光通信用光学薄膜与镀膜设备

阐述了镀制如100GHz、50GHzDWDM滤光片及GFF滤光片等滤光片的镀膜机必须具备的条件.介绍了本公司研制生产的NBPF-2型离子辅助蒸镀镀膜机.     

光通信用光学薄膜与镀膜设备

阐述了镀制如100GHz、50GHzDWDM滤光片及GFF滤光片等滤光片的镀膜机必须具备的条件.介绍了本公司研制生产的NBPF-2型离子辅助蒸镀镀膜机.     

膜厚均匀性函数的分析

为了解决膜层层数在一百多层以上的膜系在镀制过程中所必然存在的膜厚均匀性问题,定义了一个与镀膜机的结构参数、工艺参数以及基片几何参数均有关系的均匀性函数。以APS1104镀膜机为实验对象,针对多腔窄带滤光片膜系,根据此函数分析了镀膜机镀制较多层数薄膜时,其膜层厚度沿基片径向的变化规律,确定了影响膜厚均匀性的多种因素,解释了镀制多腔窄带滤光片薄膜成品率低的原因。实验结果证实了分析的正确性。     

HOM系列高精度光学膜厚监控系统的研制

叙述了新研制的适用于 DWDM窄带滤光片成膜控制的高精度光学膜厚监控系统。该系统在光谱带宽 0 .1 nm条件下 ,暗噪声小于± 0 .0 0 5 % ,性能优于目前的报道。使用它已成功地实现了 1 0 0 GHz,5 0 GHz DWDM窄带滤光片全自动成膜监腔。由其派生出的HOM系列的其他类型光学膜厚监控系统 ,可适用于不同的优质膜的过程控制     

波分复用薄膜干涉窄带滤光片的设计

总结了波分复用薄膜干涉窄带滤光片的几种设计方法 ,在此基础上用计算机进行规整系自动设计的方法设计出了 5 0 GHz的滤光片 ,并计算出了它的群延迟。     

用间接控制法镀制紫外诱增透射滤光片

诱增透射滤光片具有较高的峰值透射,良好的通带形状和深的背景抑制,并且没有难以消除的长波旁通带,这些优点都是其它类型滤光片无法比拟的。从六十年代起诱增透射滤光片已扩展到紫外波段。本文着重介绍了在普通镀膜设备上加装衰减器,利用可见光控制的方法镀制紫外波段诱增透射滤光片的原理、膜系设计和镀制工艺。     

DM-450C真空镀膜机

北京仪器厂生产的DM-450C型真空镀膜机,在1994年,被机械部评定为一等品。该产品是在DM-450A的基础上改进而成,该镀膜机主要用来蒸镀光学镜片的反射膜,透射膜及各种滤光膜,也可用来镀制无线电半导体所需的各种电学膜和轻工业品的装饰性薄膜。 DM-450C镀膜机的蒸发功率比DM-450A     

用于植物培育实验的宽带负滤光片的研制

植物生长过程中对太阳光谱的吸收具有选择性。由于植物在光合作用和生长发育中对蓝紫光和红光较为敏感,因此设计并镀制了一种滤光片,目的是从太阳光谱中过滤掉植物吸收很少、且可能有害的黄绿光,从而采集植物生长所需要的蓝紫光和红光。通过离子源辅助电子枪蒸镀的物理沉积方式在大尺寸的K9玻璃基底上镀制了宽带负滤光片,镀膜后的滤光片在400~470nm和630~750nm波长范围内平均透过率大于90%,而500~580nm波长范围内平均透过率小于0.2%。结果表明该宽带负滤光片膜系的镀制满足植物培育实验的使用要求。     

基于CAN总线的卷绕式镀膜机蒸镀控制系统

介绍了基于CAN总线的卷绕式镀膜机蒸镀系统的设计方法,阐述了系统设计的硬件及其芯片选用并介绍了软件设计方法。     

深背景紫外滤光片制造技术

深背景紫外滤光片是一种特殊类型的滤光片,在设计方面,着重分析研究了提高诱导滤光片背景截止深度的机理和改善通带波形的方法,并由此设计了四层金属(AL)结构的耦合型诱导透射滤光片。在工艺方面,对不同材料的蒸镀工艺做了大量实验,确定了适当的工艺参数。解决了四层铝诱导滤光片制造技术、短波通截止滤光片制造技术、诱导滤光片-色玻璃滤光片-干涉截止滤光片组合技术。     

组合镀膜法制备集成滤光片列阵

为实现集成滤光片列阵在单片衬底上的高效制备,提出组合镀膜法,通过磁控反应溅射,以N b2O5和S iO2为介质材料,仅通过8次镀膜就成功制备出了集成64通道的滤光片面阵。滤光片面阵的总体尺寸只有12mm×12mm,各个滤光片通道基本呈线性分布在720.5nm~877.2nm之间,带宽在1.82nm~3.92nm之间。结果表明,组合镀膜法是一种高效的集成滤光片列阵制备方法。     

耐热合金的新防护层

采用过渡层／主体镀层／封闭层的三层结构做耐热合金的防护层。以冲击镍做过渡层提高基体材料与镀层的结合力;主体镀层含陶瓷粒子的复合镀层;经激光处理交博面重熔封闭。经实验证明,防护层有优良的耐高温氧化,含硫（０．５Ｍ）介质腐蚀性能以及振动磨损等性能。     

Optical in-process height measurement system for process control of laser metal-wire deposition

We propose an in-process height measurement system for a weld bead and feedback control system for wire-feeding speed for high-quality laser deposition. Metal additive manufacturing, especially laser metal-wire deposition, is effective for complex shape fabrication and repair processing. However, we must control the gap between a weld bead and a feed wire in an optimal range for high-quality deposition. Conventionally, the Z-stage pitch for multi-layer deposition must be precisely adjusted by each deposition shape. In this paper, we design an in-process height measurement system that is integrated in a laser processing head, which measures the weld bead height by a line section method. We decreased the influence of the intense thermal radiation generated from a melt pool by inserting the band-pass filter of the line beam's wavelength in the imaging system and optimizing its line laser power. Consequently, our system can measure the weld bead height near the melt pool, which is 4 mm in front of it. Next we show that our proposed system can measure the weld bead height during wire-laser metal deposition with 50-μm accuracy by comparing its value to the true value. Finally, we achieved a cylinder shape deposition of 50-mm height, regardless of the Z-stage pitch and the cylinder diameter of the multi-layer deposition, by controlling the wire-feeding speed based on the measured weld bead height.     

