法在求解钻柱横向非线性振动方程时不需要引入以往摄动求解的小参数,这样提高了近似解的精度和扩大了解的适用范围.计算结果表明非线性因素改变了主振动的形态,使其不再成为简谐振动,同时非线性因素对频率的影响程度随着振幅、轴向压力和钻柱长度的增大而增加.因此,对于受较大轴向压力作用的长钻柱横向振动,应当考虑非线性因素的影响.     

Ablation drilling of invar alloy using ultrashort pulsed laser

Drilling a hole in Invar alloy is accomplished by using a nanosecond pulsed Nd:YAG laser. However, this process has a few problems, such as heat effect and poor edge quality. Therefore, the ablation properties of the Invar alloy were investigated by using an ultrashort pulsed laser, which is a regenerative amplifier Ti:sapphire laser with a 1 kHz repetition rate, a 184 fs pulse duration, and a 785 nm wavelength. To study the ablation characteristics of the Invar alloy, we measured the ablation shape, width, and ablated depth at the energy fluence of a single pulse. The optimal condition for hole drilling is a z-axis transfer depth of 4 μm, a circular feed rate of 0.2 mm/s, and a pulse energy of 26.4 μJ. A fine circular hole without burrs and thermal damage were obtained under the optimal processing conditions. The ultrashort pulsed laser system is an excellent tool for micro-hole drilling in Invar alloys without heat effects and poor edge quality.     

JSTZG-40型铁钻工伸缩臂机构研究与有限元分析

首先运用软件SolidWorks对JSTZG-40型铁钻工伸缩臂机构进行三维建模,其次对伸缩臂机构的强度进行了有限元分析,仿真和分析结果表明:伸缩臂机构在受到最大推力时,最大应力产生于后臂上支臂与钳头座铰接处,受到最大扭矩时,最大应力产生于前臂上支臂与连接座铰接处,且均小于材料屈服强度;最大变形位移在安全的范围内.     

Lateral performance evaluation of laser micromachining by high precision optical metrology and image analysis

Today several techniques are available for micro-manufacturing. Yet, it is difficult to assess the precision and lateral X,Y accuracy of these techniques. The available accuracy information is usually based on specifications given by machine suppliers. This information is based on in-house laboratory tests performed by dedicated machine operators and within an adapted environment. In practice, the accuracy is likely to vary due to environmental conditions, materials and operator skills. In order to check the specifications in realistic environments the EUMINAfab infrastructure consortium initiated a set of independent high precision onsite verification tests on different laser micromachining installations. In addition to providing performance verification, it gave the participating partners real capability information of their equipment and possibilities to improve machining performance to a higher level. In this study a comprehensive verification test was designed and carried out by using a high precision metrology method for 2D measurements based on subpixel resolution image analysis. This methodology improved our knowledge of the capabilities of three laser micromachining installations, and showed that specifications at single micron levels are hard to obtain.