电子束投影复印曝光机

本文介绍电子束投影复印曝光机的结构和性能。此复印曝光机的特点是采用电子束能够同时曝光大面积的图形,复印图形的面积为φ50毫米,最高分辨率为0.5微米。此复印曝光机可在半导体技术中用于复制高分辨率的掩模版和制作声表面波器件,光栅器件等。     

表面贴装声表器件封装失效及其分析

随着声表面波器件日益广泛的应用,声表面波器件的封装尺寸越来越小,封装的难度越来越大,封装过程可能带来的失效问题也越来越多。文章简单介绍了声表面波器件封装形式的变化,论述了表面贴装声表面波器件的封装工艺过程和失效分析的基本概念,并对表面贴装声表面波器件的封装工艺过程中几种主要的失效模式展开分析,促使我们在表面贴装声表面波器件的封装工艺过程加强工序过程的控制,从而提高表面贴装声表面波器件的可靠性,更好地满足顾客的需要。     

声表面波器件与标准

概述了我国声表面波技术的发展历程，指出在声表面波器件广泛应用的今天，完善、贯彻执行声表面波器件标准的重要性；介绍了我国声表面波器件标准化工作的进展和所取得的成绩，并依据贯彻国军标工作的实践，提出了今后有关标准化和产品研制、生产中的若干工作重点。     

声表面波器件与标准

概述了我国声表面波技术的发展历程，指出在声表面波器件广泛应用的今天，完善、贯彻执行声表面波器件标准的重要性；介绍了我国声表面波器件标准化工作的进展和所得的成绩，并依据贯彻国军标工作的实践，提出了今后有关标准化产产品研制、产生中的若干工作重点。     

声表面波器件制作中的干法刻蚀工艺

声表面波器件广泛应用于有线和无线通讯中。利用半导体加工工艺制作声表面波器件，由于所使用的工艺的特殊性，并不能完全按照硅工艺。该文讲述了用干法刻蚀工艺制作声表面波器件及其工艺特殊性。     

用电子束曝光机制作的微波低噪声晶体管

业已用自动化电子束曝光机大批量制作微波晶体管(ML-220),在6千兆赫下最小增益为8分贝,最大噪声系数为5.5分贝。本报告讨论了电子束曝光机制作的高性能的 ML-220晶体管及其工艺过程和成品率。采用大视场电子光学系统和完全自动化图形对准系统,使电子束光刻的实用性增加了。其它的机器性能已有说明,例如(1)校准图形位置、大小、旋转和在±2500埃以内的正交性的计算机控制的图形对准系统;(2)计算机控制的 x—y 工作台能够在7.5×7.5厘米范围内准确地作步进重复;(3)适合于制作微波晶体管的电子抗蚀剂工艺;(4)能刻出0.5微米宽的晶体管发射极条的计算机控制的电子束记录仪。一般说来,在本合同期间研制的电子束技术,能用于需要较高频率性能和较高封装密度的各种固体器件。电子束技术可用于磁泡存储器、电荷耦合器件、表面波器件和场效应晶体管。     

声表面波式小变变换及重构器件的实现研究

利用声表面波器件构建了小波变换及重构器件，为小流变换及重构器件开辟了一种新的制造途径，本文主要论述声表面波式小波变换及重构器件的工作原理，并对信号源内阻对声表面波器件的影响和声电再生问题提出了解决方案。     

“十一五”声表面波行业发展趋势

我国声表面波（Surface Acoustic Wave．SAW）技术的发展从70年代初开始．经过30多年的不懈努力，造就了一批声表面波器件生产厂家和研究单位．为21世纪我国声表面波技术的研究和产业化奠定了良好的基础。随着移动通信的迅猛发展，我国的声表面波器件也向移动通信领域迈进声表面波技术的发展进入了关键阶段。     

声表面波器件在移动通信中的应用

本文简单介绍了声表面波滤波器的原理、声表面波滤波器在移动通信系统中的应用和应用中应注意的问题，展望了声表面波器件的发展趋势。     

X射线光刻和剥离技术制作声表面波叉指换能器

提供了采用电子束光刻、X射线光刻和金属剥离技术制作亚微米尺寸的声表面波叉指换能器的方法.首先利用电子束光刻和微电镀技术制作x射线光刻的掩模,然后利用X射线光刻和剥离技术高效地制作大面积、纳米尺电、电极陡直均匀的叉指换能器.制备出的叉指电极特征尺寸为600 nm,面积为4 mm×6 mm,断指率小于3‰,可应用于高频声表面波器件中.研究结果表明,X射线光刻结合剥离技术是一种制备高频SAW器件的优良方法.     

推陈出新,创办高水平的《学报》品牌——庆贺《军医进修学院学报》创刊30周年

电子束光刻(EBL)具有高的分辨率,能制备具有亚微米尺寸的声表面波(SAW)器件.一种采用EBL技术制备用于气体传感器的具有亚微米尺寸的SAW延迟线的方法:首先利用EBL在压电衬底上获得叉指换能器(IDT)的电子抗蚀剂图形;然后用剥离工艺制作出IDT电极.通过邻近效应校正和提高场拼接精度,制作的叉指电极具有一致性,电极形貌好.相对于干法刻蚀工艺,剥离工艺避免了对压电衬底表面的物理损伤.该技术为实现特征尺寸达到百纳米级的更高工作频率SAW器件的制造提供了很好的途径.     