反应性离化团束制备光学薄膜新技术

本文叙述了离化团束淀积光学薄膜的基本概念及特性,研制了离化团束淀积光学薄膜装置,开展了光学薄膜晶体结构与性能关系的研究。所研制的光学薄膜的牢固性相当好。基底不加温就可以得到ZnS、MgF₂的硬膜。反应性离化团束淀积的ZnO光学薄膜具有优良的织构,SiO₂光学薄膜呈现多晶结构。     

Optical coating and nano-structuring on plastics

1Introduction Injectionmouldedorhot embossedpolymer opticswillreplaceglassopticsaslongasim provedpropertiesorlowercostscanbeachieved withtheplasticparts.Highlytransparentther moplasticpolymersoffersignificantweightre duction,costsavingandmanufacturingadvanta gesforopticalcomponents.Coatingsplayanim portantroleinthisdevelopment.Opticalinter ferencecoatingsarerequiredtoprovideaspecific opticalfunctionwithinadesiredspectralrange.Themostcommonapplicationsareantireflection(AR)coatingstoincreaseth…     

太阳跟踪器干涉滤光片的研制与测试

根据太阳光谱在波长750nm处的光能相对比较稳定,能避免杂光干扰这一特点,研制一种太阳跟踪器干涉滤光片.采用红外石英玻璃作为基底,选择Ti2O3和SiO2作为高低折射率材料,利用台伦对称膜系等效层的概念,设计三半波干涉滤光片.通过真空镀膜和离子辅助沉积系统,研制了在波段400nm-720nm、780nm- 1000nm平均透过率低于0.1％,750nm的透过率高于91％,带宽为40nm的太阳跟踪器干涉滤光片.在制备过程中,解决了Ti2O3吸收问题;通过实验,分析了波长漂移产生的原因并提出可行办法.     

光纤Bragg光栅传声器设计

在详细分析光纤Bragg光栅(FBG)振动传感原理的基础上,设计了基于悬臂梁结构的光纤光栅传声器.系统采用结构简单、解调速度快的线性斜边滤波解调方法,选用1 531 nm/1 551 nm的CWDM作为滤波器件,其边带斜率为13 dB/nm.分别进行了单频信号(300 Hz和4 kHz)测试实验及声音信号测试实验,表明该传声器具有良好的频率检测性能和较高的信噪比,可以无失真地传递人的声音.而且,该系统可以实现光源复用,降低系统成本.     

基于双通道M-Z干涉仪的FBG光开关研究

为降低电光开光的插入损耗并提高性能,提出了一种基于双通道可调谐马赫-曾德(M-Z)干涉仪制作的光纤布拉格光栅(fiber Bragg grating,简称FBG)光开关,通过改变干涉仪中的可调电动光纤延迟线的延迟时间,实现滤波谱周期的可调谐。通过改变干涉仪其中一臂的延迟时间设定,该光开关能够实现对设定波长光波的开关功能。对光纤M-Z干涉滤波原理进行了理论分析,使用C波段宽带放大自发辐射光源对双通道可调M-Z干涉仪的性能进行了测试。结果表明,其可实现大范围及高精度的滤波调节功能。对基于双通道可调谐马赫-曾德干涉仪制作的FBG光开关,通过FBG开关性能检测系统实验,得到该光开关在波长为1 550nm处的输出光谱,光开关的消光比达到25dB。结果表明,该光开关能够实现大范围高精度滤波功能,具有高消光比、结构简单和易于调节等优点。     

A flexible curvilinear electromagnetic filter for direct current cathodic arc source

Widespread applications of direct current (dc) cathodic arc deposition are hampered by macroparticle (MP) contamination, although a cathodic arc offers many unique merits such as high ionization rate, high deposition rate, etc. In this work, a flexible curvilinear electromagnetic filter is described to eliminate MPs from a dc cathodic arc source. The filter which has a relatively large size with a minor radius of about 85 mm is suitable for large cathodes. The filter is open and so the MPs do not rebound inside the filter. The flexible design allows the ions to be transported from the cathode to the sample surface optimally. Our measurements with a saturated ion current probe show that the efficiency of this flexible filter reaches about 2.0% (aluminum cathode) when the filter current is about 250 A. The MP density measured from TiN films deposited using this filter is two to three orders of magnitude less than that from films deposited with a 90 degrees duct magnetic filter and three to four orders of magnitude smaller than those deposited without a filter. Furthermore, our experiments reveal that the potential of the filter coil and the magnetic field on the surface of the cathode are two important factors affecting the efficacy of the filter. Different biasing potentials can enhance the efficiency to up to 12-fold, and a magnetic field at about 4.0 mT can improve it by a factor of 2 compared to 5.4 mT.     

光纤端面半反膜晶控镀制实践

叙述了一个利用石英晶体膜厚控制系统在光纤端面镀制半反射膜的工艺探索过程,包括膜系设计、工艺参数的修正。简要介绍了光控与晶控的特点,以实例证明了特殊情况下低温镀膜的可行性。