Current status of magnetostatic reflective array filters

The continual demand for increased performance in modern communication and radar systems in terms of increased bandwidths and higher operating frequencies has led to investigation of novel techniques and technologies for analog signal processing. In particular, surface acoustic waves (SAW) have been extensively exploited with great success to this end, but systems requiring bandwidths greater than 500 MHz and center frequencies greater than 1 GHz have pushed SAW devices near the practical physical limit of the technology. A novel technology promising increased bandwidths at higher frequencies is based on magnetostatic waves (MSW) propagating in epitaxial films such as Yttrium Iron Garnet (YIG). These waves can be exploited in devices offering instantaneous bandwidths up to 2.2 GHz at microwave center frequencies from 0.5 to 20 GHz.MSW signal processing technology, based on transversal filtering concepts has been under extensive investigation for the past 10 years. This paper reviews the work that has been done utilizing the MSW technology in conjunction with reflective arrays to achieve practical spectral amplitude and delay modification.     

传统SAW离子束调频技术研究

制作传统声表面波(SAW)器件晶圆芯片表面的材料是Al,Al在空气中被氧化,极易生成致密的氧化铝(Al_2O_3)薄膜,由于Al_2O_3薄膜和Al及基底压电材料的刻蚀速率存在差异,会导致SAW的离子束调频过程复杂。该文介绍了一种用于SAW的离子束调频方法,采用该方法对制作的SAW器件进行离子束调频后,实现了目标频率的调高和调低,并进一步提高了频率集中度,从而解决了低频窄带SAW器件及2 GHz以上SAW高频器件频率精度难以提高的工艺难题。     

Surface acoustic wave devices for sensor applications

Surface acoustic wave (SAW) devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.     

System applications of magnetostatic wave devices

A need for microwave signal processing components ranging from simple delay lines to broadband, complex analog non-recursive transversal filters has led to the exploration of several solid-state technologies. Bulk acoustic delay lines lack spatial signal tapping and have high insertion loss. Electromagnetic delay lines have high insertion loss, limited signal processing capabilities, and are bulky. Surface acoustic wave (SAW) devices offer excellent signal processing capabilities at VHF/UHF but suffer from excessive loss at microwave frequencies and the requirement for transducers of sub-micron linewidths. However, a signal processing technology based on magnetostatic waves (MSW) propagating on epitaxial yttrium iron garnet (YIG) is emerging to fill microwave signal processing requirements. This paper summarizes the characteristics and status of magnetostatic waves and devices based on MSW, and initial experimental studies of the application of MSW devices to systems, and presents a survey of other potential areas of MSW device applications.     

Precision Saw Filters For A Large Phased-array Radar System

The electronically steerable radar (ELRA) at the Forschungsinstitut fur Funk und Mathematik is an experimental S-band phased-array radar system consisting of separate transmitting and receiving arrays employing several coherent and incoherent signal-processing and data-handling techniques, incorporating multiple beam and multifunction operation for target search and tracking, adaptive interference suppression, and target resolution. This paper deals with the development and application of two types of SAW filters for the IF amplifier channel of the receiving array. Compared to conventional filters with lumped elements, these filters have some important merits. By making use of a special tuning technique, the center frequencies of all filters were adjusted, resulting in an rms deviation of less than 1 kHz. One type of the SAW filters represents an almost ideal approach of realizing a matched filter for rectangular shaped pulses. The conformity of the frequency responses of several hundred filters improved the noise suppression capability of the system. The use of the filters described represents one of the applications where high-quality mass-produced SAW devices have been applied to improve system reliability and performance.     

Forward, May 1981

The "applications" theme of this Issue is a reflection of the rapid progress in the surface-acoustic-wave (SAW) field since its beginnings in the late 1960's. Twelve years have elapsed since the first Special Issue on microwave acoustics including SAW's was published jointly by the Microwave Theory and Techniques Society and the Sonics and Ultrasonics Group. In November 1969, the SAW field was quite new, and a large fraction of the SAW papers published during 1969 were contained in that one Special Issue. Much of the Issue was devoted to speculations on the configuration and operation of future devices. By the time of the second joint Special Issue in April 1973, several types of SAW devices had been developed to the point of achieving very attractive levels of performance, and a few papers outlining the potential impact of these devices on systems applications were included the Issue. Increasingly sophisticated and high-performance SAW devices were the major theme of the May 1976 Special Issue of the Proceedings of the IEEE. By the end of the 1970's, SAW devices found increased acceptance as practical, high-performance components for signal generation and processing in electronic systems. Accordingly, the goal of this Special Issue is to emphasize the fact that SAW devices "have arrived" by providing a number of specific examples of how the devices are being effectively and profitably used in many different systems. Engineers and systems designers will find interest in the variety of complex signal-processing functions that can be performed with SAW devices in compact and simple configurations.     

声表面波器件的封装技术及其发展

目前各种声表面波器件的工作频率涵盖30MHz到3000MHz的频率范围,其封装形式主要有塑料封装、金属封装(如F11、TO-39)和sMD封装。在本文中,作者对声表面波器件的这三种主要封装形式对声表面波器件电传输性的影响作了系统的实验研究与分析,并论述了声表面波器件在封装方面的现状及其发展趋势。     

声表面波信号处理器件的进展与应用

综述了近１０年声表面波抽头延迟线、延迟线等声表面波信号处理器的新发展及在系统中的应用。